\uff08\u7406\u60e0\uff09VacTechniche \u7684\u8bbe\u5907<\/p>\n<\/div>\n<\/div>\n<\/div>\n

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MRIE03VT-A \u53f0\u5f0f<\/a> RIE \u7cfb\u7edf\uff0c\u7531\u201c Vac Techniche<\/a> Ltd\u201d\u5236\u9020\uff0c\u5177\u6709\u4ee5\u4e0b\u89c4\u683c\u7ec4\u5408\uff0c\u662f\u4e00\u6b3e\u72ec\u7279\u7684\u4ea7\u54c1\u3002<\/p>\n

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\nAr\uff1a100 SCCM
\nN2\uff1a50 SCCM
\nO2\uff1a100 SCCM
\nSF6\uff1a50SCCM\u3002<\/p>\n

\u53cd\u5e94\u6027\u79bb\u5b50\u8680\u523b\uff1aRIE<\/h2>\n<\/div>\n<\/div>\n
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\n
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🔹 \u534a\u5bfc\u4f53\u5668\u4ef6\u5236\u9020
🔹 MEMS\uff08\u5fae\u673a\u7535\u7cfb\u7edf\uff09\u5236\u9020
🔹 \u5149\u5b50\u5b66\u548c\u5149\u7535\u5143\u4ef6\u52a0\u5de5
🔹 \u4ecb\u7535\u6750\u6599\u7ed3\u6784\uff08\u4f8b\u5982 SiO\u2082\u3001Si\u2083N\u2084\uff09
🔹 \u805a\u5408\u7269\u548c\u6709\u673a\u6750\u6599\u56fe<\/h6>\n
$\"\"$ <\/p>\n<\/div>\n<\/div>\n<\/div>\n<\/div>\n<\/div>\n<\/div>\n
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