{"id":519,"date":"2023-11-26T17:50:29","date_gmt":"2023-11-26T09:50:29","guid":{"rendered":"https:\/\/www.bihec.com\/thermionics\/?p=519"},"modified":"2023-11-26T17:50:29","modified_gmt":"2023-11-26T09:50:29","slug":"rcr-series-3-kw-multiple-crucible-rotary-e-guns-rcr%e7%b3%bb%e5%88%973kw%e6%97%8b%e8%bd%ac%e7%94%b5%e5%ad%90%e6%9e%aa-%e5%a4%9a%e5%9d%a9%e5%9f%9a%e9%95%80%e8%86%9c%e7%94%b5%e5%ad%90%e6%9e%aa-8","status":"publish","type":"post","link":"https:\/\/www.bihec.com\/thermionics\/rcr-series-3-kw-multiple-crucible-rotary-e-guns-rcr%e7%b3%bb%e5%88%973kw%e6%97%8b%e8%bd%ac%e7%94%b5%e5%ad%90%e6%9e%aa-%e5%a4%9a%e5%9d%a9%e5%9f%9a%e9%95%80%e8%86%9c%e7%94%b5%e5%ad%90%e6%9e%aa-8\/","title":{"rendered":"RCR Series 3 kW Multiple Crucible Rotary e-Guns&#x2122; RCR\u7cfb\u52173kW\u65cb\u8f6c\u7535\u5b50\u67aa \u591a\u5769\u57da\u9540\u819c\u7535\u5b50\u67aa"},"content":{"rendered":"<p><a href=\"https:\/\/www.bihec.com\/thermionics\/tag\/rcr\/\" title=\"View all posts in RCR\" target=\"_blank\">RCR<\/a> Series <a href=\"https:\/\/www.bihec.com\/thermionics\/tag\/3-kw\/\" title=\"View all posts in 3 kW\" target=\"_blank\">3 kW<\/a> Multiple Crucible Rotary <a href=\"https:\/\/www.bihec.com\/thermionics\/tag\/e-guns\/\" title=\"View all posts in e-Guns\" target=\"_blank\">e-Guns<\/a>&#x2122; RCR\u7cfb\u52173kW<a href=\"https:\/\/www.bihec.com\/thermionics\/tag\/%e6%97%8b%e8%bd%ac%e7%94%b5%e5%ad%90%e6%9e%aa\/\" title=\"View all posts in \u65cb\u8f6c\u7535\u5b50\u67aa\" target=\"_blank\">\u65cb\u8f6c\u7535\u5b50\u67aa<\/a> <a href=\"https:\/\/www.bihec.com\/thermionics\/tag\/%e5%a4%9a%e5%9d%a9%e5%9f%9a\/\" title=\"View all posts in \u591a\u5769\u57da\" target=\"_blank\">\u591a\u5769\u57da<\/a><\/p>\n<p><img decoding=\"async\" loading=\"lazy\" class=\"alignnone size-medium wp-image-125\" src=\"https:\/\/www.bihec.com\/thermionics\/wp-content\/uploads\/sites\/11\/2019\/12\/1-300x216.jpg\" alt=\"\" width=\"300\" height=\"216\" srcset=\"https:\/\/www.bihec.com\/thermionics\/wp-content\/uploads\/sites\/11\/2019\/12\/1-300x216.jpg 300w, https:\/\/www.bihec.com\/thermionics\/wp-content\/uploads\/sites\/11\/2019\/12\/1.jpg 331w\" sizes=\"(max-width: 300px) 100vw, 300px\" \/><\/p>\n<div class=\"fl-module fl-module-callout fl-node-59d41468d0c6d\" data-node=\"59d41468d0c6d\">\n<div class=\"fl-module-content fl-node-content\">\n<div class=\"fl-callout fl-callout-left fl-callout-has-photo fl-callout-photo-right\">\n<div class=\"fl-callout-content\">\n<h3 class=\"fl-callout-title\"><span class=\"fl-callout-title-text\">RCR Series 3 kW Multiple Crucible Rotary e-Guns&#x2122;<\/span><\/h3>\n<div class=\"fl-callout-text-wrap\">\n<div class=\"fl-callout-text\">\n<div>\n<p>The new Thermionics research capacity series, 3 kW multiple-crucible rotary e-Guns&#x2122;, provides enhanced beam stability and efficient XY sweep with full crucible coverage with automatic positioning available with the auto-indexer, sold separately.