Kimball Physics is a key supplier of electron guns designed for use in a wide variety of ultra high vacuum (UHV) surface physics, space physics, and processing applications. Guns can be focusable for small spot size, for use in applications such as x-ray production, welding and RHEED; or for flood beams, for use in charge neutralization, electron beam scrubbing, space simulation and radiation damage studies.
Range of Operation
- Energy Ranges:1 eV to 100 keV
- Beam Current Ranges:1 nA to 20 mA
- Spot Size Ranges: 15 μm (focused column) to 500+ mm (flood beams)
Performance
- Beam Current Stability: feedback-stabilized emission current control; better than ± 0.1% per hour
- Energy Stability: ± 0.01% per hour, ± 0.02% per 8 hours at full output to minimize chromatic aberration.
Versatility
- Breadth of cathodes: balancing brightness, energy spread, ruggedness, longevity and cost
- Flexible Controllers: Independent fiber optic control and metering of functions such as source, emission current, energy, lens, anode, grid and X – Y deflection.
Convenience
- Customer-replaceable firing units
- Mechanical alignment during full operation
- Storable control settings
- Computer remote control / metering
Operational Capabilities
- Fast pulsing / Beam blanking
- Deflection / Rastering
- Gun-mounted Faraday cups
Low Energy (5 keV max)
| Low Energy Electron Gun Systems (5 keV Max) | |||
| Gun Model | Key Characteristics | Specifications* | Features / Options |
|---|---|---|---|
|
ELG-2
|
Constant Beam Current & Spot Size over Broad Energy Range
2¾CF Mounted |
Energy Range: 1 eV to 2keV Beam Current: 1 nA to 10 μA Spot Size: 0.5 mm to 5 mm |
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Compact, Wide-Angle Beam
2¾CF Mounted |
Energy Range: 5 eV to 1 keV Beam Current: 1 nA to 400 μA Spot Size: 20 mm to 50 mm |
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|
EGA-1012
|
High Current, Medium Diameter Spot Size
2¾CF Mounted |
Energy Range: 5 eV to 1 keV Beam Current: 1 μA to 2 mA Spot Size: 10 mm to 25 mm |
|
|
Focused or Uniform Wide-Angle
2¾CF Mounted |
Energy Range: 10 eV to 1.5 keV Beam Current: 1 nA to 100 μA Spot Size: 1 mm to 100 mm |
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Energy Range: 10 eV to 1.5 keV Beam Current: 1 nA to 1 mA Spot Size: 3 mm to 100 mm |
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EFG-7, EGPS-2017
|
Focused or Uniform Wide-Angle
2¾CF Mounted |
Energy Range: 100 eV to 5 keV Beam Current: 10 nA to 100 μA Spot Size: 1 mm to 100 mm |
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Energy Range: 100 eV to 5 keV Beam Current: 10 nA to 1 mA Spot Size: 3 mm to 100 mm |
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Energy Sweeping: Constant Beam Current and Spot
