Electronic Vacuum Regulators 电子真空调节器

Electronic Vacuum Regulator
Anodized Aluminum EVR-GSD8 with integrated QPV electronic pilot regulator

Equilibar electronic vacuum regulators allow vacuum control through a computerized command signal. The command signal is first sent to a small electronic regulator that produces a pilot signal to the reference port of the dome-loaded Equilibar Vacuum Regulator (EVR) to control the process pressure.

equilibar 电子真空调节器允许通过计算机化的命令信号进行真空控制。命令信号首先被发送到一个小型电子调节器, 该调节器产生一个导频信号, 进入负载赤道真空调节器 (evr) 的参考端口, 以控制过程压力。
equilibar 提供一系列精密电子压力调节器, 以提供此试点参考信号。qpv 超分辨率和 epr-30hg 模型几乎没有滞后性或死带, 从而能够进行精确调整。

Equilibar offers a line of precision electronic pressure regulators to provide this pilot reference signal. The QPV ultra-resolution and the EPR-30Hg models have virtually no hysteresis or deadband, resulting in the capability to make precise adjustments. equilibar 提供一系列精密电子压力调节器, 以提供此试点参考信号。qpv 超分辨率和 epr-30hg 模型几乎没有滞后性或死带, 从而能够进行精确调整。

These regulators can be used in open loop mode or closed loop mode. In open loop mode, the vacuum setpoint is commanded using a computerized signal sent to the electronic pilot regulator. The pilot regulator produces that commanded pressure onto the EVR reference port to keep the process vacuum very close to the setpoint value. Open loop mode will result in a slight variability in vacuum pressure as flow rates increase. 这些调节器可在开环模式或闭环模式下使用。在开环模式下, 真空设定值使用发送到电子先导调节器的计算机信号进行命令。先导调节器在 evr 参考端口上产生所命令的压力, 以使工艺真空非常接近设定值。开环模式将导致真空压力的轻微变化, 随着流量的增加。

In closed loop, or PID mode, the process vacuum pressure is monitored by a separate pressure sensor close to the process, and the command signal sent to the pilot regulator is adjusted to bring that process pressure to match the desired setpoint. This PID action can be accomplished inside the QPV electronic pressure regulator, or in the existing process control system. Closed loop control will result in more accuracy over a wide range of flow rates. 在闭环或 pid 模式下, 过程真空压力由接近过程的单独压力传感器进行监测, 并调整发送到先导调节器的命令信号, 使该过程压力与所需的设定值相匹配。这种 pid 动作可以在 qpv 电子压力调节器内完成, 也可以在现有的过程控制系统中完成。闭环控制将在广泛的流量范围内实现更高的精度。

Electronic Vacuum Regulator Details

This table details Equilibar Vacuum Regulators with inlet port sizes from 1/4″ to 1″.