{"id":205,"date":"2024-07-09T15:33:22","date_gmt":"2024-07-09T07:33:22","guid":{"rendered":"https:\/\/www.bihec.com\/vactechniche\/?p=205"},"modified":"2024-07-09T15:33:22","modified_gmt":"2024-07-09T07:33:22","slug":"%e6%94%be%e6%b0%94%e7%9c%9f%e7%a9%ba%e5%ae%a4%e5%86%85%e7%9a%84%e6%94%be%e6%b0%94%e6%98%af%e4%bb%80%e4%b9%88%ef%bc%9f","status":"publish","type":"post","link":"https:\/\/www.bihec.com\/vactechniche\/%e6%94%be%e6%b0%94%e7%9c%9f%e7%a9%ba%e5%ae%a4%e5%86%85%e7%9a%84%e6%94%be%e6%b0%94%e6%98%af%e4%bb%80%e4%b9%88%ef%bc%9f\/","title":{"rendered":"\u653e\u6c14|\u771f\u7a7a\u5ba4\u5185\u7684\u653e\u6c14\u662f\u4ec0\u4e48\uff1f"},"content":{"rendered":"

\u653e\u6c14 | \u771f\u7a7a<\/a>\u5ba4\u5185\u7684\u653e\u6c14\u662f\u4ec0\u4e48\uff1f<\/p>\n

\"\"<\/p>\n

\u771f\u7a7a\u6c89\u79ef<\/a>\u4e2d\u7684\u653e\u6c14
\n\u653e\u6c14\u88ab\u5b9a\u4e49\u4e3a\u91ca\u653e\u4e4b\u524d\u88ab\u6355\u83b7\u3001\u6eb6\u89e3\u3001\u5438\u6536\u6216\u51bb\u7ed3\u5728\u6750\u6599\u4e2d\u7684\u6c14\u4f53\uff0c\u8fd9\u5bf9\u9ad8\u771f\u7a7a<\/a>\u6c89\u79ef\u6765\u8bf4\u662f\u4e00\u4e2a\u6311\u6218\u3002\u5728\u70ed\u529b\u5b66\u4e2d\uff0c\u6c14\u4f53\u5206\u5b50\u603b\u662f\u503e\u5411\u4e8e\u4ece\u538b\u529b\u8f83\u9ad8\u7684\u5730\u65b9\u79fb\u52a8\u5230\u538b\u529b\u8f83\u4f4e\u7684\u5730\u65b9\uff0c\u56e0\u6b64\u964d\u4f4e\u8154\u5ba4\u4e2d\u7684\u538b\u529b\u6c34\u5e73\u4f1a\u9762\u4e34\u8bf8\u5982\u8fdb\u5165\u8154\u5ba4\u7684\u6c14\u4f53\u8d1f\u8f7d\u7b49\u969c\u788d\u3002<\/p>\n

\u5728\u9ad8\u771f\u7a7a\u7cfb\u7edf\u4e2d\uff0c\u771f\u7a7a\u8fc7\u7a0b\u4e2d\u6700\u91cd\u8981\u7684\u6c14\u4f53\u8d1f\u8f7d\u6e90\u662f\u4ece\u771f\u7a7a\u5ba4\u4e2d\u7269\u4f53\u8868\u9762\u6392\u51fa\u7684\u6c14\u4f53\uff0c\u79f0\u4e3a\u653e\u6c14\u3002
\n\u4e3a\u4e86\u51cf\u5c11\u8868\u9762\u539f\u5b50\u7684\u4e0d\u5b8c\u5168\u7ed3\u5408\uff0c\u8868\u9762\u662f\u5438\u9644\u5728\u771f\u7a7a\u4e2d\u65f6\u4ece\u8868\u9762\u91ca\u653e\u7684\u6c14\u4f53\u548c\u84b8\u6c7d\u7684\u6d3b\u6027\u4f4d\u70b9\u3002\u8fd9\u610f\u5473\u7740\uff0c\u65e0\u8bba\u6750\u6599\u7c7b\u578b\u5982\u4f55\uff0c\u6240\u6709\u8868\u9762\u90fd\u4f1a\u653e\u6c14\u3002<\/p>\n

