EQUIPE双臂晶圆搬运机器人
类别：机器人 > Equipe系列
特点
- 针对快速晶圆交换进行了优化
- 标准一体式马蹄形末端执行器
- 完整的 360° Theta 旋转，消除死区
General Specifications:
- Payload (each arm) 1 lb. (.45kg)
- Wafer Size: 200mm-300mm (Standard)
- Weight: 90 lbs. (41kg)
Utilities Required:
- Vacuum: 18-24 inches Hg
- Input Voltage: 100/120/220/240 VAC, 50/60 Hz.
- Throughput: ≤ 3 seconds / per wafer swaps.
Mounting Specifications:
- Mounting Holes: 4 x .375” thru holes.
- Mounting Holes: Spacing 11.75″.
- End Effector Mounting: 4 x 6-32, 1.00” spacing
- Dead Zone: N/A
| Axis | Repeatability | Speed | Motion range (2406) | Motion range (2407) |
|---|---|---|---|---|
| T | + 0.01 | 360°/sec | 360° | 360° |
| R | < ± 0.002″ | 24 inch/sec | 11.68” | 14.50” |
| Z | ± 0.001″ | 12 inch/sec | 12.96″ | 12.96″ |