{"id":242,"date":"2025-04-16T16:06:37","date_gmt":"2025-04-16T08:06:37","guid":{"rendered":"https:\/\/www.bihec.com\/waferpro\/?p=242"},"modified":"2025-04-16T16:06:37","modified_gmt":"2025-04-16T08:06:37","slug":"waferpro-sio2%e7%86%94%e8%9e%8d%e7%9f%b3%e8%8b%b1%e6%99%b6%e5%9c%86","status":"publish","type":"post","link":"https:\/\/www.bihec.com\/waferpro\/waferpro-sio2%e7%86%94%e8%9e%8d%e7%9f%b3%e8%8b%b1%e6%99%b6%e5%9c%86\/","title":{"rendered":"WaferPro SiO2\u7194\u878d\u77f3\u82f1\u6676\u5706"},"content":{"rendered":"

WaferPro SiO2\u7194\u878d\u77f3\u82f1\u6676\u5706<\/a><\/p>\n

\u201c\u7194\u878d\u77f3\u82f1\u201d\u6216\u201c\u7194\u878d\u77f3\u82f1\u201d\uff0c\u5b83\u662f\u77f3\u82f1 \uff08SiO2\uff09 \u7684\u975e\u6676\u76f8\u3002\u4e0e\u787c\u7845<\/a>\u9178\u76d0\u73bb\u7483\u76f8\u6bd4\uff0c\u7194\u878d\u77f3\u82f1\u4e0d\u542b\u6dfb\u52a0\u5242;\u56e0\u6b64\u5b83\u4ee5\u7eaf\u5f62\u5f0f\u5b58\u5728\uff0c\u5373 SiO2\u3002\u4e0e\u666e\u901a\u73bb\u7483\u76f8\u6bd4\uff0c\u7194\u878d\u77f3\u82f1\u5728\u7ea2\u5916\u548c\u7d2b\u5916\u7ebf\u5149\u8c31\u4e2d\u5177\u6709\u66f4\u9ad8\u7684\u900f\u5c04\u7387\u3002\u7194\u878d\u77f3\u82f1\u662f\u901a\u8fc7\u7194\u5316\u548c\u518d\u56fa\u5316\u8d85\u7eaf SiO2 \u5236\u6210\u7684\u3002\u53e6\u4e00\u65b9\u9762\uff0c\u5408\u6210\u7194\u878d\u77f3\u82f1\u7531\u5bcc\u542b\u7845\u7684\u5316\u5b66\u524d\u9a71\u4f53\uff08\u5982 SiCl4\uff09\u5236\u6210\uff0c\u8fd9\u4e9b\u5316\u5b66\u524d\u9a71\u4f53\u5728 H2 + O2 \u6c14\u6c1b\u4e2d\u6c14\u5316\u7136\u540e\u6c27\u5316\u3002\u5728\u8fd9\u79cd\u60c5\u51b5\u4e0b\u5f62\u6210\u7684 SiO2 \u7c89\u5c18\u4e0e\u57fa\u677f\u4e0a\u7684\u4e8c\u6c27\u5316\u7845\u7194\u5408\u3002\u7194\u878d\u77f3\u82f1\u5757\u88ab\u5207\u5272\u6210\u6676\u7247\uff0c\u7136\u540e\u6700\u7ec8\u5bf9\u6676\u7247\u8fdb\u884c\u629b\u5149\u3002<\/p>\n

\u7194\u878d\u77f3\u82f1\u7845\u7247<\/a>\u7684\u7c7b\u578b<\/h2>\n

WaferPro \u63d0\u4f9b\u7531\u4ee5\u4e0b\u886c\u5e95\u6750\u6599\u5236\u6210\u7684\u9ad8\u54c1\u8d28\u7194\u878d\u77f3\u82f1\u73bb\u7483\u6676\u5706<\/a>\u3002<\/p>\n

