{"id":289,"date":"2026-05-06T11:00:21","date_gmt":"2026-05-06T03:00:21","guid":{"rendered":"https:\/\/www.bihec.com\/sens4-vacuum\/?p=289"},"modified":"2026-05-06T11:00:21","modified_gmt":"2026-05-06T03:00:21","slug":"sens4-vpm-5-smartpirani-%e7%9c%9f%e7%a9%ba%e5%8f%98%e9%80%81%e5%99%a8-3","status":"publish","type":"post","link":"https:\/\/www.bihec.com\/sens4-vacuum\/sens4-vpm-5-smartpirani-%e7%9c%9f%e7%a9%ba%e5%8f%98%e9%80%81%e5%99%a8-3\/","title":{"rendered":"sens4 VPM-5 SmartPirani \u771f\u7a7a\u53d8\u9001\u5668"},"content":{"rendered":"<p>VPM-5 SmartPirani&#x2122; \u771f\u7a7a\u53d8\u9001\u5668\u91c7\u7528\u5c16\u7aef\u6280\u672f\u6253\u9020\uff0c\u4e0d\u4ec5\u63d0\u4f9b\u884c\u4e1a\u9886\u5148\u7684\u6027\u80fd\u8868\u73b0\uff0c\u66f4\u901a\u8fc7\u5c06\u70ed\u5bfc\u5f0f\u771f\u7a7a\u8ba1\u7684\u53ef\u7528\u6d4b\u91cf\u8303\u56f4\u6269\u5c551-3\u4e2a\u6570\u91cf\u7ea7\uff0c\u6811\u7acb\u4e86\u5168\u65b0\u7684\u6027\u80fd\u6807\u6746\u3002<\/p>\n<p>\u8be5\u4ea7\u54c1\u57fa\u4e8e\u521b\u65b0\u7684MEMS\uff08\u5fae\u673a\u7535\u7cfb\u7edf\uff09\u4f20\u611f\u5668\u6280\u672f\uff0c\u7ed3\u5408\u9769\u547d\u6027\u7684\u9ad8\u7cbe\u5ea6\u6570\u5b57\u4fe1\u53f7\u5904\u7406\u67b6\u6784\u548c\u5148\u8fdb\u7684\u6d4b\u91cf\u7b97\u6cd5\u3002\u914d\u5408\u7cbe\u5bc6\u7684\u81ea\u52a8\u5316\u5236\u9020\u4e0e\u6821\u51c6\u5de5\u827a\uff0c\u8fd9\u4e9b\u6280\u672f\u8981\u7d20\u5171\u540c\u6210\u5c31\u4e86\u4e00\u6b3e\u5177\u6709\u65e0\u4e0e\u4f26\u6bd4\u6d4b\u91cf\u6027\u80fd\u7684\u72ec\u7279\u4ea7\u54c1\u3002<\/p>\n<p><strong>\u8d85\u5bbd\u91cf\u7a0b\u8986\u76d6<\/strong><br \/>\n1.0E-6\u81f31333\u6beb\u5df4\uff0c\u6a2a\u8de89\u4e2a\u6570\u91cf\u7ea7<\/p>\n<p><strong>\u5353\u8d8a\u8010\u8150\u8680\u6027\u80fd<\/strong><br \/>\n\u53ef\u9009\u914d\u9676\u74f7\u6216\u805a\u5bf9\u4e8c\u7532\u82ef(Parylene)\u4f20\u611f\u5668\u9632\u62a4\u5c42<\/p>\n<p><strong>\u6c14\u4f53\u7c7b\u578b\u65e0\u5173\u6d4b\u91cf<\/strong><br \/>\n2\u81f31333\u6beb\u5df4\u8303\u56f4\u5185\u91c7\u7528\u7cbe\u5bc6\u8584\u819c\u4f20\u611f\u5668\u6280\u672f<\/p>\n<p><strong>\u6781\u81f4\u6027\u4ef7\u6bd4<\/strong><br \/>\n\u4e3a\u5404\u7c7b\u771f\u7a7a\u5e94\u7528\u63d0\u4f9b\u4e1a\u754c\u9886\u5148\u7684\u6027\u80fd\u8868\u73b0<\/p>\n<h4 class=\"card-header\">VPM-5-10101211\u200b<\/h4>\n<ul class=\"list-group list-group-flush\">\n<li class=\"list-group-item\">DN16KF Flange<\/li>\n<li class=\"list-group-item\">Standard