Thermionics研究能力系列,3 kW多坩埚线性电子枪,提供增强的光束稳定性和高效的XY扫描,具有完整的坩埚覆盖范围,并可通过自动分度器进行自动定位,单独出售。
特性
真正的XY扫掠,完全覆盖坩埚
扫频线圈随电源一起提供
增强光束准直
插入式发射器模块
增强的高稳定性冷却
交叉污染屏蔽
坚固的设计
可选自动索引器
Specifications
Operating Pressure | Below 5 x 10-5 Torr is desirable for best operation |
Beam Voltage | 4,000 VDC |
Beam Current | 0–750 mA continuously variable |
Maximum Power | 3 kW |
Cooling Water | 1.5 gpm |
Pressure Differential | 25 psi minimum |
Maximum Bakeout Temperature |
230°C (446°F) |
Crucible Volume | 2.24 cc x 3, 4 or 5 crucibles |
Ordering Information
Description | Model No. |
---|---|
Multiple crucible 3 kW e-Gun source with sweep coils, linear 3-position | RCL0303 |
Multiple crucible 3 kW e-Gun source with sweep coils, linear 4-position | RCL0304 |
Multiple crucible 3 kW e-Gun source with sweep coils, linear 5-position | RCL0305 |