{"id":307,"date":"2026-04-15T17:28:35","date_gmt":"2026-04-15T09:28:35","guid":{"rendered":"https:\/\/www.bihec.com\/polygonphysics\/?p=307"},"modified":"2026-04-15T17:28:35","modified_gmt":"2026-04-15T09:28:35","slug":"polygon-physics-%e5%9f%ba%e4%ba%8e-cf63-%e6%b3%95%e5%85%b0%e7%9a%84%e7%b4%a7%e5%87%91%e5%9e%8b-ecr-%e7%a6%bb%e5%ad%90%e6%ba%90-tes-63","status":"publish","type":"post","link":"https:\/\/www.bihec.com\/polygonphysics\/polygon-physics-%e5%9f%ba%e4%ba%8e-cf63-%e6%b3%95%e5%85%b0%e7%9a%84%e7%b4%a7%e5%87%91%e5%9e%8b-ecr-%e7%a6%bb%e5%ad%90%e6%ba%90-tes-63\/","title":{"rendered":"Polygon Physics \u57fa\u4e8e CF63 \u6cd5\u5170\u7684\u7d27\u51d1\u578b ECR \u79bb\u5b50\u6e90 TES-63"},"content":{"rendered":"<p><a href=\"https:\/\/www.bihec.com\/polygonphysics\/tag\/polygon-physics\/\" title=\"View all posts in Polygon Physics\" target=\"_blank\">Polygon Physics<\/a> <a href=\"https:\/\/www.bihec.com\/polygonphysics\/tag\/%e5%9f%ba%e4%ba%8e-cf63-%e6%b3%95%e5%85%b0%e7%9a%84%e7%b4%a7%e5%87%91%e5%9e%8b-ecr-%e7%a6%bb%e5%ad%90%e6%ba%90\/\" title=\"View all posts in \u57fa\u4e8e CF63 \u6cd5\u5170\u7684\u7d27\u51d1\u578b ECR \u79bb\u5b50\u6e90\" target=\"_blank\">\u57fa\u4e8e CF63 \u6cd5\u5170\u7684\u7d27\u51d1\u578b ECR \u79bb\u5b50\u6e90<\/a> <a href=\"https:\/\/www.bihec.com\/polygonphysics\/tag\/tes-63\/\" title=\"View all posts in TES-63\" target=\"_blank\">TES-63<\/a><\/p>\n<p>\u54a8\u8be2\u70ed\u7ebf 15821107090<\/p>\n<div class=\"auto-hide-last-sibling-br paragraph-pP9ZLC paragraph-element\">\u57fa\u4e8e CF63 \u6cd5\u5170\u7684\u7d27\u51d1\u578b<a href=\"https:\/\/www.bihec.com\/polygonphysics\/tag\/%e7%94%b5%e5%ad%90%e5%9b%9e%e6%97%8b%e5%85%b1%e6%8c%af%e7%a6%bb%e5%ad%90%e6%ba%90\/\" title=\"View all posts in \u7535\u5b50\u56de\u65cb\u5171\u632f\u79bb\u5b50\u6e90\" target=\"_blank\">\u7535\u5b50\u56de\u65cb\u5171\u632f\u79bb\u5b50\u6e90<\/a>\uff0c\u675f\u6d41\u6700\u9ad8\u53ef\u8fbe 15 \u5343\u4f0f<\/p>\n<div class=\"container-Uxvbjy md-box-line-break wrapper-GYqxgQ undefined\"><\/div>\n<p>TES-63 \u4f9d\u6258\u5b89\u88c5\u4e8e CF63 \u5200\u53e3\u6cd5\u5170\u7684 TES \u8c10\u632f\u8154\u8bbe\u8ba1\uff0c\u53ef\u627f\u53d7\u6700\u9ad8 15 \u5343\u4f0f\u7684\u675f\u6d41\u80fd\u91cf\u3002<\/p><\/div>\n<div class=\"container-Uxvbjy md-box-line-break wrapper-GYqxgQ undefined\"><\/div>\n<div class=\"auto-hide-last-sibling-br paragraph-pP9ZLC paragraph-element\">TES-63 \u63d0\u4f9b\u4e09\u79cd\u578b\u53f7\uff1a<\/div>\n<div class=\"container-Uxvbjy md-box-line-break wrapper-GYqxgQ undefined\"><\/div>\n<ul class=\"auto-hide-last-sibling-br\">\n<li>\u5bbd\u675f\u79bb\u5b50\u578b\uff1a\u53ef\u6ee1\u8db3\u6e85\u5c04\u3001\u94e3\u524a\u3001\u6e05\u6d17\u53ca\u629b\u5149\u7b49\u591a\u79cd\u5e94\u7528\u9700\u6c42\u3002<\/li>\n<li>\u9ad8\u4eae\u5ea6\u79bb\u5b50\u578b\uff1a\u53ef\u5355\u72ec\u4f7f\u7528\uff0c\u6216\u914d\u5907\u5355\u900f\u955c\u4ee5\u63d0\u5347\u4eae\u5ea6\u5e76\u8c03\u63a7\u675f\u6d41\u5f62\u6001\uff0c\u9002\u7528\u4e8e\u8d28\u8c31\u5206\u6790\u3001\u94e3\u524a\u3001\u523b\u8680\u53ca\u675f\u6d41\u7ebf\u7b49\u573a\u666f\u3002<\/li>\n<li>\u7535\u5b50\u578b\uff1a\u9002\u7528\u4e8e\u5404\u7c7b\u9700\u8981\u6700\u9ad8 