\u771f\u7a7a\u6c89\u79ef\u662f\u5236\u5907\u9ad8\u8d28\u91cf\u8584\u819c\u7684\u5173\u952e\u56e0\u7d20\uff0c\u5176\u4e2d\u6c89\u79ef\u5ba4\u7684\u538b\u529b\u8fdc\u4f4e\u4e8e\u5927\u6c14\u538b\u3002\u56e0\u6b64\uff0c\u9897\u7c92\u79bb\u5f00\u9776\u5411\u57fa\u5e95\u7684\u5e73\u5747\u81ea\u7531\u7a0b\u589e\u52a0\uff0c\u8fd9\u4f7f\u5f97\u8584\u819c\u2014\u2014\u4e00\u4e2a\u51e0\u7eb3\u7c73\u5230\u51e0\u5fae\u7c73\u539a\u5ea6\u7684\u5c42\u2014\u2014\u7684\u5f62\u6210\u6210\u4e3a\u53ef\u80fd\u3002
\n\u8584\u819c\u7684\u72ec\u7279\u6027\u80fd\u51fa\u73b0\u5728\u5149\u5b66\u3001\u7535\u5b66\u3001\u4ecb\u7535\u5e94\u7528\u7b49\u9886\u57df\uff0c\u5e76\u4e14\u5bf9\u6742\u8d28\u7684\u5b58\u5728\u9ad8\u5ea6\u654f\u611f\uff0c\u8fd9\u53ef\u80fd\u4f1a\u4f7f\u5176\u6027\u80fd\u6076\u5316\u3002\u5728\u9ad8\u771f\u7a7a\u7cfb\u7edf\u4e2d\uff0c\u4e0d\u5e0c\u671b\u7684\u9897\u7c92\u5728\u8154\u5ba4\u5185\u51cf\u5c11\uff0c\u4ece\u800c\u4ea7\u751f\u66f4\u5747\u5300\u3001\u66f4\u7eaf\u51c0\u7684\u8584\u819c\uff1b\u7136\u800c\uff0c\u8fdb\u5165\u8154\u5ba4\u7684\u6c14\u4f53\u8d1f\u8f7d\u91cf\u4f1a\u5f71\u54cd\u6cf5\u9001\u901f\u5ea6\u3001\u6cf5\u9001\u65f6\u95f4\u548c\u6700\u4f4e\u53ef\u8fbe\u538b\u529b[1\uff0c2]\u3002<\/p>\n

\u653e\u6c14\u6e90
\n\u653e\u6c14\u73b0\u8c61\u7684\u56db\u4e2a\u4e3b\u8981\u6765\u6e90\u662f\uff1a
\n\u84b8\u53d1<\/a>\uff1a\u7269\u8d28\u5206\u5b50\u4ece\u5176\u8868\u9762\u91ca\u653e\u51fa\u6765
\n\u89e3\u5438\uff1a\u5df2\u7ecf\u5438\u9644\u5728\u7269\u8d28\u8868\u9762\u7684\u6c14\u4f53\u5206\u5b50\u7684\u91ca\u653e\u3002\u8fd9\u4e2a\u8fc7\u7a0b\u53ef\u80fd\u662f\u7531\u4e8e\u70ed\u3001\u7535\u6216\u5149\u523a\u6fc0\u800c\u53d1\u751f\u7684\u3002<\/p>\n

