{"id":336,"date":"2024-12-12T16:18:26","date_gmt":"2024-12-12T08:18:26","guid":{"rendered":"https:\/\/www.bihec.com\/prevac-eu\/?p=336"},"modified":"2024-12-12T16:18:26","modified_gmt":"2024-12-12T08:18:26","slug":"prevac%e7%a3%81%e6%8e%a7%e7%ae%a1%e6%ba%90-2%e8%8b%b1%e5%af%b8%e9%9d%b6","status":"publish","type":"post","link":"https:\/\/www.bihec.com\/prevac-eu\/prevac%e7%a3%81%e6%8e%a7%e7%ae%a1%e6%ba%90-2%e8%8b%b1%e5%af%b8%e9%9d%b6\/","title":{"rendered":"Prevac\u78c1\u63a7\u7ba1\u6e90\/2\u82f1\u5bf8\u9776"},"content":{"rendered":"

\u7528\u4e8e\u5728\u6e85\u5c04\u8fc7\u7a0b<\/a>\u4e2d\u65bd\u52a0\u9ad8\u5747\u5300\u6027\u8584\u5c42\u7684 \u78c1\u63a7\u7ba1\u6e90<\/a>\u3002\u7528\u67652\u82f1\u5bf8\u76f4\u5f84\u7684\u76ee\u6807<\/strong>.<\/p>\n

\u6839\u636e\u6e85\u5c04\u8fc7\u7a0b\u6240\u9700\u7684\u6761\u4ef6\uff0c\u6211\u4eec\u63d0\u4f9b\u4e24\u79cd\u7c7b\u578b\u7684\u6e90:\u7c7b\u578b<\/strong>\u00a0B<\/strong>\u00a0&\u00a0C<\/strong>.<\/span><\/span><\/span><\/p>\n

\u6240\u6709\u7c7b\u578b\u90fd\u4e0e\u6211\u4eec\u7684M600DC-PS\u7535\u6e90\u4ee5\u53ca\u5e02\u573a\u4e0a\u6240\u6709\u5176\u4ed6DC\u3001\u5c04\u9891\u548c\u8109\u51b2DC\u7535\u6e90\u5b8c\u5168\u517c\u5bb9\u3002<\/p>\n

\u78c1\u63a7\u7ba1\u6e90A\u578b<\/strong>\u7528\u4e8e\u5728\u6e85\u5c04\u8fc7\u7a0b\u4e2d\u65bd\u52a0\u5177\u6709\u9ad8\u5747\u5300\u6027\u7684\u8584\u5c42\u3002\u8be5\u6e90\u4e0eUHV\u6761\u4ef6\u517c\u5bb9\u3002\u7531\u4e8e\u96c6\u6210\u7684\u539f\u4f4d\u503e\u659c\u7cfb\u7edf\uff0c\u5b83\u53ef\u4ee5\u7528\u4e8e\u6807\u51c6\u548c\u5b9a\u5236\u51e0\u4f55\u5ba4\u3002\u901a\u8fc7\u4f7f\u7528\u5706\u9876\u578b\u8bbe\u8ba1\uff0c\u6211\u4eec\u5c06\u6253\u5f00\u5feb\u95e8\u6240\u9700\u7684\u7a7a\u95f4\u51cf\u5230\u6700\u5c0f\u3002<\/p>\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n
\u5b89\u88c5\u7528\u6cd5\u5170<\/td>\n DN 63 CF\uff0cDN 100 ISO-K*<\/td>\n<\/tr>\n
\u6700\u5927\u503c\u7535\u6e90(DC\u6a21\u5f0f)<\/td>\n 400 W DC **<\/td>\n<\/tr>\n
\u6700\u5927\u503c\u529f\u7387(\u5c04\u9891\u6a21\u5f0f)<\/td>\n 400\u74e6\u5c04\u9891**<\/td>\n<\/tr>\n
\u6700\u5927\u503c\u7535\u538bDC<\/td>\n 1200\u4f0f<\/td>\n<\/tr>\n
DC\/\u53f3\u524d\u8fde\u63a5\u5668<\/td>\n 7\/16\u578b<\/td>\n<\/tr>\n
\u76ee\u6807<\/td>\n <\/td>\n<\/tr>\n
