Thermionics Northwest,Inc公司RC Series – Multiple Crucible Rotary 3kW e-Gun™ RC系列多坩埚旋转电子枪

Thermionics RCF Series 3 kW Single Crucible Linear e-Guns™ 3kW电子枪 真空镀膜电子枪 坩埚

Thermionics RCF Series 3 kW Single Crucible Linear e-Guns™ 3kW电子枪 真空镀膜 坩埚

 

Thermionics research capacity RCF series single crucible e-Gun™ provides enhanced beam stability and efficient XY sweep with full crucible coverage. The included plug-in emitter and sweep coil assemblies make the e-Gun source easier to service.

提供增强的电子束稳定性和高效的XY扫描,并具有全坩埚覆盖范围。

Features

  • True XY sweep with full crucible coverage
  • Sweep coils included with source
  • Enhanced beam collimation
  • Plug-in emitter module
  • Enhanced high-stability cooling
  • Cross-contamination shielding
  • Rugged design

Specifications:

Feature Specifications
Operating Below 5 x 10-5 Torr is desirable for best operation
Beam Voltage 4,000 VDC
Beam Current 0–750 mA
continuously variable
Maximum Power 3 kW
Cooling Water 1.5 gpm
Pressure Differential 25 psi minimum
Maximum Bakeout
Temperature
230°C (446°F)
Crucible Volume 2.24 cc

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