\u63d2\u5934\u548c\u5de5\u4f5c\u7ed3\u6784<\/strong>\u00a0<\/span><\/li>\n

\u6613\u4e8e\u4f7f\u7528\u7684\u79fb\u52a8\u88c5\u7f6e\uff0c\u7528\u4e8e\u5feb\u901f\u6d4b\u8bd5\u548c\u6e85\u5c04\u6d82\u5c42<\/span><\/li>\n

\u5904\u7406\u5ba4\u5e26\u6709l<\/strong><\/span>\u5927\u578b\u771f\u7a7a\u95e8<\/strong>\u4e3a\u4e86\u5bb9\u6613\u66f4\u6362\u76ee\u6807\u6216\u886c\u5e95<\/span>\u00a0<\/span><\/li>\n

\u88c5\u6709MS2 100 ISO-K\u78c1\u63a7\u7ba1\u6e90<\/a><\/strong>\u548c\u65b0\u5947M600DC-PS\u7535\u6e90<\/strong><\/span>
\n<\/span><\/li>\n
\u57fa\u5e95\u53f0\u7528\u4e8e\u6700\u591a2\u4e2a<\/strong><\/span>\u201d\u76f4\u5f84\u6837\u54c1<\/strong><\/li>\n
\u5904\u7406\u5ba4\u76f4\u5f84:355\u6beb\u7c73<\/span>\u00a0<\/span><\/li>\n
3\u4e2a\u7aef\u53e3<\/strong>\u5bf9\u4e8e2\u82f1\u5bf8\u78c1\u63a7\u7ba1\u6e90<\/span>\u00a0<\/span><\/li>\n
1\u4e2a\u89c6\u7a97\u2013\u5e26\u767e\u53f6\u7a97\u7684\u89c2\u5bdf\u7a97<\/span>\u00a0<\/span><\/li>\n
\u4fdd\u62a4\u7f69<\/strong>\u9632\u6b62\u4ea4\u53c9\u6c61\u67d3<\/span>\u00a0<\/span><\/li>\n
\u57fa\u5e95\u538b\u529b<\/strong>\u8303\u56f410<\/span>^{-7<\/sup>\u00a0<\/span>\u6beb\u5df4(millibar\u538b\u529b\u5355\u4f4d)<\/span>\u00a0<\/span><\/li>\n}
\u5feb\u901f\u6cf5\u9001\u7cfb\u7edf<\/strong>\u968f\u7740<\/span>\u771f\u7a7a\u8ba1<\/a><\/span>\u00a0<\/span><\/li>\n
\u6c29\u6c14\u81ea\u52a8\u52a0\u836f<\/strong>\u901a\u8fc7\u8d28\u91cf\u6d41\u91cf\u63a7\u5236<\/span><\/li>\n
A\u8f66\u8f6e\u4e0a\u7684\u521a\u6027\u4e3b\u8f66\u67b6<\/strong>\u4fbf\u4e8e\u7cfb\u7edf\u7684\u653e\u7f6e<\/span><\/li>\n