<\/p>\n<\/div>\n<\/div>\n<\/div>\n<\/div>\n<\/div>\n<\/div>\n<\/div>\n<div class=\"fl-module fl-module-rich-text fl-node-5a0ce05cf050a\" data-node=\"5a0ce05cf050a\">\n<div class=\"fl-module-content fl-node-content\">\n<div class=\"fl-rich-text\">\n<p><strong>Features<\/strong><\/p>\n<div>\n<ul>\n<li>True XY sweep with full crucible coverage<\/li>\n<li>Sweep coils included with source<\/li>\n<li>Enhanced beam collimation<\/li>\n<li>Plug-in emitter module<\/li>\n<li>Enhanced high-stability cooling<\/li>\n<li>Cross-contamination shielding<\/li>\n<li>Rugged design<\/li>\n<li>Optional auto-indexer<\/li>\n<\/ul>\n<\/div>\n<div>\n<p>\u00a0The operating principle of the multiple crucible e-Gun is identical to the single crucible source with the following advantages:<\/p>\n<ul>\n<li>Large supply of evaporant\u2014When every crucible is filled with the same source material, an increased volume of evaporant can be evaporated in a single vacuum cycle.<\/li>\n<li>Deposition of up to eight different materials in one vacuum cycle\u2014A different material can be put in each crucible and deposited in any sequence during a single vacuum cycle. The deposition rates are the same as those of the single crucible model. Only one crucible is heated at a time. The single filament remains stationary and the crucible head is indexed into position by the drive handle. Therefore, the evaporation always originates from exactly the same position in the vacuum chamber. The inactive crucibles are shielded from the heated crucibles by the magnetic pole pieces, thereby eliminating contamination between crucibles.<\/li>\n<\/ul>\n<p><strong>High Vacuum Compatible<\/strong><\/p>\n<p>Metal and elastomer seals, measured base pressure: 2 x 10<sup>-9<\/sup>\u00a0Torr.<\/p>\n<p><strong>Interchangeable Crucibles<\/strong><\/p>\n<p>The main crucible wheel can be removed from the top of the source without total source disassembly. This flexibility allows field upgrades.<\/p>\n<p><strong>Specials<\/strong><\/p>\n<p>All multiple crucible e-Guns can be mounted on larger diameter ConFlat or rectangular PyraFlat flanges, single or back-to-back.<\/p>\n<div>\n<p><strong>Specifications<\/strong><\/p>\n<table border=\"2\" cellspacing=\"6\" align=\"center\">\n<tbody>\n<tr>\n<td>Operating Pressure<\/td>\n<td>Below 5 x 10<sup>-5<\/sup>\u00a0Torr is desirable for best operation<\/td>\n<\/tr>\n<tr>\n<td>Beam Voltage<\/td>\n<td><a href=\"https:\/\/www.bihec.com\/thermionics\/tag\/4\/\" title=\"View all posts in 4\" target=\"_blank\">4<\/a>,000 V<\/td>\n<\/tr>\n<tr>\n<td>Beam Current<\/td>\n<td>0\u2013750 mA continuously variable<\/td>\n<\/tr>\n<tr>\n<td>Maximum Power<\/td>\n<td>3,000 W<\/td>\n<\/tr>\n<tr>\n<td>Cooling Water<\/td>\n<td>1.5 gpm<\/td>\n<\/tr>\n<tr>\n<td>Maximum Bakeout Temperature<\/td>\n<td>120\u00b0C (150\u00b0F)<\/td>\n<\/tr>\n<tr>\n<td>Crucible Volume<\/td>\n<td>2.24 cc x 4, 6, or 8 crucibles<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<\/div>\n<\/div>\n<\/div>\n<\/div>\n<\/div>\n<br><div class=\"tagcloud\"><a href=\"https:\/\/www.bihec.com\/thermionics\/tag\/3kw%e7%94%b5%e5%ad%90%e6%9e%aa\/\" class=\"tag-cloud-link tag-link-0 tag-link-position-1\" style=\"font-size: 11.684210526316pt;\" aria-label=\"3kW\u7535\u5b50\u67aa (24\u4e2a\u9879\u76ee)\">3kW\u7535\u5b50\u67aa<\/a>\n<a