Thermionics RNN™-150 Series 真空压差密封角度盘

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RNN™系列差压抽气旋转密封件

差压抽气旋转密封件（RNN）可在超高真空系统的真空腔壁上实现 360° 连续旋转自由度。该密封件设有两级差压抽气结构，在专用密封面上采用浸渍石墨的膨化特氟龙 ® 密封件进行隔离。预加载滚珠轴承组件可精准控制旋转台位置。

RNN 系列可配备蜗轮蜗杆微调选件，使角度调节更简便、更精准。该系列产品也可选用无间隙步进驱动或同步电机驱动方案。

目录中所列 RNN 产品的内径最大可达 12 英寸，更大内径的型号也已实现优异性能。特殊应用场景请咨询我们。

技术规格

标准内径规格：1.53 英寸至 12 英寸，更大尺寸可按需定制
可烘烤温度：最高 150℃
配备固定式与旋转式法兰，带螺纹孔
厚度约为两片 ConFlat 型法兰的厚度
二级差分式抽气结构
极限真空度可达 10⁻¹¹ 托量级
标配 0–360° 带游标刻度盘

RNN-400 及更大型号典型性能指标

分辨率：＜0.004°
重复性：＜0.008°
回程间隙：＜0.035°

读数精度规格

标准刻度：1.0°
机械计数器：0.1°
如需实现最高分辨率，需配备微步进电机驱动

可选配置

精密调节蜗轮驱动
精密调节装置配数字读数，机械读数精度 0.1°，不可归零
可选配机械计数器
无回程间隙步进电机驱动，整步精度 0.018°（RNN-150/MS 型号为 0.0225°/ 整步），带手动旋钮
/FA 系列可定制抽气管长度与曲轴长度

负载参数

标准最大负载如下。特定应用场景下可承载更大负载，定制需求请咨询厂家。

负载重心距设备极轴的距离 “X” 不超过设备内径的 10%
水平安装设备中，负载重心距旋转法兰的距离 “Y” 不超过法兰内径
真空外部负载最大外形尺寸 “A”：
垂直安装：7 倍法兰外径水平安装：5 倍法兰外径倒置安装：7 倍法兰外径

Model No.	Vertical	Horizontal	Inverted
RNN-150	54 lbs	30 lbs	45 lbs
RNN-250	90 lbs	38 lbs	70 lbs
RNN-400	144 lbs	66 lbs	110 lbs
RNN-600	180 lbs	84 lbs	140 lbs
RNN-800	200 lbs	91 lbs	160 lbs
RNN-1000	370 lbs	160 lbs	280 lbs
RNN-1200	430 lbs	200 lbs	350 lbs

Table 1. RNN Series Differentially Pumped Rotary Seals

(includes a removable adjustment wrench)

I.D.	Flange O.D.	A	B	C	D	E	F	G	H	Model No.
1.53	2.75	4.50	2.99	1.0	3.18	2.75	.49	.13	60°	RNN-150
1.53	2.75/6 ¹	6.00	2.99	1.34	3.33	2.75	.15	.13	45°	RNN-150/6
2.53	4.5	5.75	3.64	1.36	3.58	4.50	.49	.03	45°	RNN-250
2.53	4.5/6 ¹	6.00	3.64	1.52	3.71	4.50	.33	.03	45°	RNN-250/6
4.03	6	7.75	4.57	1.68	4.34	6.02	.37	.06	45°	RNN-400
6.03	8	10.25	6.16	1.74	5.70	8.00	.42	.13	54°	RNN-600
8.00	10	12.05	7.03	1.94	6.70	10.00	.42	.13	45°	RNN-800
10.00	13.25	15.75	8.81	2.37	8.50	13.28	.29	.13	24°	RNN-1000
12.00	14	20.00	–	3.34	–	–	–	–	–	RNN-1200

