{"id":463,"date":"2026-08-31T09:24:01","date_gmt":"2026-08-31T01:24:01","guid":{"rendered":"https:\/\/www.bihec.com\/sens4\/?p=463"},"modified":"2026-08-31T09:47:48","modified_gmt":"2026-08-31T01:47:48","slug":"%e4%b8%b9%e9%ba%a6-sens4-vpm%e2%80%914-smartpirani%e2%80%91lt-%e7%9a%ae%e6%8b%89%e5%b0%bc%e7%9c%9f%e7%a9%ba%e4%bc%a0%e6%84%9f%e5%99%a8-%e7%9c%9f%e7%a9%ba%e5%8f%98%e9%80%81%e5%99%a8","status":"publish","type":"post","link":"https:\/\/www.bihec.com\/sens4\/%e4%b8%b9%e9%ba%a6-sens4-vpm%e2%80%914-smartpirani%e2%80%91lt-%e7%9a%ae%e6%8b%89%e5%b0%bc%e7%9c%9f%e7%a9%ba%e4%bc%a0%e6%84%9f%e5%99%a8-%e7%9c%9f%e7%a9%ba%e5%8f%98%e9%80%81%e5%99%a8\/","title":{"rendered":"\u4e39\u9ea6 SENS4 VPM\u20114 SmartPirani\u2011LT \u76ae\u62c9\u5c3c\u771f\u7a7a\u4f20\u611f\u5668 \u771f\u7a7a\u53d8\u9001\u5668"},"content":{"rendered":"

VPM-4 SMARTPIRANI™ LT \u771f\u7a7a\u4f20\u611f\u5668<\/a><\/span><\/h2>\n
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1\u00d7^{10-6<\/sup>\u00a0\u81f3 13 \u6beb\u5df4 \/ 7.5\u00d7^{10-7<\/sup>\u00a0\u81f3 10 \u6258 \/ 1\u00d7^{10-4<\/sup>\u00a0\u81f3 1.333\u00d710^{+3<\/sup> \u5e15<\/span><\/h2>\n<\/div>\n<\/div>\n<\/div>\n<\/div>\n<\/div>\n<\/div>\n\n\n\n\n\n\n\u4e0b\u4e00\u4ee3 MEMS \u76ae\u62c9\u5c3c\u4f20\u611f\u5668<\/a><\/span><\/h3>\n\n\u6d4b\u91cf\u8303\u56f4\u4e3a 1\u00d7^{10-6<\/sup>^{\u00a0<\/sup>\u81f3 13.33 mbar\uff087.5\u00d710-7\u00a0\u81f3 10 Torr\uff09<\/span><\/li>\n}}\u8d85\u5bbd\u8303\u56f4\u9ad8\u6027\u80fd MEMS \u76ae\u62c9\u5c3c\u4f20\u611f\u5668<\/a><\/span><\/li>\n
\u5148\u8fdb\u7684\u521b\u65b0\u6570\u5b57\u4fe1\u53f7\u5904\u7406<\/span><\/li>\n
\u53ef\u5b89\u88c5\u5728\u4efb\u4f55\u65b9\u5411\uff0c\u800c\u4e0d\u4f1a\u5f71\u54cd\u6027\u80fd\u3002<\/span><\/li>\n
\u53ef\u7f16\u7a0b\u7535\u538b\u8f93\u51fa\u4fe1\u53f7\uff0c\u53ef\u4e0e\u5176\u4ed6\u4f9b\u5e94\u5546\u4eff\u771f<\/span><\/li>\n
\u6570\u5b57 RS-232 \u6216 RS-485 \u63a5\u53e3<\/span><\/li>\n
\u4f4e\u538b\u771f\u7a7a\u5f00\u5173<\/span><\/li>\n
\u7528\u4e8e\u771f\u7a7a\u8fc7\u7a0b\u63a7\u5236\u7684\u4e09\u4e2a\u56fa\u6001\u8bbe\u5b9a\u70b9<\/span><\/li>\n
10 bar \uff08145 psi\uff09 \u7684\u9ad8\u8fc7\u538b\u5bb9\u9650<\/span><\/li>\n
\u575a\u56fa\u3001\u7d27\u51d1\u7684\u4e0d\u9508\u94a2\u6cd5\u5170\u548c\u5916\u58f3\u8bbe\u8ba1<\/span><\/li>\n<\/ul>\n<\/div>\n<\/div>\n<\/div>\n<\/div>\n<\/div>\n<\/div>\n<\/div>\n<\/div>\n<\/div>\n<\/div>\n<\/div>\n<\/div>\n\n\n\n\n\n\n\n\n\n\n\nSENS4 VPM-4<\/a> SmartPirani™ LT \u4f20\u611f\u5668<\/a>\u57fa\u4e8e\u521b\u7eaa\u5f55\u7684 VPM-5<\/a> SmartPirani™ \u4f20\u611f\u5668\u4e2d\u4f7f\u7528\u7684\u70ed\u635f\u5931\u4f20\u611f\u5668\u6280\u672f\uff0c\u63d0\u4f9b 13 \u81f3 1E-6 mbar\uff0810 \u81f3 7.5E-7 torr\uff09\u7684\u6d4b\u91cf\u8303\u56f4\u3002<\/p>\n