\u5f62\u5f0f<\/td>\n \u5706\u5f62\u7684\uff1b\u5faa\u73af\u7684<\/td>\n<\/tr>\n
\u76f4\u5f84<\/td>\n 2\u82f1\u5bf8(50.8\u6beb\u7c73)0.2\u6beb\u7c73<\/td>\n<\/tr>\n
\u539a\u5ea6<\/td>\n 1-6\u6beb\u7c73<\/td>\n<\/tr>\n
\u51b7\u5374<\/td>\n \u95f4\u63a5\u7684<\/td>\n<\/tr>\n
\u6c34\u6d41<\/td>\n \u91cf\u6ef41\u5347\/\u5206\u949f<\/td>\n<\/tr>\n
\u6700\u5927\u503c\u5165\u53e3\u6c34\u6e29<\/td>\n < 28 \u00b0C<\/td>\n<\/tr>\n
\u6700\u5927\u503c\u6c34\u538b<\/td>\n 3\u5df4<\/td>\n<\/tr>\n
\u7ba1\u9053\u76f4\u5f84<\/td>\n 6\u00d71\u6beb\u7c73\u805a\u56db\u6c1f\u4e59\u70ef<\/td>\n<\/tr>\n
\u78c1\u4f53\u6750\u6599<\/td>\n \u9495\u94c1\u787c(NdFeB)<\/td>\n<\/tr>\n
\u78c1\u94c1\u6700\u5927\u3002\u6e29\u5ea6<\/td>\n 200\u6444\u6c0f\u5ea6<\/td>\n<\/tr>\n
\u5185\u90e8\u6c14\u52a8\u767e\u53f6\u7a97<\/td>\n \u662f<\/td>\n<\/tr>\n
\u5feb\u95e8\u7c7b\u578b<\/td>\n \u5706\u9876\u578b\u6216\u5e73\u6446\u578b<\/td>\n<\/tr>\n
\u539f\u4f4d\u503e\u659c\u6a21\u5757<\/td>\n \u662f\uff0c\u8303\u56f4+45 \\-10<\/td>\n<\/tr>\n
\u70df\u56f1<\/td>\n \u662f<\/td>\n<\/tr>\n
\u4e13\u7528\u6750\u6599:<\/td>\n <\/td>\n<\/tr>\n
<\/td>\n 200 W\u65f6\u7684\u5178\u578b\u901f\u7387[nm\/min]:<\/td>\n<\/tr>\n
\u94dc<\/td>\n 40.87\u7eb3\u7c73\/\u5206\u949f(\u8ddd\u79bb:150\u6beb\u7c73\uff1b\u76ee\u6807\u539a\u5ea6:3\u6beb\u7c73)***<\/td>\n<\/tr>\n
\u949b<\/td>\n 10.82\u7eb3\u7c73\/\u5206\u949f(\u8ddd\u79bb:150\u6beb\u7c73\uff1b\u76ee\u6807\u539a\u5ea6:3\u6beb\u7c73)***<\/td>\n<\/tr>\n
\uff08\u82f1\u56fd\uff09\u7ee7\u7eed\u6559\u80b2<\/td>\n 15.94\u7eb3\u7c73\/\u5206\u949f(\u8ddd\u79bb:150\u6beb\u7c73\uff1b\u76ee\u6807\u539a\u5ea6:1\u6beb\u7c73)***<\/td>\n<\/tr>\n
\u5185\u90e8\u6c14\u4f53\u5165\u53e3<\/td>\n \u662f(VCR\u6807\u51c6)<\/td>\n<\/tr>\n
\u5de5\u4f5c\u6c14\u4f53<\/td>\n \u6c29<\/td>\n<\/tr>\n
\u6700\u5927\u503c\u5de5\u4f5c\u538b\u529b<\/td>\n 5\u00d710^{-3<\/sup>\u00a0\u2013 1\u00d710^{-1<\/sup>\u6beb\u5df4(millibar\u538b\u529b\u5355\u4f4d)<\/td>\n<\/tr>\n}}
\u6700\u4f73\u5de5\u4f5c\u538b\u529b<\/td>\n 5\u00d710^{-3<\/sup>\u00a0\u2013 5\u00d710^{-2<\/sup>\u6beb\u5df4(millibar\u538b\u529b\u5355\u4f4d)<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n*\u6839\u636e\u8981\u6c42\u63d0\u4f9b\u5176\u4ed6\u5b89\u88c5\u6cd5\u5170
