{"id":267,"date":"2025-07-30T16:15:39","date_gmt":"2025-07-30T08:15:39","guid":{"rendered":"https:\/\/www.bihec.com\/polygonphysics\/?p=267"},"modified":"2025-07-30T16:15:39","modified_gmt":"2025-07-30T08:15:39","slug":"polygon-physics-%e5%ba%94%e7%94%a8-ion-beam-sputter-deposition-%e7%a6%bb%e5%ad%90%e6%9d%9f%e6%ba%85%e5%b0%84%e6%b2%89%e7%a7%af","status":"publish","type":"post","link":"https:\/\/www.bihec.com\/polygonphysics\/polygon-physics-%e5%ba%94%e7%94%a8-ion-beam-sputter-deposition-%e7%a6%bb%e5%ad%90%e6%9d%9f%e6%ba%85%e5%b0%84%e6%b2%89%e7%a7%af\/","title":{"rendered":"Polygon Physics \u5e94\u7528 Ion beam sputter deposition \u79bb\u5b50\u675f\u6e85\u5c04\u6c89\u79ef"},"content":{"rendered":"<p><a href=\"https:\/\/www.bihec.com\/polygonphysics\/tag\/polygon-physics\/\" title=\"View all posts in Polygon Physics\" target=\"_blank\">Polygon Physics<\/a> \u5e94\u7528 Ion beam sputter deposition <a href=\"https:\/\/www.bihec.com\/polygonphysics\/tag\/%e7%a6%bb%e5%ad%90%e6%9d%9f%e6%ba%85%e5%b0%84%e6%b2%89%e7%a7%af\/\" title=\"View all posts in \u79bb\u5b50\u675f\u6e85\u5c04\u6c89\u79ef\" target=\"_blank\">\u79bb\u5b50\u675f\u6e85\u5c04\u6c89\u79ef<\/a><\/p>\n<p>\u54a8\u8be2\u70ed\u7ebf 15821107090<\/p>\n<p>\u5728\u79bb\u5b50\u675f\u6e85\u5c04\u6c89\u79ef\u4e2d\u6dfb\u52a0\u8584\u819c<br class=\"container-utlnW2 wrapper-d0Cc1k undefined\" \/>\u5728\u79bb\u5b50\u675f\u6e85\u5c04\u6c89\u79ef\u4e2d\uff0c\u76ee\u6807\u662f\u5728\u886c\u5e95\u8868\u9762\u6dfb\u52a0\u4e00\u5c42\u8584\u819c\uff0c\u4ee5\u6539\u53d8\u5176\u6750\u6599\u7279\u6027\u3002\u79bb\u5b50\u675f\u6c89\u79ef\u7684\u6982\u5ff5\u662f\u5229\u7528\u79bb\u5b50\u675f\u5728\u9760\u8fd1\u886c\u5e95\u7684\u4f4d\u7f6e\u6e85\u5c04\u9776\u6750\u3002\u79bb\u5b50\u675f\u6c89\u79ef\u662f\u4e00\u79cd\u7269\u7406\u6c14\u76f8\u6c89\u79ef\uff08PVD\uff09\u6280\u672f\u3002\u5176\u4ed6 PVD \u65b9\u6cd5\u5305\u62ec\u70ed\u84b8\u53d1\u6216\u7535\u5b50\u675f\u84b8\u53d1\u3001\u78c1\u63a7\u6e85\u5c04\u548c\u8109\u51b2\u6fc0\u5149\u6c89\u79ef\u7b49\u3002\u6bcf\u79cd\u6280\u672f\u90fd\u6709\u5176\u4f18\u70b9\u3002\u5bf9\u4e8e\u79bb\u5b50\u675f\u6c89\u79ef\u800c\u8a00\uff0c\u5176\u4e3b\u8981\u4f18\u70b9\u5728\u4e8e\u6c89\u79ef\u53c2\u6570\u7684\u7075\u6d3b\u6027\u548