Thermionics HCL e-Gun™ Motorized Z Series Crucible Pocket Indexing HCL系列 镀膜电子枪
咨询热线 15821107090

高容量线性电子枪™,该电子枪集成了 Z 系列平移器和坩埚分度器。与其他运动控制系统相比,它具有成本效益且价格低廉。
HCL 电子枪™
电动 Z 系列坩埚槽位索引
特点
■ 控制特性简单
■ 可靠性高且稳定
■ 速度控制范围(电动版本)
■ 电机寿命长
■ 计算机控制
■ 更小的执行器外形,可支持更多的源法兰实用功能
■ 用于直观显示坩埚位置的刻度
Specifications
| Operating Pressure | Below 5×10-5 Torr is desirable for best operation |
| Power Rating | 6.10 or 12 kW |
| Filament | 12 VAC 60A |
| Maximum Power | 12 kW |
| Cooling Water | 2gpm |
| Pressure Differential | 25 psi minimum |
| Max. Bakeout Temp. | 200° C |
| Crucible Volume | 7, 10, 15, 25, 40 or 75 cc |
Ordering Info
Motor Stepper
| Description | Model No. |
| 7 cc HCL series e-Gun, 6 kW, 3, 4, 5, or 6+ pockets | HCL-0607-X-ZST-MS |
| 10 cc HCL series e-Gun, 10 kW, 3, 4, 5, or 6+ pockets | HCL-1010-X-ZST-MS |
| 15 cc HCL series e-Gun, 10 kW, 3, 4, 5, or 6+ pockets | HCL-1015-X-ZST-MS |
| 25 cc HCL series e-Gun, 10 kW, 3, 4, 5, or 6+ pockets | HCL-1025-X-ZST-MS |
| 40 cc HCL series e-Gun, 10 kW, 3, 4, 5, or 6+ pockets | HCL-1040-X-ZST-MS |
| 75 cc HCL series e-Gun, 12 kW, 3, 4, 5, or 6+ pockets | HCL-1275-X-ZST-MS |
Manual
| Description | Model No. |
| 7 cc HCL series e-Gun, 6 kW, 3, 4, 5, or 6+ pockets | HCL-0607-X-ZST-M |
| 10 cc HCL series e-Gun, 10 kW, 3, 4, 5, or 6+ pockets | HCL-1010-X-ZST-M |
| 15 cc HCL series e-Gun, 10 kW, 3, 4, 5, or 6+ pockets | HCL-1015-X-ZST-M |
| 25 cc HCL series e-Gun, 10 kW, 3, 4, 5, or 6+ pockets | HCL-1025-X-ZST-M |
| 40 cc HCL series e-Gun, 10 kW, 3, 4, 5, or 6+ pockets | HCL-1040-X-ZST-M |
| 75 cc HCL series e-Gun, 12 kW, 3, 4, 5, or 6+ pockets | HCL-1275-X-ZST-M |
