{"id":156,"date":"2022-09-04T11:00:21","date_gmt":"2022-09-04T03:00:21","guid":{"rendered":"https:\/\/www.bihec.com\/nonsequitur\/?p=156"},"modified":"2022-09-04T11:00:21","modified_gmt":"2022-09-04T03:00:21","slug":"nonsequitur-%e7%a6%bb%e5%ad%90%e6%ba%90%e7%a6%bb%e5%ad%90%e6%9e%aa-ion-guns-model-1401-5ev-5kev-%e6%b0%94%e7%9b%b8%e7%a6%bb%e5%ad%90%e6%ba%90-2","status":"publish","type":"post","link":"https:\/\/www.bihec.com\/nonsequitur\/nonsequitur-%e7%a6%bb%e5%ad%90%e6%ba%90%e7%a6%bb%e5%ad%90%e6%9e%aa-ion-guns-model-1401-5ev-5kev-%e6%b0%94%e7%9b%b8%e7%a6%bb%e5%ad%90%e6%ba%90-2\/","title":{"rendered":"NonSequitur \u79bb\u5b50\u6e90\u79bb\u5b50\u67aa Ion Guns: Model 1401 5eV – 5keV \u6c14\u76f8\u79bb\u5b50\u6e90"},"content":{"rendered":"

\"\"<\/p>\n

Nonsequitur<\/a>\u516c\u53f8\u7684Model 1401\u79bb\u5b50\u6e90<\/a>\u79bb\u5b50\u67aa<\/a>\u975e\u5e38\u9002\u5408\u7528\u4e8e\u8868\u9762\u5316\u5b66\u5b9e\u9a8c<\/a>\uff0c\u4f8b\u5982\u4f7f\u7528Auger \u548cESCA\u8fdb\u884c\u6837\u54c1\u5236\u5907\u548c\u6df1\u5ea6\u5206\u6790\uff0c\u53ef\u4ee5\u7528\u4e8e\u60f0\u6027\u6c14\u4f53\u3002<\/p>\n

\u5728\u5de5\u4f5c\u8ddd\u79bb\u4e3a25mm\uff0c\u675f\u6d41\u5927\u5c0f\u4e3a20\u00b5A\u65f6\uff0c\u5149\u6591\u4e3a\u76f4\u5f840.4mm\u3002\u76f8\u6bd4\u8f83\u4e8e\u5176\u4ed6\u7684\u79bb\u5b50\u67aa\u800c\u8a00\uff0c\u79bb\u5b50\u67aaModel 1401\u80fd\u63d0\u4f9b\u7684\u7535\u6d41\u5bc6\u5ea6\u662f\u5176\u4ed6\u79bb\u5b50\u67aa\u76841-\u500d\u3002\u5f53\u675f\u6d41\u4e3a1\u00b5A\u65f6\uff0c\u5149\u6591\u6700\u5c0f\u53ef\u4ee5\u9009\u62e9\u523050\u00b5m. \u7535\u5b50\u675f\u80fd\u91cf\u53ef\u4ee5\u5728\u8303\u56f45eV\u52305keV\u4e2d\u9009\u62e9\uff0c\u5e76\u540c\u65f6\u4fdd\u6301\u6837\u54c1\u7684\u6700\u4f73\u805a\u7126\u3002\u675f\u6d41\u5927\u5c0f\u53ef\u4ee5\u8c03\u8282\uff0c\u5e76\u4e0d\u53d7\u7535\u5b50\u675f\u80fd\u91cf\u7684\u5f71\u54cd\uff0c\u65e0\u9700\u5916\u90e8\u8bbe\u5907\uff0c\u53ef\u4ee5\u76f4\u63a5\u4ece\u524d\u9762\u677f\u8fdb\u884c\u8c03\u8282\u3002<\/p>\n

\u901a\u8fc7\u7535\u5b50\u51b2\u51fb\u6765\u751f\u6210\u79bb\u5b50\uff0c\u53cc\u706f\u4e1d\u8bbe\u8ba1\u53ef\u4ee5\u5ef6\u957f\u4f7f\u7528\u5bff\u547d\uff0c\u800c\u65e0\u9700\u4e2d\u65ad\u8bbe\u5907\u7684\u4f7f\u7528\u3002\u79bb\u5b50\u6e90\u7684\u771f\u7a7a\u706f\u4e1d\u5904\u4e8e\u79bb\u8f74\u72b6\u6001\uff0c\u4ee5\u9632\u6b62\u706f\u4e1d\u6750\u6599\u6c89\u79ef\u5230\u6837\u54c1\u4e0a\u3002
\nThe ion source may be differentially pumped either directly into the system or by means of a separate turbo pump for improved system vacuum.<\/p>\n

The controller with power supplies and scan electronics is housed in a single 5-1\/4″ high 19″ rack mount cabinet. The Ion Gun can be controlled either from the front panel or through a flexible interface allowing control of beam and focus voltages, ionization current, gas, beam on\/off, and raster. The raster scan is digitally generated for uniform etch rate.<\/p>\n

Design Features:<\/strong><\/p>\n