{"id":258,"date":"2025-10-10T13:29:10","date_gmt":"2025-10-10T05:29:10","guid":{"rendered":"https:\/\/www.bihec.com\/silicon-materials\/?p=258"},"modified":"2025-10-10T13:29:10","modified_gmt":"2025-10-10T05:29:10","slug":"76-2mm%e7%a1%85%e6%99%b6%e5%9c%86","status":"publish","type":"post","link":"https:\/\/www.bihec.com\/silicon-materials\/76-2mm%e7%a1%85%e6%99%b6%e5%9c%86\/","title":{"rendered":"\u7f8e\u56fdSilicon Materials 3\u82f1\u5bf8(76.2mm) \u7845\u6676\u5706 \u7845\u6676\u7247 \u6676\u5706\u63ba\u6742 \u539a\u5ea6250\u20131800\u5fae\u7c73"},"content":{"rendered":"<p><a href=\"https:\/\/www.bihec.com\/silicon-materials\/tag\/silicon-materials\/\" title=\"View all posts in Silicon Materials\" target=\"_blank\">Silicon Materials<\/a>, Inc. \u7684<a title=\"View all posts in \u6676\u5706\" href=\"https:\/\/www.bihec.com\/silicon-materials\/tag\/%e6%99%b6%e5%9c%86\/\" target=\"_blank\" rel=\"noopener\">\u6676\u5706<\/a>\u5236\u9020\u8fc7\u7a0b\u5b8c\u5168\u900f\u660e\u3002\u6240\u6709<a href=\"https:\/\/www.bihec.com\/silicon-materials\/tag\/%e6%99%b6%e5%9c%86\/\" title=\"View all posts in \u6676\u5706\" target=\"_blank\">\u6676\u5706<\/a>\u751f\u4ea7\u4ece\u521d\u59cb\u7684<a title=\"View all posts in \u591a\u6676\u7845\" href=\"https:\/\/www.bihec.com\/silicon-materials\/tag\/%e5%a4%9a%e6%99%b6%e7%a1%85\/\" target=\"_blank\" rel=\"noopener\">\u591a\u6676\u7845<\/a>\u6279\u6b21\u5230\u6700\u7ec8\u5305\u88c5\u5747\u53ef\u8ffd\u6eaf\u3002\u4ea7\u54c1\u7684\u7a33\u5b9a\u6027\u6e90\u4e8e\u5bf9\u6574\u4e2a\u5236\u9020\u5468\u671f\u7684\u4e25\u683c\u63a7\u5236\u3002\u8fd9\u4e9b\u4f18\u52bf\u4f7f Silicon Materials, Inc. \u6210\u4e3a\u4f18\u79c0\u7684\u957f\u671f\u5408\u4f5c\u4f19\u4f34\u3002<\/p>\n<h3><strong>\u4ea7\u54c1<\/strong><\/h3>\n<p>Silicon Materials, Inc. \u63d0\u4f9b\u591a\u79cd\u89c4\u683c\u7684\u6676\u5706\u53ca\u76f8\u5173\u670d\u52a1\uff0c\u6ee1\u8db3\u534a\u5bfc\u4f53\u884c\u4e1a\u7684\u4e0d\u540c\u9700\u6c42\u3002<\/p>\n<h4><strong>\u4e3b\u8981\u539f\u6750\u6599<\/strong>\uff1a\u91c7\u7528\u7f8e\u56fd\u751f\u4ea7\u7684\u539f\u751f\u534a\u5bfc\u4f53\u7ea7<a