2¾CF Mounted |
Energy Range: 50 eV to 5 keV Beam Current: 1 nA to 100 μA Spot Size: 1 mm to 10 mm |
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| * Custom Energy & Beam Current Ranges Optional | |||
Medium Energy (30 keV max)
| Mid-Energy Electron Gun Systems (30 keV Max) | |||||
|
Gun Model |
Key Characteristics |
Energy Range* |
Beam Current* |
Spot Size (mm) |
Features / Options |
|
Small Spot Collimated Focusable Beam, Modular Gun |
100eV to 10keV |
1nA to 10μA | 0.06 to 10 |
Internal Alignment while Operating, Collimated Beam, Electrostatic Focusing & Deflection, Blanking, Pulsing, Rastering,Optional Faraday Cup |
|
| 10nA to 100μA | 0.5 to 25 | ||||
| 100nA to 1mA | 1.5 to 25 | ||||
|
EGG-3103
|
Focusable Electron Beams, High Current Option up to 50mA |
100eV to 10keV |
0.2mA to 10mA |
1.5 to 20 |
Focusing, High Current, Deflection, Rastering |
| 5mA to 50mA | 5 to 25 | ||||
|
EGF-3104
|
Uniform Wide-Angle Flood Gun |
200eV to 20keV |
1nA to 100μA |
15 to 50 |
Adjustable Beam Alignment, Wide Angle Uniform Beam, Divergence Control, Magnetic Deflection, Beam Washing, Custom Apertures |
|
100nA to 1mA |
15 to 50 |
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|
Small Spot Collimated Focusable Beam, Modular Gun |
1keV to 20keV |
1nA to 10μA | 0.1 to 10 |
Modular Design, Internal Alignment while Operating, Collimated Beam, Electrostatic Focusing & Deflection, Rastering, Pulsing, Blanking |
|
| 10nA to 100μA | 0.5 to 25 | ||||
| 1μA to 1mA | 1.5 to 25 | ||||
|
Small Spot Collimated Focusable Beam, Modular Gun |
1keV to 30keV |
1nA to 10μA | 0.1 to 10 |
Modular Design, Internal Alignment while Operating, Collimated Beam, Electrostatic Focusing & Deflection, Rastering, Pulsing, Blanking |
|
| 10nA to 100μA | 0.5 to 25 | ||||
| 100nA to 1mA | 1.5 to 25 | ||||
|
Versatile, Option Laden, Medium Energy Gun with Small Spot Size Capability |
1keV to 30keV |
10nA to 1μA |
0.015 to 0.5 |
Small Spot, Modular Design, Internal Alignment while Operating, Quadrupole Alignment, Octopole Deflection, Raster, Stigmator, Blanking, In-Line Faraday Cup, Internal Magnetic Shielding, Differential Pumping |
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|
EMG-4215
|
Versatile, Modular Medium Energy, Focusing & Flood Gun |
1keV to 30keV |
1nA to 5mA |
0.5 to 25 |
Modular Design, Internal Alignment while Operating, Electrostatic Focusing & Deflection |
|
EMG-4210
|
Wide Range of Currents, Magnetic Centering & Shaping |
1keV to 30keV |
10µA to 5mA |
0.1 to 10 |
Small Spot, Internal Alignment while Operating, Pulsing, Magnetostatic Focusing & Beam Shaping |
| * Custom Energy & Beam Current Ranges Optional | |||||
High Energy (100 keV max)
