Evaporation Source Series: RCL 3 kW Multiple Crucible Linear e-Gun™
Thermionics研究能力系列，3 kW多坩埚线性电子枪，提供增强的光束稳定性和高效的XY扫描，具有完整的坩埚覆盖范围，并可通过自动分度器进行自动定位，单独出售。
特性
真正的XY扫掠，完全覆盖坩埚
扫频线圈随电源一起提供
增强光束准直
插入式发射器模块
增强的高稳定性冷却
交叉污染屏蔽
坚固的设计
可选自动索引器
Specifications
| Operating Pressure | Below 5 x 10-5 Torr is desirable for best operation |
| Beam Voltage | 4,000 VDC |
| Beam Current | 0–750 mA continuously variable |
| Maximum Power | 3 kW |
| Cooling Water | 1.5 gpm |
| Pressure Differential | 25 psi minimum |
| Maximum Bakeout Temperature | 230°C (446°F) |
| Crucible Volume | 2.24 cc x 3, 4 or 5 crucibles |
Ordering Information
| Description | Model No. |
|---|---|
| Multiple crucible 3 kW e-Gun source with sweep coils, linear 3-position | RCL0303 |
| Multiple crucible 3 kW e-Gun source with sweep coils, linear 4-position | RCL0304 |
| Multiple crucible 3 kW e-Gun source with sweep coils, linear 5-position | RCL0305 |