15 \u5343\u4f0f\u7535\u5b50\u675f\u7684\u5e94\u7528\u573a\u666f\uff08\u7535\u5b50\u5316\u5b66\u3001\u6e05\u6d17\u3001\u7f3a\u9677\u4fee\u590d\uff09\u3002<\/li>\n<\/ul>\n<div class=\"container-Uxvbjy md-box-line-break wrapper-GYqxgQ undefined\"><\/div>\n<div class=\"auto-hide-last-sibling-br paragraph-pP9ZLC paragraph-element\">TES-63 \u662f TES \u7cfb\u5217\u4e2d\u552f\u4e00\u914d\u5907\u626b\u63cf\u5668\u9009\u914d\u4ef6\u7684\u578b\u53f7\uff0c\u53ef\u5b9e\u73b0\u675f\u6d41\u7cbe\u51c6\u504f\u8f6c\u5e76\u5728\u6307\u5b9a\u8868\u9762\u8fdb\u884c\u626b\u63cf\u3002\u501f\u52a9\u6ce2\u5f62\u53d1\u751f\u5668\uff0c\u675f\u6d41\u8f68\u8ff9\u53ef\u5b9e\u73b0\u5149\u6805\u626b\u63cf\u6216\u4efb\u610f\u66f2\u7ebf\u626b\u63cf\u3002<\/div>\n<div class=\"container-Uxvbjy md-box-line-break wrapper-GYqxgQ undefined\"><\/div>\n<div class=\"auto-hide-last-sibling-br paragraph-pP9ZLC paragraph-element\">\u9009\u914d\u53cc\u6781\u6027\u529f\u80fd\u540e\uff0c\u8be5<a href=\"https:\/\/www.bihec.com\/polygonphysics\/tag\/%e7%a6%bb%e5%ad%90%e6%ba%90\/\" title=\"View all posts in \u79bb\u5b50\u6e90\" target=\"_blank\">\u79bb\u5b50\u6e90<\/a>\u53ef\u4ea4\u66ff\u4ea7\u751f\u79bb\u5b50\u675f\u4e0e\u7535\u5b50\u675f\uff0c\u4ece\u800c\u4ee5\u5355\u4e00\u6e90\u4f53\u6ee1\u8db3\u591a\u79cd\u5e94\u7528\u9700\u6c42\u3002<\/div>\n<div><\/div>\n<div>\n<p id=\"FLHSIsn\"><img decoding=\"async\" loading=\"lazy\" width=\"841\" height=\"323\" class=\"alignnone size-full wp-image-308 \" src=\"https:\/\/www.bihec.com\/polygonphysics\/wp-content\/uploads\/sites\/2416\/2026\/04\/img_69df59923a7fe.png\" alt=\"\" srcset=\"https:\/\/www.bihec.com\/polygonphysics\/wp-content\/uploads\/sites\/2416\/2026\/04\/img_69df59923a7fe.png 841w, https:\/\/www.bihec.com\/polygonphysics\/wp-content\/uploads\/sites\/2416\/2026\/04\/img_69df59923a7fe-300x115.png 300w, https:\/\/www.bihec.com\/polygonphysics\/wp-content\/uploads\/sites\/2416\/2026\/04\/img_69df59923a7fe-768x295.png 768w, https:\/\/www.bihec.com\/polygonphysics\/wp-content\/uploads\/sites\/2416\/2026\/04\/img_69df59923a7fe-500x192.png 500w, https:\/\/www.bihec.com\/polygonphysics\/wp-content\/uploads\/sites\/2416\/2026\/04\/img_69df59923a7fe-800x307.png 800w\" sizes=\"(max-width: 841px) 100vw, 841px\" \/><\/p>\n<table class=\"table-responsive\">\n<thead>\n<tr>\n<th><strong>TES-63<\/strong><\/th>\n<th><strong>electrons<\/strong><\/th>\n<th><strong>Ions Broad Beam\u00a0<\/strong><\/th>\n<th><strong>ions-high brightness<\/strong><\/th>\n<th><strong>ions-scanner<\/strong><\/th>\n<\/tr>\n<\/thead>\n<tbody>\n<tr class=\"heading\">\n<td>Applications<\/td>\n<td>Electron chemistry (down to 100 V) \/ High power e-beam up to 1.5 kW<\/td>\n<td>Beam line, accelerator, mass spectroscopy, sputtering<\/td>\n<td>Beam line, accelerator, mass spectroscopy, etching<\/td>\n<td>Etching, Figuring<\/td>\n<\/tr>\n<tr class=\"heading\">\n<td>Energy range<\/td>\n<td>100 V \u2013 15 kV<\/td>\n<td>0.5 \u2013 15 kV<\/td>\n<td>0.5 \u2013 15 kV<\/td>\n<td>0.5 \u2013 15 kV<\/td>\n<\/tr>\n<tr