href=\"https:\/\/www.bihec.com\/silicon-materials\/tag\/%e5%a4%9a%e6%99%b6%e7%a1%85\/\" title=\"View all posts in \u591a\u6676\u7845\" target=\"_blank\">\u591a\u6676\u7845<\/a>\u3002<\/h4>\n<hr \/>\n<h4><strong>\u6676\u5706\u4ea7\u54c1<\/strong><\/h4>\n<ol start=\"1\">\n<li><strong>CZ\uff08\u76f4\u62c9\u6cd5\uff09\u6676\u5706<\/strong>\n<ul>\n<li>\u5c3a\u5bf8\u8303\u56f4\uff1a50.8mm \u81f3 450mm<\/li>\n<li>\u7c7b\u578b\uff1a<a title=\"View all posts in \u4f18\u8d28\u6676\u5706\" href=\"https:\/\/www.bihec.com\/silicon-materials\/tag\/%e4%bc%98%e8%b4%a8%e6%99%b6%e5%9c%86\/\" target=\"_blank\" rel=\"noopener\">\u4f18\u8d28\u6676\u5706<\/a>\uff08Prime\uff09\u548c<a title=\"View all posts in \u6d4b\u8bd5\u6676\u5706\" href=\"https:\/\/www.bihec.com\/silicon-materials\/tag\/%e6%b5%8b%e8%af%95%e6%99%b6%e5%9c%86\/\" target=\"_blank\" rel=\"noopener\">\u6d4b\u8bd5\u6676\u5706<\/a>\uff08Test\uff09<\/li>\n<\/ul>\n<\/li>\n<li><strong>FZ\uff08\u6d6e\u533a\u6cd5\uff09\u6676\u5706<\/strong>\n<ul>\n<li>\u5c3a\u5bf8\u8303\u56f4\uff1a50.8mm \u81f3 150mm<\/li>\n<li>\u7c7b\u578b\uff1a<a href=\"https:\/\/www.bihec.com\/silicon-materials\/tag\/%e4%bc%98%e8%b4%a8%e6%99%b6%e5%9c%86\/\" title=\"View all posts in \u4f18\u8d28\u6676\u5706\" target=\"_blank\">\u4f18\u8d28\u6676\u5706<\/a>\uff08Prime\uff09<\/li>\n<\/ul>\n<\/li>\n<li><strong>\u63ba\u6742\u7c7b\u578b<\/strong>\n<ul>\n<li>\u787c\uff08Boron\uff09\u3001\u78f7\uff08Phosphorous\uff09\u3001\u9511\uff08Antimony\uff09\u3001\u7837\uff08Arsenic\uff09<\/li>\n<li>\u672a\u63ba\u6742 CZ \u6676\u5706\uff08Undoped CZ\uff09<\/li>\n<li><a title=\"View all posts in \u672c\u5f81\u6676\u5706\" href=\"https:\/\/www.bihec.com\/silicon-materials\/tag\/%e6%9c%ac%e5%be%81%e6%99%b6%e5%9c%86\/\" target=\"_blank\" rel=\"noopener\">\u672c\u5f81\u6676\u5706<\/a>\uff08Intrinsic\uff09<\/li>\n<\/ul>\n<\/li>\n<li><strong>\u6676\u5411<\/strong>\n<ul>\n<li>\u6807\u51c6\u6676\u5411\uff1a&lt;100&gt;\u3001&lt;111&gt;\u3001&lt;110&gt;\u3001&lt;112&gt;<\/li>\n<li>\u53ef\u6839\u636e\u5ba2\u6237\u9700\u6c42\u63d0\u4f9b\u5b9a\u5236\u5207\u5272\u89c4\u683c<\/li>\n<\/ul>\n<\/li>\n<li><strong>\u539a\u5ea6\u548c\u51e0\u4f55\u53c2\u6570<\/strong>\n<ul>\n<li>\u7b26\u5408 