Sensors<\/li>\n<li class=\"list-group-item\">RS-232 Interface<\/li>\n<li class=\"list-group-item\">mbar<\/li>\n<li class=\"list-group-item\">Std. Analog Output<\/li>\n<li class=\"list-group-item\">1 Setpoint Relay<\/li>\n<li class=\"list-group-item\">9 pin. D-sub<\/li>\n<\/ul>\n<h4 class=\"card-header\">VPM-5-10201211<\/h4>\n<ul class=\"list-group list-group-flush\">\n<li class=\"list-group-item\">DN16KF Flange<\/li>\n<li class=\"list-group-item\">Standard Sensors<\/li>\n<li class=\"list-group-item\">RS-485 Interface<\/li>\n<li class=\"list-group-item\">mbar<\/li>\n<li class=\"list-group-item\">Std. Analog Output<\/li>\n<li class=\"list-group-item\">1 Setpoint Relay<\/li>\n<li class=\"list-group-item\">9 pin. D-sub<\/li>\n<\/ul>\n<h4 class=\"card-header\">VPM-5-10101111<\/h4>\n<ul class=\"list-group list-group-flush\">\n<li class=\"list-group-item\">DN16KF Flange<\/li>\n<li class=\"list-group-item\">Standard Sensors<\/li>\n<li class=\"list-group-item\">RS-232 Interface<\/li>\n<li class=\"list-group-item\">torr<\/li>\n<li class=\"list-group-item\">Std. Analog Output<\/li>\n<li class=\"list-group-item\">1 Setpoint Relay<\/li>\n<li class=\"list-group-item\">9 pin. D-sub<\/li>\n<\/ul>\n<h4 class=\"card-header\">VPM-5-10201111<\/h4>\n<ul class=\"list-group list-group-flush\">\n<li class=\"list-group-item\">DN16KF Flange<\/li>\n<li class=\"list-group-item\">Standard Sensors<\/li>\n<li class=\"list-group-item\">RS-485 Interface<\/li>\n<li class=\"list-group-item\">torr<\/li>\n<li class=\"list-group-item\">Std.\u00a0Analog Output<\/li>\n<li class=\"list-group-item\">1 Setpoint Relay<\/li>\n<li class=\"list-group-item\">9 pin. D-sub<\/li>\n<\/ul>\n<p><strong>\u9886\u5148\u7684\u771f\u7a7a\u6d4b\u91cf\u6280\u672f<\/strong><br \/>\nVPM-5 SmartPirani&#x2122;\u53d8\u9001\u5668\u51ed\u501f\u5353\u8d8a\u6027\u80fd\uff0c\u5c06\u70ed\u5bfc\u5f0f\u771f\u7a7a\u8ba1\u7684\u53ef\u7528\u6d4b\u91cf\u8303\u56f4\u6269\u5c551-3\u4e2a\u6570\u91cf\u7ea7\uff0c\u91cd\u65b0\u5b9a\u4e49\u4e86\u771f\u7a7a\u6d4b\u91cf\u7684\u884c\u4e1a\u57fa\u51c6\u3002<img decoding=\"async\" src=\"https:\/\/www.sens4.com\/web\/image\/704120-ef47e375\/VPM-5-range.png\" alt=\"VPM-5 range\" \/><\/p>\n<p>\u7a81\u7834\u6027\u6280\u672f\u89e3\u51b3\u6c14\u4f53\u4f9d\u8d56\u6027\u95ee\u9898<br \/>\n\u901a\u8fc7\u96c6\u6210<a href=\"https:\/\/www.bihec.com\/sens4-vacuum\/tag\/mems%e8%96%84%e8%86%9c%e4%bc%a0%e6%84%9f%e5%99%a8\/\" title=\"View