EF 40C1蒸发源(Knudsen池)是一种设计用于间接电阻加热并提供高度恒定蒸发速率的源。定制插入长度114-380毫米(根据要求提供其他长度)。
特性
极其稳定的通量率
各种坩埚材料
高度可重复性和可靠性
适用于任何MBE系统
无钼结构(允许高放气温度)
整体水冷
选项
定制插入长度
有或没有集成手动/电动气动快门
线性移位
坩埚
C或K型热电偶
技术参数
Mounting flange | DN 40CF (rotatable) |
Heater | W wire (tungsten) |
Temperature range | EF 1500 °C (~250 °C – 1500 °C, 1600 °C for degas) EF 1200 °C (~250 °C – 1200 °C) |
Temperature stability | ± 0.1°C |
Crucible type (option) | PBN, Al2O3, Quartz (other materials on request) |
Crucibles volume | 5cc |
Evaporated materials | All typical materials according to crucible type |
Thermocouple type | EF 1500 °C – type C (standard) EF 1200 °C – type K (option) |
Degassing temp. | 1600 °C |
Type of shutter | side or flip type, manual or pneumatic |
Water cooling (required) | water flow: > 0.5 l/min, temperature: 20 – 30 °C, max pressure: 6 bar |
Insertion length | min. 114mm (other on request) OD: 35 mm |
Spot size | Dependent on working distance |
Working distance | 100 – 150 mm |
Bakeout temperature | up to 250 °C |
Working pressure | < 10-5 mbar |