\u4f20\u611f\u5668\u6280\u672f\u901a\u8fc7\u5c06\u70ed\u5bfc\u5f0f\u771f\u7a7a\u8ba1<\/a>\u7684\u53ef\u7528\u6d4b\u91cf\u8303\u56f4\u5ef6\u957f\u4e86 1-3 \u4e2a\u6570\u91cf\u7ea7\uff0c\u5efa\u7acb\u4e86\u65b0\u7684\u6807\u51c6\u3002<\/p>\n
SENS4 SmartPirani<\/a>™ \u57fa\u4e8e\u5c16\u7aef\u7684 MEMS\uff08\u5fae\u673a\u7535\u7cfb\u7edf\uff09\u4f20\u611f\u5668\u6280\u672f\uff0c\u7ed3\u5408\u4e86\u65b0\u9896\u7684\u7cbe\u5bc6\u6570\u5b57\u4fe1\u53f7\u5904\u7406\u67b6\u6784\u548c\u53ea\u6709 Sens4 \u624d\u80fd\u63d0\u4f9b\u7684\u5148\u8fdb\u521b\u65b0\u6d4b\u91cf\u7b97\u6cd5\u3002<\/p>\n<\/div>\n<\/div>\n<\/div>\n<\/div>\n<\/div>\n
<\/p>\n<\/div>\n<\/div>\n<\/div>\n<\/div>\n<\/div>\n<\/div>\n<\/div>\n<\/div>\n<\/div>\n<\/div>\n<\/div>\n<\/div>\n
\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\nSENS4<\/a> SmartPirani™ LT \u6269\u5c55\u7684\u6d4b\u91cf\u8303\u56f4\u4f7f\u5176\u80fd\u591f\u5728\u4f20\u7edf\u4e0a\u7531\u70ed\u9634\u6781\u7535\u79bb\u8ba1\u6216\u51b7\u9634\u6781\u7535\u79bb\u8ba1\u4e3b\u5bfc\u7684\u8303\u56f4\u5185\u4f7f\u7528\u3002SmartPirani LT \u9488\u5bf9\u4f4e\u91cf\u7a0b\u6d4b\u91cf\u6027\u80fd\u8fdb\u884c\u4e86\u4f18\u5316\uff0c\u6d4b\u91cf\u4e0a\u9650\u53ef\u8fbe 13 mbar \uff0810 Torr\uff09\u3002<\/p>\n
SENS4 SmartPirani™ \u4f20\u611f\u5668\u7cfb\u5217\u8fd8\u5305\u62ec\u5168\u7cfb\u5217 VPM-5 SmartPirani™\uff0c\u53ef\u63d0\u4f9b 2 \u81f3 1333 mbar \u7684\u6c14\u4f53\u72ec\u7acb\u6d4b\u91cf\uff0c\u4ee5\u53ca\u00a0VPM-7<\/a> SmartPirani™\u00a0ATM\uff0c\u6b64\u5916\u8fd8\u63d0\u4f9b\u5927\u6c14\u5f00\u5173\u529f\u80fd\u3002<\/p>\n<\/div>\n<\/div>\n<\/div>\n<\/div>\n
\n\n\n\n\u53ef\u7f16\u7a0b\u4f20\u611f\u5668\u8bbe\u7f6e\u548c\u53c2\u6570<\/span><\/h2>\n\u4f20\u611f\u5668\u8bbe\u7f6e\u548c\u53c2\u6570\u53ef\u7531\u7528\u6237\u901a\u8fc7 PC \u6216\u667a\u80fd\u624b\u673a\u901a\u8fc7\u6570\u5b57\u901a\u4fe1\u63a5\u53e3\u8fdb\u884c\u7f16\u7a0b\u3002\u5e26\u6709 RS-232 \u6216 RS-485 \u4e32\u884c\u63a5\u53e3\u7684\u4f20\u611f\u5668\u53ef\u4ee5\u901a\u8fc7\u4e32\u884c\u63a5\u53e3\u6216 S4-Connect™ \u63a5\u53e3\u8fdb\u884c\u914d\u7f6e\u3002\u6570\u5b57\u754c\u9762\u652f\u6301\u8bca\u65ad\u3001\u9884\u6d4b\u6027\u7ef4\u62a4\u3001\u670d\u52a1\u3001\u6821\u51c6\u3001\u8bbe\u5b9a\u70b9\u914d\u7f6e\u3001\u6a21\u62df\u8f93\u51fa\u7f29\u653e\u548c\u5b9e\u65f6\u771f\u7a7a\u538b\u529b\u6d4b\u91cf\u91c7\u96c6\uff0c\u4ee5\u5b9e\u73b0\u5c4f\u5e55\u53ef\u89c6\u5316\u3002S4-Connect™ USB \u7f16\u7a0b\u5668\u4e0e\u514d\u8d39\u3001\u76f4\u89c2\u7684\u914d\u7f6e\u8f6f\u4ef6\u76f8\u7ed3\u5408\uff0c\u662f\u7528\u4e8e\u4f20\u611f\u5668\u7f16\u7a0b\u3001\u5b9e\u65f6\u6d4b\u91cf\u548c\u8bca\u65ad\u7684\u5373\u63d2\u5373\u7528\u89e3\u51b3\u65b9\u6848\u3002<\/p>\n<\/div>\n<\/div>\n<\/div>\n<\/div>\n<\/div>\n<\/div>\n<\/div>\n<\/div>\n<\/div>\n<\/div>\n<\/div>\n<\/div>\n<\/div>\n<\/div>\n<\/div>\n<\/div>\n<\/div>\n<\/div>\n<\/div>\n
