美国Thermionics RCL Series 3 kW Multiple Crucible Linear e-Gun™ 3kW线性多坩埚镀膜电子枪

Thermionics研究能力系列,3 kW多坩埚线性电子枪,提供增强的光束稳定性和高效的XY扫描,具有完整的坩埚覆盖范围,并可通过自动分度器进行自动定位,单独出售。

特性
真正的XY扫掠,完全覆盖坩埚
扫频线圈随电源一起提供
增强光束准直
插入式发射器模块
增强的高稳定性冷却
交叉污染屏蔽
坚固的设计
可选自动索引器

Specifications

Operating Pressure Below 5 x 10-5 Torr is desirable for best operation
Beam Voltage 4,000 VDC
Beam Current 0–750 mA
continuously variable
Maximum Power 3 kW
Cooling Water 1.5 gpm
Pressure Differential 25 psi minimum
Maximum Bakeout
Temperature
230°C (446°F)
Crucible Volume 2.24 cc x 3, 4 or 5 crucibles

Ordering Information

Description Model No.
Multiple crucible 3 kW e-Gun source with sweep coils, linear 3-position RCL0303
Multiple crucible 3 kW e-Gun source with sweep coils, linear 4-position RCL0304
Multiple crucible 3 kW e-Gun source with sweep coils, linear 5-position RCL0305

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