SEMI \u6807\u51c6\u6216\u5ba2\u6237\u6307\u5b9a\u8981\u6c42<\/li>\n<li>\u5f53\u524d\u80fd\u529b\uff1a\u5927\u591a\u6570\u76f4\u5f84\u7684\u6676\u5706\u539a\u5ea6\u8303\u56f4\u4e3a 250 \u2013 1800 \u5fae\u7c73<\/li>\n<\/ul>\n<\/li>\n<li><strong>\u8d28\u91cf\u63a7\u5236<\/strong>\n<ul>\n<li>\u6240\u6709\u6676\u5706\u5747\u7531 SMI \u751f\u4ea7\u6216\u7531 SMI \u8ba4\u8bc1\/\u62c5\u4fdd\u7684\u4f9b\u5e94\u5546\u63d0\u4f9b<\/li>\n<\/ul>\n<\/li>\n<\/ol>\n<hr \/>\n<h4><strong><a href=\"https:\/\/www.bihec.com\/silicon-materials\/tag\/%e5%ae%9a%e5%88%b6%e8%96%84%e8%86%9c\/\" title=\"View all posts in \u5b9a\u5236\u8584\u819c\" target=\"_blank\">\u5b9a\u5236\u8584\u819c<\/a>\u548c\u670d\u52a1<\/strong><\/h4>\n<ul>\n<li>\u63d0\u4f9b\u5b9a\u5236\u8584\u819c\u6c89\u79ef\u670d\u52a1\uff0c\u6ee1\u8db3\u7279\u5b9a\u5e94\u7528\u9700\u6c42\u3002<\/li>\n<li>\u5176\u4ed6\u76f8\u5173\u670d\u52a1\u53ef\u6839\u636e\u5ba2\u6237\u9700\u6c42\u5b9a\u5236\u3002<\/li>\n<\/ul>\n<hr \/>\n<h4><strong>\u4f18\u52bf<\/strong><\/h4>\n<ul>\n<li><strong>\u9ad8\u8d28\u91cf<\/strong>\uff1a\u4e25\u683c\u7684\u8d28\u91cf\u63a7\u5236\u548c\u751f\u4ea7\u6d41\u7a0b\uff0c\u786e\u4fdd\u4ea7\u54c1\u4e00\u81f4\u6027\u3002<\/li>\n<li><strong>\u7075\u6d3b\u6027<\/strong>\uff1a\u652f\u6301\u5ba2\u6237\u5b9a\u5236\u9700\u6c42\uff0c\u5305\u62ec\u5c3a\u5bf8\u3001\u63ba\u6742\u3001\u6676\u5411\u548c\u539a\u5ea6\u3002<\/li>\n<li><strong>\u53ef\u9760\u6027<\/strong>\uff1a\u6240\u6709\u4ea7\u54c1\u5747\u53ef\u8ffd\u6eaf\uff0c\u786e\u4fdd\u900f\u660e\u5ea6\u548c\u53ef\u4fe1\u5ea6\u3002<\/li>\n<\/ul>\n<h3><strong>3 \u82f1\u5bf8\uff0876.2\u6beb\u7c73\uff09<a title=\"View all posts in \u7845\u6676\u5706\" href=\"https:\/\/www.bihec.com\/silicon-materials\/tag\/%e7%a1%85%e6%99%b6%e5%9c%86\/\" target=\"_blank\" rel=\"noopener\">\u7845\u6676\u5706<\/a>\u89c4\u683c<\/strong><\/h3>\n<hr \/>\n<h4><strong>\u6750\u6599\u7279\u6027<\/strong><\/h4>\n<table>\n<thead>\n<tr>\n<th>\u53c2\u6570<\/th>\n<th>\u7279\u6027<\/th>\n<th>ASTM \u63a7\u5236\u65b9\u6cd5<\/th>\n<\/tr>\n<\/thead>\n<tbody>\n<tr>\n<td>\u751f\u957f\u65b9\u6cd5<\/td>\n<td>\u76f4\u62c9\u6cd5\uff08Cz\uff09\u3001\u6d6e\u533a\u6cd5\uff08Fz\uff09<\/td>\n<td>\u2013<\/td>\n<\/tr>\n<tr>\n<td>\u7c7b\u578b\/\u63ba\u6742<\/td>\n<td>P \u578b \u2013 \u787c\uff08Boron\uff09<br \/>\nN \u578b \u2013 \u78f7\uff08Phosphorous\uff09<br \/>\nN \u578b \u2013 \u9511\uff08Antimony\uff09<br \/>\nN \u578b \u2013 \u7837\uff08Arsenic\uff09<br \/>\n\u672a\u63ba\u6742\uff08Undoped\uff09<\/td>\n<td>F42<\/td>\n<\/tr>\n<tr>\n<td>\u6676\u5411<\/td>\n<td>&lt;100&gt;\u3001&lt;111&gt;\u3001&lt;110&gt;\uff0c\u53ef\u6839\u636e\u5ba2\u6237\u8981\u6c42\u63d0\u4f9b\u5207\u5272\u65b9\u5411\uff08slice ON \u6216 slice OFF\uff09<\/td>\n<td>F26<\/td>\n<\/tr>\n<tr>\n<td>\u6c27\u542b\u91cf<\/td>\n<td>10-19 ppmA\uff0c\u53ef\u6839\u636e\u5ba2\u6237\u8981\u6c42\u63d0\u4f9b\u5b9a\u5236\u516c\u5dee<\/td>\n<td>F121<\/td>\n<\/tr>\n<tr>\n<td>\u78b3\u542b\u91cf<\/td>\n<td>&lt; 1 ppmA\uff0c\u53ef\u6839\u636e\u5ba2\u6237\u8981\u6c42\u63d0\u4f9b\u5b9a\u5236\u516c\u5dee<\/td>\n<td>F123<\/td>\n<\/tr>\n<tr>\n<td>\u7535\u963b\u7387\u8303\u56f4<\/td>\n<td>\u2013 P \u578b\uff08\u787c\uff09\uff1a0.001 \u2013 50 \u6b27\u59c6\u00b7\u5398\u7c73<br \/>\n\u2013 N \u578b\uff08\u78f7\uff09\uff1a0.1 \u2013 40 \u6b27\u59c6\u00b7\u5398\u7c73<br \/>\n\u2013 N \u578b\uff08\u9511\uff09\uff1a0.01 \u2013 0.025 \u6b27\u59c6\u00b7\u5398\u7c73<br \/>\n\u2013 N \u578b\uff08\u7837\uff09\uff1a0.001 \u2013 0.005 \u6b27\u59c6\u00b7\u5398\u7c73<br \/>\n\u2013 \u672a\u63ba\u6742\uff1a&gt; 100 \u6b27\u59c6\u00b7\u5398\u7c73<br \/>\n\u53ef\u6839\u636e\u5ba2\u6237\u8981\u6c42\u63d0\u4f9b\u5b9a\u5236\u516c\u5dee<\/td>\n<td>F84<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<hr \/>\n<h4><strong>\u673a\u68b0\u7279\u6027<\/strong><\/h4>\n<table>\n<thead>\n<tr>\n<th>\u53c2\u6570<\/th>\n<th>Prime A<\/th>\n<th>Prime B<\/th>\n<th>Test<\/th>\n<th>ASTM \u65b9\u6cd5<\/th>\n<\/tr>\n<\/thead>\n<tbody>\n<tr>\n<td>\u76f4\u5f84<\/td>\n<td>3\u2033 \u00b1 0.008\u2033<\/td>\n<td>3\u2033 \u00b1 0.008\u2033<\/td>\n<td>3\u2033 \u00b1 0.02\u2033<\/td>\n<td>F2074<\/td>\n<\/tr>\n<tr>\n<td>\u539a\u5ea6<\/td>\n<td>381 \u00b1 20 \u00b5m\uff08\u6807\u51c6\uff09<br \/>\n305 \u00b1 20 \u00b5m<br \/>\n635 \u00b1 20 \u00b5m<br \/>\n750 \u00b1 20 \u00b5m<br \/>\n1000 \u00b1 20 \u00b5m<\/td>\n<td>381 \u00b1 25 \u00b5m\uff08\u6807\u51c6\uff09<br \/>\n305 \u00b1 25 \u00b5m<br \/>\n635 \u00b1 25 \u00b5m<br \/>\n750 \u00b1 25 \u00b5m<br \/>\n1000 \u00b1 25 \u00b5m<\/td>\n<td>381 \u00b1 50 \u00b5m\uff08\u6807\u51c6\uff09<br \/>\n305 \u00b1 50 \u00b5m<br \/>\n635 \u00b1 20 \u00b5m<br \/>\n750 \u00b1 50 \u00b5m<br \/>\n1000 \u00b1 50 \u00b5m<\/td>\n<td>F533<\/td>\n<\/tr>\n<tr>\n<td>TTV\uff08\u603b\u539a\u5ea6\u53d8\u5316\uff09<\/td>\n<td>&lt; 5 \u00b5m<\/td>\n<td>&lt; 10 \u00b5m<\/td>\n<td>&lt; 15 \u00b5m<\/td>\n<td>F657<\/td>\n<\/tr>\n<tr>\n<td>\u5f2f\u66f2\u5ea6\uff08Bow\uff09<\/td>\n<td>&lt; 30 \u00b5m<\/td>\n<td>&lt; 30 \u00b5m<\/td>\n<td>&lt; 40 \u00b5m<\/td>\n<td>F534<\/td>\n<\/tr>\n<tr>\n<td>\u7fd8\u66f2\u5ea6\uff08Warp\uff09<\/td>\n<td>&lt; 30 \u00b5m<\/td>\n<td>&lt; 30 \u00b5m<\/td>\n<td>&lt; 40 \u00b5m<\/td>\n<td>F657<\/td>\n<\/tr>\n<tr>\n<td>\u8fb9\u7f18\u5012\u89d2<\/td>\n<td>\u7b26\u5408 SEMI \u6807\u51c6<\/td>\n<td>\u2013<\/td>\n<td>\u2013<\/td>\n<td>F928<\/td>\n<\/tr>\n<tr>\n<td>\u6807\u8bb0<\/td>\n<td>\u4ec5\u4e3b SEMI \u5e73\u8fb9\uff0c\u63d0\u4f9b SEMI \u6807\u51c6\u5e73\u8fb9\u3001\u7f3a\u53e3\u6216\u5706\u5f62\u8fb9\u7f18<\/td>\n<td>F847, F671<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<hr \/>\n<h4><strong>\u8868\u9762\u8d28\u91cf<\/strong><\/h4>\n<table>\n<thead>\n<tr>\n<th>\u53c2\u6570<\/th>\n<th>Prime A<\/th>\n<th>Prime B<\/th>\n<th>Test<\/th>\n<th>ASTM \u65b9\u6cd5<\/th>\n<\/tr>\n<\/thead>\n<tbody>\n<tr>\n<td><strong>\u6b63\u9762\u6807\u51c6<\/strong><\/td>\n<td><\/td>\n<td><\/td>\n<td><\/td>\n<td><\/td>\n<\/tr>\n<tr>\n<td>\u8868\u9762\u72b6\u6001<\/td>\n<td>\u5316\u5b66\u673a\u68b0\u629b\u5149\uff08CMP\uff09<\/td>\n<td>\u2013<\/td>\n<td>\u2013<\/td>\n<td>F523<\/td>\n<\/tr>\n<tr>\n<td>\u8868\u9762\u7c97\u7cd9\u5ea6<\/td>\n<td>&lt; 2 \u00c5<\/td>\n<td>&lt; 2 \u00c5<\/td>\n<td>&lt; 2 \u00c5<\/td>\n<td>\u2013<\/td>\n<\/tr>\n<tr>\n<td>\u6c61\u67d3\u9897\u7c92\uff08&gt;0.3 \u00b5m\uff09<\/td>\n<td>&lt; 20<\/td>\n<td>&lt; 20<\/td>\n<td>&lt; 20<\/td>\n<td>F523<\/td>\n<\/tr>\n<tr>\n<td>\u96fe\u5ea6\u3001\u51f9\u5751\u3001\u6a58\u76ae<\/td>\n<td>\u65e0<\/td>\n<td>\u65e0<\/td>\n<td>\u65e0<\/td>\n<td>F523<\/td>\n<\/tr>\n<tr>\n<td>\u952f\u75d5\u3001\u6761\u7eb9<\/td>\n<td>\u65e0<\/td>\n<td>\u65e0<\/td>\n<td>\u65e0<\/td>\n<td>F523<\/td>\n<\/tr>\n<tr>\n<td><strong>\u80cc\u9762\u6807\u51c6<\/strong><\/td>\n<td><\/td>\n<td><\/td>\n<td><\/td>\n<td><\/td>\n<\/tr>\n<tr>\n<td>\u88c2\u7eb9\u3001\u952f\u75d5\u3001\u6c61\u6e0d<\/td>\n<td>\u65e0<\/td>\n<td>\u65e0<\/td>\n<td>\u65e0<\/td>\n<td>F523<\/td>\n<\/tr>\n<tr>\n<td>\u8868\u9762\u72b6\u6001<\/td>\n<td>\u78b1\u8680\u523b<\/td>\n<td>\u2013<\/td>\n<td>\u2013<\/td>\n<td>F523<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<hr \/>\n<h4><strong>\u5305\u88c5\u9009\u9879<\/strong><\/h4>\n<table>\n<thead>\n<tr>\n<th>\u5305\u88c5\u7c7b\u578b<\/th>\n<th>\u5305\u88c5\u888b\u63cf\u8ff0<\/th>\n<\/tr>\n<\/thead>\n<tbody>\n<tr>\n<td>2 \u90e8\u5206\u6676\u5706\u76d2\uff0c2 \u888b<\/td>\n<td>\u900f\u660e\u7acb\u4f53\u888b\uff0cA\/S \u84dd\u8272\u5e73\u888b<\/td>\n<\/tr>\n<tr>\n<td>3 \u90e8\u5206\u6676\u5706\u76d2\uff0c2 \u888b<\/td>\n<td>\u900f\u660e\u7acb\u4f53\u888b\uff0cA\/S \u84dd\u8272\u5e73\u888b<\/td>\n<\/tr>\n<tr>\n<td>\u5355\u6676\u5706\u8fd0\u8f93\u76d2\uff0c3 \u888b<\/td>\n<td>\u900f\u660e\u7acb\u4f53\u888b\uff0c\u94dd\u5236\u7acb\u4f53\u888b\uff0cA\/S \u84dd\u8272\u5e73\u888b<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<hr \/>\n<h3><strong>\u5907\u6ce8<\/strong><\/h3>\n<ul>\n<li>\u6240\u6709\u89c4\u683c\u53ef\u6839\u636e\u5ba2\u6237\u9700\u6c42\u8fdb\u884c\u8c03\u6574\u3002<\/li>\n<li>\u63d0\u4f9b\u7b26\u5408 SEMI \u6807\u51c6\u6216\u5ba2\u6237\u6307\u5b9a\u8981\u6c42\u7684\u5b9a\u5236\u670d\u52a1\u3002<\/li>\n<\/ul>\n<br><div class=\"tagcloud\"><a href=\"https:\/\/www.bihec.com\/silicon-materials\/tag\/3%e8%8b%b1%e5%af%b8%e7%a1%85%e6%99%b6%e5%9c%86\/\" class=\"tag-cloud-link tag-link-0 tag-link-position-1\" style=\"font-size: 8pt;\" 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