RCRF Series 3 kW Rod-Fed e-Gun 3kW RCRF系列电子枪 真空镀膜
RCRF Series 3 kW Rod-Fed e-Gun
The 3 kW RCRF Series rod-fed e-Gun uses evaporant source material in the form of a rod up to 3/8″ in diameter, which is fed continuously into the crucible using an external linear feedthrough. Film thickness may be controlled using a rate monitor and are available mounted on various flanges.
UHV Compatible
Metal-sealed, fully UHV compatible, measured base pressure: 2 x 10-11 Torr.
Mounting and Configurations
- The 3 kW rod-fed e-Gun may be mounted and operated in any orientation, including upside down (which is material dependent)
- The rod-fed e-Gun shown in the photo can fit through a 2.5″ O.D. tube
- An optional cryoshroud to surround the e-Gun is available
- Multiple rod-fed e-Guns can be mounted side-by-side
- Custom designs are available, please consult the factory
Knudsen Cell Replacement
e-Guns can evaporate difficult materials, ie.: carbon, niobium, and silicon.
A rod-fed e-Gun, complete with all the necessary utility and mechanical feedthroughs, installed on a 4.5″ O.D. ConFlat mounting flange, is available as a direct replacement for existing Knudsen cell furnaces on Varian/Intevac, Perkin-Elmer, Riber, EPI and VG systems.
Specifications
| Feature | Specification |
| Operating Pressure | Below 5 x 10-5 Torr is desirable for best operation; fully UHV compatible design |
| Beam Voltage | 4,000 V |
| Beam Current | 0–750 mA continuously variable |
| Maximum Power | 3 kW @ 4 kV |
| Cooling Water | 1/2 gpm |
| Maximum Bakeout Temperature |
230°C (446°F) |
| Feedthrough Requirements |
Two 7 kV 50 A |
| Crucible Volume | 1/4″ or 3/8″ diameter rod |
| e-Gun Size | 2.25″ diameter x 2.95″ L |
