{"id":279,"date":"2025-08-01T10:36:17","date_gmt":"2025-08-01T02:36:17","guid":{"rendered":"https:\/\/www.bihec.com\/polygonphysics\/?p=279"},"modified":"2025-08-01T10:36:17","modified_gmt":"2025-08-01T02:36:17","slug":"polygon-physics-from-sputter-cleaning-to-ion-milling-ion-beam-sputtering-%e4%bb%8e%e6%ba%85%e5%b0%84%e6%b8%85%e6%b4%97%e5%88%b0%e7%a6%bb%e5%ad%90%e9%93%a3%e5%89%8a%ef%bc%9a%e7%a6%bb%e5%ad%90%e6%9d%9f","status":"publish","type":"post","link":"https:\/\/www.bihec.com\/polygonphysics\/polygon-physics-from-sputter-cleaning-to-ion-milling-ion-beam-sputtering-%e4%bb%8e%e6%ba%85%e5%b0%84%e6%b8%85%e6%b4%97%e5%88%b0%e7%a6%bb%e5%ad%90%e9%93%a3%e5%89%8a%ef%bc%9a%e7%a6%bb%e5%ad%90%e6%9d%9f\/","title":{"rendered":"Polygon Physics From sputter cleaning to ion milling: ion beam sputtering \u4ece\u6e85\u5c04\u6e05\u6d17\u5230\u79bb\u5b50\u94e3\u524a\uff1a\u79bb\u5b50\u675f\u6e85\u5c04"},"content":{"rendered":"

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\"Graph<\/p>\n

\u4f7f\u7528\u79bb\u5b50\u675f\u8fdb\u884c\u886c\u5e95\u6e05\u6d17<\/p>\n

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\u79bb\u5b50\u675f\u94e3\u524a<\/p>\n

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\u901a\u5e38\uff0c\u805a\u7126\u79bb\u5b50\u675f\uff08FIB\uff09\u94e3\u524a\u548c\u5bbd\u79bb\u5b50\u675f\uff08BIB\uff09\u94e3\u524a\u4e4b\u95f4\u5b58\u5728\u533a\u522b\u3002\u5927\u591a\u6570 FIB \u94e3\u524a\u662f\u4f7f\u7528\u9ad8\u5ea6\u805a\u7126\u7684\u9ad8\u80fd\u9553\u79bb\u5b50\uff08\u901a\u5e38\u4e3a 30 \u5343\u4f0f\uff09\u5b8c\u6210\u7684\u3002BIB \u94e3\u524a\u901a\u5e38\u4f7f\u7528\u76f4\u5f84\u53ef\u8fbe\u51e0\u6beb\u7c73\u3001\u80fd\u91cf\u53ef\u8fbe\u51e0\u5343\u4f0f\u7684\u6c29\u79bb\u5b50\u675f\u8fdb\u884c\u3002FIB \u94e3\u524a\u975e\u5e38\u7cbe\u786e\uff0c\u4f46\u4f1a\u5bfc\u81f4\u76f8\u5f53\u7a0b\u5ea6\u7684\u8868\u9762\u635f\u4f24\uff08\u975e\u6676\u5316\uff09\u548c\u79bb\u5b50\u6ce8\u5165<\/a>\u3002BIB \u94e3\u524a\u7684\u4f4d\u7f6e\u7cbe\u5ea6\u8981\u4f4e\u5f97\u591a\uff0c\u4f46\u66f4\u4e3a\u6e29\u548c\u3002BIB \u94e3\u524a\u4e2d\u7684\u5178\u578b\u7535\u6d41\u5bc6\u5ea6\u4e3a 1 – 10 \u6beb\u5b89 \/ \u5e73\u65b9\u5398\u7c73\u3002\u5b83\u53ef\u4ee5\u4e0e FIB \u5207\u5272\u7b49\u5fae\u52a0\u5de5\u6280\u672f\u4e92\u8865\uff0c\u5e76\u901a\u8fc7\u4f4e\u80fd\u79bb\u5b50\u629b\u5149\u53bb\u9664 FIB \u5f15\u8d77\u7684\u8868\u9762\u635f\u4f24\u3002<\/p>\n

