Model SO-55离子源主要功能
可以生成固体、液体和气体材料的多种电子束
束流高达 100 µA
烤箱工作温度可变化，高达 1700 oC
可以方便快捷地从一种源材料更换成另一种源材料
高效使用源材料
General description
The Model SO-55 ion source, a hot filament, hollow cathode ion source, is very versatile and used in a great many research laboratories around the world. The SO-55 ion source is a further development of the 911A ion source.
The SO-55 ion source is able to ionize most materials that have a vapor pressure of 10-2 mbar at temperatures of 1700 oC or lower. This makes the SO-55 is ideally suited for research applications in which a large variety of different ion beams from solid, liquid and gaseous materials is required.
The hollow cathode consists of an outlet gap and a rear gap, both made of tantalum, with the electron emitting filament placed in between. The ions are extracted from the plasma through the outlet gap. The cylindrical anode insulator is made of boron nitride, the anode electrode of tantalum. The oven consists of a boron nitride chamber with a tantalum heating coil around it.
The ion source is supplied with three oven configurations for different temperature ranges: 100 – 500 oC, 400 – 700 oC and 600 – 1700 oC. A separate gas inlet permits the use of a supporting gas with all three oven configurations.
Spare parts to cover the first needs and a set of special tools are included with each Model SO-55 ion source.