\n**\u6700\u5927\u529f\u7387\u7531\u76ee\u6807\u6750\u6599\u51b3\u5b9a
\n***\u8ddd\u79bb\u53d6\u51b3\u4e8e\u5ba4\u548c\u78c1\u63a7\u7ba1\u7684\u51e0\u4f55\u5f62\u72b6<\/p>\n
\u78c1\u63a7\u7ba1\u6e90B\u578b<\/strong>\u7528\u4e8e\u5728\u6e85\u5c04\u8fc7\u7a0b\u4e2d\u65bd\u52a0\u5177\u6709\u9ad8\u5747\u5300\u6027\u7684\u8584\u5c42\u3002\u8be5\u6e90\u4e0eUHV\u6761\u4ef6\u517c\u5bb9\u3002\u8be5\u6e90\u88ab\u8bbe\u8ba1\u7528\u4e8e\u6e85\u5c04\u78c1\u6027\u548c\u94c1\u78c1\u6750\u6599\u3002\u5b83\u53ef\u4ee5\u64cd\u4f5c7\u6beb\u7c73\u539a\u7684\u76ee\u6807\u3002<\/p>\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\u5b89\u88c5\u7528\u6cd5\u5170<\/td>\n DN 63 CF<\/td>\n<\/tr>\n
\u6700\u5927\u503c\u7535\u6e90(DC\u6a21\u5f0f)<\/td>\n 400 W DC **<\/td>\n<\/tr>\n
\u6700\u5927\u503c\u529f\u7387(\u5c04\u9891\u6a21\u5f0f)<\/td>\n 400\u74e6\u5c04\u9891**<\/td>\n<\/tr>\n
\u6700\u5927\u503c\u7535\u538bDC<\/td>\n 1200\u4f0f<\/td>\n<\/tr>\n
DC\/\u53f3\u524d\u8fde\u63a5\u5668<\/td>\n 7\/16\u578b<\/td>\n<\/tr>\n
\u76ee\u6807<\/td>\n <\/td>\n<\/tr>\n
\u5f62\u5f0f<\/td>\n \u6212\u6307<\/td>\n<\/tr>\n
\u76f4\u5f84<\/td>\n 2\u82f1\u5bf8(50.8\u6beb\u7c73)0.2\u6beb\u7c73<\/td>\n<\/tr>\n
\u539a\u5ea6<\/td>\n 1-7\u6beb\u7c73(\u78c1\u6027\u548c\u975e\u78c1\u6027)<\/td>\n<\/tr>\n
\u51b7\u5374<\/td>\n \u95f4\u63a5\u7684<\/td>\n<\/tr>\n
\u6c34\u6d41<\/td>\n \u91cf\u6ef41\u5347\/\u5206\u949f<\/td>\n<\/tr>\n
\u6700\u5927\u503c\u5165\u53e3\u6c34\u6e29<\/td>\n < 28 \u00b0C<\/td>\n<\/tr>\n
\u6700\u5927\u503c\u6c34\u538b<\/td>\n 3\u5df4<\/td>\n<\/tr>\n
\u7ba1\u9053\u76f4\u5f84<\/td>\n 6\u00d71\u6beb\u7c73\u805a\u56db\u6c1f\u4e59\u70ef<\/td>\n<\/tr>\n
\u78c1\u4f53\u6750\u6599<\/td>\n \u9490\u94b4(SmCo)<\/td>\n<\/tr>\n
\u78c1\u94c1\u6700\u5927\u3002\u6e29\u5ea6<\/td>\n 350\u6444\u6c0f\u5ea6<\/td>\n<\/tr>\n
\u5185\u90e8\u6c14\u52a8\u767e\u53f6\u7a97<\/td>\n \u662f<\/td>\n<\/tr>\n
\u5feb\u95e8\u7c7b\u578b<\/td>\n \u5706\u9876\u578b\u6216\u5e73\u6446\u578b<\/td>\n<\/tr>\n
\u539f\u4f4d\u503e\u659c\u6a21\u5757<\/td>\n \u662f\uff0c\u8303\u56f4+45 \\-10<\/td>\n<\/tr>\n
\u70df\u56f1<\/td>\n \u662f<\/td>\n<\/tr>\n
\u4e13\u7528\u6750\u6599:<\/td>\n <\/td>\n<\/tr>\n
<\/td>\n 200 W\u65f6\u7684\u5178\u578b\u901f\u7387[nm\/min]:<\/td>\n<\/tr>\n