\u5229\u7528\u79bb\u5b50\u675f\u8fdb\u884c\u7eb3\u7c73\u7ed3\u6784\u5316<\/p>\n

\u79bb\u5b50\u8f90\u7167\u4e5f\u53ef\u7528\u4e8e\u8c03\u6574\u8868\u9762\u7ed3\u6784\u3002\u4f8b\u5982\uff0c\u79bb\u5b50\u675f\u6e85\u5c04\u53ef\u7528\u4e8e\u66f4\u597d\u5730\u63ed\u793a\u56fa\u4f53\u7684\u5185\u90e8\u6676\u7c92\u548c\u76f8\u7ed3\u6784\uff0c\u4ee5\u7528\u4e8e\u5206\u6790\u76ee\u7684\u3002\u5728\u8fd9\u79cd\u60c5\u51b5\u4e0b\uff0c\u201c\u8868\u9762\u79bb\u5b50\u675f\u8680\u523b\u201d \u8fd9\u4e00\u672f\u8bed\u4f3c\u4e4e\u4e5f\u5f88\u5408\u9002\u3002\u4e00\u4e2a\u76f8\u5bf9\u8f83\u5927\u7684\u7814\u7a76\u8bfe\u9898\u662f\u5229\u7528\u79bb\u5b50\u675f\u6e85\u5c04\u5f62\u6210\u7279\u5b9a\u7684\u8868\u9762\u7c97\u7cd9\u5ea6\uff0c\u4f8b\u5982\u6539\u53d8\u592a\u9633\u80fd\u5438\u6536\u5668\u7684\u5438\u6536\u7cfb\u6570\u3001\u7528\u4e8e\u88c5\u9970\u5e94\u7528\u7684\u8868\u9762\u989c\u8272\uff0c\u6216\u751f\u7269\u533b\u5b66\u690d\u5165\u7269\u7684\u7c98\u9644\u6027\u3002<\/p>\n

\u79bb\u5b50\u6e85\u5c04<\/p>\n

\u6211\u4eec\u7684\u5355\u8154\u7535\u5b50\u56de\u65cb\u5171\u632f\uff08ECR\uff09\u79bb\u5b50\u6e90<\/a> TES \u53ef\u914d\u7f6e\u4e3a\u5728\u9ad8\u771f\u7a7a\u6216\u8d85\u9ad8\u771f\u7a7a\u73af\u5883\u4e2d\u5bf9\u76f4\u5f84\u7ea6 4 \u82f1\u5bf8\u7684\u6e05\u6d01\u6837\u54c1\u8fdb\u884c\u6e85\u5c04\uff0c\u8fd8\u80fd\u4f7f\u7528\u6beb\u7c73\u5c3a\u5bf8\u7684\u79bb\u5b50\u675f\u8fdb\u884c\u6709\u6548\u7684\u79bb\u5b50\u94e3\u524a\u3002ECR \u6280\u672f\u53ef\u63d0\u4f9b\u7a33\u5b9a\u53ef\u9760\u7684\u79bb\u5b50\u675f\uff0c\u4e14\u65e0\u9700\u50cf\u57fa\u4e8e\u70ed\u706f\u4e1d\u7684\u6280\u672f\u90a3\u6837\u8fdb\u884c\u7ef4\u62a4\u3002\u5bf9\u4e8e\u66f4\u5927\u8868\u9762\u79ef\u7684\u6e85\u5c04\u6e05\u6d01\u548c\u8680\u523b\uff0c\u6211\u4eec\u63d0\u4f9b\u57fa\u4e8e\u591a\u4e2a\u8154\u4f53\u7684\u79bb\u5b50\u6e90<\/p>\n<\/div>\n

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<\/div>\n
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