{"id":399,"date":"2025-05-06T10:54:38","date_gmt":"2025-05-06T02:54:38","guid":{"rendered":"https:\/\/www.bihec.com\/vactechniche\/?p=399"},"modified":"2025-05-06T10:54:38","modified_gmt":"2025-05-06T02:54:38","slug":"%e8%8b%b1%e5%9b%bdvactechniche%e5%8f%8d%e5%ba%94%e7%a6%bb%e5%ad%90%e5%88%bb%e8%9a%80%ef%bc%9arie","status":"publish","type":"post","link":"https:\/\/www.bihec.com\/vactechniche\/%e8%8b%b1%e5%9b%bdvactechniche%e5%8f%8d%e5%ba%94%e7%a6%bb%e5%ad%90%e5%88%bb%e8%9a%80%ef%bc%9arie\/","title":{"rendered":"\u82f1\u56fdVacTechniche,\u53cd\u5e94\u79bb\u5b50\u523b\u8680\uff1aRIE"},"content":{"rendered":"<div class=\"elementor-element elementor-element-4218c4b elementor-widget elementor-widget-heading\" data-id=\"4218c4b\" data-element_type=\"widget\" data-widget_type=\"heading.default\">\n<div class=\"elementor-widget-container\">\n<h2 class=\"elementor-heading-title elementor-size-large\"><a href=\"https:\/\/www.bihec.com\/vactechniche\/tag\/%e5%8f%8d%e5%ba%94%e7%a6%bb%e5%ad%90%e5%88%bb%e8%9a%80\/\" title=\"View all posts in \u53cd\u5e94\u79bb\u5b50\u523b\u8680\" target=\"_blank\">\u53cd\u5e94\u79bb\u5b50\u523b\u8680<\/a>\uff1aRIE<\/h2>\n<\/div>\n<\/div>\n<div class=\"elementor-element elementor-element-dd41855 elementor-widget__width-inherit elementor-widget elementor-widget-heading\" data-id=\"dd41855\" data-element_type=\"widget\" data-widget_type=\"heading.default\">\n<div class=\"elementor-widget-container\">\n<h3 class=\"elementor-heading-title elementor-size-large\">\u53cd\u5e94\u79bb\u5b50<a href=\"https:\/\/www.bihec.com\/vactechniche\/tag\/%e5%88%bb%e8%9a%80\/\" title=\"View all posts in \u523b\u8680\" target=\"_blank\">\u523b\u8680<\/a><\/h3>\n<\/div>\n<\/div>\n<div class=\"elementor-element elementor-element-ba10644 elementor-widget elementor-widget-pix-text\" data-id=\"ba10644\" data-element_type=\"widget\" data-widget_type=\"pix-text.default\">\n<div class=\"elementor-widget-container\">\n<div class=\"pix-el-text w-100 text-left \">\n<p class=\"text-sm resp-option text-secondary text-left font-weight-bold\">\uff08RIE\uff09VacTechniche \u7684\u8bbe\u5907<\/p>\n<\/div>\n<\/div>\n<\/div>\n<div class=\"elementor-element elementor-element-fd68f33 elementor-widget elementor-widget-pix-text\" data-id=\"fd68f33\" data-element_type=\"widget\" data-widget_type=\"pix-text.default\">\n<div class=\"elementor-widget-container\">\n<div class=\"pix-el-text w-100 text-left \">\n<p class=\"text-18 resp-option text-heading-default text-left \">\u53cd\u5e94\u79bb\u5b50\u523b\u8680 \uff08RIE\uff09 \u662f\u4e00\u79cd\u5148\u8fdb\u7684\u57fa\u4e8e\u7b49\u79bb\u5b50\u4f53\u7684\u523b\u8680\u6280\u672f\uff0c\u7528\u4e8e\u5fae\u7eb3\u52a0\u5de5\uff0c\u4ee5\u5b9e\u73b0\u9ad8\u7cbe\u5ea6\u3001\u5404\u5411\u5f02\u6027\u7684\u6750\u6599\u53bb\u9664\u3002VacTechniche \u7684 RIE 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\u5236\u9020\uff0c\u5177\u6709\u4ee5\u4e0b\u89c4\u683c\u7ec4\u5408\uff0c\u662f\u4e00\u79cd\u72ec\u7279\u7684\u4ea7\u54c1\u3002<\/p>\n<\/div>\n<\/div>\n<\/div>\n<div class=\"elementor-element elementor-element-eb5c6d5 elementor-widget elementor-widget-pix-text\" data-id=\"eb5c6d5\" data-element_type=\"widget\" data-widget_type=\"pix-text.default\">\n<div