{"id":1039,"date":"2026-09-16T12:45:04","date_gmt":"2026-09-16T04:45:04","guid":{"rendered":"https:\/\/www.bihec.com\/logosol\/?p=1039"},"modified":"2026-09-16T12:45:04","modified_gmt":"2026-09-16T04:45:04","slug":"logosol-isellpa12fs-3%e7%8b%ac%e7%ab%8b%e5%bc%8f%e6%99%b6%e5%9c%86%e9%a2%84%e5%af%b9%e5%87%86%e5%99%a8%e6%99%b6%e5%9c%86%e8%87%aa%e5%8a%a8%e5%ae%9a%e5%bf%83%e5%92%8c%e8%a7%92%e5%ba%a6%e6%96%b9","status":"publish","type":"post","link":"https:\/\/www.bihec.com\/logosol\/logosol-isellpa12fs-3%e7%8b%ac%e7%ab%8b%e5%bc%8f%e6%99%b6%e5%9c%86%e9%a2%84%e5%af%b9%e5%87%86%e5%99%a8%e6%99%b6%e5%9c%86%e8%87%aa%e5%8a%a8%e5%ae%9a%e5%bf%83%e5%92%8c%e8%a7%92%e5%ba%a6%e6%96%b9\/","title":{"rendered":"Logosol\/isel,LPA12FS-3,\u72ec\u7acb\u5f0f\u6676\u5706\u9884\u5bf9\u51c6\u5668,\u6676\u5706\u81ea\u52a8\u5b9a\u5fc3\u548c\u89d2\u5ea6\u65b9\u5411\u6821\u51c6"},"content":{"rendered":"<p><a href=\"https:\/\/www.bihec.com\/logosol\/tag\/logosol\/\" title=\"View all posts in Logosol\" target=\"_blank\">Logosol<\/a>\/<a href=\"https:\/\/www.bihec.com\/logosol\/tag\/isel\/\" title=\"View all posts in isel\" target=\"_blank\">isel<\/a>,<a href=\"https:\/\/www.bihec.com\/logosol\/tag\/lpa12fs-3\/\" title=\"View all posts in LPA12FS-3\" target=\"_blank\">LPA12FS-3<\/a>,<a href=\"https:\/\/www.bihec.com\/logosol\/tag\/%e7%8b%ac%e7%ab%8b%e5%bc%8f%e6%99%b6%e5%9c%86%e9%a2%84%e5%af%b9%e5%87%86%e5%99%a8\/\" title=\"View all posts in \u72ec\u7acb\u5f0f\u6676\u5706\u9884\u5bf9\u51c6\u5668\" target=\"_blank\">\u72ec\u7acb\u5f0f\u6676\u5706\u9884\u5bf9\u51c6\u5668<\/a>,<a href=\"https:\/\/www.bihec.com\/logosol\/tag\/%e6%99%b6%e5%9c%86%e8%87%aa%e5%8a%a8%e5%ae%9a%e5%bf%83%e5%92%8c%e8%a7%92%e5%ba%a6%e6%96%b9%e5%90%91%e6%a0%a1%e5%87%86\/\" title=\"View all posts in \u6676\u5706\u81ea\u52a8\u5b9a\u5fc3\u548c\u89d2\u5ea6\u65b9\u5411\u6821\u51c6\" target=\"_blank\">\u6676\u5706\u81ea\u52a8\u5b9a\u5fc3\u548c\u89d2\u5ea6\u65b9\u5411\u6821\u51c6<\/a><\/p>\n<p>Logosol\/isel \u7684 <a href=\"https:\/\/www.bihec.com\/logosol\/tag\/lpa12fs\/\" title=\"View all posts in LPA12FS\" target=\"_blank\">LPA12FS<\/a>-3\u00a0 <a href=\"https:\/\/www.bihec.com\/logosol\/tag\/%e7%8b%ac%e7%ab%8b%e5%bc%8f\/\" title=\"View all posts in \u72ec\u7acb\u5f0f\" target=\"_blank\">\u72ec\u7acb\u5f0f<\/a><a href=\"https:\/\/www.bihec.com\/logosol\/tag\/%e6%99%b6%e5%9c%86%e9%a2%84%e5%af%b9%e5%87%86%e5%99%a8\/\" title=\"View all posts in \u6676\u5706\u9884\u5bf9\u51c6\u5668\" target=\"_blank\">\u6676\u5706\u9884\u5bf9\u51c6\u5668<\/a>\u3002\u4e3b\u8981\u7528\u4e8e 300 mm \u6676\u5706\u5728\u8fdb\u5165\u540e\u7eed\u534a\u5bfc\u4f53\u8bbe\u5907\/\u5de5\u827a\u4e4b\u524d\uff0c\u5bf9\u6676\u5706\u8fdb\u884c\u81ea\u52a8\u5b9a\u5fc3\u548c\u89d2\u5ea6\u65b9\u5411\u6821\u51c6\u3002\u5b83\u7684\u6838\u5fc3\u7279\u70b9\u662f\u5feb\u901f\u6362\u7247\u3002<\/p>\n<h3 class=\"PDq2pG_selectionAnchorContainer\" dir=\"auto\" data-section-id=\"ejxng8\" data-start=\"244\" data-end=\"259\">\u4e00\u3001\u5b83\u4e3b\u8981\u662f\u505a\u4ec0\u4e48\u7684\uff1f<\/h3>\n<p dir=\"auto\" data-start=\"261\" data-end=\"269\">\u53ef\u4ee5\u7b80\u5355\u7406\u89e3\u4e3a\uff1a<\/p>\n<blockquote data-start=\"271\" data-end=\"340\">\n<p dir=\"auto\" data-start=\"273\" data-end=\"340\"><a href=\"https:\/\/www.bihec.com\/logosol\/tag\/%e6%9c%ba%e5%99%a8%e4%ba%ba\/\" title=\"View all posts in \u673a\u5668\u4eba\" target=\"_blank\">\u673a\u5668\u4eba<\/a>\u628a\u6676\u5706\u653e\u5230<a