\u6269\u6563\uff1a\u6c14\u4f53\u5206\u5b50\u4ece\u5927\u91cf\u6750\u6599\u4e2d\u91ca\u653e\u51fa\u6765\u3002\u8fd9\u4e9b\u5206\u5b50\u5728\u5236\u9020\u8fc7\u7a0b\u4e2d\u6216\u5f53\u6750\u6599\u66b4\u9732\u4e8e\u7a7a\u6c14\u4e2d\u65f6\u6eb6\u89e3\u5728\u6750\u6599\u7684\u4e3b\u4f53\u4e2d\uff0c\u5f53\u6750\u6599\u5904\u4e8e\u4f4e\u538b\u73af\u5883\uff08\u5982\u771f\u7a7a\u5ba4\uff09\u4e2d\u65f6\u5230\u8fbe\u6750\u6599\u7684\u8868\u9762\u5e76\u4ece\u8868\u9762\u91ca\u653e\u3002
\n\u6e17\u900f\uff1a\u7a7a\u6c14\u539f\u5b50\u4ece\u771f\u7a7a\u5ba4\u8fdb\u5165\u771f\u7a7a\u5ba4\u3002\u5f53\u771f\u7a7a\u5ba4\u5468\u56f4\u7684\u6c14\u4f53\u539f\u5b50\u7a7f\u900f\u771f\u7a7a\u5ba4\u7684\u5b9e\u5fc3\u58c1\u8fdb\u5165\u771f\u7a7a\u5ba4\u65f6\uff0c\u5c31\u4f1a\u51fa\u73b0\u8fd9\u79cd\u73b0\u8c61\u3002\u6b64\u8fc7\u7a0b\u5305\u62ec\u4e09\u4e2a\u6b65\u9aa4\u3002\u9996\u5148\uff0c\u539f\u5b50\u88ab\u5ba4\u7684\u5916\u58c1\u5438\u6536\u3002\u5728\u7b2c\u4e8c\u6b65\u9aa4\u4e2d\uff0c\u5b83\u4eec\u6269\u6563\u7a7f\u8fc7\u672c\u4f53\u6750\u6599\u5e76\u5230\u8fbe\u771f\u7a7a\u5ba4\u5185\u58c1\u7684\u8868\u9762\uff0c\u5e76\u4e14\u6700\u7ec8\u4ece\u5185\u58c1\u91ca\u653e\u5230\u771f\u7a7a\u5ba4\u4e2d\u3002\u8fd9\u56db\u4e2a\u8fc7\u7a0b\u5982\u56fe1\u6240\u793a\u3002<\/p>\n

\"\"<\/p>\n

 <\/p>\n

\u6392\u6c14\u6750\u6599
\n\u6392\u6c14\u7387\u662f\u6307\u5728\u5355\u4f4d\u65f6\u95f4\u5185\u6bcf\u5355\u4f4d\u9762\u79ef\u91ca\u653e\u7684\u6c14\u4f53\u91cf\uff0c\u4e0d\u540c\u6750\u6599\u7684\u6392\u6c14\u7387\u53ef\u80fd\u76f8\u5dee9\u4e2a\u6570\u91cf\u7ea7\u3002\u56e0\u6b64\uff0c\u53ea\u6709\u6750\u6599\u7684\u653e\u6c14\u901f\u7387\u4e0d\u8d85\u8fc7\u5141\u8bb8\u7684\u6781\u9650\u65f6\uff0c\u624d\u5141\u8bb8\u5728\u9ad8\u771f\u7a7a\u73af\u5883\u4e2d\u5b58\u5728\u3002\u4e00\u4e9b\u4e0d\u5e94\u5728\u771f\u7a7a\u73af\u5883\u4e2d\u4f7f\u7528\u7684\u6750\u6599\u5305\u62ec\uff1a\u6db2\u4f53\u3001\u5851\u6599\u3001\u5f39\u6027\u4f53\u3001\u7c98\u5408\u5242\u3001\u591a\u5b54\u9676\u74f7\u4ee5\u53ca\u4e0e\u6d3b\u4f53\u6709\u5173\u7684\u6548\u679c\uff0c\u5982\u5934\u53d1\u3001\u6307\u7532\u3001\u76ae\u80a4\u7ec6\u80de\u3001\u6307\u7eb9\u7b49\u3002\u6392\u6c14\u6d41\u901f\u7684\u8fd1\u4f3c\u503c\u7531\u65b9\u7a0b\uff081\uff09\u7ed9\u51fa\uff1a<\/p>\n

