Thermionics RNN™-1200 Series 真空压差密封回转角度盘真空压差密封回转样品台

咨询热线 15821107090

差动抽气旋转密封件（RNNs）通过超高真空（UHV）系统的真空壁提供 360° 的连续旋转自由度。

RNN™系列差动抽气旋转密封
差动抽气旋转密封（RNNs）可通过超高真空（UHV）系统的真空壁实现 360° 连续旋转自由度。RNN 具有两级差动抽气结构，通过浸渍石墨的膨胀聚四氟乙烯（Teflon®）密封件在特殊密封面上实现隔离。一组预加载滚珠轴承精确控制旋转台的位置。

RNN 可选配蜗杆传动微调功能，便于更轻松、更精确地进行角度调节。RNN 还可配备无 backlash 步进电机或同步电机驱动。

现有 RNN 的内径（I.D.）最大为 12 英寸。更大内径的产品已成功制造且性能优异。特殊应用请咨询厂家。

规格参数
▪标准内径为 1.53 英寸至 12 英寸，更大尺寸可定制
▪可烘烤至 150°C
▪固定和旋转法兰，带螺纹孔
▪厚度约为两个 ConFlat 型法兰的厚度
▪两级差动抽气
▪极限压力可达 10⁻¹¹ 托范围
▪标配 0–360° 刻度及游标

RNN-400 及更大型号的典型性能规格
▪分辨率：<0.004°
▪重复性：<0.008°
▪Backlash：<0.035°

可读性规格
▪标准刻度：1.0°
▪机械计数器：0.1°
▪需配备微步进电机驱动以实现最高分辨率

可选配置
▪微调蜗杆传动
▪微调数字读数，0.1° 机械读数，不可重置
▪可选机械计数器
▪无 backlash 步进电机驱动，每整步 0.018°（RNN-150/MS 型号为每整步 0.0225°），带手动旋钮
▪/FA 型号可定制抽气管长度和曲轴长度

负载要求
标准最大负载如下所列。特定应用中可处理更大负载。定制应用请咨询厂家。
▪负载的重心需位于设备极轴的 “X” 范围内，其中 X 等于 RNN 内径的 10%
▪水平安装设备中，负载的重心需位于旋转法兰的 “Y” 距离范围内，其中 Y 为法兰内径
▪真空外部负载的整体最大尺寸 “A” 为：
垂直操作：7× 法兰外径水平操作：5× 法兰外径倒置操作：7× 法兰外径

Model No.	Vertical	Horizontal	Inverted
RNN-150	54 lbs	30 lbs	45 lbs
RNN-250	90 lbs	38 lbs	70 lbs
RNN-400	144 lbs	66 lbs	110 lbs
RNN-600	180 lbs	84 lbs	140 lbs
RNN-800	200 lbs	91 lbs	160 lbs
RNN-1000	370 lbs	160 lbs	280 lbs
RNN-1200	430 lbs	200 lbs	350 lbs

Payload Location

Table 1. RNN Series Differentially Pumped Rotary Seals

(includes a removeable adjustment wrench)

I.D.	Flange O.D.	A	B	C	D	E	F	G	H	Model No.
1.53	2.75	4.50	2.99	1.0	3.18	2.75	.49	.13	60°	RNN-150
1.53	2.75/6 ¹	6.00	2.99	1.34	3.33	2.75	.15	.13	45°	RNN-150/6
2.53	4.5	5.75	3.64	1.36	3.58	4.50	.49	.03	45°	RNN-250
2.53	4.5/6 ¹	6.00	3.64	1.52	3.71	4.50	.33	.03	45°	RNN-250/6
4.03	6	7.75	4.57	1.68	4.34	6.02	.37	.06	45°	RNN-400
6.03	8	10.25	6.16	1.74	5.70	8.00	.42	.13	54°	RNN-600
8.00	10	12.05	7.03	1.94	6.70	10.00	.42	.13	45°	RNN-800
10.00	13.25	15.75	8.81	2.37	8.50	13.28	.29	.13	24°	RNN-1000
12.00	14	20.00	–	3.34	–	–	–	–	–	RNN-1200

