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| PART | VACUUM SERIES | ACTUATOR | PORT FLANGE | FLANGE SIZE | FLANGE THREAD | BONNET SEAL |
|---|---|---|---|---|---|---|
| 302003 | UHV | MANUAL | CONFLAT | 4-5/8 | UNF | METAL |
| 302015 | UHV | MANUAL | CONFLAT | 4-5/8 | METRIC | METAL |
| 303003 | UHV | PNEUMATIC | CONFLAT | 4-5/8 | UNF | METAL |
| 303015 | UHV | PNEUMATIC | CONFLAT | 4-5/8 | METRIC | METAL |
| 300003 | HV | MANUAL | CONFLAT | 4-5/8 | UNF | FKM |
| 300015 | HV | MANUAL | CONFLAT | 4-5/8 | METRIC | FKM |
| 306004 | HV | MANUAL | ISO | NW80 | METRIC | FKM |
| 304001 | HV | MANUAL | ASA | ASA3 | UNC | FKM |
| 301003 | HV | PNEUMATIC | CONFLAT | 4-5/8 | UNF | FKM |
| 301015 | HV | PNEUMATIC | CONFLAT | 4-5/8 | METRIC | FKM |
| 307004 | HV | PNEUMATIC | ISO | NW80 | METRIC | FKM |
| 305001 | HV | PNEUMATIC | ASA | ASA3 | UNC | FKM |
| Material | |
| Body, Carriage & Gate | 300 Series SS |
| Bellows | AM-350 ss |
| Air Cylinder | Teflon® coated Aluminum |
| Bolts | 300 Series ss, silver plated |
| Gaskets | |
| Bonnet UHV / HV | OFE Copper / FKM elastomer |
| Gate | FKM or optional Kalrez® 4079 elastomer |
| Piston | FKM elastomer |
| Electropneumatic Actuator | |
| Air Pressure | 70 to 100 psig |
| Air Control Valve | 410 Series Humphrey solenoid valve |
| Solenoid Power | 120VAC, 50/60Hz, 4W |
| Power Loss | Valve closes |
| Position Indicators | Mechanical, vernier adjustable, hinged-roller type micro switches suitable for 5A, 120/240VAC |
| Vacuum | |
| Range | 1×10-11 Torr |
| Leak Test | 2×10-10 cc/sec of He |
| Temperature Range | |
| Bakeability under vacuum in Open-Closed positions, with the following Bonnet-Gate seal combinations | |
| UHV | 200°C Open /150°C Closed / Copper Bonnet / FKM Gate |
| UHV | 250°C Open /200°C Closed / Copper Bonnet / Kalrez® Gate |
| HV | 150°C Open /150°C Closed / FKM Bonnet / FKM Gate |