href=\"https:\/\/www.bihec.com\/logosol\/tag\/%e9%a2%84%e5%af%b9%e5%87%86%e5%99%a8\/\" title=\"View all posts in \u9884\u5bf9\u51c6\u5668\" target=\"_blank\">\u9884\u5bf9\u51c6\u5668<\/a>\u4e0a \u2192 <a href=\"https:\/\/www.bihec.com\/logosol\/tag\/%e9%a2%84%e5%af%b9%e5%87%86\/\" title=\"View all posts in \u9884\u5bf9\u51c6\" target=\"_blank\">\u9884\u5bf9\u51c6<\/a>\u5668\u68c0\u6d4b\u6676\u5706\u8fb9\u7f18\/\u7f3a\u53e3 \u2192 \u8c03\u6574\u6676\u5706\u4e2d\u5fc3\u548c\u89d2\u5ea6 \u2192 \u673a\u5668\u4eba\u518d\u628a\u5df2\u7ecf\u5bf9\u51c6\u7684\u6676\u5706\u9001\u5165\u5de5\u827a\u8bbe\u5907\u3002<\/p>\n<\/blockquote>\n<p dir=\"auto\" data-start=\"342\" data-end=\"380\">\u5b83\u4e0d\u662f\u7528\u6765\u52a0\u5de5\u6676\u5706\u7684\uff0c\u800c\u662f\u89e3\u51b3\u6676\u5706\u8fdb\u5165\u8bbe\u5907\u524d\u7684\u4f4d\u7f6e\u548c\u65b9\u5411\u4e00\u81f4\u6027\u95ee\u9898\u3002<\/p>\n<p dir=\"auto\" data-start=\"382\" data-end=\"407\">\u4f8b\u5982 300 mm \u6676\u5706\u88ab\u673a\u5668\u4eba\u53d6\u653e\u65f6\uff0c\u53ef\u80fd\u5b58\u5728\uff1a<\/p>\n<ul data-start=\"409\" data-end=\"471\">\n<li data-section-id=\"1hgr6zd\" data-start=\"409\" data-end=\"418\">\u6676\u5706\u4e2d\u5fc3\u504f\u79fb\uff1b<\/li>\n<li data-section-id=\"17x0ujt\" data-start=\"419\" data-end=\"431\">\u6676\u5706\u65cb\u8f6c\u89d2\u5ea6\u4e0d\u4e00\u81f4\uff1b<\/li>\n<li data-section-id=\"yhhq4k\" data-start=\"432\" data-end=\"449\">Notch\uff08\u7f3a\u53e3\uff09\u65b9\u5411\u4e0d\u4e00\u81f4\uff1b<\/li>\n<li data-section-id=\"d6rgp\" data-start=\"450\" data-end=\"471\">\u6676\u5706\u900f\u660e\/\u534a\u900f\u660e\u5bfc\u81f4\u666e\u901a\u5149\u5b66\u68c0\u6d4b\u56f0\u96be\u3002<\/li>\n<\/ul>\n<p dir=\"auto\" data-start=\"473\" data-end=\"518\">\u9884\u5bf9\u51c6\u5668\u4f1a\u5148\u68c0\u6d4b\u6676\u5706\u7684\u4f4d\u7f6e\u548c\u8fb9\u7f18\uff0c\u7136\u540e\u901a\u8fc7\u8fd0\u52a8\u8f74\u8fdb\u884c\u8c03\u6574\uff0c\u4f7f\u6676\u5706\u8fbe\u5230\u8bbe\u5907\u8981\u6c42\u7684\u4f4d\u7f6e\u548c\u89d2\u5ea6\u3002<\/p>\n<p dir=\"auto\" data-start=\"520\" data-end=\"621\">Logosol\/isel <a href=\"https:\/\/www.bihec.com\/logosol\/tag\/lpa\/\" title=\"View all posts in LPA\" target=\"_blank\">LPA<\/a>12FS-3 \u652f\u6301 300 mm \u6676\u5706\uff0c\u5e76\u4e14\u53ef\u4ee5\u68c0\u6d4b\u900f\u660e\u3001\u534a\u900f\u660e\u548c\u4e0d\u900f\u660e\u6676\u5706\u3002<\/p>\n<h3 dir=\"auto\" data-section-id=\"1mi3ve7\" data-start=\"628\" data-end=\"659\">\u4e8c\u3001LPA12FS-3 \u6700\u6838\u5fc3\u7684\u529f\u80fd\uff1aFast Swap\u5feb\u901f\u6362\u7247<\/h3>\n<p dir=\"auto\" data-start=\"661\" data-end=\"713\">\u8fd9\u4e2a\u578b\u53f7\u548c\u666e\u901a<a href=\"https:\/\/www.bihec.com\/logosol\/tag\/%e7%8b%ac%e7%ab%8b%e5%bc%8f%e9%a2%84%e5%af%b9%e5%87%86%e5%99%a8\/\" title=\"View all posts in \u72ec\u7acb\u5f0f\u9884\u5bf9\u51c6\u5668\" target=\"_blank\">\u72ec\u7acb\u5f0f\u9884\u5bf9\u51c6\u5668<\/a>\u6700\u5927\u7684\u533a\u522b\u5c31\u662f Fast Swap\u5feb\u901f\u6362\u7247\u3002<\/p>\n<blockquote data-start=\"736\" data-end=\"821\">\n<p dir=\"auto\" data-start=\"738\" data-end=\"821\">\u91c7\u7528\u4e13\u5229\u8bbe\u8ba1\uff0c\u4f7f wafer chuck\u6676\u5706\u5361\u76d8 \u53ef\u4ee5\u5728 pin level \u9500\u9489\u6c34\u5e73\u4ee5\u4e0b\u8fdb\u884c\u88c5\u8f7d\u3002<\/p>\n<\/blockquote>\n<p dir=\"auto\" data-start=\"823\" data-end=\"830\">\u7b80\u5355\u7406\u89e3\u5c31\u662f\uff1a<\/p>\n<h3 