SENS4<\/a>\nSENS4 DiCAP\u2122<\/a>\nSENS4 TriCAP\u2122<\/a>\nSENS4 VDM-2<\/a>\nSENS4 VDM-5<\/a>\nSENS4 VDM-5 DiCap\u2122<\/a>\nSENS4 VPM-4<\/a>\nSENS4 VPM-7<\/a>\nSENS4 VPM-17<\/a>\nSENS4\u4ee3\u7406<\/a>\nSENS4\u4f20\u611f\u5668<\/a>\nSENS4\u538b\u529b\u4f20\u611f\u5668<\/a>\nSENS4\u538b\u7535\u4f20\u611f\u5668<\/a>\nSENS4\u771f\u7a7a\u4f20\u611f\u5668<\/a>\nSENS4\u771f\u7a7a\u6d4b\u91cf<\/a>\nSMARTPIRANI\u2122 LT \u771f\u7a7a\u4f20\u611f\u5668<\/a>\nTriCAP\u2122 ATM \u4f20\u611f\u5668<\/a>\nVPM-7<\/a>\n\u4e39\u9ea6SENS4<\/a>\n\u4e39\u9ea6 SENS4<\/a>\n\u4f20\u611f\u5668<\/a>\n\u5bbd\u91cf\u7a0b\u771f\u7a7a\u4f20\u611f\u5668<\/a>\n\u771f\u7a7a\u4f20\u611f\u5668<\/a>\n\u771f\u7a7a\u538b\u529b\u4f20\u611f\u5668<\/a>\n\u771f\u7a7a\u6d4b\u91cf<\/a><\/div>","protected":false},"excerpt":{"rendered":"VPM-4 SMARTPIRANI™ LT \u771f\u7a7a\u4f20\u611f\u5668 1\u00d710-6\u00a0\u81f3 13 \u6beb\u5df4 \/ 7.5\u00d710-7\u00a0\u81f3 10 \u6258 \/ 1\u00d710-4\u00a0\u81f3 1.333\u00d710+3 <\/p>\n","protected":false},"author":33,"featured_media":232,"comment_status":"closed","ping_status":"open","sticky":false,"template":"","format":"standard","meta":{"_vp_format_video_url":"","_vp_image_focal_point":[]},"categories":[29],"tags":[4,54,46,50,53,52,48,55,43,40,42,45,51,41,44,56,49,24,19,5,11,10,8,9,7],"_links":{"self":[{"href":"https:\/\/www.bihec.com\/sens4\/wp-json\/wp\/v2\/posts\/463"}],"collection":[{"href":"https:\/\/www.bihec.com\/sens4\/wp-json\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/www.bihec.com\/sens4\/wp-json\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/www.bihec.com\/sens4\/wp-json\/wp\/v2\/users\/33"}],"replies":[{"embeddable":true,"href":"https:\/\/www.bihec.com\/sens4\/wp-json\/wp\/v2\/comments?post=463"}],"version-history":[{"count":1,"href":"https:\/\/www.bihec.com\/sens4\/wp-json\/wp\/v2\/posts\/463\/revisions"}],"predecessor-version":[{"id":494,"href":"https:\/\/www.bihec.com\/sens4\/wp-json\/wp\/v2\/posts\/463\/revisions\/494"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/www.bihec.com\/sens4\/wp-json\/wp\/v2\/media\/232"}],"wp:attachment":[{"href":"https:\/\/www.bihec.com\/sens4\/wp-json\/wp\/v2\/media?parent=463"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/www.bihec.com\/sens4\/wp-json\/wp\/v2\/categories?post=463"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/www.bihec.com\/sens4\/wp-json\/wp\/v2\/tags?post=463"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}}}}}