Evaporation Source Series: HCR Rotary e-Gun™
The HCR series Rotary e-Gun™ is available in 3 to 8 crucible versions allowing sequential deposition of up to 8 plus materials. Standard mounting is on a 12″ O.D. CF flange and includes auto indexer and all mechanical and electrical connections.
特性
可提供3至8个坩埚
270°光束偏转
多坩埚，旋转设计
可互换坩埚组件
长寿命发射器组件
易于更换灯丝
永磁梁定位
整体式扫掠线圈
提供底部或侧面驱动
Specifications
| Feature | Specifications |
| Maximum Power | 10 kW |
| Emission Voltage | -6 to -10 kV |
| Emission Current | 0 to 1 A |
| Filament | 700 W |
| E-Beam Deflection | 270° |
| Beam Spot Size | .25″ diameter, tight beam |
| Evaporation Rate | 1 gram/min @ 10 kW 36,000 Å/min Al @ 10″ (250 mm) source-to-substrate distance |
| X and Y Sweep | Longitudinal and lateral control up to 200 Hz when operated with Thermionics sweep controller |
| Water | 3 gpm, 20°C, 50 psi pressure differential |
| Crucible Material | OFE copper |
| Bakeout Temperature | 120°C (250°F) |
安装配置
每个e-Gun™都有三种标准安装配置：
e-Gun™安装在PyraFlat或ConFlat金属密封型法兰上，该法兰使用标准OFE铜垫片
e-Gun™配备直径为1英寸的螺栓式安装座，通过直径为1”的孔安装，并由压缩O型圈密封
e-Gun™单独使用，无安装法兰
请在下单时指定安装配置；成本可能不包括螺栓式或法兰式安装。