dir=\"auto\" data-section-id=\"69w8m9\" data-start=\"832\" data-end=\"842\">\u666e\u901a\u9884\u5bf9\u51c6\u5668<\/h3>\n<p dir=\"auto\" data-start=\"844\" data-end=\"852\">\u673a\u5668\u4eba\u901a\u5e38\u9700\u8981\uff1a<\/p>\n<ol data-start=\"854\" data-end=\"936\">\n<li data-section-id=\"mpzb0s\" data-start=\"854\" data-end=\"875\">\u628a\u6676\u5706\u653e\u5230\u9500\u9489\u4e0a<\/li>\n<li data-section-id=\"1j8smld\" data-start=\"876\" data-end=\"899\">\u9500\u9489\/\u5361\u76d8 \u914d\u5408\u5b8c\u6210\u6676\u5706\u8f6c\u79fb<\/li>\n<li data-section-id=\"1hf94pr\" data-start=\"900\" data-end=\"914\">\u5361\u76d8\u627f\u63a5\u6676\u5706<\/li>\n<li data-section-id=\"c8n1u0\" data-start=\"915\" data-end=\"924\">\u8fdb\u884c\u9884\u5bf9\u51c6<\/li>\n<li data-section-id=\"15gl37y\" data-start=\"925\" data-end=\"936\">\u518d\u7531\u673a\u5668\u4eba\u53d6\u8d70<\/li>\n<\/ol>\n<h3 dir=\"auto\" data-section-id=\"1fibz2r\" data-start=\"938\" data-end=\"951\">Fast Swap\u5feb\u901f\u6362\u7247\u9884\u5bf9\u51c6\u5668<\/h3>\n<p dir=\"auto\" data-start=\"953\" data-end=\"1017\">\u5feb\u901f\u6362\u7247\u9884\u5bf9\u51c6\u5668\u5bf9\u6676\u5706\u7684\u88c5\u8f7d\u65b9\u5f0f\u8fdb\u884c\u4e86\u4f18\u5316\uff0c\u4f7f\u5361\u76d8\u53ef\u4ee5\u5728\u9500\u9489\u7684\u4e0b\u65b9\u5b8c\u6210\u6676\u5706\u52a0\u8f7d\u3002<\/p>\n<p dir=\"auto\" data-start=\"1019\" data-end=\"1025\">\u56e0\u6b64\u6676\u5706\u7684\uff1a<\/p>\n<p dir=\"auto\" data-start=\"1027\" data-end=\"1048\">\u653e\u5165 \u2192 \u627f\u63a5 \u2192 \u5bf9\u51c6 \u2192 \u53d6\u8d70<\/p>\n<p dir=\"auto\" data-start=\"1050\" data-end=\"1068\">\u6574\u4e2a\u6362\u7247\u8fc7\u7a0b\u53ef\u4ee5\u505a\u5f97\u66f4\u52a0\u7d27\u51d1\u3001\u9ad8\u6548\u3002<\/p>\n<p dir=\"auto\" data-start=\"1070\" data-end=\"1107\">\u8fd9\u4e5f\u662f\u5b83\u53eb\u5feb\u901f\u6362\u7247\u9884\u5bf9\u51c6\u5668\u7684\u4e3b\u8981\u539f\u56e0\u3002<\/p>\n<h3 dir=\"auto\" data-section-id=\"ij8kct\" data-start=\"1114\" data-end=\"1130\">\u4e09\u3001\u5177\u4f53\u80fd\u591f\u5b8c\u6210\u54ea\u4e9b\u52a8\u4f5c\uff1f<\/h3>\n<p dir=\"auto\" data-section-id=\"16u6e2\" data-start=\"1132\" data-end=\"1154\">1. \u6676\u5706\u5b9a\u5fc3<\/p>\n<p dir=\"auto\" data-start=\"1156\" data-end=\"1182\">\u6676\u5706\u653e\u4e0a\u53bb\u4e4b\u540e\uff0c\u4e0d\u4e00\u5b9a\u6b63\u597d\u4f4d\u4e8e\u5361\u76d8\u7684\u4e2d\u5fc3\u3002<\/p>\n<p dir=\"auto\" data-start=\"1184\" data-end=\"1211\">\u5feb\u901f\u6362\u7247\u9884\u5bf9\u51c6\u5668\u53ef\u4ee5\u68c0\u6d4b\u6676\u5706\u4f4d\u7f6e\uff0c\u5e76\u8fdb\u884c\u4e2d\u5fc3\u6821\u6b63\u3002<\/p>\n<p dir=\"auto\" data-start=\"1213\" data-end=\"1218\">\u53c2\u6570\uff1a<\/p>\n<div class=\"group TyagGW_tableContainer\" dir=\"auto\">\n<div class=\"TyagGW_tableWrapper flex flex-col-reverse w-fit\">\n<table class=\"w-fit min-w-(--thread-content-width)\" dir=\"auto\" data-start=\"1220\" data-end=\"1315\">\n<thead data-start=\"1220\" data-end=\"1238\">\n<tr data-start=\"1220\" data-end=\"1238\">\n<th class=\"last:pe-10\" data-start=\"1220\" data-end=\"1225\" data-col-size=\"sm\">\u9879\u76ee<\/th>\n<th class=\"last:pe-10\" data-start=\"1225\" data-end=\"1238\" data-col-size=\"sm\">LPA12FS-3<\/th>\n<\/tr>\n<\/thead>\n<tbody data-start=\"1249\" data-end=\"1315\">\n<tr data-start=\"1249\" data-end=\"1270\">\n<td data-start=\"1249\" data-end=\"1256\" data-col-size=\"sm\">\u6676\u5706\u5c3a\u5bf8<\/td>\n<td