MILARA智能预对准器 3英寸 – 12英寸
类别：预对准器
Milara智能预对准器采用高分辨率编码器，提供行业领先的对准精度。
特点：
▶ 行业领先的对准精度
▶ 自校准和自诊断功能
▶ RGB 和 IR 光源，实现更快的边缘检测
▶ 移动式灯塔设计
Milara智能预对准器采用高分辨率编码器，提供行业领先的对准精度。该对准器配备RGB和IR光源，能够更轻松、更快速地检测半透明和玻璃载体的边缘。移动式灯塔设计使其能够对准非标准尺寸的方形和圆形基板。Milara 智能预对准器具备自校准和自诊断功能，并配备支持 M2M通信的Web 界面，适用于智能制造和自动化应用。此外，还提供多种吸盘和针材质选择，如 Peek、Tekapeek ELS nano、Semitron ESD420、Viton、Kalrez、陶瓷等。
| Wafer Diameter | From 3” to 12” | |
| Non-standard size wafers (e.g. 108mm, 208mm etc.) | Yes | |
| Square Substrates | Yes | |
| Flat and Notch Compatibility | Yes | |
| Wafer Opacity | Transparent, Semi-Transparent, Opaque | |
| Angular Accuracy | 0.015° | |
| Centering Accuracy | 20 um / 0.0007” | |
| Initial Offset Limit | 10 mm / 0.39” | |
| Chuck and pins materials | Peek, Tekapeek ELS nano, Semitron ESD420, Viton, Kalrez, Ceramic, etc. | |
| Alignment time | <4 sec | |
| Body Dimensions | Width | 173mm / 6,811” |
| Length | 317mm / 12,480” | |
| Height | 188.50mm / 7,421” | |
| Weight (kg) | 5.00 | |
| Servo Axes | Four | |
| Handling | Vacuum | |
| Facilities Required | 100-240 VAC, 50-60 Hz or 24 VDC/3A Minimum vacuum: 70 kPa Minimum airflow: 100 cc/sec. (at 70 kPa) | |
| Host Communication | RS232 or Ethernet | |
| Light Source | Adaptive | |
| Cleanliness | ISO 3 (ISO 14644) / Class 1 (FED STD 209E) Clean room compliant | |
| Nitrogen purge | Optional | |
| MTBF | >60 000hours / >10 000 000 cycles | |
| Certification | TUV (IEC/UL61010-1) | |
| Compliance | SEMI S2, S8 and CE / UKCA compliant | |