Thermionics RNN™-150 Series 真空压差密封回转角度盘 真空压差密封回转样品台
咨询热线 15821107090
Differentially pumped rotary seals (RNNs) provide 360° of continuous rotary freedom through the vacuum wall of a UHV system.
RNN™ Series Differentially Pumped Rotary Seal
RNN™系列差动泵旋转密封
差动泵旋转密封（RNNs）可通过超高真空（UHV）系统的真空壁提供 360° 的连续旋转自由度。RNN 有两级差动泵，通过浸渍石墨的膨胀聚四氟乙烯（Teflon®）密封件在特殊密封面上实现隔离。一套预加载球轴承精确控制旋转台的位置。
RNN 提供蜗轮传动微调选项，这使得角度调节更轻松、更精确。RNN 还可配备无 backlash 步进电机或同步电机驱动。
目前有内径（I.D.）达 12 英寸的 RNN 产品。更大内径的产品也已制造出来，且性能优良。
规格
▪标准内径为 1.53 英寸至 12 英寸的型号，更大尺寸可按需定制
▪可烘烤至 150°C
▪固定式和旋转式法兰，带螺纹孔
▪厚度约为两个 ConFlat 型法兰的厚度
▪两级差动抽气
▪极限压力在 10⁻¹¹ 托范围内
▪标配 0–360° 刻度及游标
RNN-400 及更大型号的典型性能规格
▪分辨率：<0.004°
▪重复性：<0.008°
▪回程间隙：<0.035°
可读性规格
▪标准刻度：1.0°
▪机械计数器：0.1°
▪达到最大分辨率需要微步进电机驱动
选项
▪精细调节蜗杆传动
▪精细调节上的数字读数，0.1° 读数，机械式，不可重置
▪可提供机械计数器选项
▪消隙步进电机驱动，每整步 0.018°（RNN-150/MS 上为 0.0225°/ 整步），带手动旋钮
▪/FA 单元可提供定制的抽气管长度和曲轴长度
有效载荷
标准最大有效载荷如下所列。更大的载荷可在特定应用场景下处理。有关定制应用，请咨询厂家。
▪有效载荷的重心位于设备极轴的 “X” 范围内，其中 X 等于 RNN 内径的 10%。
▪在水平安装的设备上，有效载荷的重心位于旋转法兰的 “Y” 距离范围内，其中 Y 为法兰内径。
▪真空中有效载荷的整体最大尺寸 “A” 为：
垂直运行：7× 法兰外径 水平运行：5× 法兰外径 倒置运行：7× 法兰外径
| Model No. | Vertical | Horizontal | Inverted |
| RNN-150 | 54 lbs | 30 lbs | 45 lbs |
| RNN-250 | 90 lbs | 38 lbs | 70 lbs |
| RNN-400 | 144 lbs | 66 lbs | 110 lbs |
| RNN-600 | 180 lbs | 84 lbs | 140 lbs |
| RNN-800 | 200 lbs | 91 lbs | 160 lbs |
| RNN-1000 | 370 lbs | 160 lbs | 280 lbs |
| RNN-1200 | 430 lbs | 200 lbs | 350 lbs |
Table 1. RNN Series Differentially Pumped Rotary Seals
(includes a removable adjustment wrench)
| I.D. | Flange O.D. | A | B | C | D | E | F | G | H | Model No. |
| 1.53 | 2.75 | 4.50 | 2.99 | 1.0 | 3.18 | 2.75 | .49 | .13 | 60° | RNN-150 |
| 1.53 | 2.75/6 1 | 6.00 | 2.99 | 1.34 | 3.33 | 2.75 | .15 | .13 | 45° | RNN-150/6 |
| 2.53 | 4.5 | 5.75 | 3.64 | 1.36 | 3.58 | 4.50 | .49 | .03 | 45° | RNN-250 |
| 2.53 | 4.5/6 1 | 6.00 | 3.64 | 1.52 | 3.71 | 4.50 | .33 | .03 | 45° | RNN-250/6 |
| 4.03 | 6 | 7.75 | 4.57 | 1.68 | 4.34 | 6.02 | .37 | .06 | 45° | RNN-400 |
| 6.03 | 8 | 10.25 | 6.16 | 1.74 | 5.70 | 8.00 | .42 | .13 | 54° | RNN-600 |
| 8.00 | 10 | 12.05 | 7.03 | 1.94 | 6.70 | 10.00 | .42 | .13 | 45° | RNN-800 |
| 10.00 | 13.25 | 15.75 | 8.81 | 2.37 | 8.50 | 13.28 | .29 | .13 | 24° | RNN-1000 |
| 12.00 | 14 | 20.00 | – | 3.34 | – | – | – | – | – | RNN-1200 |