data-start=\"1256\" data-end=\"1270\" data-col-size=\"sm\">300 mm<\/td>\n<\/tr>\n<tr data-start=\"1271\" data-end=\"1293\">\n<td data-start=\"1271\" data-end=\"1280\" data-col-size=\"sm\">\u6700\u5927\u521d\u59cb\u504f\u5fc3<\/td>\n<td data-start=\"1280\" data-end=\"1293\" data-col-size=\"sm\">12 mm<\/td>\n<\/tr>\n<tr data-start=\"1294\" data-end=\"1315\">\n<td data-start=\"1294\" data-end=\"1301\" data-col-size=\"sm\">\u5b9a\u5fc3\u7cbe\u5ea6<\/td>\n<td data-start=\"1301\" data-end=\"1315\" data-col-size=\"sm\">\u00b125 \u03bcm<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<\/div>\n<\/div>\n<p dir=\"auto\" data-start=\"1317\" data-end=\"1389\">\u4e5f\u5c31\u662f\u8bf4\uff0c\u6676\u5706\u5373\u4f7f\u4e00\u5f00\u59cb\u6709\u4e00\u5b9a\u7a0b\u5ea6\u7684\u4f4d\u7f6e\u504f\u5dee\uff0c\u9884\u5bf9\u51c6\u5668\u4e5f\u80fd\u591f\u8fdb\u884c\u6821\u6b63\u3002<\/p>\n<p dir=\"auto\" data-section-id=\"1d3ted4\" data-start=\"1396\" data-end=\"1417\">2. \u6676\u5706\u89d2\u5ea6\/\u7f3a\u53e3\u65b9\u5411\u5bf9\u51c6<\/p>\n<p dir=\"auto\" data-start=\"1419\" data-end=\"1481\">\u5bf9\u4e8e 300 mm \u6676\u5706\uff0c\u901a\u5e38\u9700\u8981\u8bc6\u522b\u6676\u5706\u8fb9\u4e0a\u7684\u7f3a\u53e3\uff0c\u7136\u540e\u628a\u7f3a\u53e3\u8f6c\u5230\u89c4\u5b9a\u7684\u89d2\u5ea6\u3002<\/p>\n<p dir=\"auto\" data-start=\"1483\" data-end=\"1498\">\u5feb\u901f\u6362\u7247\u9884\u5bf9\u51c6\u5668LPA12FS-3 \u53ef\u4ee5\u8fdb\u884c\uff1a<\/p>\n<p dir=\"auto\" data-start=\"1500\" data-end=\"1562\">\u6676\u5706\u8fb9\u68c0\u6d4b \u2192 \u7f3a\u53e3\u68c0\u6d4b \u2192 \u89d2\u5ea6\u5bf9\u51c6<\/p>\n<p dir=\"auto\" data-start=\"1564\" data-end=\"1577\">\u89d2\u5ea6\u7cbe\u5ea6\u53d6\u51b3\u4e8e\u7f16\u7801\u5668\u914d\u7f6e\uff1a<\/p>\n<div class=\"group TyagGW_tableContainer\" dir=\"auto\">\n<div class=\"TyagGW_tableWrapper flex flex-col-reverse w-fit\">\n<table class=\"w-fit min-w-(--thread-content-width)\" dir=\"auto\" data-start=\"1579\" data-end=\"1660\">\n<thead data-start=\"1579\" data-end=\"1601\">\n<tr data-start=\"1579\" data-end=\"1601\">\n<th class=\"last:pe-10\" data-start=\"1579\" data-end=\"1589\" data-col-size=\"sm\">\u7f16\u7801\u5668<\/th>\n<th class=\"last:pe-10\" data-start=\"1589\" data-end=\"1601\" data-col-size=\"sm\">\u89d2\u5ea6\u7cbe\u5ea6\uff083\u03c3\uff09<\/th>\n<\/tr>\n<\/thead>\n<tbody data-start=\"1613\" data-end=\"1660\">\n<tr data-start=\"1613\" data-end=\"1636\">\n<td data-start=\"1613\" data-end=\"1626\" data-col-size=\"sm\">10,000 CPR<\/td>\n<td data-col-size=\"sm\" data-start=\"1626\" data-end=\"1636\">\u00b10.04\u00b0<\/td>\n<\/tr>\n<tr data-start=\"1637\" data-end=\"1660\">\n<td data-start=\"1637\" data-end=\"1650\" data-col-size=\"sm\">24,000 CPR<\/td>\n<td data-start=\"1650\" data-end=\"1660\" data-col-size=\"sm\">\u00b10.02\u00b0<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<\/div>\n<\/div>\n<p dir=\"auto\" data-start=\"1662\" data-end=\"1746\">\u56e0\u6b64\u5982\u679c\u5ba2\u6237\u8981\u6c42\u6bd4\u8f83\u9ad8\u7684\u7f3a\u53e3\u5b9a\u4f4d\u7cbe\u5ea6\uff0c\u53ef\u4ee5\u9009\u62e9\u00a024,000 CPR \u914d\u7f6e\u7684\u7f16\u7801\u5668\u3002<\/p>\n<p dir=\"auto\" data-section-id=\"1vah1wi\" data-start=\"1753\" data-end=\"1770\">3. \u68c0\u6d4b\u4e0d\u540c\u900f\u660e\u5ea6\u7684\u6676\u5706<\/p>\n<p dir=\"auto\" data-start=\"1772\" data-end=\"1785\">\u8fd9\u662f\u5b83\u6bd4\u8f83\u91cd\u8981\u7684\u4e00\u4e2a\u7279\u70b9\u3002<\/p>\n<p