Q \u0307= \u2211\u2009a1h\u2219A\u00a0<\/sub>\/ (t\u20441h)^\u03b1\u00a0 \u00a0 \u00a0 \u00a0 \u00a0 Equation (1)<\/p>\n

\u5176\u4e2dA\u662f\u51e0\u4f55\u8868\u9762\u9879\uff0ca1h\u662f1\u5c0f\u65f6\u540e\u7684\u653e\u6c14\u901f\u7387\uff0c\u03b1\u662f\u8870\u53d8\u5e38\u6570\uff0c\u603b\u548c\u662f\u6240\u6709\u8868\u9762\u7684\u8d21\u732e\u3002\u8870\u53d8\u5e38\u6570\u57280.2-1.2\u7684\u8303\u56f4\u5185\uff0c\u5305\u542b\u6709\u5173\u6750\u6599\u7c7b\u578b\u548c\u8131\u6c14\u673a\u5236\u7684\u4fe1\u606f\u3002\u51e0\u79cd\u6750\u6599\u7684\u8870\u53d8\u5e38\u6570\u5982\u88681\u6240\u793a\u3002\u4e0d\u540c\u6750\u6599\u7684\u6392\u6c14\u901f\u7387\u5982\u56fe2\u6240\u793a\u3002<\/p>\n\n\n\n\n\n\n\n\n\n
Material<\/strong><\/td>\nDecay constant (\u03b1)<\/strong><\/td>\n<\/tr>\n
Clean metal surfaces<\/strong><\/td>\n1.1-1.2<\/strong><\/td>\n<\/tr>\n
Desorption from surfaces<\/strong><\/td>\n1<\/strong><\/td>\n<\/tr>\n
Metals, glasses, and ceramics<\/strong><\/td>\n1<\/strong><\/td>\n<\/tr>\n
Polymers<\/strong><\/td>\n0.4-0.8<\/strong><\/td>\n<\/tr>\n
Highly porous surfaces<\/strong><\/td>\n0.5-0.7<\/strong><\/td>\n<\/tr>\n
Diffusion controlled outgassing from the bulk<\/strong><\/td>\n0.5<\/strong><\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n

Table 1. Decay constant of some type of materials [3].<\/p>\n

 <\/p>\n

\u51cf\u5c11\u653e\u6c14\u7684\u65b9\u6cd5\uff1a
\n\u6709\u51e0\u79cd\u65b9\u6cd5\u53ef\u4ee5\u964d\u4f4e\u771f\u7a7a\u5ba4\u4e2d\u7684\u653e\u6c14\u91cf\uff0c\u5305\u62ec\u9002\u5f53\u9009\u62e9\u6750\u6599\u3001\u5904\u7406\u548c\u6e05\u6d01\u8868\u9762\u3001\u8868\u9762\u5904\u7406\u548c\u70d8\u7119\u3002\u8fd9\u4e9b\u65b9\u6cd5\u901a\u5e38\u57fa\u4e8e\u4e24\u79cd\u65b9\u6cd5\uff1a
\n1.\u5728\u4f7f\u7528\u524d\u5c3d\u53ef\u80fd\u591a\u5730\u6682\u65f6\u523a\u6fc0\u5206\u5b50\u4ece\u8868\u9762\u89e3\u5438\uff0c
\n2.\u5728\u6574\u4e2a\u64cd\u4f5c\u8fc7\u7a0b\u4e2d\uff0c\u5728\u8868\u9762\u4e0a\u5f62\u6210\u963b\u6321\u5c42\u4ee5\u963b\u6321\u5438\u9644\u7684\u5206\u5b50\u89e3\u5438\u3002<\/p>\n

