Newmark RMS-5防水旋转台

RMS-5采用完全密封设计,与外部环境彻底隔离,特别适用于半导体晶圆切割等应用场景。

该转台具备IP68防护等级,可完全浸没于水中运行,同时也能满足户外防尘防潮的应用需求。其工作台运动采用单套预紧交叉滚子轴承设计,摒弃了传统双轴承配置,从而显著提升了轴向跳动精度和稳定性。

这款防水旋转台采用蜗轮驱动系统,提供72:1和36:1两种减速比选项,并通过预紧蜗杆有效降低传动链背隙。标准配置包含集成式光学原点开关、23步进电机以及10英尺长的电机/信号复合电缆。用户可选配步进电机旋转编码器,若需高速应用还可升级为23无刷伺服电机版本。

Specifications
Resolution
up to 0.36 arc-sec (depends on gear ratio and motor type)
Accuracy
70 arc-sec
Max. Speed
Stepper Motor: 25°/sec (72:1 gear ratio), 50°/sec (36:1 gear ratio) Servo Motor: 125°/sec (72:1 gear ratio), 250°/sec (36:1 gear ratio)
Unidirectional Repeatability
5 arc-sec
Bi-directional Repeatability
45 arc-sec
Max. Output Torque
10.2 Nm (90 lb-in)
Max Load Capacity
36.3 kg (80 lbs)
Travel Range
360° Continuous
Encoder
Optical rotary encoder mounted to rear of motor, 4000 CPR with Index (Optional)
Limit Switches
None
Origin
Optical home switch Optical index mark on encoder (with encoder option)
Gear Ratio
72:1 or 36:1
Stage Weight
5 kg (11 lbs)
Material
Aluminum Alloy Construction
Finish
Black Anodize

RMS-5 Submersible Rotary Stage