Polygon Physics 基于 CF100 法兰的紧凑型电子回旋共振离子源 TES-100
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| TES-100 | Electrons | Ions |
|---|---|---|
| Applications | Electron chemistry (down to 100 V) | High power e-beam up to 1.5 kW, accelerator, mass spectroscopy, surface modification |
| Energy range | 100 V – 30 kV | 5 – 30 kV |
| Energy spread | – | 1% @ 30 kV |
| Current | 0.1 to 50 mA | 3 to 30 µA – typical with 1 mm extractor, 30 to 300 µA – typical with 3 mm extractor |
| Beam size | Energy and focus dependent | 0.5 – 20 mm |
| Insertion depth | From 169 mm or longer on demand | From 169 mm or longer on demand |