\u94dc<\/td>\n 32.84\u7eb3\u7c73\/\u5206\u949f(\u8ddd\u79bb:160\u6beb\u7c73\uff1b\u76ee\u6807\u539a\u5ea6:3\u6beb\u7c73)***<\/td>\n<\/tr>\n
\u949b<\/td>\n 10.07nm\/min(\u8ddd\u79bb:160mm\uff1b\u76ee\u6807\u539a\u5ea6:3\u6beb\u7c73)***<\/td>\n<\/tr>\n
\uff08\u82f1\u56fd\uff09\u7ee7\u7eed\u6559\u80b2<\/td>\n 9.63\u7eb3\u7c73\/\u5206\u949f(\u8ddd\u79bb:160\u6beb\u7c73\uff1b\u76ee\u6807\u539a\u5ea6:3\u6beb\u7c73)***<\/td>\n<\/tr>\n
\u5185\u90e8\u6c14\u4f53\u5165\u53e3<\/td>\n \u662f(VCR\u6807\u51c6)<\/td>\n<\/tr>\n
\u5de5\u4f5c\u6c14\u4f53<\/td>\n \u6c29<\/td>\n<\/tr>\n
\u6700\u5927\u503c\u5de5\u4f5c\u538b\u529b<\/td>\n 5\u00d710^{-3<\/sup>\u00a0\u2013 1\u00d710^{-1<\/sup>\u6beb\u5df4(millibar\u538b\u529b\u5355\u4f4d)<\/td>\n<\/tr>\n}}
\u6700\u4f73\u5de5\u4f5c\u538b\u529b<\/td>\n 5\u00d710^{-3<\/sup>\u00a0\u2013 5\u00d710^{-2<\/sup>\u6beb\u5df4(millibar\u538b\u529b\u5355\u4f4d)<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n*\u6839\u636e\u8981\u6c42\u63d0\u4f9b\u5176\u4ed6\u5b89\u88c5\u6cd5\u5170
\n**\u6700\u5927\u529f\u7387\u7531\u76ee\u6807\u6750\u6599\u51b3\u5b9a
\n***\u8ddd\u79bb\u53d6\u51b3\u4e8e\u5ba4\u548c\u78c1\u63a7\u7ba1\u7684\u51e0\u4f55\u5f62\u72b6<\/p>\n
\u78c1\u63a7\u7ba1\u6e90C\u578b<\/strong>\u4e0e\u5c04\u9891\u548cDC\u517c\u5bb9\uff0c\u53ef\u6c89\u79ef\u591a\u79cd\u6750\u6599:\u5bfc\u4f53\u3001\u534a\u5bfc\u4f53\u548c\u7edd\u7f18\u4f53\u3002\u8be5\u6e90\u80fd\u591f\u4ea7\u751f\u5747\u5300\u3001\u540c\u8d28\u548c\u5c0f\u6676\u7c92\u7684\u8584\u819c\uff1b\u5177\u6709\u9ad8\u5bc6\u5ea6(\u4f4e\u7a7a\u9699\u9762\u79ef)\u3001\u9ad8\u955c\u9762\u6027(\u53cd\u5c04\u7387)\u3001\u65e0\u8f90\u5c04\u635f\u4f24\u548c\u65ad\u952e\u7b49\u4f18\u70b9\u3002<\/p>\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\nMounting flange<\/td>\n \u578b\u53f7\u4e3aDN 63CF\u6216DN 63 iso-KMS2\/63C1<\/strong>,
\n\u6216\u578b\u53f7\u4e3aDN 100CF\u6216DN 100 iso-KMS2\/100C1<\/strong><\/td>\n<\/tr>\n
Max. power (DC mode)<\/td>\n 400 W DC **<\/td>\n<\/tr>\n
Max. power (RF mode)<\/td>\n 400 W RF **<\/td>\n<\/tr>\n
Max. voltage DC<\/td>\n 1200 V<\/td>\n<\/tr>\n
Connector DC\/RF<\/td>\n type 7\/16<\/td>\n<\/tr>\n
Target<\/td>\n \u4fdd\u7ba1\u5458\u6807\u51c6<\/td>\n<\/tr>\n
form<\/td>\n circular<\/td>\n<\/tr>\n
