超宽测量范围
1.0E-6至1333毫巴的9个量程，其中5E-3至1333毫巴区间支持气体类型无关测量
创新四重传感器组合
MEMS皮拉尼、电容薄膜、压电薄膜与大气压传感器的智能融合
CDG自动调零功能
自动归零技术彻底免除了手动调校需求
大气参考开关模式
基于大气压的相对测量实现真空系统精确排气控制
VPM-17 TriCAP™ ATM真空传感器树立了全新标杆，为广泛真空应用提供一体化测量解决方案。与传统真空计不同，该设备不仅具备5.0E-3至1333 mbar的气体类型无关型经济测量范围，还集成可低至1E-6 mbar的皮拉尼热损耗测量能力。
在气体成分可能变化的真空应用中，传统依赖气体类型的皮拉尼规易导致测量误差。TriCAP™ ATM传感器采用精密电容式薄膜规（CDG）技术，彻底消除气体依赖性，即使气体特性变化也能确保测量精准度。
除真空测量外，VPM-17还能实现相对于大气压的差压测量，为真空系统排气过程提供精确控制。
重新定义真空测量标准
TriCAP™ ATM真空计开创性地采用多传感器融合技术，既能作为传统皮拉尼规应用的性能升级方案，又可替代分立的电容式压力计与皮拉尼规组合，提供高性价比的一体化测量解决方案。
CDG自动零点校准技术
集成的MEMS皮拉尼热损耗传感器将测量范围扩展至1E-6 mbar，并为电容式压力计引入创新性自动零点校准功能，彻底消除了传统电容薄膜规需手动调零的操作需求。无需按键调零——仅需抽真空至自动校准点，电容薄膜规即自动完成校准，随时提供精确测量。
严苛工况应对方案
针对可能接触腐蚀性或活性气体的应用场景，TriCAP™可选配共形保护涂层作为高效防护屏障。
该系列传感器还可选配陶瓷或派瑞林（Parylene）防护层：
- 陶瓷层具有卓越的耐腐蚀性，广泛用于电容薄膜规的真空传感器膜片
- 派瑞林作为一种特种聚合物，兼具优异耐腐蚀性与疏水性，特别适合冷冻干燥、灭菌等医疗应用
在存在颗粒污染的真空工艺中，TriCAP™可加装防护挡板阻隔宏观颗粒。结合上述防护涂层选项，该系列传感器专为耐受极端真空环境而设计。
Specifications | |
| Measuring range in mbar | 1E-6 to 1333 mbar (7.5E-7 to 1000 Torr) |
| Measuring principle 1E-6 to 1E-3 mbar | MEMS Pirani thermal conductivity |
| Measuring principle 1E-3 to 5E-3 mbar | Blended MEMS Pirani / CDG |
| Measuring principle 5E-3 to 3.99 mbar | Capacitance Diaphragm Gauge (CDG) |
| Measuring principle 4 to 5.99 mbar | Blended CDG / Piezo Diaphragm |
| Measuring principle 6 to 1333 mbar | Piezo Diaphragm |
| Accuracy 1E-5 to 9.99E-5 mbar | 25% of reading |
| Accuracy 1E-4 to 9.99E-3 mbar | 5% of reading |
| Accuracy 1E-2 to 799 mbar | 0.5% of reading |
| Accuracy 800 to 1099 mbar | 0.25% of reading |
| Accuracy 1100 to 1333 mbar | 0.5% reading |
| Barometric measurement range | 300 to 1200 mbar |
| Barometric accuracy | +/- 0.5 mbar |
| Atmospheric referenced pressure output range | – 1333 to + 1333 mbar |
| Hysteresis 1E-3 to 10 mbar (ISO19685:2017) | 1% |
| Hysteresis 10 to 1333 mbar (ISO19685:2017) | 0.1% |
| Analog output resolution | 16 bit (150 μV) |
| Analog output update rate | 124 Hz |
| Response time (ISO 19685:2017) | <20 ms |
| Temperature compensation | +10 to +50 °C |
| Solid state relay set point range | 5E-6 to 1333 mbar (3.75E-6 to 1000 Torr) |
| Solid state relay contact rating | 50 V, 100 mArms / mADC |
| Solid state relay approvals | UL Recognized: File E76270 CSA Certified: Certificate 1175739 EN/IEC 60950-1 Certified |
| Environment conditions | |
| Operating ambient temperature | -20 to +50 °C |
| Media temperature | -20 to +50 °C |
| Storage ambient temperature | -20 to +80 °C |
| Bake-out temperature (non-operating) | +80 °C |
| Maximum media pressure(3) | 4 bar absolute |
| Mounting position | Arbitrary (4) |
| Protection rating, EN 60529/A2:2013 | IP40 |
| Humidity, IEC 68-2-38 | 98%, non-condensing |
| Power supply | |
| Supply voltage | 12-30 VDC |
| Power consumption | 350 mW (max) |
| Reverse polarity protection | Yes |
| Overvoltage protection | Yes |
| Internal fuse | 100 mA (thermal recoverable) |
| Materials | |
| Enclosure | SS 1.4307 / AISI 304L / Aluminum 6061 |
| Vacuum Process flange (media wetted) | SS 1.4401 / AISI 316 |
| Vacuum exposed materials (media wetted) Standard version | 316 Stainless steel, Kovar, glass, silicon, nickel, aluminum, SiO2, Si3N4, AI2O3, gold, Viton®, low out-gassing epoxy resin, solder, RO4305, vitreous silica |
| Vacuum exposed materials (media wetted) Parylene protected version | 316 Stainless steel, Viton®, Parylene |
| Vacuum exposed materials (media wetted) Ceramic protected version | 316 Stainless steel, Viton®, Aluminum oxide ceramic (AI2O3) |
| Process leak tightness | <1·10-9 mbar·l/s |
| Approvals | |
| CE | EMC directive 2014/30/EU |
| RoHS compliance | Directive EU 2015/863 |
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