class=\"elementor-widget-container\">\n<div class=\"pix-el-text w-100 text-left \">\n<p>\u8154\u5ba4\u5c3a\u5bf8\uff1a<br \/>\n\u6ce8\u5c04\u6c14\u4f53\u6570\u91cf\uff1a4 MFC\uff0c\u53ef\u5728\u4e0d\u540c\u7684\u5de5\u827a\u8bbe\u8ba1\u4e2d\u53d1\u6325\u66f4\u591a\u529f\u80fd\u3002<br \/>\nAr\uff1a100 SCCM<br \/>\nN2\uff1a50 SCCM<br \/>\nO2\uff1a100 SCCM<br \/>\nSF6\uff1a50SCCM\u3002<\/p>\n<div class=\"elementor-element elementor-element-54a426e elementor-widget elementor-widget-heading\" data-id=\"54a426e\" data-element_type=\"widget\" data-widget_type=\"heading.default\">\n<div class=\"elementor-widget-container\">\n<h3 class=\"elementor-heading-title elementor-size-large\">\u66f4\u591a\u4fe1\u606f<\/h3>\n<\/div>\n<\/div>\n<div class=\"elementor-element elementor-element-b575e75 elementor-widget elementor-widget-pix-text\" data-id=\"b575e75\" data-element_type=\"widget\" data-widget_type=\"pix-text.default\">\n<div class=\"elementor-widget-container\">\n<div class=\"pix-el-text w-100 text-left \">\n<ul>\n<li>\u5177\u6709\u591a\u8fbe 40 \u4e2a\u4e0d\u540c\u5e8f\u5217\u7684\u5de5\u827a\u8bbe\u8ba1\u80fd\u529b\u3002<\/li>\n<li>\u80fd\u591f\u4fdd\u5b58 5 \u4e2a\u4e0d\u540c\u7684 Processes \u53c2\u6570\u3002<\/li>\n<li>\u9ad8\u8fbe 300W\uff0c13.56MHz 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w-100 text-left \">\n<p>&#x1f539; \u534a\u5bfc\u4f53\u5668\u4ef6\u5236\u9020<br data-start=\"1186\" data-end=\"1189\" \/>&#x1f539; MEMS\uff08\u5fae\u673a\u7535\u7cfb\u7edf\uff09\u5236\u9020<br data-start=\"1245\" data-end=\"1248\" \/>&#x1f539; \u5149\u5b50\u5b66\u548c\u5149\u7535\u5143\u4ef6\u52a0\u5de5<br data-start=\"1300\" data-end=\"1303\" data-is-only-node=\"\" \/>&#x1f539; \u4ecb\u7535\u6750\u6599\u7ed3\u6784\uff08\u4f8b\u5982 SiO\u2082\u3001Si\u2083N\u2084\uff09<br data-start=\"1357\" data-end=\"1360\" \/>&#x1f539; \u805a\u5408\u7269\u548c\u6709\u673a\u6750\u6599\u56fe\u6848\u5316<\/p>\n<\/div>\n<div class=\"elementor-element elementor-element-eec361b elementor-widget elementor-widget-pix-highlighted-text\" data-id=\"eec361b\" data-element_type=\"widget\" data-widget_type=\"pix-highlighted-text.default\">\n<div class=\"elementor-widget-container\">\n<div id=\"highlighted-text-143886783\" class=\"pix-highlighted-element text-left \">\n<h3 class=\"pix-highlighted-items \" data-anim-type=\"\" data-anim-delay=\"\"><span id=\"highlighted-text-143886783-0\" class=\" elementor-repeater-item-d86810e\"><span class=\"pix-highlighted-text pix-highlight-item font-weight-normal  font-weight-bold heading-font text-black\">\u53cd\u5e94\u79bb\u5b50\u523b\u8680\uff1a<\/span><\/span><span id=\"highlighted-text-143886783-1\" class=\" elementor-repeater-item-daf9d76\"><span class=\"pix-highlighted-text pix-highlight-item font-weight-normal  heading-font text-body-default\">VacTechniche RIE \u7cfb\u7edf\u7684 RIE \u4e3b\u8981\u7279\u70b9<\/span><\/span><\/h3>\n<\/div>\n<\/div>\n<\/div>\n<div class=\"elementor-element elementor-element-1b5f3b4 elementor-widget__width-initial elementor-widget elementor-widget-pix-text\" data-id=\"1b5f3b4\" data-element_type=\"widget\" data-widget_type=\"pix-text.default\">\n<div