High Voltage溅射潘宁离子源 Model SO-90主要特点
易于操作和维护
低功耗
使用寿命长
近光灯发射
高亮度
General description
The HVEE Model SO-90 Sputter Penning ion source will ionize almost all conducting solids whose melting point is not too low, including those with a very low vapor pressure such as tungsten and tantalum.
In this source the cathodes are made from the element to be ionized. Positive ions from an argon or neon plasma discharge hit the cathodes and sputter the required material into the plasma. The special source geometry results in a high density of sputtered material in the plasma and a low deposition rate of unionized
sputtered materials.
Spare parts to cover the first needs are included with each SO-90 ion source.
Other types of penning ion sources available from High Voltage Engineering Europa B.V. are:
– The Model SO-60 Cold Cathode Penning ion source
– The Model SO-100 Hot Cathode Penning ion source