\n

Several methods to reduce outgassing are presented in Table 2.<\/p>\n<\/div>\n\n\n\n\n\n\n\n\n\n\n\n\n\n
Method<\/strong><\/td>\nMaterial<\/strong><\/td>\nEffective for<\/strong><\/td>\nNot Effective for<\/strong><\/td>\nVacuum Level<\/strong><\/td>\nTime<\/strong><\/td>\n<\/tr>\n
Wash<\/strong><\/td>\n\n
Hot water\/solvent, detergent<\/div>\n<\/td>\n
Gross\/fine contaminants<\/td>\nGrease<\/td>\nPressures >10-3<\/sup>mbar<\/td>\n< 30 min<\/td>\n<\/tr>\n
Vapor Degrease<\/strong><\/td>\nHeated solvent<\/td>\nGross\/fine contaminants, loosely bound heavy molecules<\/td>\nInaccessible areas, large parts<\/td>\nOrder of magnitude reduction in outgassing<\/td>\n< 1 hour<\/td>\n<\/tr>\n
Blowing<\/strong><\/td>\nAir, nitrogen or other dry inert gas<\/td>\nGross\/fine contaminants, loosely bound heavy molecules<\/td>\nGrease<\/td>\n<\/td>\n< 30 min<\/td>\n<\/tr>\n
Chemical Treatment<\/strong><\/td>\nH2<\/sub>O, HCl, HNO3<\/sub>or HF<\/td>\nRough surfaces (O2<\/sub>, C, P or Cladsorption)<\/td>\n<\/td>\nOrder of magnitude reduction in outgassing rate<\/td>\n< 30 min<\/td>\n<\/tr>\n
Reactive Gas<\/strong><\/td>\nO2<\/sub>\u00a0or NO for oxidation, H2<\/sub>\u00a0or NH3<\/sub>\u00a0for reduction<\/td>\nHydrocarbons, surface reconditioning after atmospheric exposure<\/td>\nCan form unwanted oxides<\/td>\nReduction in outgassing rate by 50% up to 5 orders of magnitude<\/td>\n30 min- 2 hours<\/td>\n<\/tr>\n
Glow Discharge<\/strong><\/td>\nAr\/5-10%O2<\/sub>, Ar, O2<\/sub>, N2<\/sub>, H2<\/sub>,\u2026<\/td>\nC or O based molecules, large surface areas, reconditioning after atmospheric exposure<\/td>\nLarge components<\/td>\n13 x reduction in outgassing rate<\/td>\n~ 2 hours<\/td>\n<\/tr>\n
Passive Coating<\/strong><\/td>\nSi, TiN, BN, Al2<\/sub>O3<\/sub>,ZrO3<\/sub><\/td>\nH2<\/sub>\u00a0from metals, CO, CO2<\/sub>, H2<\/sub>O<\/td>\n<\/td>\n0.1-100 x reduction in H2<\/sub>outgassing<\/td>\nDepends on size<\/td>\n<\/tr>\n
Active Coating<\/strong><\/td>\nHf, Zr, Ti, Pd, V and combination<\/td>\nH2<\/sub>, H2<\/sub>O, CO, O2<\/sub>, N2<\/sub>, small spaces<\/td>\nHydrocarbons,
\ninert gas, continual
\noperation (needs
\nre-activation and
\nreplacement)<\/td>\n		Outgassing reduced to <10\u221213<\/sup>\u00a0with no bake<\/td>\nDepends on size<\/td>\n<\/tr>\n
Vacuum Bake<\/strong><\/td>\n<\/td>\nMetals, UHV, H2<\/sub>O<\/td>\nTemperature sensitive components<\/td>\nReduces outgassing of H2<\/sub>to<10\u221214<\/sup><\/td>\n2-400 hours<\/td>\n<\/tr>\n
Air Bake<\/strong><\/td>\nAir<\/td>\nStainless steel,
\naluminum,
\nH2<\/sub>, CO, CO2<\/sub>, CH4<\/sub><\/td>\n		Plastic, cadmium plating, temperature sensitive components<\/td>\nReduces outgassing of H2<\/sub>to<10\u221214<\/sup><\/td>\n2-400 hours<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n

Table 2.\u00a0Methods of reducing outgassing [3].<\/p>\n

 <\/p>\n

\u771f\u7a7a\u6392\u6c14\u4e0e\u6cc4\u6f0f
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References<\/strong><\/h3>\n

Read the following article for more on outgassing topic:<\/p>\n