\u624b\u52a8\u8282\u6d41\u9600<\/li>\n<\/ul>\n
\u8fd9\u5feb\u901f\u6cf5\u9001\u7cfb\u7edf<\/strong>(\u5e26\u624b\u52a8\u8282\u6d41\u9600)\u4e0e\u5c0f\u4f53\u79ef\u7684\u5904\u7406\u5ba4\u76f8\u7ed3\u5408\uff0c\u4f7f\u60a8\u80fd\u591f\u5728\u77ed\u65f6\u95f4\u5185\u8fbe\u5230\u57fa\u7840\u538b\u529b\u3002<\/span><\/span><\/span><\/p>\n
\u8fd9\u52a0\u5de5\u5ba4<\/strong>\u914d\u6709\u9ad8\u538b\u6807\u51c6\u7684\u8fde\u63a5\u6cd5\u5170\uff0c\u7528\u4e8e\u8fde\u63a5\u5f53\u524d\u548c\u672a\u6765\u7684\u8bbe\u5907\uff0c\u5305\u62ec:<\/span>\u00a0<\/span><\/p>\n
\n
\u591a\u8fbe3\u4e2a\u78c1\u63a7\u7ba1\u6e90<\/span>\u00a02\u201d,<\/span><\/li>\n
\u886c\u5e95\u64cd\u7eb5\u5668\uff0c<\/span><\/li>\n
\u6cf5\u9001\u7cfb\u7edf<\/span>m\uff0c<\/span><\/li>\n
\u9632\u6b62\u4ea4\u53c9\u6c61\u67d3\u7684\u4fdd\u62a4\u7f69\uff0c<\/span><\/li>\n
\u77f3\u82f1<\/span>\u5e73\u8861\uff0c<\/span><\/li>\n
\u89c6\u53e3\u2013\u5e26\u767e\u53f6\u7a97\u7684\u89c2\u5bdf\u7a97\uff0c<\/span><\/li>\n
\u771f\u7a7a\u8ba1\uff0c<\/span><\/li>\n
p<\/span>y<\/span>\u7f57\u6885\u7279\u3002<\/span><\/li>\n<\/ul>\n\n\n\n\n\n\n\n\n\n\n\n
Applications<\/strong><\/td>\n Examples<\/strong><\/td>\n<\/tr>\n
Single and multilayer conductor films (for microelectronics and semiconductor devices)<\/span>\u00a0<\/span><\/td>\n Al, Mo, Mo\/Au, Ta, Ta\/Au<\/span>\u00a0<\/span><\/td>\n<\/tr>\n
Barrier layers for semiconductor metallizations<\/span>\u00a0<\/span><\/td>\n TiN, W-Ti<\/span>\u00a0<\/span><\/td>\n<\/tr>\n
Magnetics films<\/span>\u00a0<\/span><\/td>\n Fe, Co, Ni, Fe-Al-Si, Co-Nb-Zr, Co-Cr, Fe-Ni-Cr, Fe-Si, Co-Ni-Cr, Co-Ni-Si\u00a0<\/span>\u00a0<\/span><\/td>\n<\/tr>\n
Optical coatings \u2013 metallic (reflective)<\/span>\u00a0<\/span><\/td>\n Cr, Al, Ag<\/span>\u00a0<\/span><\/td>\n<\/tr>\n
Optical coatings \u2013 dielectric<\/span>\u00a0<\/span><\/td>\n MgO, TiO<\/span>_{2<\/sub>\u00a0<\/span>, ZrO<\/span>_{2<\/sub><\/span>\u00a0<\/span><\/td>\n<\/tr>\n}}
Photomasks<\/span>\u00a0<\/span><\/td>\n Cr, Mo, W<\/span>\u00a0<\/span><\/td>\n<\/tr>\n
Transparent gas\/vapor permeation barriers<\/span>\u00a0<\/span><\/td>\n Al<\/span>_{2<\/sub><\/span>O<\/span>_{3<\/sub><\/span><\/td>\n<\/tr>\n}}
Transparent electrical conductors<\/span>\u00a0<\/span><\/td>\n InO_{2<\/sub>, SnO_{2<\/sub>,In-Sn-O (ITO)<\/span>\u00a0<\/span><\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<\/div>\n
032PRIMS\u57fa\u672cMS\u7cfb\u7edf<\/a>\nPrevac\u6c89\u79ef\u7cfb\u7edf<\/a>\n\u6e85\u5c04\u6c89\u79ef\u88c5\u7f6e<\/a>\n\u78c1\u63a7\u6e85\u5c04\u6e90<\/a>\n\u78c1\u63a7\u6e85\u5c04\u7cfb\u7edf<\/a><\/div>","protected":false},"excerpt":{"rendered":"Prevac\u6c89\u79ef\u7cfb\u7edf\u3001\u78c1\u63a7\u6e85\u5c04\u7cfb\u7edf\u3001032PRIMS\u57fa\u672cMS\u7cfb\u7edf \u7b80\u5355\u548c\u5168\u529f\u80fd\u7684\u6e85\u5c04\u6c89\u79ef\u88c5\u7f6e\uff0c\u7528\u4e8e\u53ef\u590d\u5236\u7684\u8584\u819c\u5c42\u7684\u5e94\u7528\u3002\u00a0\u5373\u63d2\u5373\u7528\u7d27\u51d1\u7684\u8bbe\u8ba1.\u00a0 \u8be5\u5904\u7406\u5ba4\u00a0\u5305\u542b3\u4e2a\u78c1\u63a7\u6e85\u5c04\u6e90\u7aef\u53e3( <\/p>\n","protected":false},"author":12,"featured_media":221,"comment_status":"closed","ping_status":"open","sticky":false,"template":"","format":"standard","meta":{"_vp_format_video_url":"","_vp_image_focal_point":[]},"categories":[1],"tags":[8,6,4,5,7],"_links":{"self":[{"href":"https:\/\/www.bihec.com\/prevac-eu\/wp-json\/wp\/v2\/posts\/220"}],"collection":[{"href":"https:\/\/www.bihec.com\/prevac-eu\/wp-json\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/www.bihec.com\/prevac-eu\/wp-json\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/www.bihec.com\/prevac-eu\/wp-json\/wp\/v2\/users\/12"}],"replies":[{"embeddable":true,"href":"https:\/\/www.bihec.com\/prevac-eu\/wp-json\/wp\/v2\/comments?post=220"}],"version-history":[{"count":1,"href":"https:\/\/www.bihec.com\/prevac-eu\/wp-json\/wp\/v2\/posts\/220\/revisions"}],"predecessor-version":[{"id":222,"href":"https:\/\/www.bihec.com\/prevac-eu\/wp-json\/wp\/v2\/posts\/220\/revisions\/222"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/www.bihec.com\/prevac-eu\/wp-json\/wp\/v2\/media\/221"}],"wp:attachment":[{"href":"https:\/\/www.bihec.com\/prevac-eu\/wp-json\/wp\/v2\/media?parent=220"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/www.bihec.com\/prevac-eu\/wp-json\/wp\/v2\/categories?post=220"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/www.bihec.com\/prevac-eu\/wp-json\/wp\/v2\/tags?post=220"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}}}