\n
\n\n\n\n
\u5927\u5c0f<\/th>\n\u82f1\u5bf8<\/th>\n2″<\/th>\n3″<\/th>\n4″<\/th>\n6″<\/th>\n8″<\/th>\n10″<\/th>\n12\u201d<\/th>\n<\/tr>\n<\/thead>\n<\/table>\n<\/div>\n<\/div>\n
\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n
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<\/div>\n<\/th>\n
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<\/div>\n<\/th>\n
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<\/div>\n<\/th>\n
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<\/div>\n<\/th>\n<\/tr>\n<\/thead>\n
\u76f4\u5f84<\/td>\n\u6beb\u7c73<\/td>\n50.8<\/td>\n76.2<\/td>\n100<\/td>\n150<\/td>\n200<\/td>\n250<\/td>\n300<\/td>\n<\/tr>\n
\u5bb9\u5dee \uff08\u00b1\uff09<\/td>\n\u6beb\u7c73<\/td>\n0.2<\/td>\n0.2<\/td>\n0.2<\/td>\n0.2<\/td>\n0.2<\/td>\n0.2<\/td>\n0.2<\/td>\n<\/tr>\n
\u539a\u5ea6<\/td>\n\u5fae\u7c73<\/td>\n100 \u53ca\u4ee5\u4e0a<\/td>\n100 \u53ca\u4ee5\u4e0a<\/td>\n100 \u53ca\u4ee5\u4e0a<\/td>\n300 \u53ca\u4ee5\u4e0a<\/td>\n400 \u53ca\u4ee5\u4e0a<\/td>\n500 \u53ca\u4ee5\u4e0a<\/td>\n500 \u53ca\u4ee5\u4e0a<\/td>\n<\/tr>\n
\u4e3b\u8981\u53c2\u8003\u5355\u4f4d<\/td>\n\u6beb\u7c73<\/td>\n32.5<\/td>\n32.5<\/td>\n32.5<\/td>\n57.5<\/td>\n\u534a\u7f3a\u53e3<\/td>\n\u534a\u7f3a\u53e3<\/td>\n\u534a\u7f3a\u53e3<\/td>\n<\/tr>\n
LTV \uff085 \u6beb\u7c73 x 5 \u6beb\u7c73\uff09<\/td>\n\u5fae\u7c73<\/td>\n< 0.5<\/td>\n< 0.5<\/td>\n< 0.5<\/td>\n< 0.5<\/td>\n< 0.5<\/td>\n< 0.5<\/td>\n< 0.5<\/td>\n<\/tr>\n
TTV \u7535\u89c6<\/td>\n\u5fae\u7c73<\/td>\n< 2<\/td>\n< 2<\/td>\n< 2<\/td>\n< 3<\/td>\n<3<\/td>\n<5<\/td>\n<5<\/td>\n<\/tr>\n
\u5f13<\/td>\n\u5fae\u7c73<\/td>\n\u00b120<\/td>\n\u00b120<\/td>\n\u00b120<\/td>\n\u00b130<\/td>\n\u00b140<\/td>\n\u00b140<\/td>\n\u00b140<\/td>\n<\/tr>\n
\u7ecf\u7ebf<\/td>\n\u5fae\u7c73<\/td>\n\u2264 30<\/td>\n\u2264 30<\/td>\n\u2264 30<\/td>\n\u2264 40<\/td>\n\u2264 50<\/td>\n\u2264 50<\/td>\n\u2264 50<\/td>\n<\/tr>\n
\u8fde\u7eed\u66dd\u5149\u5ea6\uff085mm*5mm\uff09<0.4um<\/td>\n%<\/td>\n\u226595%<\/td>\n\u226595%<\/td>\n\u226595%<\/td>\n\u226595%<\/td>\n\u226595%<\/td>\n\u226595%<\/td>\n\u226595%<\/td>\n<\/tr>\n
\u8fb9\u7f18\u5012\u5706\u89d2<\/td>\n\u6beb\u7c73<\/td>\nSEMI \u6807\u51c6<\/td>\nSEMI \u6807\u51c6<\/td>\nSEMI \u6807\u51c6<\/td>\nSEMI \u6807\u51c6<\/td>\nSEMI \u6807\u51c6<\/td>\nSEMI \u6807\u51c6<\/td>\nSEMI \u6807\u51c6<\/td>\n<\/tr>\n
\u8868\u9762\u7c7b\u578b<\/td>\n<\/td>\nSSP\/DSP\u7684<\/td>\nSSP\/DSP\u7684<\/td>\nSSP\/DSP\u7684<\/td>\nSSP\/DSP\u7684<\/td>\nSSP\/DSP\u7684<\/td>\nSSP\/DSP\u7684<\/td>\nSSP\/DSP\u7684<\/td>\n<\/tr>\n
\u8868\u9762\u7c97\u7cd9\u5ea6<\/td>\n\u7eb3\u7c73<\/td>\n\u22641<\/td>\n\u22641<\/td>\n\u22641<\/td>\n\u22641<\/td>\n\u22641<\/td>\n\u22641<\/td>\n\u22641<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n