all posts in MEMS\u8584\u819c\u4f20\u611f\u5668\" target=\"_blank\">MEMS\u8584\u819c\u4f20\u611f\u5668<\/a>\uff0cSmartPirani&#x2122;\u6210\u529f\u6d88\u9664\u4e86\u4f20\u7edf\u70ed\u5bfc\u5f0f\u771f\u7a7a\u8ba1\u5728\u7c97\u771f\u7a7a\u8303\u56f4\u5185\u7684\u6c14\u4f53\u4f9d\u8d56\u6027\u96be\u9898\u3002\u8be5\u4f20\u611f\u5668\u63d0\u4f9b\u4e0e\u6602\u8d35\u7535\u5bb9\u5f0f\u538b\u529b\u8ba1\u76f8\u5ab2\u7f8e\u7684\u6d4b\u91cf\u7cbe\u5ea6\uff0c\u5176\u6d4b\u91cf\u7ed3\u679c\u5b8c\u5168\u4e0d\u53d7\u6c14\u4f53\u79cd\u7c7b\u548c\u6d53\u5ea6\u5f71\u54cd\u3002\u8fd9\u4e00\u6280\u672f\u7a81\u7834\u663e\u8457\u63d0\u5347\u4e86\u6d4b\u91cf\u53ef\u9760\u6027\uff0c\u786e\u4fdd\u771f\u7a7a\u7cfb\u7edf\u6392\u6c14\u8fc7\u7a0b\u63a7\u5236\u66f4\u52a0\u7cbe\u51c6\uff0c\u6709\u6548\u9632\u6b62\u7cfb\u7edf\u8fc7\u538b\u98ce\u9669\u3002<\/p>\n<p>\u4e25\u82db\u5de5\u51b5\u5e94\u7528\u89e3\u51b3\u65b9\u6848<br \/>\n\u9488\u5bf9\u53ef\u80fd\u63a5\u89e6\u8150\u8680\u6027\u6216\u6d3b\u6027\u6c14\u4f53\u7684\u5e94\u7528\u73af\u5883\uff0cSmartPirani&#x2122;\u53ef\u9009\u914d\u9ad8\u6027\u80fd\u9632\u62a4\u9540\u5c42\uff0c\u4e3a\u4f20\u611f\u5668\u63d0\u4f9b\u53ef\u9760\u4fdd\u62a4\u5c4f\u969c\u3002<\/p>\n<p>\u65b0\u4e00\u4ee3\u9632\u62a4\u6280\u672f\u9009\u9879\uff1a<br \/>\n\u2022 \u9676\u74f7\u9632\u62a4\u5c42\uff1a\u5177\u6709\u5353\u8d8a\u8010\u8150\u8680\u7279\u6027\uff0c\u662f\u7ecf\u7535\u5bb9\u5f0f\u8584\u819c\u89c4\u9a8c\u8bc1\u7684\u771f\u7a7a\u4f20\u611f\u5668\u819c\u7247\u6750\u6599<br \/>\n\u2022 \u805a\u5bf9\u4e8c\u7532\u82ef(Parylene)\u9632\u62a4\u5c42\uff1a\u72ec\u7279\u805a\u5408\u7269\u6750\u6599\u517c\u5177\u8d85\u5f3a\u8010\u8150\u8680\u6027\u548c\u758f\u6c34\u7279\u6027\uff0c\u4e13\u4e3a\u51bb\u5e72\u706d\u83cc\u7b49\u533b\u7597\u5e94\u7528\u8bbe\u8ba1<\/p>\n<p>\u9897\u7c92\u9632\u62a4\u521b\u65b0\u8bbe\u8ba1<br \/>\n\u9488\u5bf9\u5b58\u5728\u9897\u7c92\u6c61\u67d3\u7684\u771f\u7a7a\u5de5\u827a\uff0cSmartPirani&#x2122;\u53ef\u914d\u5907\u9632\u62a4\u6321\u677f\uff0c\u6709\u6548\u963b\u9694\u5b8f\u89c2\u9897\u7c92\u7269\u3002\u7ed3\u5408\u53ef\u9009\u9632\u62a4\u9540\u5c42\u6280\u672f\uff0c\u65b0\u4e00\u4ee3\u53d8\u9001\u5668\u4e13\u4e3a\u5e94\u5bf9\u6781\u7aef\u771f\u7a7a\u73af\u5883\u6311\u6218\u800c\u6253\u9020\u3002<\/p>\n<table class=\"table table-bordered o_table\">\n<tbody>\n<tr>\n<td class=\"bg-o-color-1\">\n<h4>Specifications<\/h4>\n<\/td>\n<td