dir=\"auto\" data-start=\"1787\" data-end=\"1809\">\u5feb\u901f\u6362\u7247\u9884\u5bf9\u51c6\u5668LPA12FS-3 \u7684\u626b\u63cf\u7535\u5b50\u7cfb\u7edf\u53ef\u4ee5\u68c0\u6d4b\uff1a<\/p>\n<ul data-start=\"1811\" data-end=\"1875\">\n<li data-section-id=\"1cwna9t\" data-start=\"1811\" data-end=\"1827\">Opaque\uff1a\u4e0d\u900f\u660e<\/li>\n<li data-section-id=\"1u2f4jk\" data-start=\"1828\" data-end=\"1854\">Semi-transparent\uff1a\u534a\u900f\u660e<\/li>\n<li data-section-id=\"1ram5xx\" data-start=\"1855\" data-end=\"1875\">Transparent\uff1a\u900f\u660e<\/li>\n<\/ul>\n<p dir=\"auto\" data-start=\"1877\" data-end=\"1951\">\u800c\u4e14\u4e0d\u9700\u8981\u9488\u5bf9\u4e0d\u540c\u6676\u5706\u5c3a\u5bf8\u8fdb\u884c\u673a\u68b0\u91cd\u65b0\u5b9a\u4f4d\u3002<\/p>\n<p dir=\"auto\" data-start=\"1953\" data-end=\"1992\">\u56e0\u6b64\u5b83\u4e0d\u4ec5\u9002\u5408\u666e\u901a\u7845\u7247\uff0c\u4e5f\u53ef\u4ee5\u8003\u8651\u4e00\u4e9b\u5177\u6709\u7279\u6b8a\u5149\u5b66\u7279\u6027\u7684\u57fa\u677f\u3002<\/p>\n<h3 dir=\"auto\" data-section-id=\"12ly98n\" data-start=\"1999\" data-end=\"2016\">\u56db\u3001\u5b83\u4e3a\u4ec0\u4e48\u9002\u5408\u534a\u5bfc\u4f53\u8bbe\u5907\uff1f<\/h3>\n<p dir=\"auto\" data-start=\"2018\" data-end=\"2069\">\u5feb\u901f\u6362\u7247\u9884\u5bf9\u51c6\u5668LPA12FS-3 \u662f\u4e00\u4e2a\u72ec\u7acb\u5f0f\u9884\u5bf9\u51c6\u5668\u3002<\/p>\n<p dir=\"auto\" data-start=\"2071\" data-end=\"2078\">\u5b83\u81ea\u5df1\u96c6\u6210\u4e86\uff1a<\/p>\n<ul data-start=\"2080\" data-end=\"2119\">\n<li data-section-id=\"2r5s6c\" data-start=\"2080\" data-end=\"2088\">\u673a\u68b0\u8fd0\u52a8\u673a\u6784<\/li>\n<li data-section-id=\"1180bt5\" data-start=\"2089\" data-end=\"2100\">\u626b\u63cf\/\u68c0\u6d4b\u7535\u5b50\u7cfb\u7edf<\/li>\n<li data-section-id=\"26tz6p\" data-start=\"2101\" data-end=\"2107\">\u8fd0\u52a8\u63a7\u5236<\/li>\n<li data-section-id=\"yhqg19\" data-start=\"2108\" data-end=\"2112\">\u7535\u6e90<\/li>\n<li data-section-id=\"1n0lzfk\" data-start=\"2113\" data-end=\"2119\">\u63a7\u5236\u8f6f\u4ef6<\/li>\n<\/ul>\n<p dir=\"auto\" data-start=\"2121\" data-end=\"2206\">\u56e0\u6b64\u4e0d\u9700\u8981\u989d\u5916\u914d\u7f6e\u4e00\u4e2a\u72ec\u7acb\u7684\u5916\u90e8\u63a7\u5236\u5668\u3002\u53ef\u4ee5\u79f0\u5176\u4e3a\u4e00\u4f53\u5316\u8bbe\u8ba1\u3002<\/p>\n<p dir=\"auto\" data-start=\"2208\" data-end=\"2215\">\u5b83\u8fd8\u53ef\u4ee5\u901a\u8fc7\uff1a<\/p>\n<ul data-start=\"2217\" data-end=\"2244\">\n<li data-section-id=\"16c31rr\" data-start=\"2217\" data-end=\"2229\">RS-232<\/li>\n<li data-section-id=\"m2tfo9\" data-start=\"2230\" data-end=\"2244\">Ethernet<\/li>\n<\/ul>\n<p dir=\"auto\" data-start=\"2246\" data-end=\"2293\">\u4e0e\u4e3b\u673a\u8bbe\u5907\u8fdb\u884c\u901a\u4fe1\u3002<\/p>\n<p dir=\"auto\" data-start=\"2295\" data-end=\"2321\">\u6240\u4ee5\u5b83\u53ef\u4ee5\u6bd4\u8f83\u5bb9\u6613\u5730\u5d4c\u5165\u5230\u534a\u5bfc\u4f53\u8bbe\u5907\u7684\u81ea\u52a8\u5316\u6d41\u7a0b\u4e2d\u3002<\/p>\n<h3 dir=\"auto\" data-section-id=\"i2si22\" data-start=\"2328\" data-end=\"2339\">\u4e94\u3001\u5178\u578b\u5e94\u7528\u573a\u666f<\/h3>\n<p dir=\"auto\" data-start=\"2341\" data-end=\"2354\">\u4f8b\u5982\u4e00\u53f0\u534a\u5bfc\u4f53\u8bbe\u5907\u91cc\u9762\u6709\uff1a<\/p>\n<p dir=\"auto\" data-start=\"2356\" data-end=\"2414\">Load Port \u2192 Wafer Robot \u2192 <a href=\"https:\/\/www.bihec.com\/logosol\/tag\/prealigner\/\" title=\"View all posts in