sens4 VPM-5 SmartPirani 真空变送器

VPM-5 SmartPirani™ 真空变送器采用尖端技术打造，不仅提供行业领先的性能表现，更通过将热导式真空计的可用测量范围扩展1-3个数量级，树立了全新的性能标杆。

该产品基于创新的MEMS（微机电系统）传感器技术，结合革命性的高精度数字信号处理架构和先进的测量算法。配合精密的自动化制造与校准工艺，这些技术要素共同成就了一款具有无与伦比测量性能的独特产品。

超宽量程覆盖
1.0E-6至1333毫巴，横跨9个数量级

卓越耐腐蚀性能
可选配陶瓷或聚对二甲苯(Parylene)传感器防护层

气体类型无关测量
2至1333毫巴范围内采用精密薄膜传感器技术

极致性价比
为各类真空应用提供业界领先的性能表现

VPM-5-10101211

DN16KF Flange
Standard Sensors
RS-232 Interface
mbar
Std. Analog Output
1 Setpoint Relay
9 pin. D-sub

VPM-5-10201211

DN16KF Flange
Standard Sensors
RS-485 Interface
mbar
Std. Analog Output
1 Setpoint Relay
9 pin. D-sub

VPM-5-10101111

DN16KF Flange
Standard Sensors
RS-232 Interface
torr
Std. Analog Output
1 Setpoint Relay
9 pin. D-sub

VPM-5-10201111

DN16KF Flange
Standard Sensors
RS-485 Interface
torr
Std. Analog Output
1 Setpoint Relay
9 pin. D-sub

领先的真空测量技术
VPM-5 SmartPirani™变送器凭借卓越性能，将热导式真空计的可用测量范围扩展1-3个数量级，重新定义了真空测量的行业基准。

突破性技术解决气体依赖性问题
通过集成MEMS薄膜传感器，SmartPirani™成功消除了传统热导式真空计在粗真空范围内的气体依赖性难题。该传感器提供与昂贵电容式压力计相媲美的测量精度，其测量结果完全不受气体种类和浓度影响。这一技术突破显著提升了测量可靠性，确保真空系统排气过程控制更加精准，有效防止系统过压风险。

严苛工况应用解决方案
针对可能接触腐蚀性或活性气体的应用环境，SmartPirani™可选配高性能防护镀层，为传感器提供可靠保护屏障。

新一代防护技术选项：
• 陶瓷防护层：具有卓越耐腐蚀特性，是经电容式薄膜规验证的真空传感器膜片材料
• 聚对二甲苯(Parylene)防护层：独特聚合物材料兼具超强耐腐蚀性和疏水特性，专为冻干灭菌等医疗应用设计

颗粒防护创新设计
针对存在颗粒污染的真空工艺，SmartPirani™可配备防护挡板，有效阻隔宏观颗粒物。结合可选防护镀层技术，新一代变送器专为应对极端真空环境挑战而打造。

Specifications
Measuring range in mbar	1×10-6 to 1333 mbar (7.5×10-7 to 1000 Torr)
Measuring principle 1×10-6 to 1.5 mbar	MEMS Pirani thermal conductivity
Measuring principle 1.5 to 2 mbar	Blended MEMS Pirani / piezo reading
Measuring principle 2 to 1333 mbar	MEMS piezo resistive diaphragm
Accuracy 1×10-5 to 9.99×10-5	25% of reading
Accuracy 1×10-4 to 7.99 mbar	5% of reading
Accuracy 8.00 to 99.9 mbar	1% of reading
Accuracy 100 to 800 mbar	0.5% of reading
Accuracy 800 to 1099 mbar	0.25% of reading
Accuracy 1100 to 1333 mbar	0.5% reading
Hysteresis 1×10-3 to 10 mbar (ISO19685:2017)	1%
Hysteresis 10 to 1333 mbar (ISO19685:2017)	0.1%
Analog output resolution	16 bit (150 μV)
Analog output update rate	124 Hz
Response time (ISO 19685:2017)	<20 ms
Temperature compensation	+10 to +50 °C
Solid state relay set point range	5×10-6 to 1333 mbar (3.75×10-6 to 1000 Torr)
Solid state relay contact rating	50 V, 100 mArms / mADC
Solid state relay approvals	UL Recognized: File E76270 CSA Certified: Certificate 1175739 EN/IEC 60950-1 Certified
Environment conditions
Operating ambient temperature	-20 to +50 °C
Media temperature	-20 to +50 °C
Storage ambient temperature	-40 to +120 °C
Bake-out temperature (non-operating)	+120 °C
Maximum media pressure(3)	10 bar absolute
Mounting position	Arbitrary
Protection rating, EN 60529/A2:2013	IP40
Humidity, IEC 68-2-38	98%, non-condensing
Power supply
Supply voltage	12-30 VDC
Power consumption	240 mW (max)
Reverse polarity protection	Yes
Overvoltage protection	Yes
Internal fuse	100 mA (thermal recoverable)
Materials
Enclosure	SS 1.4307 / AISI 304L / Aluminum 6061
Vacuum Process flange (media wetted)	SS 1.4401 / AISI 316
Vacuum exposed materials (media wetted) Standard version	316 Stainless steel, Kovar, glass, silicon, nickel, aluminum, SiO2, Si3N4, gold, Viton®, low out-gassing epoxy resin, solder, RO4305
Vacuum exposed materials (media wetted) Parylene protected version	316 Stainless steel, Viton®, Parylene
Vacuum exposed materials (media wetted) Ceramic protected version	316 Stainless steel, Viton®, Aluminum oxide ceramic (AI2O3)
Process leak tightness	<1·10-9 mbar·l/s
Reliability
MTBF (Mean Time Between Failure)	13.092.170 hours
Failure rate FIT (Failure In Time, where time=10E+9 hours)	76,38
Approvals
CE	EMC directive 2014/30/EU
RoHS compliance	Directive EU 2015/863

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