class=\"bg-o-color-1\"><\/td>\n<\/tr>\n<tr>\n<td>Measuring range in mbar<\/td>\n<td>1\u00d710-6 to 1333 mbar (7.5\u00d710-7 to 1000 Torr)<\/td>\n<\/tr>\n<tr>\n<td class=\"bg-100\">Measuring principle 1\u00d710-6 to 1.5 mbar<\/td>\n<td class=\"bg-100\">MEMS Pirani thermal conductivity<\/td>\n<\/tr>\n<tr>\n<td>Measuring principle 1.5 to 2 mbar<\/td>\n<td>Blended MEMS Pirani \/ piezo reading<\/td>\n<\/tr>\n<tr>\n<td class=\"bg-100\">Measuring principle 2 to 1333 mbar<\/td>\n<td class=\"bg-100\">MEMS piezo resistive diaphragm<\/td>\n<\/tr>\n<tr>\n<td>Accuracy 1\u00d710-5 to 9.99\u00d710-5<\/td>\n<td>25% of reading<\/td>\n<\/tr>\n<tr>\n<td class=\"bg-100\">Accuracy 1\u00d710-4 to 7.99 mbar<\/td>\n<td class=\"bg-100\">5% of reading<\/td>\n<\/tr>\n<tr>\n<td>Accuracy 8.00 to 99.9 mbar<\/td>\n<td>1% of reading<\/td>\n<\/tr>\n<tr>\n<td class=\"bg-100\">Accuracy 100 to 800 mbar<\/td>\n<td class=\"bg-100\">0.5% of reading<\/td>\n<\/tr>\n<tr>\n<td>Accuracy 800 to 1099 mbar<\/td>\n<td>0.25% of reading<\/td>\n<\/tr>\n<tr>\n<td class=\"bg-100\">Accuracy 1100 to 1333 mbar<\/td>\n<td class=\"bg-100\">0.5% reading<\/td>\n<\/tr>\n<tr>\n<td>Hysteresis 1\u00d710-3 to 10 mbar (ISO19685:2017)<\/td>\n<td>1%<\/td>\n<\/tr>\n<tr>\n<td class=\"bg-100\">Hysteresis 10 to 1333 mbar (ISO19685:2017)<\/td>\n<td class=\"bg-100\">0.1%<\/td>\n<\/tr>\n<tr>\n<td>Analog output resolution<\/td>\n<td>16 bit (150 \u03bcV)<\/td>\n<\/tr>\n<tr>\n<td class=\"bg-100\">Analog output update rate<\/td>\n<td class=\"bg-100\">124 Hz<\/td>\n<\/tr>\n<tr>\n<td>Response time (ISO 19685:2017)<\/td>\n<td>&lt;20 ms<\/td>\n<\/tr>\n<tr>\n<td class=\"bg-100\">Temperature compensation<\/td>\n<td class=\"bg-100\">+10 to +50 \u00b0C<\/td>\n<\/tr>\n<tr>\n<td>Solid state relay set point range<\/td>\n<td>5\u00d710-6 to 1333 mbar (3.75\u00d710-6 to 1000 Torr)<\/td>\n<\/tr>\n<tr>\n<td class=\"bg-100\">Solid state relay contact rating<\/td>\n<td class=\"bg-100\">50 V, 100 mArms \/ mADC<\/td>\n<\/tr>\n<tr>\n<td>Solid state relay approvals<\/td>\n<td>UL Recognized: File E76270<\/p>\n<p>CSA\u00a0Certified: Certificate 1175739<\/p>\n<p>EN\/IEC 60950-1 Certified<\/td>\n<\/tr>\n<tr>\n<td class=\"bg-o-color-1\"><strong>Environment conditions<\/strong><\/td>\n<td class=\"bg-o-color-1\"><\/td>\n<\/tr>\n<tr>\n<td>Operating ambient temperature<\/td>\n<td>-20 to +50 \u00b0C<\/td>\n<\/tr>\n<tr>\n<td class=\"bg-100\">Media temperature<\/td>\n<td class=\"bg-100\">-20 