Prealigner\" target=\"_blank\">Prealigner<\/a> \u2192 Process Chamber<\/p>\n<p dir=\"auto\" data-start=\"2416\" data-end=\"2438\">\u673a\u5668\u4eba\u4ece FOUP \u4e2d\u53d6\u51fa wafer \u540e\uff1a<\/p>\n<p dir=\"auto\" data-start=\"2440\" data-end=\"2459\">\u2460 Robot \u53d6 wafer<\/p>\n<p dir=\"auto\" data-start=\"2461\" data-end=\"2464\">\u2193<\/p>\n<p dir=\"auto\" data-start=\"2466\" data-end=\"2484\">\u2461 \u653e\u5230 LPA12FS-3<\/p>\n<p dir=\"auto\" data-start=\"2486\" data-end=\"2489\">\u2193<\/p>\n<p dir=\"auto\" data-start=\"2491\" data-end=\"2520\">\u2462 LPA12FS-3 \u68c0\u6d4b wafer edge<\/p>\n<p dir=\"auto\" data-start=\"2522\" data-end=\"2525\">\u2193<\/p>\n<p dir=\"auto\" data-start=\"2527\" data-end=\"2548\">\u2463 \u5224\u65ad wafer center<\/p>\n<p dir=\"auto\" data-start=\"2550\" data-end=\"2553\">\u2193<\/p>\n<p dir=\"auto\" data-start=\"2555\" data-end=\"2569\">\u2464 \u68c0\u6d4b Notch<\/p>\n<p dir=\"auto\" data-start=\"2571\" data-end=\"2574\">\u2193<\/p>\n<p dir=\"auto\" data-start=\"2576\" data-end=\"2599\">\u2465 \u8c03\u6574 wafer \u7684\u4e2d\u5fc3\u548c\u65cb\u8f6c\u89d2\u5ea6<\/p>\n<p dir=\"auto\" data-start=\"2601\" data-end=\"2604\">\u2193<\/p>\n<p dir=\"auto\" data-start=\"2606\" data-end=\"2632\">\u2466 Robot \u518d\u53d6\u8d70\u5df2\u7ecf\u5bf9\u51c6\u7684 wafer<\/p>\n<p dir=\"auto\" data-start=\"2634\" data-end=\"2637\">\u2193<\/p>\n<p dir=\"auto\" data-start=\"2639\" data-end=\"2694\">\u2467 \u9001\u5165 Etch \/ Deposition \/ Inspection \/ Metrology \u7b49\u8bbe\u5907<\/p>\n<p dir=\"auto\" data-start=\"2696\" data-end=\"2729\">\u8fd9\u6837\u540e\u7eed\u8bbe\u5907\u6bcf\u6b21\u62ff\u5230 wafer \u65f6\uff0c\u6676\u5706\u7684\u4f4d\u7f6e\u548c\u65b9\u5411\u90fd\u662f\u4e00\u81f4\u7684\u3002<\/p>\n<h3 dir=\"auto\" data-section-id=\"ifm89y\" data-start=\"2736\" data-end=\"2747\">\u516d\u3001LPA12FS-3\u4e3b\u8981\u53c2\u6570<\/h3>\n<div class=\"group TyagGW_tableContainer\" dir=\"auto\">\n<div class=\"TyagGW_tableWrapper flex flex-col-reverse w-fit\">\n<table class=\"w-fit min-w-(--thread-content-width)\" dir=\"auto\" data-start=\"2777\" data-end=\"3294\">\n<thead data-start=\"2777\" data-end=\"2795\">\n<tr data-start=\"2777\" data-end=\"2795\">\n<th class=\"last:pe-10\" data-start=\"2777\" data-end=\"2782\" data-col-size=\"sm\">\u53c2\u6570<\/th>\n<th class=\"last:pe-10\" data-start=\"2782\" data-end=\"2795\" data-col-size=\"md\">LPA12FS-3<\/th>\n<\/tr>\n<\/thead>\n<tbody data-start=\"2806\" data-end=\"3294\">\n<tr data-start=\"2806\" data-end=\"2826\">\n<td data-start=\"2806\" data-end=\"2813\" data-col-size=\"sm\">\u4ea7\u54c1\u7c7b\u578b<\/td>\n<td data-start=\"2813\" data-end=\"2826\" data-col-size=\"md\">\u72ec\u7acb\u5f0f\u6676\u5706\u9884\u5bf9\u51c6\u5668<\/td>\n<\/tr>\n<tr data-start=\"2827\" data-end=\"2851\">\n<td data-start=\"2827\" data-end=\"2834\" data-col-size=\"sm\">\u7279\u6b8a\u529f\u80fd<\/td>\n<td data-col-size=\"md\" data-start=\"2834\" data-end=\"2851\">Fast Swap<\/td>\n<\/tr>\n<tr data-start=\"2852\" data-end=\"2873\">\n<td data-start=\"2852\" data-end=\"2859\" data-col-size=\"sm\">\u6676\u5706\u5c3a\u5bf8<\/td>\n<td data-start=\"2859\" data-end=\"2873\" data-col-size=\"md\">300 mm<\/td>\n<\/tr>\n<tr data-start=\"2874\" data-end=\"2899\">\n<td data-start=\"2874\" data-end=\"2881\" data-col-size=\"sm\">\u6676\u5706\u7c7b\u578b<\/td>\n<td data-col-size=\"md\" data-start=\"2881\" data-end=\"2899\">\u900f\u660e \/ \u534a\u900f\u660e \/ \u4e0d\u900f\u660e<\/td>\n<\/tr>\n<tr data-start=\"2900\" data-end=\"2915\">\n<td data-start=\"2900\" data-end=\"2907\" data-col-size=\"sm\">\u65b9\u5f62\u57fa\u677f<\/td>\n<td data-start=\"2907\" data-end=\"2915\" data-col-size=\"md\">\u6709\u9650\u652f\u6301<\/td>\n<\/tr>\n<tr data-start=\"2916\" data-end=\"2954\">\n<td data-start=\"2916\" data-end=\"2923\" data-col-size=\"sm\">\u6676\u5706\u627f\u8f7d<\/td>\n<td data-start=\"2923\" data-end=\"2954\" data-col-size=\"md\">Vacuum Chuck + Passive Pins<\/td>\n<\/tr>\n<tr data-start=\"2955\" data-end=\"2976\">\n<td data-start=\"2955\" data-end=\"2962\" data-col-size=\"sm\">\u5b9a\u5fc3\u7cbe\u5ea6<\/td>\n<td data-start=\"2962\" data-end=\"2976\" data-col-size=\"md\">\u00b125 \u03bcm<\/td>\n<\/tr>\n<tr data-start=\"2977\" data-end=\"3006\">\n<td data-start=\"2977\" data-end=\"2984\" data-col-size=\"sm\">\u89d2\u5ea6\u7cbe\u5ea6<\/td>\n<td data-start=\"2984\" data-end=\"3006\" data-col-size=\"md\">\u00b10.04\u00b0\uff0810,000 CPR\uff09<\/td>\n<\/tr>\n<tr data-start=\"3007\" data-end=\"3040\">\n<td data-start=\"3007\" data-end=\"3014\" data-col-size=\"sm\">\u89d2\u5ea6\u7cbe\u5ea6<\/td>\n<td data-start=\"3014\" data-end=\"3040\" data-col-size=\"md\">\u00b10.02\u00b0\uff0824,000 CPR\uff09<\/td>\n<\/tr>\n<tr data-start=\"3041\" data-end=\"3059\">\n<td data-start=\"3041\" data-end=\"3050\" data-col-size=\"sm\">\u6700\u5927\u521d\u59cb\u504f\u79fb<\/td>\n<td data-start=\"3050\" data-end=\"3059\" data-col-size=\"md\">12 mm<\/td>\n<\/tr>\n<tr data-start=\"3060\" data-end=\"3079\">\n<td data-start=\"3060\" data-end=\"3073\" data-col-size=\"sm\">Servo Axes<\/td>\n<td data-start=\"3073\" data-end=\"3079\" data-col-size=\"md\">3\u8f74<\/td>\n<\/tr>\n<tr data-start=\"3080\" data-end=\"3105\">\n<td data-start=\"3080\" data-end=\"3085\" data-col-size=\"sm\">\u901a\u4fe1<\/td>\n<td data-col-size=\"md\" data-start=\"3085\" data-end=\"3105\">RS232 \/ Ethernet<\/td>\n<\/tr>\n<tr data-start=\"3106\" data-end=\"3126\">\n<td data-start=\"3106\" data-end=\"3115\" data-col-size=\"sm\">\u5178\u578b\u5bf9\u51c6\u65f6\u95f4<\/td>\n<td data-col-size=\"md\" data-start=\"3115\" data-end=\"3126\">&lt;5\u79d2<\/td>\n<\/tr>\n<tr data-start=\"3127\" data-end=\"3144\">\n<td data-start=\"3127\" data-end=\"3134\" data-col-size=\"sm\">\u771f\u7a7a\u8981\u6c42<\/td>\n<td data-start=\"3134\" data-end=\"3144\" data-col-size=\"md\">12&#8243; Hg<\/td>\n<\/tr>\n<tr data-start=\"3145\" data-end=\"3199\">\n<td data-start=\"3145\" data-end=\"3150\" data-col-size=\"sm\">\u7535\u6e90<\/td>\n<td data-start=\"3150\" data-end=\"3199\" data-col-size=\"md\">100\u2013240 VAC \/ 50\u201360 Hz \/ 48 VA\uff0c\u6216 24 VDC \/ 2 A<\/td>\n<\/tr>\n<tr data-start=\"3200\" data-end=\"3222\">\n<td data-start=\"3200\" data-end=\"3207\" data-col-size=\"sm\">\u6d01\u51c0\u7b49\u7ea7<\/td>\n<td data-start=\"3207\" data-end=\"3222\" data-col-size=\"md\">Class 1<\/td>\n<\/tr>\n<tr data-start=\"3223\" data-end=\"3243\">\n<td data-start=\"3223\" data-end=\"3230\" data-col-size=\"sm\">MTBF<\/td>\n<td data-start=\"3230\" data-end=\"3243\" data-col-size=\"md\">&gt;70,000 h<\/td>\n<\/tr>\n<tr data-start=\"3244\" data-end=\"3277\">\n<td data-start=\"3244\" data-end=\"3255\" data-col-size=\"sm\">\u5c3a\u5bf8 W\u00d7L\u00d7H<\/td>\n<td data-col-size=\"md\" data-start=\"3255\" data-end=\"3277\">173 \u00d7 317 \u00d7 229 mm<\/td>\n<\/tr>\n<tr data-start=\"3278\" data-end=\"3294\">\n<td