RCR Series 3 kW Multiple Crucible Rotary e-Guns™ RCR系列3kW旋转电子枪 多坩埚镀膜电子枪

• True XY sweep with full crucible coverage
• Sweep coils included with source
• Enhanced beam collimation
• Plug-in emitter module
• Enhanced high-stability cooling
• Cross-contamination shielding
• Rugged design
• Optional auto-indexer

 The operating principle of the multiple crucible e-Gun is identical to the single crucible source with the following advantages:

• Large supply of evaporant—When every crucible is filled with the same source material, an increased volume of evaporant can be evaporated in a single vacuum cycle.
• Deposition of up to eight different materials in one vacuum cycle—A different material can be put in each crucible and deposited in any sequence during a single vacuum cycle. The deposition rates are the same as those of the single crucible model. Only one crucible is heated at a time. The single filament remains stationary and the crucible head is indexed into position by the drive handle. Therefore, the evaporation always originates from exactly the same position in the vacuum chamber. The inactive crucibles are shielded from the heated crucibles by the magnetic pole pieces, thereby eliminating contamination between crucibles.

High Vacuum Compatible

Metal and elastomer seals, measured base pressure: 2 x 10^-9 Torr.

Interchangeable Crucibles

The main crucible wheel can be removed from the top of the source without total source disassembly. This flexibility allows field upgrades.

Specials

All multiple crucible e-Guns can be mounted on larger diameter ConFlat or rectangular PyraFlat flanges, single or back-to-back.