to +50 \u00b0C<\/td>\n<\/tr>\n<tr>\n<td>Storage ambient temperature<\/td>\n<td>-40 to +120 \u00b0C<\/td>\n<\/tr>\n<tr>\n<td class=\"bg-100\">Bake-out temperature (non-operating)<\/td>\n<td class=\"bg-100\">+120 \u00b0C<\/td>\n<\/tr>\n<tr>\n<td>Maximum media pressure(3)<\/td>\n<td>10 bar absolute<\/td>\n<\/tr>\n<tr>\n<td class=\"bg-100\">Mounting position<\/td>\n<td class=\"bg-100\">Arbitrary<\/td>\n<\/tr>\n<tr>\n<td>Protection rating, EN 60529\/A2:2013<\/td>\n<td>IP40<\/td>\n<\/tr>\n<tr>\n<td class=\"bg-100\">Humidity, IEC 68-2-38<\/td>\n<td class=\"bg-100\">98%, non-condensing<\/td>\n<\/tr>\n<tr>\n<td class=\"bg-o-color-1\"><strong>Power supply<\/strong><\/td>\n<td class=\"bg-o-color-1\"><\/td>\n<\/tr>\n<tr>\n<td>Supply voltage<\/td>\n<td>12-30 VDC<\/td>\n<\/tr>\n<tr>\n<td class=\"bg-100\">Power consumption<\/td>\n<td class=\"bg-100\">240 mW (max)<\/td>\n<\/tr>\n<tr>\n<td>Reverse polarity protection<\/td>\n<td>Yes<\/td>\n<\/tr>\n<tr>\n<td class=\"bg-100\">Overvoltage protection<\/td>\n<td class=\"bg-100\">Yes<\/td>\n<\/tr>\n<tr>\n<td>Internal fuse<\/td>\n<td>100 mA (thermal recoverable)<\/td>\n<\/tr>\n<tr>\n<td class=\"bg-o-color-1\"><strong>Materials<\/strong><\/td>\n<td class=\"bg-o-color-1\"><\/td>\n<\/tr>\n<tr>\n<td>Enclosure<\/td>\n<td>SS 1.4307 \/ AISI 304L \/ Aluminum 6061<\/td>\n<\/tr>\n<tr>\n<td class=\"bg-100\">Vacuum Process flange (media wetted)<\/td>\n<td class=\"bg-100\">SS 1.4401 \/ AISI 316<\/td>\n<\/tr>\n<tr>\n<td>Vacuum exposed materials (media wetted) Standard version<\/td>\n<td>316 Stainless steel, Kovar, glass, silicon, nickel, aluminum, SiO2, Si3N4, gold, Viton\u00ae, low out-gassing epoxy resin, solder, RO4305<\/td>\n<\/tr>\n<tr>\n<td class=\"bg-100\">Vacuum exposed materials (media wetted) Parylene protected version<\/td>\n<td class=\"bg-100\">316 Stainless steel, Viton\u00ae, Parylene<\/td>\n<\/tr>\n<tr>\n<td>Vacuum exposed materials (media wetted) Ceramic protected version<\/td>\n<td>316 Stainless steel, Viton\u00ae, Aluminum oxide ceramic (AI2O3)<\/td>\n<\/tr>\n<tr>\n<td class=\"bg-100\">Process leak tightness<\/td>\n<td class=\"bg-100\">&lt;1\u00b710-9 mbar\u00b7l\/s<\/td>\n<\/tr>\n<tr>\n<td class=\"bg-o-color-1\"><strong>Reliability<\/strong><\/td>\n<td class=\"bg-o-color-1\"><\/td>\n<\/tr>\n<tr>\n<td>MTBF (Mean Time Between Failure)<\/td>\n<td>13.092.170 hours<\/td>\n<\/tr>\n<tr>\n<td class=\"bg-100\">Failure rate FIT (Failure In