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\u4f4e\u5e94\u529b LPCVD \u6c2e\u5316\u7269\uff1a<\/h3>\n\u8584\u819c\u539a\u5ea6\uff1a\u4e24\u4fa7 100\u00c5 \u2013 20,000\u00c5\n\u8584\u819c\u5e94\u529b\uff1a<250\u00b150 MPa \u62c9\u4f38\u5e94\u529b<\/p>\n

\u8d85\u4f4e\u5e94\u529b LPCVD \u6c2e\u5316\u7269\uff1a<\/h3>\n\u8584\u819c\u539a\u5ea6\uff1a\u4e24\u4fa7 100\u00c5 \u2013 20,000\u00c5\n\u8584\u819c\u5e94\u529b\uff1a<100\u00b150 MPa \u62c9\u4f38\u5e94\u529b<\/p>\n

PECVD \u6c2e\u5316\u7269\uff1a<\/h3>\n\u8584\u819c\u539a\u5ea6\uff1a+\u4e00\u4fa7\n100\u00c5 \u2013 5000\u00c5 \u8584\u819c\u5e94\u529b\uff1a+400\u00b150 MPa \u62c9\u4f38\u5e94\u529b<\/p>\n

\u4f4e\u5e94\u529b PECVD \u6c2e\u5316\u7269\uff1a<\/h3>\n\u8584\u819c\u539a\u5ea6\uff1a\u4e00\u4fa7 100\u00c5 \u2013 20,000\u00c5\n\u8584\u819c\u5e94\u529b\uff1a<250\u00b150 MPa \u62c9\u4f38\u5e94\u529b<\/p>\n

PECVD \u6c2e\u6c27:<\/h3>\n\u8584\u819c\u539a\u5ea6\uff1a\u4e00\u4fa7 100\u00c5 \u2013 20,000\u00c5\n\u8584\u819c\u5e94\u529b\uff1a-400\u00b150 MPa \u62c9\u4f38\u5e94\u529b<\/p>\n<\/p>\n<\/p>\n

\u4f4e\u5e94\u529b LPCVD \u6c2e\u5316\u7269\uff1a<\/h3>\n
\u8584\u819c\u539a\u5ea6\uff1a\u4e24\u4fa7 100\u00c5 \u2013 20,000\u00c5
\n\u8584\u819c\u5e94\u529b\uff1a<250\u00b150 MPa \u62c9\u4f38\u5e94\u529b<\/p>\n

\u8d85\u4f4e\u5e94\u529b LPCVD \u6c2e\u5316\u7269\uff1a<\/h3>\n
\u8584\u819c\u539a\u5ea6\uff1a\u4e24\u4fa7 100\u00c5 \u2013 20,000\u00c5
\n\u8584\u819c\u5e94\u529b\uff1a<100\u00b150 MPa \u62c9\u4f38\u5e94\u529b<\/p>\n

PECVD \u6c2e\u5316\u7269\uff1a<\/h3>\n
\u8584\u819c\u539a\u5ea6\uff1a+\u4e00\u4fa7
\n100\u00c5 \u2013 5000\u00c5 \u8584\u819c\u5e94\u529b\uff1a+400\u00b150 MPa \u62c9\u4f38\u5e94\u529b<\/p>\n

\u4f4e\u5e94\u529b PECVD \u6c2e\u5316\u7269\uff1a<\/h3>\n
\u8584\u819c\u539a\u5ea6\uff1a\u4e00\u4fa7 100\u00c5 \u2013 20,000\u00c5
\n\u8584\u819c\u5e94\u529b\uff1a<250\u00b150 MPa \u62c9\u4f38\u5e94\u529b<\/p>\n

PECVD \u6c2e\u6c27:<\/h3>\n
\u8584\u819c\u539a\u5ea6\uff1a\u4e00\u4fa7 100\u00c5 \u2013 20,000\u00c5
\n\u8584\u819c\u5e94\u529b\uff1a-400\u00b150 MPa \u62c9\u4f38\u5e94\u529b<\/p>\n
$\"\"$ <\/p>\n
$\"\"$ <\/p>\n