c\u7cbe\u786e\u6027\u3001\u5bf9\u6837\u54c1\u7684\u5f71\u54cd\u5c0f\u4ee5\u53ca\u6c89\u79ef\u7269\u8d28\u91cf\u9ad8\u3002<\/p>\n<p>\u79bb\u5b50\u675f\u6e85\u5c04\u6c89\u79ef\u4e2d\u7684\u7c92\u5b50\u80fd\u91cf<\/p>\n<p>\u79bb\u5b50\u675f\u7684\u80fd\u91cf\u901a\u5e38\u4e3a\u51e0\u767e\u4f0f\u5230\u51e0\u5343\u4f0f\u3002\u5f53\u9776\u539f\u5b50\u83b7\u5f97\u7684\u80fd\u91cf\u5927\u4e8e\u6e85\u5c04\u9608\u503c\u80fd\u91cf\u6216\u8868\u9762\u7ed3\u5408\u80fd\u65f6\uff0c\u5b83\u4eec\u5c31\u80fd\u4ece\u8868\u9762\u9038\u51fa\u3002\u8be5\u80fd\u91cf\u53d6\u51b3\u4e8e\u9776\u6750\uff0c\u91cf\u7ea7\u7ea6\u4e3a\u51e0\u4e2a\u7535\u5b50\u4f0f\u7279\u3002\u88ab\u6e85\u5c04\u539f\u5b50\u7684\u5e73\u5747\u52a8\u80fd\u53d6\u51b3\u4e8e\u5165\u5c04\u79bb\u5b50\u7684\u80fd\u91cf\u3001\u89d2\u5ea6\u548c\u7c7b\u578b\uff0c\u4ee5\u53ca\u9776\u6750\u7684\u6027\u8d28\uff0c\u901a\u5e38\u4e3a\u51e0\u5341\u7535\u5b50\u4f0f\u7279\u3002<\/p>\n<p id=\"QUdXeMb\"><img decoding=\"async\" loading=\"lazy\" width=\"463\" height=\"396\" class=\"alignnone size-full wp-image-268 \" src=\"https:\/\/www.bihec.com\/polygonphysics\/wp-content\/uploads\/sites\/2416\/2025\/07\/img_6889d2e29606e.png\" alt=\"\" srcset=\"https:\/\/www.bihec.com\/polygonphysics\/wp-content\/uploads\/sites\/2416\/2025\/07\/img_6889d2e29606e.png 463w, https:\/\/www.bihec.com\/polygonphysics\/wp-content\/uploads\/sites\/2416\/2025\/07\/img_6889d2e29606e-300x257.png 300w\" sizes=\"(max-width: 463px) 100vw, 463px\" \/><\/p>\n<p>\u79bb\u5b50\u675f\u6e85\u5c04\u6c89\u79ef\u4e0e\u5176\u4ed6\u7269\u7406\u6c14\u76f8\u6c89\u79ef\uff08PVD\uff09\u65b9\u6cd5\u7684\u6bd4\u8f83<\/p>\n<p>\u5728\u7269\u7406\u6c14\u76f8\u6c89\u79ef\u65b9\u6cd5\u4e2d\uff0c\u5de5\u4e1a\u4e0a\u5e38\u7528\u7684\u65b9\u6cd5\u662f\u78c1\u63a7\u6e85\u5c04\u3002\u5728\u78c1\u63a7\u6e85\u5c04\u4e2d\uff0c\u60f0\u6027\u6c14\u4f53\u5728\u886c\u5e95\u548c\u9776\u6750\u4e4b\u95f4\u7684\u7b49\u79bb\u5b50\u4f53\u4e2d\u88ab\u7535\u79bb\uff0c\u8be5\u7b49\u79bb\u5b50\u4f53\u7531\u78c1\u573a\u7ea6\u675f\u3002\u9776\u6750\u88ab\u65bd\u52a0\u504f\u538b\uff0c\u5e76\u88ab\u52a0\u901f\u98de\u5411\u5b83\u7684\u6b63\u79bb\u5b50\u6e85\u5c04\u3002\u79bb\u5b50\u675f\u6e85\u5c04\u6c89\u79ef\u4e0e\u78c1\u63a7\u6e85\u5c04\u4e4b\