Dimensions in inches
Table 2. RNN/FA Differentially Pumped Rotary Seals with Fine Adjust 1
| I.D. | Flange O.D. | A | B | C | D | E | F | G | H | I | Drive Ratio | Model No. |
| 1.53 | 2.75 | 5.13 | 3.38 | 1.00 | 4.95 | 2.75 | .49 | 0.37 | 60° | 3 | 80:1 | RNN-150/FA |
| 1.53 | 2.75/6 2 | 6.00 | 3.84 | 1.34 | 5.32 | 2.75 | .15 | 0.37 | 45° | 3 | 100:1 | RNN-150/6/FA |
| 2.53 | 4.5 | 6.38 | 4.20 | 1.36 | 6.11 | 4.50 | .49 | 0.41 | 45° | 3 | 100:1 | RNN-250/FA |
| 2.53 | 4.5/6 2 | 6.38 | 4.20 | 1.52 | 6.11 | 4.50 | .33 | 0.41 | 45° | 3 | 100:1 | RNN-250/6/FA |
| 4.03 | 6 | 8.50 | 8.25 | 1.68 | 9.28 | 6.02 | .37 | 0.54 | 45° | 4 | 100:1 | RNN-400/FA |
| 6.03 | 8 | 10.25 | 8.50 | 1.74 | 9.93 | 8.00 | .42 | 1.10 | 54° | 5 | 100:1 | RNN-600/FA |
| 8.00 | 10 | 12.75 | 9.56 | 1.94 | 11.50 | 10.00 | .42 | 1.10 | 45° | 5 | 100:1 | RNN-800/FA |
| 10.00 | 13.25 | 17.00 | 11.86 | 2.37 | 17.25 | 13.28 | .29 | .91 | 24° | 7 | 100:1 | RNN-1000/FA |
| 12.00 | 14 | Consult Factory | RNN-1200/FA | |||||||||
Dimensions in inches
Table 3. RNN/MS or /MY Differentially Pumped Rotary Seals with Anti-Backlash /MS Stepping or /MY Synchronous Motor Drive 1
I.D. | Flange
O.D. | A | B | C | D | E | F | G | H | I | Drive
Ratio | Model
No. |
| 1.53 | 2.75 | 5.13 | 10.00 | 1.00 | 9.97 | 2.75 | .49 | 0.74 | 60° | 3.39 | 80:1 | RNN-150/MS or /MY |
| 1.53 | 2.75/6 2 | 5.13 | 10.00 | 1.34 | 9.97 | 2.75 | .15 | 0.74 | 45° | 3.39 | 100:1 | RNN-150/6/MS or /MY |
| 2.53 | 4.5 | 6.38 | 10.10 | 1.36 | 8.30 | 4.50 | .49 | 0.41 | 45° | 3.39 | 100:1 | RNN-250/MS or /MY |
| 2.53 | 4.5/6 2 | 6.38 | 10.10 | 1.52 | 8.30 | 4.50 | .33 | 0.41 | 45° | 3.39 | 100:1 | RNN-250/6/MS or /MY |
| 4.03 | 6 | 8.50 | 9.77 | 1.68 | 11.69 | 6.02 | .37 | 0.54 | 45° | 3.39 | 100:1 | RNN-400/MS or /MY |
| 6.03 | 8 | 10.20 | 10.13 | 1.74 | 11.69 | 8.00 | .42 | 1.10 | 54° | 3.39 | 100:1 | RNN-600/MS or /MY |
| 8.00 | 10 | 12.75 | 11.39 | 1.94 | 11.69 | 10.00 | .42 | 1.10 | 45° | 3.39 | 100:1 | RNN-800/MS or /MY |
| 10.00 | 13.25 | Consult Factory | RNN-1000/MS or /MY | |||||||||
| 12.00 | 14 | Consult Factory | RNN-1200/MS or /MY | |||||||||
| 18.00 | 24 | Consult Factory | RNN-1800/MS | |||||||||
| 24.00 | 34 | Consult Factory | RNN-2400/MS | |||||||||
Dimensions in inches