Time, where time=10E+9 hours)<\/td>\n<td class=\"bg-100\">76,38<\/td>\n<\/tr>\n<tr>\n<td class=\"bg-o-color-1\"><strong>Approvals<\/strong><\/td>\n<td class=\"bg-o-color-1\"><\/td>\n<\/tr>\n<tr>\n<td>CE<\/td>\n<td>EMC directive 2014\/30\/EU<\/td>\n<\/tr>\n<tr>\n<td class=\"bg-100\">RoHS compliance<\/td>\n<td class=\"bg-100\">Directive EU 2015\/863<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<p><a href=\"https:\/\/www.bihec.com\/sens4-vacuum\/wp-admin\/edit.php?tag=sens4-vcm-1%e9%99%b6%e7%93%b7%e9%9a%94%e8%86%9c%e7%9c%9f%e7%a9%ba%e4%bc%a0%e6%84%9f%e5%99%a8\">sens4 VCM-1\u9676\u74f7\u9694\u819c\u771f\u7a7a\u4f20\u611f\u5668<\/a>\u3001<a href=\"https:\/\/www.bihec.com\/sens4-vacuum\/wp-admin\/edit.php?tag=sens4-vdm-3\">sens4 VDM-3<\/a>\u3001<a href=\"https:\/\/www.bihec.com\/sens4-vacuum\/wp-admin\/edit.php?tag=sens4-vdm-3%e9%99%b6%e7%93%b7%e8%86%9c%e7%89%87%e7%9c%9f%e7%a9%ba%e4%bc%a0%e6%84%9f%e5%99%a8\">sens4 VDM-3\u9676\u74f7\u819c\u7247\u771f\u7a7a\u4f20\u611f\u5668<\/a>\u3001<a href=\"https:\/\/www.bihec.com\/sens4-vacuum\/wp-admin\/edit.php?tag=sens4-vpm-4-smartpirani-lite%e7%9c%9f%e7%a9%ba%e5%8f%98%e9%80%81%e5%99%a8\">sens4 VPM-4 SmartPirani Lite\u771f\u7a7a\u53d8\u9001\u5668<\/a>\u3001<a href=\"https:\/\/www.bihec.com\/sens4-vacuum\/wp-admin\/edit.php?tag=sens4%e7%9c%9f%e7%a9%ba%e4%bc%a0%e6%84%9f%e5%99%a8\">sens4\u771f\u7a7a\u4f20\u611f\u5668<\/a>\u3001<a href=\"https:\/\/www.bihec.com\/sens4-vacuum\/wp-admin\/edit.php?tag=sens4%e9%99%b6%e7%93%b7%e8%86%9c%e7%89%87%e7%9c%9f%e7%a9%ba%e4%bc%a0%e6%84%9f%e5%99%a8\">sens4\u9676\u74f7\u819c\u7247\u771f\u7a7a\u4f20\u611f\u5668<\/a>\u3001<a href=\"https:\/\/www.bihec.com\/sens4-vacuum\/wp-admin\/edit.php?tag=vcm-1%e4%bc%a0%e6%84%9f%e5%99%a8\">VCM-1\u4f20\u611f\u5668<\/a>\u3001<a href=\"https:\/\/www.bihec.com\/sens4-vacuum\/wp-admin\/edit.php?tag=vdm-2%e9%99%b6%e7%93%b7%e8%86%9c%e7%89%87%e7%9c%9f%e7%a9%ba%e4%bc%a0%e6%84%9f%e5%99%a8\">VDM-2\u9676\u74f7\u819c\u7247\u771f\u7a7a\u4f20\u611f\u5668<\/a>\u3001<a href=\"https:\/\/www.bihec.com\/sens4-vacuum\/wp-admin\/edit.php?tag=vdm-3%e9%99%b6%e7%93%b7%e8%86%9c%e7%89%87%e7%9c%9f%e7%a9%ba%e4%bc%a0%e6%84%9f%e5%99%a8\">VDM-3\u9676\u74f7\u819c\u7247\u771f\u7a7a\u4f20\u611f\u5668<\/a>\u3001<a href=\"https:\/\/www.bihec.com\/sens4-vacuum\/wp-admin\/edit.php?tag=vpm-4-mems%e7%9a%ae%e6%8b%89%e5%b0%bc%e4%bc%a0%e6%84%9f%e5%99%a8\">VPM-4 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