u95f4\u7684\u4e00\u4e2a\u5f88\u5927\u533a\u522b\u662f\uff0c\u5bf9\u4e8e\u79bb\u5b50\u675f\u6c89\u79ef\u800c\u8a00\uff0c\u886c\u5e95\u548c\u9776\u6750\u4e4b\u95f4\u4e0d\u5b58\u5728\u7b49\u79bb\u5b50\u4f53\u3002\u8fd9\u610f\u5473\u7740\u5bf9\u4e8e\u79bb\u5b50\u675f\u6c89\u79ef\uff0c\u4e5f\u53ef\u4ee5\u5728\u654f\u611f\u7684\u886c\u5e95\u4e0a\u8fdb\u884c\u6c89\u79ef\uff0c\u5e76\u4e14\u6c89\u79ef\u7269\u4e2d\u6e85\u5c04\u6c14\u4f53\u7684\u5939\u6742\u53ef\u80fd\u4f1a\u66f4\u5c11\u3002\u6b64\u5916\uff0c\u5728\u4f20\u7edf\u7684\u79bb\u5b50\u675f\u6c89\u79ef\u4e2d\uff0c\u886c\u5e95\u548c\u9776\u6750\u4e4b\u95f4\u6ca1\u6709\u504f\u538b\uff0c\u8fd9\u610f\u5473\u7740\u5bfc\u7535\u548c\u975e\u5bfc\u7535\u7684\u9776\u6750\u4e0e\u886c\u5e95\u90fd\u53ef\u4ee5\u4f7f\u7528\u3002\u800c\u4e14\uff0c\u4e0e\u5176\u4ed6\u6e85\u5c04\u65b9\u6cd5\u76f8\u53cd\uff0c\u79bb\u5b50\u675f\u6e85\u5c04\u80fd\u591f\u5728\u5f88\u5bbd\u7684\u8303\u56f4\u5185\u72ec\u7acb\u63a7\u5236\u79bb\u5b50\u80fd\u91cf\u3001\u901a\u91cf\u3001\u79cd\u7c7b\u548c\u5165\u5c04\u89d2\u3002<\/p>\n<p>&nbsp;<\/p>\n<p id=\"ivNdcYR\"><img decoding=\"async\" loading=\"lazy\" width=\"654\" height=\"232\" class=\"alignnone size-full wp-image-269 \" src=\"https:\/\/www.bihec.com\/polygonphysics\/wp-content\/uploads\/sites\/2416\/2025\/07\/img_6889d386ce38c.png\" alt=\"\" srcset=\"https:\/\/www.bihec.com\/polygonphysics\/wp-content\/uploads\/sites\/2416\/2025\/07\/img_6889d386ce38c.png 654w, https:\/\/www.bihec.com\/polygonphysics\/wp-content\/uploads\/sites\/2416\/2025\/07\/img_6889d386ce38c-300x106.png 300w, https:\/\/www.bihec.com\/polygonphysics\/wp-content\/uploads\/sites\/2416\/2025\/07\/img_6889d386ce38c-500x177.png 500w\" sizes=\"(max-width: 654px) 100vw, 654px\" \/><\/p>\n<p>\u84b8\u53d1\u6c89\u79ef\u6cd5\u4f7f\u7528\u7126\u8033\u52a0\u70ed\u6216\u7535\u5b50\u675f\u5c06\u9776\u6750\u52a0\u70ed\u5230\u5176\u84b8\u53d1\u70b9\u3002<\/p>\n<p>\u70ed\u84b8\u53d1\u6216\u7535\u5b50\u675f\u84b8\u53d1\u7684\u5e73\u5747\u52a8\u80fd\u8fdc\u5c0f\u4e8e 1 \u7535\u5b50\u4f0f\u7279\uff0c\u8fd9\u6bd4\u79bb\u5b50\u675f\u6e85\u5c04\u7684\u5e73\u5747\u52a8\u80fd\u4f4e\u5f97\u591a\u3002\u56e0\u6b64\uff0c\u4e0e\u901a\u8fc7\u84b8\u53d1\u6280\u672f\u6c89\u79ef\u7684\u8584\u819c\u76f8\u6bd4\uff0c\u901a\u8fc7\u79bb\u5b50\u675f\u6e85\u5c04\u6c89\u79ef\u7684\u8584\u819c\u5bc6\u5ea6\u66f4\u9ad8\uff08\u5b54\u9699\u7387\u66f4\u4f4e\uff09\u3001\u66f4\u5149\u6ed1\uff0c\u5e76\u4e14\u66f4\u5bb9\u6613\u4ea7\u751f\u5e94\u529b\u3002\u8109\u51b2\u6fc0\u5149\u6c89\u79ef\u4f7f\u7528\u6fc0\u5149\u7167\u5c04\u9776\u6750\uff0c\u4f7f\u9776\u6750\u6c7d\u5316\u3002<\/p>\n<p>IBSD \u4e0e Polygon Physics \u516c\u53f8<\/p>\n<p>\u79bb\u5b50\u675f\u6e85\u5c04\u6c89\u79ef\u53ef\u80fd\u662f Polygon Physics \u516c\u53f8\u53c2\u4e0e\u6700\u591a\u7684\u8868\u9762\u5de5\u7a0b\u5de5\u827a\u3002\u79bb\u5b50\u675f\u6e85\u5c04\u6c89\u79ef\u7684\u4f20\u7edf\u7f3a\u70b9\u662f\u7ef4\u62a4\u6210\u672c\u9ad8\u3001\u590d\u6742\u7a0b\u5ea6\u9ad8\u4e14\u96be\u4ee5\u6269\u5927\u89c4\u6a21\u3002\u6211\u4eec\u5f88\u81ea\u8c6a\uff0c\u7531\u4e8e\u6211\u4eec\u72ec\u7279\u7684\u7535\u5b50\u56de\u65cb\u5171\u632f\uff08ECR\uff09\u6280\u672f\uff0c\u8fd9\u4e9b\u7f3a\u70b9\u5982\u4eca\u5df2\u6210\u4e3a\u5386\u53f2\u3002<\/p>\n<p>\u6211\u4eec\u7684\u4e00\u4e9b\u5b66\u672f\u5ba2\u6237\u5728\u4ed6\u4eec\u81ea\u5df1\u7684\u771f\u7a7a\u7cfb\u7edf\u4e2d\uff0c\u4f7f\u7528\u5355\u8154<a href=\"https:\/\/www.bihec.com\/polygonphysics\/tag\/%e7%a6%bb%e5%ad%90%e6%ba%90\/\" title=\"View all posts in \u79bb\u5b50\u6e90\" target=\"_blank\">\u79bb\u5b50\u6e90<\/a>\u5bf9\u8f83\u5c0f\u7684\u6837\u54c1\u8fdb\u884c\u79bb\u5b50\u675f\u6e85\u5c04\u6c89\u79ef\u3002\u4f46 Polygon Physics \u516c\u53f8\u4e5f\u5f00\u53d1\u51fa\u4e86\u4e00\u79cd\u5168\u65b0\u7684\u79bb\u5b50\u675f\u6e85\u5c04\u6c89\u79ef\u65b9\u6cd5\uff0c\u8be5\u65b9\u6cd5\u57fa\u4e8e\u591a\u6e90\u4f7f\u7528\uff1a\u591a\u675f\u6e85\u5c04\u6c89\u79ef\u3002\u8fd9\u9879\u6280\u672f\u72ec\u7279\u7684\u51e0\u4f55\u7ed3\u6784\u4e3a\u591a\u7ec4\u5206\u6c89\u79ef\u5e26\u6765\u4e86\u524d\u6240\u672a\u6709\u7684\u80fd\u529b\u3002Polygon Physics \u56e2\u961f\u5df2\u7ecf\u5f00\u53d1\u5e76\u5236\u9020\u4e86\u51e0\u6b3e<a href=\"https:\/\/www.bihec.com\/polygonphysics\/tag\/%e5%a4%9a%e6%9d%9f%e6%ba%85%e5%b0%84%e6%b2%89%e7%a7%af%e7%b3%bb%e7%bb%9f\/\" title=\"View all posts in \u591a\u675f\u6e85\u5c04\u6c89\u79ef\u7cfb\u7edf\" target=\"_blank\">\u591a\u675f\u6e85\u5c04\u6c89\u79ef\u7cfb\u7edf<\/a>\uff0c\u6700\u591a\u53ef\u914d\u5907 