class=\"elementor-widget-container\">\n<div class=\"pix-el-text w-100 text-left \">\n<p>&#x2714;\u00a0<strong data-start=\"495\" data-end=\"535\">\u9ad8\u7cbe\u5ea6\u548c\u5404\u5411\u5f02\u6027\u8680\u523b<\/strong>\u00a0\u2013 \u786e\u4fdd\u5782\u76f4\u4fa7\u58c1\u548c\u6700\u5c0f\u7684\u5e95\u5207\uff0c\u8fd9\u5bf9\u4e8e\u5148\u8fdb\u7684\u534a\u5bfc\u4f53\u5e94\u7528\u81f3\u5173\u91cd\u8981\u3002<br data-start=\"640\" data-end=\"643\" \/>&#x2714;\u00a0<strong data-start=\"645\" data-end=\"673\">\u4f18\u5316\u7684\u7b49\u79bb\u5b50\u4f53\u63a7\u5236<\/strong>\u00a0\u2013 \u901a\u8fc7\u5bf9\u8680\u523b\u901f\u7387\u548c\u9009\u62e9\u6027\u7684\u7cbe\u7ec6\u63a7\u5236\uff0c\u63d0\u4f9b\u5747\u5300\u7684\u8680\u523b\u3002<br data-start=\"750\" data-end=\"753\" \/>&#x2714;\u00a0<strong data-start=\"755\" data-end=\"786\">\u591a\u79cd\u5de5\u827a\u6c14\u4f53<\/strong>\u00a0\u2013 \u4e0e CF\u2084\u3001SF\u2086\u3001O\u2082 \u548c\u5176\u4ed6\u53cd\u5e94\u6c14\u4f53\u517c\u5bb9\uff0c\u7528\u4e8e\u5b9a\u5236\u8680\u523b\u89e3\u51b3\u65b9\u6848\u3002<br data-start=\"875\" data-end=\"878\" \/>&#x2714;\u00a0<strong 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\">\u51ed\u501f\u5bf9\u521b\u65b0\u548c\u8d28\u91cf\u7684\u575a\u5b9a\u627f\u8bfa\uff0cVacTechniche \u4e3a\u6700\u82db\u523b\u7684\u5e94\u7528\u63d0\u4f9b\u91cf\u8eab\u5b9a\u5236\u7684\u5c16\u7aef RIE \u89e3\u51b3\u65b9\u6848\u3002\u6211\u4eec\u7684\u7cfb\u7edf\u7ecf\u8fc7\u7cbe\u5fc3\u8bbe\u8ba1\uff0c\u53ef\u5b9e\u73b0\u53ef\u9760\u6027\u3001\u53ef\u91cd\u590d\u6027\u548c\u5de5\u827a\u7075\u6d3b\u6027\uff0c\u786e\u4fdd\u4e3a\u7814\u7a76\u548c\u5de5\u4e1a\u89c4\u6a21\u751f\u4ea7\u63d0\u4f9b\u5353\u8d8a\u7684\u7ed3\u679c\u3002<\/p>\n<\/div>\n<\/div>\n<\/div>\n<\/div>\n<\/div>\n<\/div>\n<\/div>\n<\/div>\n<br><div class=\"tagcloud\"><a href=\"https:\/\/www.bihec.com\/vactechniche\/tag\/vac-techniche\/\" class=\"tag-cloud-link tag-link-0 tag-link-position-1\" style=\"font-size: 22pt;\" aria-label=\"Vac Techniche (50\u4e2a\u9879\u76ee)\">Vac Techniche<\/a>\n<a href=\"https:\/\/www.bihec.com\/vactechniche\/tag\/%e5%88%bb%e8%9a%80\/\" class=\"tag-cloud-link tag-link-1 tag-link-position-2\" style=\"font-size: 8pt;\" aria-label=\"\u523b\u8680 (1\u4e2a\u9879\u76ee)\">\u523b\u8680<\/a>\n<a href=\"https:\/\/www.bihec.com\/vactechniche\/tag\/%e5%8f%8d%e5%ba%94%e7%a6%bb%e5%ad%90%e5%88%bb%e8%9a%80\/\" class=\"tag-cloud-link tag-link-2 tag-link-position-3\" style=\"font-size: 8pt;\" aria-label=\"\u53cd\u5e94\u79bb\u5b50\u523b\u8680 (1\u4e2a\u9879\u76ee)\">\u53cd\u5e94\u79bb\u5b50\u523b\u8680<\/a>\n<a href=\"https:\/\/www.bihec.com\/vactechniche\/tag\/%e8%8b%b1%e5%9b%bdvactechniche\/\" class=\"tag-cloud-link tag-link-3 tag-link-position-4\" style=\"font-size: 21.801418439716pt;\" aria-label=\"\u82f1\u56fdVacTechniche (48\u4e2a\u9879\u76ee)\">\u82f1\u56fdVacTechniche<\/a><\/div>","protected":false},"excerpt":{"rendered":"<p>\u53cd\u5e94\u79bb\u5b50\u523b\u8680\uff1aRIE \u53cd\u5e94\u79bb\u5b50\u523b\u8680 \uff08RIE\uff09VacTechniche \u7684\u8bbe\u5907 \u53cd\u5e94\u79bb\u5b50\u523b\u8680 \uff08RIE\uff09 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