Dimensions in inches
¹ Signifies mounting flange sizes respectively

Table 2. RNN/FA Differentially Pumped Rotary Seals with Fine Adjust 1

I.D.	Flange O.D.	A	B	C	D	E	F	G	H	I	Drive Ratio	Model No.
1.53	2.75	5.13	3.38	1.00	4.95	2.75	.49	0.37	60°	3	80:1	RNN-150/FA
1.53	2.75/6 ²	6.00	3.84	1.34	5.32	2.75	.15	0.37	45°	3	100:1	RNN-150/6/FA
2.53	4.5	6.38	4.20	1.36	6.11	4.50	.49	0.41	45°	3	100:1	RNN-250/FA
2.53	4.5/6 ²	6.38	4.20	1.52	6.11	4.50	.33	0.41	45°	3	100:1	RNN-250/6/FA
4.03	6	8.50	8.25	1.68	9.28	6.02	.37	0.54	45°	4	100:1	RNN-400/FA
6.03	8	10.25	8.50	1.74	9.93	8.00	.42	1.10	54°	5	100:1	RNN-600/FA
8.00	10	12.75	9.56	1.94	11.50	10.00	.42	1.10	45°	5	100:1	RNN-800/FA
10.00	13.25	17.00	11.86	2.37	17.25	13.28	.29	.91	24°	7	100:1	RNN-1000/FA
12.00	14	Consult Factory										RNN-1200/FA

Dimensions in inches

¹ The fine adjust units utilize worm drive and are dynamic anti-backlash on RNN-400 and larger models. They come with large knobs and crank handles.
² Signifies mounting flange sizes respectively

Table 3. RNN/MS or /MY Differentially Pumped Rotary Seals with Anti-Backlash /MS Stepping or /MY Synchronous Motor Drive 1

I.D.	Flange O.D.	A	B	C	D	E	F	G	H	I	Drive Ratio	Model No.
1.53	2.75	5.13	10.00	1.00	9.97	2.75	.49	0.74	60°	3.39	80:1	RNN-150/MS or /MY
1.53	2.75/6 ²	5.13	10.00	1.34	9.97	2.75	.15	0.74	45°	3.39	100:1	RNN-150/6/MS or /MY
2.53	4.5	6.38	10.10	1.36	8.30	4.50	.49	0.41	45°	3.39	100:1	RNN-250/MS or /MY
2.53	4.5/6 ²	6.38	10.10	1.52	8.30	4.50	.33	0.41	45°	3.39	100:1	RNN-250/6/MS or /MY
4.03	6	8.50	9.77	1.68	11.69	6.02	.37	0.54	45°	3.39	100:1	RNN-400/MS or /MY
6.03	8	10.20	10.13	1.74	11.69	8.00	.42	1.10	54°	3.39	100:1	RNN-600/MS or /MY
8.00	10	12.75	11.39	1.94	11.69	10.00	.42	1.10	45°	3.39	100:1	RNN-800/MS or /MY
10.00	13.25	Consult Factory										RNN-1000/MS or /MY
12.00	14	Consult Factory										RNN-1200/MS or /MY
18.00	24	Consult Factory										RNN-1800/MS
24.00	34	Consult Factory										RNN-2400/MS

Dimensions in inches

¹ The motor drive units utilize worm drive and are all dynamic anti-backlash with hand knobs at the rear of the motor
² Signifies mounting flange sizes respectively

技术规格

RNN-400 及更大型号典型性能指标

读数精度规格

可选配置

负载参数

Table 1. RNN Series Differentially Pumped Rotary Seals

Table 2. RNN/FA Differentially Pumped Rotary Seals with Fine Adjust 1

Table 3. RNN/MS or /MY Differentially Pumped Rotary Seals with Anti-Backlash /MS Stepping or /MY Synchronous Motor Drive 1

I.D.

Flange

O.D.

A

B

C

D

E

F

G

H

I

Drive

Ratio

Model

No.

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