PREVAC Flood source FS 40A1 洪流离子源 大束流离子源
咨询热线 15821107090
低成本电子注入源，用于 XPS/AES 和 SIMS 应用中绝缘体或半导体的电荷中和。该注入源可在两个能量范围内工作，完全由软件控制，还可提供定制的插入长度（145–421 毫米，其他长度可按需定制）和屏蔽材料，例如坡莫合金、铜。
| Mounting flange | DN 40CF (non-rotatable) |
| Energy range | 0.01 – 1000 eV |
| Sample current | up to 100 μA |
| Cathode type | thoriated tungsten |
| Shield | Cu (for μ-metal chambers) or μ-metal (for stainless steel chambers) |
| Insertion length | min. 145 mm (others on request), OD: 33.6 mm (μ-metal), 35 mm (Cu) |
| FWHM | depending on working distance (e.g. 10 mm for distance 30 mm) |
| Typical working distance | 20-100 mm |
| Bakeout temperature | up to 250°C |
| Working pressure | < 5 × 10-6 mbar |
・高电子束电流
・可选能量范围
・稳定发射
・束流轮廓控制