Applications<\/strong><\/td>\n	Examples<\/strong><\/td>\n<\/tr>\n
Single and multilayer conductor films (for microelectronics and semiconductor devices)<\/span>\u00a0<\/span><\/td>\n	Al, Mo, Mo\/Au, Ta, Ta\/Au<\/span>\u00a0<\/span><\/td>\n<\/tr>\n
Barrier layers for semiconductor metallizations<\/span>\u00a0<\/span><\/td>\n	TiN, W-Ti<\/span>\u00a0<\/span><\/td>\n<\/tr>\n
Magnetics films<\/span>\u00a0<\/span><\/td>\n	Fe, Co, Ni, Fe-Al-Si, Co-Nb-Zr, Co-Cr, Fe-Ni-Cr, Fe-Si, Co-Ni-Cr, Co-Ni-Si\u00a0<\/span>\u00a0<\/span><\/td>\n<\/tr>\n
Optical coatings \u2013 metallic (reflective)<\/span>\u00a0<\/span><\/td>\n	Cr, Al, Ag<\/span>\u00a0<\/span><\/td>\n<\/tr>\n
Optical coatings \u2013 dielectric<\/span>\u00a0<\/span><\/td>\n	MgO, TiO<\/span>_{2<\/sub>\u00a0<\/span>, ZrO<\/span>_{2<\/sub><\/span>\u00a0<\/span><\/td>\n<\/tr>\n}}
Photomasks<\/span>\u00a0<\/span><\/td>\n	Cr, Mo, W<\/span>\u00a0<\/span><\/td>\n<\/tr>\n
Transparent gas\/vapor permeation barriers<\/span>\u00a0<\/span><\/td>\n	Al<\/span>_{2<\/sub><\/span>O<\/span>_{3<\/sub><\/span><\/td>\n<\/tr>\n}}
Transparent electrical conductors<\/span>\u00a0<\/span><\/td>\n	InO_{2<\/sub>, SnO_{2<\/sub>,In-Sn-O (ITO)<\/span>\u00a0<\/span><\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<\/div>\n 032PRIMS\u57fa\u672cMS\u7cfb\u7edf<\/a>\nPrevac\u6c89\u79ef\u7cfb\u7edf<\/a>\n\u6e85\u5c04\u6c89\u79ef\u88c5\u7f6e<\/a>\n\u78c1\u63a7\u6e85\u5c04\u6e90<\/a>\n\u78c1\u63a7\u6e85\u5c04\u7cfb\u7edf<\/a><\/div>","protected":false},"excerpt":{"rendered":"Prevac\u6c89\u79ef\u7cfb\u7edf\u3001\u78c1\u63a7\u6e85\u5c04\u7cfb\u7edf\u3001032PRIMS\u57fa\u672cMS\u7cfb\u7edf \u7b80\u5355\u548c\u5168\u529f\u80fd\u7684\u6e85\u5c04\u6c89\u79ef\u88c5\u7f6e\uff0c\u7528\u4e8e\u53ef\u590d\u5236\u7684\u8584\u819c\u5c42\u7684\u5e94\u7528\u3002\u00a0\u5373\u63d2\u5373\u7528\u7d27\u51d1\u7684\u8bbe\u8ba1.\u00a0 \u8be5\u5904\u7406\u5ba4\u00a0\u5305\u542b3\u4e2a\u78c1\u63a7\u6e85\u5c04\u6e90\u7aef\u53e3( <\/p>\n","protected":false},"author":12,"featured_media":221,"comment_status":"closed","ping_status":"open","sticky":false,"template":"","format":"standard","meta":{"_vp_format_video_url":"","_vp_image_focal_point":[]},"categories":[1],"tags":[8,6,4,5,7],"_links":{"self":[{"href":"https:\/\/www.bihec.com\/prevac-eu\/wp-json\/wp\/v2\/posts\/220"}],"collection":[{"href":"https:\/\/www.bihec.com\/prevac-eu\/wp-json\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/www.bihec.com\/prevac-eu\/wp-json\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/www.bihec.com\/prevac-eu\/wp-json\/wp\/v2\/users\/12"}],"replies":[{"embeddable":true,"href":"https:\/\/www.bihec.com\/prevac-eu\/wp-json\/wp\/v2\/comments?post=220"}],"version-history":[{"count":1,"href":"https:\/\/www.bihec.com\/prevac-eu\/wp-json\/wp\/v2\/posts\/220\/revisions"}],"predecessor-version":[{"id":222,"href":"https:\/\/www.bihec.com\/prevac-eu\/wp-json\/wp\/v2\/posts\/220\/revisions\/222"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/www.bihec.com\/prevac-eu\/wp-json\/wp\/v2\/media\/221"}],"wp:attachment":[{"href":"https:\/\/www.bihec.com\/prevac-eu\/wp-json\/wp\/v2\/media?parent=220"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/www.bihec.com\/prevac-eu\/wp-json\/wp\/v2\/categories?post=220"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/www.bihec.com\/prevac-eu\/wp-json\/wp\/v2\/tags?post=220"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}}}