Nonsequitur 离子源离子枪 Model 1403 TOF/SIMS Ion Guns 气相离子源

Nonsequitur 离子源离子枪 Model 1403 TOF/SIMS设计特点

  • High brightness electron impact source for maximum bulk material removal
  • Emission regulated bombardment provides stable ion current with front panel adjustable dynamic range x300
  • Adjustable spot size from 20 µm to > 1 mm for spatially defined sputtering
  • Continuously variable beam energy up to 5keV
  • Neutral species suppression using beam bending optics
  • Beam blanking capability for TOF SIMS
  • Integral beam current monitoring capability
  • Replaceable beam trimming aperture with typical life-time of > 500 hours
  • Dual filaments provide operational backup with typical filament life-time > 500 hours
  • Internal source pressure sensor permits monitoring of ion source pressure
  • All UHV compatible and etch resistant materials used in fabrication
  • Pre-objective lens deflection for reduced spot size
  • Differential pumping to minimize main chamber gas loading
  • Operates over the range of inert gas species

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