data-start=\"3278\" data-end=\"3283\" data-col-size=\"sm\">\u91cd\u91cf<\/td>\n<td data-start=\"3283\" data-end=\"3294\" data-col-size=\"md\">5.90 kg<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<\/div>\n<\/div>\n<h3 dir=\"auto\" data-section-id=\"1jaz5sp\" data-start=\"3368\" data-end=\"3389\">\u4e03\u3001\u5feb\u901f\u6362\u7247\u9884\u5bf9\u51c6\u5668\u6838\u5fc3\u7279\u70b9<\/h3>\n<p>300 mm\u6676\u5706 + \u72ec\u7acb\u5f0f + \u9ad8\u7cbe\u5ea6\u5b9a\u5fc3\/\u89d2\u5ea6\u5bf9\u51c6 + Fast Swap\u5feb\u901f\u6362\u7247 + \u900f\u660e\/\u534a\u900f\u660e\/\u4e0d\u900f\u660e\u6676\u5706\u68c0\u6d4b + \u534a\u5bfc\u4f53\u8bbe\u5907\u81ea\u52a8\u5316\u63a5\u53e3<\/p>\n<p>\u5c24\u5176\u662f Fast Swap\uff0c\u5b83\u66f4\u504f\u5411\u4e8e\u63d0\u9ad8 wafer handling \u7684\u6362\u7247\u6548\u7387\u548c\u6574\u673a throughput\uff0c\u800c\u4e0d\u4ec5\u4ec5\u662f\u4e00\u4e2a\u666e\u901a\u7684\u201c\u6676\u5706\u627e\u4e2d\u5fc3\u8bbe\u5907\u201d\u3002\u5178\u578b alignment cycle time \u662f 5\u79d2\u4ee5\u5185\u3002<\/p>\n<p>\u5feb\u901f\u6362\u7247\u9884\u5bf9\u51c6\u5668\u662f\u7528\u4e8e300 mm\u6676\u5706\u5728\u673a\u5668\u4eba\u8f6c\u8fd0\u8fc7\u7a0b\u4e2d\u8fdb\u884c\u9ad8\u7cbe\u5ea6\u4e2d\u5fc3\u5b9a\u4f4d\u53caNotch\u65b9\u5411\u6821\u51c6\u7684\u72ec\u7acb\u5f0f\u9ad8\u901f\u9884\u5bf9\u51c6\u5668\u3002<\/p>\n<p id=\"GWAaMBo\"><img decoding=\"async\" loading=\"lazy\" width=\"726\" height=\"672\" class=\"alignnone size-full wp-image-1040 \" src=\"https:\/\/www.bihec.com\/logosol\/wp-content\/uploads\/sites\/929\/2026\/09\/img_6aaa1935e9596.png\" alt=\"\" srcset=\"https:\/\/www.bihec.com\/logosol\/wp-content\/uploads\/sites\/929\/2026\/09\/img_6aaa1935e9596.png 726w, https:\/\/www.bihec.com\/logosol\/wp-content\/uploads\/sites\/929\/2026\/09\/img_6aaa1935e9596-300x278.png 300w, https:\/\/www.bihec.com\/logosol\/wp-content\/uploads\/sites\/929\/2026\/09\/img_6aaa1935e9596-500x463.png 500w\" sizes=\"(max-width: 726px) 100vw, 726px\" \/><\/p>\n<h3>\u516b\u3001LPA12FS-3 \u4ea7\u54c1\u8d44\u6599<\/h3>\n<p><a href=\"https:\/\/logosolinc.com\/wp-content\/uploads\/2020\/08\/LPA12FS-3_Brochure.pdf\">https:\/\/logosolinc.com\/wp-content\/uploads\/2020\/08\/LPA12FS-3_Brochure.pdf<\/a><\/p>\n<p><a href=\"https:\/\/www.bihec.com\/logosol\/Logosol\/isel,LPA12FS-3,\u72ec\u7acb\u5f0f\u6676\u5706\u9884\u5bf9\u51c6\u5668,\u6676\u5706\u81ea\u52a8\u5b9a\u5fc3\u548c\u89d2\u5ea6\u65b9\u5411\u6821\u51c6\/ \u200e\">https:\/\/www.bihec.com\/logosol\/Logosol\/isel,LPA12FS-3,\u72ec\u7acb\u5f0f\u6676\u5706\u9884\u5bf9\u51c6\u5668,\u6676\u5706\u81ea\u52a8\u5b9a\u5fc3\u548c\u89d2\u5ea6\u65b9\u5411\u6821\u51c6\/ \u200e<\/a><\/p>\n<br><div class=\"tagcloud\"><a href=\"https:\/\/www.bihec.com\/logosol\/tag\/logosol-isel\/\" class=\"tag-cloud-link tag-link-1 tag-link-position-1\" style=\"font-size: 22pt;\" aria-label=\"Logosol\/Isel (9\u4e2a\u9879\u76ee)\">Logosol\/Isel<\/a>\n<a href=\"https:\/\/www.bihec.com\/logosol\/tag\/logosol-lpa12fs-3\/\" class=\"tag-cloud-link tag-link-0 tag-link-position-2\" style=\"font-size: 11.6pt;\" aria-label=\"Logosol LPA12FS-3 (2\u4e2a\u9879\u76ee)\">Logosol LPA12FS-3<\/a>\n<a href=\"https:\/\/www.bihec.com\/logosol\/tag\/lpa12fs-3\/\" class=\"tag-cloud-link tag-link-2 tag-link-position-3\" style=\"font-size: 19pt;\" aria-label=\"LPA12FS-3 (6\u4e2a\u9879\u76ee)\">LPA12FS-3<\/a>\n<a 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