| High-Energy Electron Gun Systems (100 keV Max) | |||||
|
Gun Model |
Key Characteristics |
Energy Range* |
Beam Current* |
Spot Size (mm) |
Features / Options |
|
Focusable, Small Spot Gun |
1keV to 50keV |
10nA to 100μA | 0.5 to 100 |
Magnetostatic Focusing and Deflection, Pulsing, Internal Alignment while Operating |
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EGF-6115
|
High Current, Focusable, Flood Gun |
1keV to 50keV |
10nA to 5mA |
10 to 500 |
Magnetostatic Deflection and Rastering, Electrostatic Focusing, Internal Alignment while Operating |
|
EGF-6104
|
Uniform Density Flood Beam Gun |
1keV to 50keV |
10nA to 200μA |
15 to 50 |
Adjustable Beam Alignment while operating, Wide Angle Uniform Beam, Divergence Control, Magnetic Deflection, Beam Washing, Custom Apertures |
|
10nA to 1mA |
15 to 50 |
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|
EGH-6210
|
Focusable, Small Spot to 50μm |
1keV to 60keV |
10μA to 6mA | 0.05 to 10 |
Magnetostatic Focusing/Beam Shaping, Magnetostatic Deflection, Internal Alignment while Operating, Differential Pumping |
|
EGH-8100
|
Medium Spot, Flood Gun |
1keV to 100keV |
10nA to 1mA | 3 to 100 |
Flood Beam, Pulsing, High Current Pulsing, Internal Alignment while Operating |
|
EGH-8103
|
Focusable, Small Spot Option to 60μm |
10keV to 100keV |
10nA to 1mA |
0.5 to 10 |
Magnetostatic Focusing, Magnetostatic Deflection, Pulsing, Adjustable Alignment while Operating |
| 10nA to 100μA | 0.06 to 10 | ||||
|
EGH-8105
|
Focusable, Flood Gun |
1keV to 100keV |
50nA to 100μA |
10 to 500+ |
Uniform Flood Beam, Beam Washing for Uniform Spot, Electrostatic Focusing, Adjustable Beam Alignment while Operating, Pulsing, Magnetic Deflection |
|
EGH-8201
|
Focusable, High Currents up to 20mA Pulsed |
10keV to 100keV |
10nA to 1mA |
1 to 100 |
Magnetostatic Focusing, Magnetostatic Deflection, Pulse Capability, Internal Alignment while Operating |
|
EGH-8202
|
Two Lens System, High Currents up to 20mA pulsed, Modular Design |
10keV to 100keV |
10nA to 1mA |
1 to 100 |
Magnetostatic Focusing (Two-Lens System), Magnetostatic Deflection, Pulse Capability, Differential Pumping and Optional Gate Valve |
| * Custom Energy & Beam Current Ranges Optional | |||||
Electron Gun
ELG-2
FRA-2X1-2
EGA-1012
EFG-7
EGPS-1017
EGPS-2017
EGL-2022
EGG-3101
EGG-3103
EGF-3104
EMG-4212
EGPS-3212
EMG-4212
EGPS-4212
EMG-4103
EMG-4215
EMG-4210
EGH-6002
EGF-6115
EGF-6104
EGH-6210
EGH-8101
EGH-8103
EGH-8105
EGH-8201
EGH-8202
Ion Gun
IGS-4
ILG-6
IGL-2101
Cathodes
Emitters
ES-423E
ES-423E-GR
ES-440
ES-042
ES-044
ES-046
ES-015
ES-064
ES-066
ES-525
ES-526
ES-529
CB-104
CB-105
C423E
A423E
B423E
C423E
C423E
C423E
E423E
HL423E
H423E
I423E
JE423E
JG423E
JP423E
J423E
C423E
O423E
E423E
P423E
S423E
SE423E
G423E
G423E
