VPM-5 SmartPirani™ 真空变送器采用尖端技术打造，不仅提供行业领先的性能表现，更通过将热导式真空计的可用测量范围扩展1-3个数量级，树立了全新的性能标杆。
该产品基于创新的MEMS（微机电系统）传感器技术，结合革命性的高精度数字信号处理架构和先进的测量算法。配合精密的自动化制造与校准工艺，这些技术要素共同成就了一款具有无与伦比测量性能的独特产品。
超宽量程覆盖
1.0E-6至1333毫巴，横跨9个数量级
卓越耐腐蚀性能
可选配陶瓷或聚对二甲苯(Parylene)传感器防护层
气体类型无关测量
2至1333毫巴范围内采用精密薄膜传感器技术
极致性价比
为各类真空应用提供业界领先的性能表现
VPM-5-10101211
- DN16KF Flange
- Standard Sensors
- RS-232 Interface
- mbar
- Std. Analog Output
- 1 Setpoint Relay
- 9 pin. D-sub
VPM-5-10201211
- DN16KF Flange
- Standard Sensors
- RS-485 Interface
- mbar
- Std. Analog Output
- 1 Setpoint Relay
- 9 pin. D-sub
VPM-5-10101111
- DN16KF Flange
- Standard Sensors
- RS-232 Interface
- torr
- Std. Analog Output
- 1 Setpoint Relay
- 9 pin. D-sub
VPM-5-10201111
- DN16KF Flange
- Standard Sensors
- RS-485 Interface
- torr
- Std. Analog Output
- 1 Setpoint Relay
- 9 pin. D-sub
领先的真空测量技术
VPM-5 SmartPirani™变送器凭借卓越性能，将热导式真空计的可用测量范围扩展1-3个数量级，重新定义了真空测量的行业基准。
突破性技术解决气体依赖性问题
通过集成MEMS薄膜传感器，SmartPirani™成功消除了传统热导式真空计在粗真空范围内的气体依赖性难题。该传感器提供与昂贵电容式压力计相媲美的测量精度，其测量结果完全不受气体种类和浓度影响。这一技术突破显著提升了测量可靠性，确保真空系统排气过程控制更加精准，有效防止系统过压风险。
严苛工况应用解决方案
针对可能接触腐蚀性或活性气体的应用环境，SmartPirani™可选配高性能防护镀层，为传感器提供可靠保护屏障。
新一代防护技术选项：
• 陶瓷防护层：具有卓越耐腐蚀特性，是经电容式薄膜规验证的真空传感器膜片材料
• 聚对二甲苯(Parylene)防护层：独特聚合物材料兼具超强耐腐蚀性和疏水特性，专为冻干灭菌等医疗应用设计
颗粒防护创新设计
针对存在颗粒污染的真空工艺，SmartPirani™可配备防护挡板，有效阻隔宏观颗粒物。结合可选防护镀层技术，新一代变送器专为应对极端真空环境挑战而打造。
Specifications | |
| Measuring range in mbar | 1×10-6 to 1333 mbar (7.5×10-7 to 1000 Torr) |
| Measuring principle 1×10-6 to 1.5 mbar | MEMS Pirani thermal conductivity |
| Measuring principle 1.5 to 2 mbar | Blended MEMS Pirani / piezo reading |
| Measuring principle 2 to 1333 mbar | MEMS piezo resistive diaphragm |
| Accuracy 1×10-5 to 9.99×10-5 | 25% of reading |
| Accuracy 1×10-4 to 7.99 mbar | 5% of reading |
| Accuracy 8.00 to 99.9 mbar | 1% of reading |
| Accuracy 100 to 800 mbar | 0.5% of reading |
| Accuracy 800 to 1099 mbar | 0.25% of reading |
| Accuracy 1100 to 1333 mbar | 0.5% reading |
| Hysteresis 1×10-3 to 10 mbar (ISO19685:2017) | 1% |
| Hysteresis 10 to 1333 mbar (ISO19685:2017) | 0.1% |
| Analog output resolution | 16 bit (150 μV) |
| Analog output update rate | 124 Hz |
| Response time (ISO 19685:2017) | <20 ms |
| Temperature compensation | +10 to +50 °C |
| Solid state relay set point range | 5×10-6 to 1333 mbar (3.75×10-6 to 1000 Torr) |
| Solid state relay contact rating | 50 V, 100 mArms / mADC |
| Solid state relay approvals | UL Recognized: File E76270 CSA Certified: Certificate 1175739 EN/IEC 60950-1 Certified |
| Environment conditions | |
| Operating ambient temperature | -20 to +50 °C |
| Media temperature | -20 to +50 °C |
| Storage ambient temperature | -40 to +120 °C |
| Bake-out temperature (non-operating) | +120 °C |
| Maximum media pressure(3) | 10 bar absolute |
| Mounting position | Arbitrary |
| Protection rating, EN 60529/A2:2013 | IP40 |
| Humidity, IEC 68-2-38 | 98%, non-condensing |
| Power supply | |
| Supply voltage | 12-30 VDC |
| Power consumption | 240 mW (max) |
| Reverse polarity protection | Yes |
| Overvoltage protection | Yes |
| Internal fuse | 100 mA (thermal recoverable) |
| Materials | |
| Enclosure | SS 1.4307 / AISI 304L / Aluminum 6061 |
| Vacuum Process flange (media wetted) | SS 1.4401 / AISI 316 |
| Vacuum exposed materials (media wetted) Standard version | 316 Stainless steel, Kovar, glass, silicon, nickel, aluminum, SiO2, Si3N4, gold, Viton®, low out-gassing epoxy resin, solder, RO4305 |
| Vacuum exposed materials (media wetted) Parylene protected version | 316 Stainless steel, Viton®, Parylene |
| Vacuum exposed materials (media wetted) Ceramic protected version | 316 Stainless steel, Viton®, Aluminum oxide ceramic (AI2O3) |
| Process leak tightness | <1·10-9 mbar·l/s |
| Reliability | |
| MTBF (Mean Time Between Failure) | 13.092.170 hours |
| Failure rate FIT (Failure In Time, where time=10E+9 hours) | 76,38 |
| Approvals | |
| CE | EMC directive 2014/30/EU |
| RoHS compliance | Directive EU 2015/863 |