20 \u4e2a\u79bb\u5b50\u6e90\uff0c\u80fd\u591f\u5904\u7406\u76f4\u5f84\u8fbe 300 \u6beb\u7c73\u7684\u6837\u54c1\u3002<\/p>\n<p id=\"khaSvgh\"><img decoding=\"async\" loading=\"lazy\" class=\"alignnone  wp-image-270 \" src=\"https:\/\/www.bihec.com\/polygonphysics\/wp-content\/uploads\/sites\/2416\/2025\/07\/img_6889d420c5b7b.png\" alt=\"\" width=\"670\" height=\"521\" srcset=\"https:\/\/www.bihec.com\/polygonphysics\/wp-content\/uploads\/sites\/2416\/2025\/07\/img_6889d420c5b7b.png 1026w, https:\/\/www.bihec.com\/polygonphysics\/wp-content\/uploads\/sites\/2416\/2025\/07\/img_6889d420c5b7b-300x233.png 300w, https:\/\/www.bihec.com\/polygonphysics\/wp-content\/uploads\/sites\/2416\/2025\/07\/img_6889d420c5b7b-1024x796.png 1024w, https:\/\/www.bihec.com\/polygonphysics\/wp-content\/uploads\/sites\/2416\/2025\/07\/img_6889d420c5b7b-768x597.png 768w, https:\/\/www.bihec.com\/polygonphysics\/wp-content\/uploads\/sites\/2416\/2025\/07\/img_6889d420c5b7b-500x389.png 500w, https:\/\/www.bihec.com\/polygonphysics\/wp-content\/uploads\/sites\/2416\/2025\/07\/img_6889d420c5b7b-800x622.png 800w\" sizes=\"(max-width: 670px) 100vw, 670px\" \/><\/p>\n<br><div class=\"tagcloud\"><a href=\"https:\/\/www.bihec.com\/polygonphysics\/tag\/polygon-physics\/\" class=\"tag-cloud-link tag-link-0 tag-link-position-1\" style=\"font-size: 22pt;\" aria-label=\"Polygon Physics (18\u4e2a\u9879\u76ee)\">Polygon Physics<\/a>\n<a href=\"https:\/\/www.bihec.com\/polygonphysics\/tag\/%e6%ba%85%e5%b0%84%e7%a6%bb%e5%ad%90%e6%ba%90\/\" class=\"tag-cloud-link tag-link-1 tag-link-position-2\" style=\"font-size: 11.684210526316pt;\" aria-label=\"\u6e85\u5c04\u79bb\u5b50\u6e90 (9\u4e2a\u9879\u76ee)\">\u6e85\u5c04\u79bb\u5b50\u6e90<\/a>\n<a href=\"https:\/\/www.bihec.com\/polygonphysics\/tag\/%e7%a6%bb%e5%ad%90%e6%9d%9f%e6%ba%85%e5%b0%84%e6%b2%89%e7%a7%af\/\" class=\"tag-cloud-link tag-link-2 tag-link-position-3\" style=\"font-size: 8pt;\" aria-label=\"\u79bb\u5b50\u675f\u6e85\u5c04\u6c89\u79ef (7\u4e2a\u9879\u76ee)\">\u79bb\u5b50\u675f\u6e85\u5c04\u6c89\u79ef<\/a><\/div>","protected":false},"excerpt":{"rendered":"<p>Polygon Physics \u5e94\u7528 Ion beam sputter 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