Z423E
ES-020
ES-021
ES-030
ES-030
ES-028
ES-033
ES-029
FC-66
FC-70
FC-71
FC-72
FC-73
FC-86B
PHOS-RP22SS-B5X5-R500
PHOS-UP22SS-B5X5-R500
PHOS-RP22SS-B7X7-R750
PHOS-UP22SS-B7X7-R750
PHOS-RP22SS-C5X5-R1000
PHOS-UP22SS-C5X5-R1000
PHOS-RP22SS-C7X7-R1500
PHOS-UP22SS-C7X7-R1500
PHOS-RP22GL-B5X5-R500
PHOS-UP22GL-B5X5-R500
PHOS-RP22GL-B7X7-R750
PHOS-UP22GL-B7X7-R750
PHOS-RP22GL-C5X5-R1000
PHOS-UP22GL-C5X5-R1000
PHOS-RP22GL-C7X7-R1500
PHOS-UP22GL-C7X7-R1500
PHOS-RP22GL-CF2.75 P22
PHOS-UP22GL-CF2.75 P22
PHOS-RP22GL-CF4.5 P22
PHOS-UP22GL-CF4.5 P22
PHOS-RP22GL-CF6.0 P22
PHOS-UP22GL-CF6.0 P22
Faraday
Faraday Cups
Phosphor
Phosphor Screens
MCF133-SphCube-A6
MCF275-SphCube-C6
MCF275-SphCube-C4A8
MCF275-SphCube-C5A4
MCF275-SphCube-C6A8
MCF450-SphCube-E6
MCF450-SphCube-E6A8
MCF450-SphCube-E6C8
MCF450-SphCube-E6C8A12
MCF600-SphCube-F6
MCF600-SphCube-F6C8
MCF600-SphCube-F6C8A24
MCF800-SphCube-G6C8
MCF133-SphTri-A5
MCF275-SphTri-C5
MCF450-SphSq-E2C4
MCF450-SphSq-E2C3r1A4
MCF600-SphSq-F2C4A8
MCF600-SphSq-F2E4A4
MCF600-SphSq-F2E4A8
MCF800-SphSq-G2E4
MCF800-SphSq-G2E4C4
MCF800-SphSq-G2E4C4A16
MCF600-SphPent-F2C5
MCF600-SphPent-F2C5A2
MCF275-SphHex-C2A6
MCF275-SphHex-Cc2A6
MCF800-SphHex-G2E6
MCF275-SphOct-C2A8
MCF450-SphOct-E2A8
MCF450-SphOct-Ec2A8
MCF600-SphOct-F2A8
MCF600-SphOct-F2C8
MCF800-SphOct-G2C8
MCF800-ExtOct-G2C8
MCF800-ExtOct-G2C8A16
MCF1000-SphOct-H2C8
MCF800-SphDec-G2C10
MCF600-SphHexadecagon-F2A16
MCF133-DblSphCube-A10
MCF275-SphTrpOct-Cr2A16
MCF275-SphTrpOct-C18
MCF275-FlgAdptr-C1A1
MCF275-FlgAdptr-C2
MCF450-FlgAdptr-E2
MCF133-PWeldFlg
MCF275-PWeldFlg
MCF450-PWeldFlg
MCF600-PWeldFlg
MCF800-PWeldFlg
MCF133-ThnFlg-A2-175
MCF133-ThnFlg-A2-175-ID640
MCF133-ThnFlg-A2-400
MCF133-ThnFlg-A2-400-ID640
MCF275-ThnFlg-C2-175
MCF275-ThnFlg-C2-175-ID1500
MCF275-ThnFlg-C2-400
MCF275-ThnFlg-C2-400-ID1500GG
MCF450-ThnFlg-E2-175
MCF450-ThnFlg-E2-175-ID2900
MCF450-ThnFlg-E2-400
MCF450-ThnFlg-E2-400-ID2900GG
MCF600-ThnFlg-F2-175
MCF600-ThnFlg-F2-175-ID4300
MCF600-ThnFlg-F2-400
MCF600-ThnFlg-F2-400-ID4300GG
MCF800-ThnFlg-G2-175
MCF800-ThnFlg-G2-175-ID6300
MCF800-ThnFlg-G2-400
MCF800-ThnFlg-G2-400-ID6300GG
MCF275-MtgFlg-C2
MCF275-MtgFlg-C1Blk
MCF275-MtgFlg-C1VP
MCF450-MtgFlg-E2
MCF450-MtgFlg-E1Blk
MCF450-MtgFlg-E1VP
MCF600-MtgFlg-F2
MCF600-MtgFlg-F1Blk
MCF600-MtgFlg-F1VP
MCF800-MtgFlg-G2
MCF800-MtgFlg-G1Blk
MCF600-ClsCplr-F1r1
MCF800-ClsCplr-G1r1
MCF275-ExtBrkt-R
MCF275-ExtBrkt-LS
MCF450-ExtBrkt-LS
MCF600-ExtBrkt-LS
MCF600-ExtBrkt-SM
MCF800-ExtBrkt-LS
MCF275-GrvGrb-C01
MCF275-GrvGrb-C02
MCF275-GrvGrb-CB03
MCF275-GrvGrb-CB04
MCF275-GrvGrb-CYL0750
MCF275-GrvGrb-CYL1000
MCF450-GrvGrb-C01
MCF450-GrvGrb-C02
MCF450-GrvGrb-C03
MCF450-GrvGrb-C04
MCF450-GrvGrb-CYL1750
MCF600-GrvGrb-C01
MCF800-GrvGrb-C01
MCF1000-GrvGrb-C01
