Thermionics RCF Series 3 kW Single Crucible Linear e-Guns™ 3kW电子枪 真空镀膜 坩埚
Thermionics research capacity RCF series single crucible e-Gun™ provides enhanced beam stability and efficient XY sweep with full crucible coverage. The included plug-in emitter and sweep coil assemblies make the e-Gun source easier to service.
提供增强的电子束稳定性和高效的XY扫描，并具有全坩埚覆盖范围。
Features
- True XY sweep with full crucible coverage
- Sweep coils included with source
- Enhanced beam collimation
- Plug-in emitter module
- Enhanced high-stability cooling
- Cross-contamination shielding
- Rugged design
Specifications:
| Feature | Specifications |
| Operating | Below 5 x 10-5 Torr is desirable for best operation |
| Beam Voltage | 4,000 VDC |
| Beam Current | 0–750 mA continuously variable |
| Maximum Power | 3 kW |
| Cooling Water | 1.5 gpm |
| Pressure Differential | 25 psi minimum |
| Maximum Bakeout Temperature | 230°C (446°F) |
| Crucible Volume | 2.24 cc |