class=\"heading\">\n<td>Current<\/td>\n<td>0.1 to 50 mA<\/td>\n<td>0.1 to 5 \u00b5A &#8211; typ. with 0.3 mm extractor 10 to 500 \u00b5A &#8211; typ. with 3 mm extractor<\/td>\n<td>0.3 to 300 \u00b5A<\/td>\n<td>10 to 500 \u00b5A<\/td>\n<\/tr>\n<tr class=\"heading\">\n<td>Beam size (typ. @ 10 cm from Einzel)<\/td>\n<td>Energy and focus dependent<\/td>\n<td>0.3 -30 mm<\/td>\n<td>0.5-5 mm<\/td>\n<td>0.3 to 5mm<\/td>\n<\/tr>\n<tr class=\"heading\">\n<td>Insertion depth<\/td>\n<td>from 150 mm or longer on demand<\/td>\n<td>from 150 mm or longer on demand<\/td>\n<td>300 mm with Einzel<\/td>\n<td>360 mm with Einzel and scanner<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<\/div>\n<br><div class=\"tagcloud\"><a href=\"https:\/\/www.bihec.com\/polygonphysics\/tag\/polygon-physics\/\" class=\"tag-cloud-link tag-link-0 tag-link-position-1\" style=\"font-size: 22pt;\" aria-label=\"Polygon Physics (18\u4e2a\u9879\u76ee)\">Polygon Physics<\/a>\n<a href=\"https:\/\/www.bihec.com\/polygonphysics\/tag\/tes-63\/\" class=\"tag-cloud-link tag-link-1 tag-link-position-2\" style=\"font-size: 8pt;\" aria-label=\"TES-63 (1\u4e2a\u9879\u76ee)\">TES-63<\/a>\n<a href=\"https:\/\/www.bihec.com\/polygonphysics\/tag\/%e5%9f%ba%e4%ba%8e-cf63-%e6%b3%95%e5%85%b0%e7%9a%84%e7%b4%a7%e5%87%91%e5%9e%8b-ecr-%e7%a6%bb%e5%ad%90%e6%ba%90\/\" class=\"tag-cloud-link tag-link-2 tag-link-position-3\" style=\"font-size: 8pt;\" aria-label=\"\u57fa\u4e8e CF63 \u6cd5\u5170\u7684\u7d27\u51d1\u578b ECR \u79bb\u5b50\u6e90 (1\u4e2a\u9879\u76ee)\">\u57fa\u4e8e CF63 \u6cd5\u5170\u7684\u7d27\u51d1\u578b ECR \u79bb\u5b50\u6e90<\/a>\n<a href=\"https:\/\/www.bihec.com\/polygonphysics\/tag\/%e6%ba%85%e5%b0%84%e7%a6%bb%e5%ad%90%e6%ba%90\/\" class=\"tag-cloud-link tag-link-3 tag-link-position-4\" style=\"font-size: 18pt;\" aria-label=\"\u6e85\u5c04\u79bb\u5b50\u6e90 (9\u4e2a\u9879\u76ee)\">\u6e85\u5c04\u79bb\u5b50\u6e90<\/a>\n<a href=\"https:\/\/www.bihec.com\/polygonphysics\/tag\/%e7%94%b5%e5%ad%90%e6%ba%90\/\" class=\"tag-cloud-link tag-link-4 tag-link-position-5\" style=\"font-size: 16.571428571429pt;\" aria-label=\"\u7535\u5b50\u6e90 (7\u4e2a\u9879\u76ee)\">\u7535\u5b50\u6e90<\/a><\/div>","protected":false},"excerpt":{"rendered":"<p>Polygon Physics \u57fa\u4e8e CF63 \u6cd5\u5170\u7684\u7d27\u51d1\u578b ECR \u79bb\u5b50\u6e90 TES-63 \u54a8\u8be2\u70ed\u7ebf 15821107090 \u57fa\u4e8e CF63 \u6cd5\u5170\u7684\u7d27\u51d1\u578b\u7535\u5b50\u56de\u65cb\u5171\u632f\u79bb\u5b50\u6e90\uff0c\u675f\u6d41\u6700 <\/p>\n","protected":false},"author":19,"featured_media":308,"comment_status":"closed","ping_status":"open","sticky":false,"template":"","format":"standard","meta":{"_vp_format_video_url":"","_vp_image_focal_point":[]},"categories":[1],"tags":[4,44,43,11,17],"yoast_head":"<!-- This site is optimized with the Yoast SEO plugin v17.5 - https:\/\/yoast.com\/wordpress\/plugins\/seo\/ -->\n<title>Polygon Physics \u57fa\u4e8e CF63 \u6cd5\u5170\u7684\u7d27\u51d1\u578b ECR \u79bb\u5b50\u6e90 TES-63 - \u7535\u5b50\u67aa \u79bb\u5b50\u6e90 \u7b49\u79bb\u5b50\u4f53\u6e90 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