href=\"https:\/\/www.bihec.com\/thermionics\/tag\/mbe\/\" class=\"tag-cloud-link tag-link-1 tag-link-position-2\" style=\"font-size: 8pt;\" aria-label=\"MBE (13\u4e2a\u9879\u76ee)\">MBE<\/a>\n<a href=\"https:\/\/www.bihec.com\/thermionics\/tag\/thermionics\/\" class=\"tag-cloud-link tag-link-2 tag-link-position-3\" style=\"font-size: 22pt;\" aria-label=\"thermionics (125\u4e2a\u9879\u76ee)\">thermionics<\/a>\n<a href=\"https:\/\/www.bihec.com\/thermionics\/tag\/%e5%a4%9a%e5%9d%a9%e5%9f%9a%e6%97%8b%e8%bd%ac%e7%94%b5%e5%ad%90%e6%9e%aa\/\" class=\"tag-cloud-link tag-link-3 tag-link-position-4\" style=\"font-size: 9.1789473684211pt;\" aria-label=\"\u591a\u5769\u57da\u65cb\u8f6c\u7535\u5b50\u67aa (16\u4e2a\u9879\u76ee)\">\u591a\u5769\u57da\u65cb\u8f6c\u7535\u5b50\u67aa<\/a>\n<a href=\"https:\/\/www.bihec.com\/thermionics\/tag\/%e5%a4%9a%e5%9d%a9%e5%9f%9a%e7%94%b5%e5%ad%90%e6%9e%aa\/\" class=\"tag-cloud-link tag-link-4 tag-link-position-5\" style=\"font-size: 13.452631578947pt;\" aria-label=\"\u591a\u5769\u57da\u7535\u5b50\u67aa (32\u4e2a\u9879\u76ee)\">\u591a\u5769\u57da\u7535\u5b50\u67aa<\/a>\n<a href=\"https:\/\/www.bihec.com\/thermionics\/tag\/%e6%97%8b%e8%bd%ac%e7%94%b5%e5%ad%90%e6%9e%aa\/\" class=\"tag-cloud-link tag-link-5 tag-link-position-6\" style=\"font-size: 8.7368421052632pt;\" aria-label=\"\u65cb\u8f6c\u7535\u5b50\u67aa (15\u4e2a\u9879\u76ee)\">\u65cb\u8f6c\u7535\u5b50\u67aa<\/a>\n<a href=\"https:\/\/www.bihec.com\/thermionics\/tag\/%e7%9c%9f%e7%a9%ba%e9%95%80%e8%86%9c\/\" class=\"tag-cloud-link tag-link-6 tag-link-position-7\" style=\"font-size: 13.6pt;\" aria-label=\"\u771f\u7a7a\u9540\u819c (33\u4e2a\u9879\u76ee)\">\u771f\u7a7a\u9540\u819c<\/a><\/div>","protected":false},"excerpt":{"rendered":"<p>RCR Series 3 kW Multiple Crucible Rotary e-Guns&#x2122; RCR\u7cfb\u52173kW\u65cb\u8f6c\u7535\u5b50\u67aa \u591a\u5769\u57da RCR Series 3 kW  <\/p>\n","protected":false},"author":19,"featured_media":125,"comment_status":"open","ping_status":"open","sticky":false,"template":"","format":"standard","meta":{"_vp_format_video_url":"","_vp_image_focal_point":[]},"categories":[7],"tags":[44,50,17,49,48,47,39],"yoast_head":"<!-- This site is optimized with the Yoast SEO plugin v17.5 - https:\/\/yoast.com\/wordpress\/plugins\/seo\/ -->\n<title>RCR Series 3 kW Multiple Crucible Rotary e-Guns&#x2122; RCR\u7cfb\u52173kW\u65cb\u8f6c\u7535\u5b50\u67aa \u591a\u5769\u57da\u9540\u819c\u7535\u5b50\u67aa - Thermionics \u9ad8\u771f\u7a7a\u6cf5 \u673a\u68b0\u81c2 \u673a\u68b0\u5f15\u7ebf \u7535\u5b50\u67aa \u771f\u7a7a\u9540\u819c\u7cfb\u7edf<\/title>\n<meta name=\"robots\" content=\"index, follow, max-snippet:-1, max-image-preview:large, max-video-preview:-1\" \/>\n<link rel=\"canonical\" href=\"https:\/\/www.bihec.com\/thermionics\/rcr-series-3-kw-multiple-crucible-rotary-e-guns-rcr\u7cfb\u52173kw\u65cb\u8f6c\u7535\u5b50\u67aa-\u591a\u5769\u57da\u9540\u819c\u7535\u5b50\u67aa-8\/\" \/>\n<meta property=\"og:locale\" content=\"zh_CN\" \/>\n<meta property=\"og:type\" content=\"article\" \/>\n<meta property=\"og:title\" content=\"RCR Series 3 kW Multiple Crucible Rotary e-Guns&#x2122; 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