\"\"<\/p>\n

WaferPro \u7194\u878d\u77f3\u82f1\u7845\u7247<\/a>\uff1a\u5b9e\u73b0\u5c16\u7aef\u6280\u672f<\/p>\n

\u4f5c\u4e3a\u9ad8\u7eaf\u5ea6\u7194\u878d\u77f3\u82f1\u7845\u7247\u7684\u4e3b\u8981\u5236\u9020\u5546\uff0c\u6211\u4eec\u4e3a\u4f17\u591a\u5148\u8fdb\u884c\u4e1a\u7684\u521b\u65b0\u63d0\u4f9b\u652f\u6301\u3002\u4ece\u534a\u5bfc\u4f53\u5149\u523b\u6280\u672f\u5230\u5929\u6587\u5149\u5b66\uff0c\u6211\u4eec\u7684\u6676\u5706\u53ef\u63d0\u4f9b\u7a81\u7834\u754c\u9650\u6240\u9700\u7684\u7cbe\u786e\u6027\u80fd\u3002\u4e16\u754c\u5404\u5730\u7684\u5ba2\u6237\u4ee5\u6211\u4eec\u7684\u6750\u6599\u4e3a\u8bbe\u8ba1\u6838\u5fc3\uff0c\u521b\u9020\u51fa\u53d8\u9769\u6027\u7684\u4ea7\u54c1\u3002<\/p>\n

\u6211\u4eec\u5229\u7528\u4e00\u4e1d\u4e0d\u82df\u7684\u5236\u9020\u6280\u672f\u751f\u4ea7\u5177\u6709\u5353\u8d8a\u8d28\u91cf\u6807\u51c6\u7684\u7194\u878d\u77f3\u82f1\u6676\u7247\u3002\u6211\u4eec\u7684\u6676\u5706\u5177\u6709\u51fa\u8272\u7684\u5149\u4f20\u8f93\u7387\u3001\u5316\u5b66\u7535\u963b\u7387\u3001\u5fae\u6c61\u67d3\u7269\u7eaf\u5ea6\u3001\u8010\u6e29\u6027\u548c\u5c3a\u5bf8\u7a33\u5b9a\u6027\u3002\u6211\u4eec\u53ef\u4ee5\u6839\u636e\u9700\u8981\u5b9a\u5236\u76f4\u5f84\u3001\u539a\u5ea6\u3001\u5e73\u9762\u6216\u65b9\u5411\u3002<\/p>\n

\u51ed\u501f\u5341\u591a\u5e74\u7684\u7194\u878d\u77f3\u82f1\u4e13\u4e1a\u77e5\u8bc6\uff0c\u6211\u4eec\u7684\u5de5\u827a\u5de5\u7a0b\u4e13\u4e1a\u77e5\u8bc6\u8f6c\u5316\u4e3a\u4e00\u6279\u53c8\u4e00\u6279\u7684\u5747\u5300\u6027\u6676\u5706\u3002\u6211\u4eec\u6b22\u8fce\u6709\u673a\u4f1a\u4e0e\u7814\u7a76\u4eba\u5458\u5408\u4f5c\uff0c\u5171\u540c\u5f00\u53d1\u4ee5\u4e0b\u9886\u57df\u7684\u524d\u6cbf\u5e94\u7528\uff1a<\/p>\n