Dimensions in inches
¹ Signifies mounting flange sizes respectively

Table 2. RNN/FA Differentially Pumped Rotary Seals with Fine Adjust 1

I.D.	Flange O.D.	A	B	C	D	E	F	G	H	I	Drive Ratio	Model No.
1.53	2.75	5.13	3.38	1.00	4.95	2.75	.49	0.37	60°	3	80:1	RNN-150/FA
1.53	2.75/6 ²	6.00	3.84	1.34	5.32	2.75	.15	0.37	45°	3	100:1	RNN-150/6/FA
2.53	4.5	6.38	4.20	1.36	6.11	4.50	.49	0.41	45°	3	100:1	RNN-250/FA
2.53	4.5/6 ²	6.38	4.20	1.52	6.11	4.50	.33	0.41	45°	3	100:1	RNN-250/6/FA
4.03	6	8.50	8.25	1.68	9.28	6.02	.37	0.54	45°	4	100:1	RNN-400/FA
6.03	8	10.25	8.50	1.74	9.93	8.00	.42	1.10	54°	5	100:1	RNN-600/FA
8.00	10	12.75	9.56	1.94	11.50	10.00	.42	1.10	45°	5	100:1	RNN-800/FA
10.00	13.25	17.00	11.86	2.37	17.25	13.28	.29	.91	24°	7	100:1	RNN-1000/FA
12.00	14	Consult Factory										RNN-1200/FA

Dimensions in inches

¹ The fine adjust units utilize worm drive and are dynamic anti-backlash on RNN-400 and larger models. They come with large knobs and crank handles.
² Signifies mounting flange sizes respectively

Table 3. RNN/MS or /MY Differentially Pumped Rotary Seals with Anti-Backlash /MS Stepping or /MY Synchronous Motor Drive 1

I.D.	Flange O.D.	A	B	C	D	E	F	G	H	I	Drive Ratio	Model No.
1.53	2.75	5.13	10.00	1.00	9.97	2.75	.49	0.74	60°	3.39	80:1	RNN-150/MS or /MY
1.53	2.75/6 ²	5.13	10.00	1.34	9.97	2.75	.15	0.74	45°	3.39	100:1	RNN-150/6/MS or /MY
2.53	4.5	6.38	10.10	1.36	8.30	4.50	.49	0.41	45°	3.39	100:1	RNN-250/MS or /MY
2.53	4.5/6 ²	6.38	10.10	1.52	8.30	4.50	.33	0.41	45°	3.39	100:1	RNN-250/6/MS or /MY
4.03	6	8.50	9.77	1.68	11.69	6.02	.37	0.54	45°	3.39	100:1	RNN-400/MS or /MY
6.03	8	10.20	10.13	1.74	11.69	8.00	.42	1.10	54°	3.39	100:1	RNN-600/MS or /MY
8.00	10	12.75	11.39	1.94	11.69	10.00	.42	1.10	45°	3.39	100:1	RNN-800/MS or /MY
10.00	13.25	Consult Factory										RNN-1000/MS or /MY
12.00	14	Consult Factory										RNN-1200/MS or /MY
18.00	24	Consult Factory										RNN-1800/MS
24.00	34	Consult Factory										RNN-2400/MS

Dimensions in inches

¹ The motor drive units utilize worm drive and are all dynamic anti-backlash with hand knobs at the rear of the motor
² Signifies mounting flange sizes respectively

Thermionics RNN™-1200 Series 真空压差密封回转角度盘真空压差密封回转样品台

Table 1. RNN Series Differentially Pumped Rotary Seals

Table 2. RNN/FA Differentially Pumped Rotary Seals with Fine Adjust 1

Table 3. RNN/MS or /MY Differentially Pumped Rotary Seals with Anti-Backlash /MS Stepping or /MY Synchronous Motor Drive 1

I.D.

Flange

O.D.

A

B

C

D

E

F

G

H

I

Drive

Ratio

Model

No.

Thermionics RNN™-1400 Series 真空压差密封回转角度盘真空压差密封回转样品台

Thermionics RNN™-1000 Series 真空压差密封回转角度盘真空压差密封回转样品台

Thermionics RNN™-800 Series 真空压差密封回转角度盘真空压差密封回转样品台

Table 1. RNN Series Differentially Pumped Rotary Seals

Table 2. RNN/FA Differentially Pumped Rotary Seals with Fine Adjust 1

Table 3. RNN/MS or /MY Differentially Pumped Rotary Seals with Anti-Backlash /MS Stepping or /MY Synchronous Motor Drive 1

I.D.

Flange

O.D.

A

B

C

D

E

F

G

H

I

Drive

Ratio

Model

No.

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