diameter<\/td>\n 2\u2033 (50.8 mm) \u00b1 0.2 mm<\/td>\n<\/tr>\n
thickness<\/td>\n \u975e\u78c1\u6027:1-6mm\uff1b\u78c1\u6027:\u94c11\u6beb\u7c73\uff0c\u954d1\u6beb\u7c73<\/td>\n<\/tr>\n
cooling<\/td>\n indirect<\/td>\n<\/tr>\n
Water flow<\/td>\n min. 1 l\/min<\/td>\n<\/tr>\n
Max. inlet water temperature<\/td>\n < 28 \u00b0C<\/td>\n<\/tr>\n
Max. water pressure<\/td>\n 3 bar<\/td>\n<\/tr>\n
Tubing diameter<\/td>\n \u00d86\u00d71 mm PTFE<\/td>\n<\/tr>\n
Magnet material<\/td>\n Neodymium Iron Boride (NdFeB)<\/td>\n<\/tr>\n
Magnet max. temperature<\/td>\n 200\u6444\u6c0f\u5ea6<\/td>\n<\/tr>\n
Internal pneumatic shutter<\/td>\n yes<\/td>\n<\/tr>\n
Shutter type<\/td>\n dome type or flat swing<\/td>\n<\/tr>\n
Insitu tilt module<\/td>\n yes, range +45\u00b0 \u00f7 -10\u00b0<\/td>\n<\/tr>\n
Chimney<\/td>\n yes<\/td>\n<\/tr>\n
Dedicated materials:<\/td>\n <\/td>\n<\/tr>\n
<\/td>\n typical rates [nm\/min] for 200 W:<\/td>\n<\/tr>\n
Cu<\/td>\n 34.70\u7eb3\u7c73\/\u5206\u949f(\u8ddd\u79bb:100\u6beb\u7c73\uff1b\u76ee\u6807\u539a\u5ea6:3\u6beb\u7c73)***<\/td>\n<\/tr>\n
Ti<\/td>\n 6.8\u7eb3\u7c73\/\u5206\u949f(\u8ddd\u79bb:100\u6beb\u7c73\uff1b\u76ee\u6807\u539a\u5ea6:3\u6beb\u7c73)***<\/td>\n<\/tr>\n
Fe<\/td>\n 32.41\u7eb3\u7c73\/\u5206\u949f(\u8ddd\u79bb:100\u6beb\u7c73\uff1b\u76ee\u6807\u539a\u5ea6:1\u6beb\u7c73)***<\/td>\n<\/tr>\n
Internal gas inlet<\/td>\n yes (VCR standard)<\/td>\n<\/tr>\n
Working gas<\/td>\n Ar<\/td>\n<\/tr>\n
Max. working pressure<\/td>\n 5\u00d710^{-3<\/sup>\u00a0\u2013 1\u00d710^{-1<\/sup>\u00a0mbar<\/td>\n<\/tr>\n}}
Optimal working pressure<\/td>\n 5\u00d710^{-3<\/sup>\u00a0\u2013 5\u00d710^{-2<\/sup>\u00a0mbar<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n* Other mounting flanges on request
\n** The maximum power is determined by the target material
\n*** Distances depend on the geometry of the chamber and the magnetrons<\/p>\n
\n\u6709\u6216\u6ca1\u6709\u539f\u4f4d\u503e\u659c\u6a21\u5757<\/strong><\/li>\n
\u5b89\u88c5\u6cd5\u5170\u7684\u8303\u56f4<\/li>\n
\u6807\u51c6\u70df\u56f1<\/strong><\/li>\n
\u5145\u6c14\u7684\u5706\u9876\u578b<\/strong>\u6216\u8005\u4fa7\u6446\u5feb\u95e8<\/strong><\/li>\n
\u95f4\u63a5\u51b7\u5374<\/strong><\/li>\n<\/ul>\n
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