Kimball Physics ion gun systems, or ion sources, are used for surface physics, space physics, vacuum physics, charge neutralization, detection calibration, secondary ion mass spectrometry and ion injection for MBE.
Range of Operation
- Energy Ranges: 10eV to 5 keV
- Beam Current Ranges: 1 nA to 2 μA
- Spot Size Ranges: 1 mm to 20 mm
Ion Sources
- Electron impact ionization sources:
– Inert gases (He, Ar, Xe, Ne)
– Active gases (N2 or O2) - Solid state chemical reaction:
– Alkali metal compound (Cs+, Li+, Na+, K+ or Rb+ ions)
Performance
- Beam Current Stability: ±1.0% per hour with Emission Current Control or ±10% per hour after warm up without ECC for alkali metal sources.
- Energy Stability: ± 0.01% per hour, ± 0.02% per 8 hours at full output.
Versatility
- Flexible Controllers: Independent fiber optic control and metering of functions such as ion energy, source, electron energy, field control, extract, focus, X – Y deflection and electron current control.
- Gas feed ion sources allow for different ion species
Convenience
- Customer-replaceable source assemblies
- Storable control settings
- Computer remote control / metering
Operational Capabilities
- Fast capacitive beam or dual grid pulsing
- Deflection / Rastering
- Gun-mounted Faraday cups
Ion Gun Systems | |||
Gun Model | Key Characteristics | Specifications | Features/Options |
---|---|---|---|
IGS-4
| Alkali metal Cs+, Li+, Na+, K+, Rb+ 2¾CF Mounted | Energy Range: 50 eV to 5 keV Beam Current: 1 nA to 2 μA Spot Size: 1 mm to 20 mm |
|
ILG-6
| Alkali metal Cs+, Li+, Na+, K+, Rb+ 2¾CF Mounted | Energy Range: 10 eV to 1 keV Beam Current: 1 nA to 100 nA Spot Size: 1 mm to 5 mm |
|
TEMPORARILY UNAVAILABLE IGL-2101
| Gas fed Inert (He, Ar, Xe, Ne) Active (N2 or O2) 2¾CF Mounted | Energy Range: 10 eV to 1 keV Beam Current: 1 nA to 100 nA Spot Size: 1 mm to 20 mm |
|
Energy Range: 10 eV to 5 keV Beam Current: 1 nA to 100 nA Spot Size: 1 mm to 20 mm |
Electron Gun
ELG-2
FRA-2X1-2
EGA-1012
EFG-7
EGPS-1017
EGPS-2017
EGL-2022
EGG-3101
EGG-3103
EGF-3104
EMG-4212
EGPS-3212
EMG-4212
EGPS-4212
EMG-4103
EMG-4215
EMG-4210
EGH-6002
EGF-6115
EGF-6104
EGH-6210
EGH-8101
EGH-8103
EGH-8105
EGH-8201
EGH-8202
Ion Gun
IGS-4
ILG-6
IGL-2101
Cathodes
Emitters
ES-423E
ES-423E-GR
ES-440
ES-042
ES-044
ES-046
ES-015
ES-064
ES-066
ES-525
ES-526
ES-529
CB-104
CB-105
C423E
A423E
B423E
C423E
C423E
C423E
E423E
HL423E
H423E
I423E
JE423E
JG423E
JP423E
J423E
C423E
O423E
E423E
P423E
S423E
SE423E
G423E
G423E
Z423E
ES-020
ES-021
ES-030
ES-030
ES-028
ES-033
ES-029
FC-66
FC-70
FC-71
FC-72
FC-73
FC-86B
PHOS-RP22SS-B5X5-R500
PHOS-UP22SS-B5X5-R500
PHOS-RP22SS-B7X7-R750
PHOS-UP22SS-B7X7-R750
PHOS-RP22SS-C5X5-R1000
PHOS-UP22SS-C5X5-R1000
PHOS-RP22SS-C7X7-R1500
PHOS-UP22SS-C7X7-R1500
PHOS-RP22GL-B5X5-R500
PHOS-UP22GL-B5X5-R500
PHOS-RP22GL-B7X7-R750
PHOS-UP22GL-B7X7-R750
PHOS-RP22GL-C5X5-R1000
PHOS-UP22GL-C5X5-R1000
PHOS-RP22GL-C7X7-R1500
PHOS-UP22GL-C7X7-R1500
PHOS-RP22GL-CF2.75 P22
PHOS-UP22GL-CF2.75 P22
PHOS-RP22GL-CF4.5 P22
PHOS-UP22GL-CF4.5 P22
PHOS-RP22GL-CF6.0 P22
PHOS-UP22GL-CF6.0 P22
Faraday
Faraday Cups
Phosphor
Phosphor Screens
MCF133-SphCube-A6
MCF275-SphCube-C6
MCF275-SphCube-C4A8
MCF275-SphCube-C5A4
MCF275-SphCube-C6A8
MCF450-SphCube-E6
MCF450-SphCube-E6A8
MCF450-SphCube-E6C8
MCF450-SphCube-E6C8A12
MCF600-SphCube-F6
MCF600-SphCube-F6C8
MCF600-SphCube-F6C8A24
MCF800-SphCube-G6C8
MCF133-SphTri-A5
MCF275-SphTri-C5
MCF450-SphSq-E2C4
MCF450-SphSq-E2C3r1A4
MCF600-SphSq-F2C4A8
MCF600-SphSq-F2E4A4
MCF600-SphSq-F2E4A8
MCF800-SphSq-G2E4
MCF800-SphSq-G2E4C4
MCF800-SphSq-G2E4C4A16
MCF600-SphPent-F2C5
MCF600-SphPent-F2C5A2
MCF275-SphHex-C2A6
MCF275-SphHex-Cc2A6
MCF800-SphHex-G2E6
MCF275-SphOct-C2A8
MCF450-SphOct-E2A8
MCF450-SphOct-Ec2A8
MCF600-SphOct-F2A8
MCF600-SphOct-F2C8
MCF800-SphOct-G2C8
MCF800-ExtOct-G2C8
MCF800-ExtOct-G2C8A16
MCF1000-SphOct-H2C8
MCF800-SphDec-G2C10
MCF600-SphHexadecagon-F2A16
MCF133-DblSphCube-A10
MCF275-SphTrpOct-Cr2A16
MCF275-SphTrpOct-C18
MCF275-FlgAdptr-C1A1
MCF275-FlgAdptr-C2
MCF450-FlgAdptr-E2
MCF133-PWeldFlg
MCF275-PWeldFlg
MCF450-PWeldFlg
MCF600-PWeldFlg
MCF800-PWeldFlg
MCF133-ThnFlg-A2-175
MCF133-ThnFlg-A2-175-ID640
MCF133-ThnFlg-A2-400
MCF133-ThnFlg-A2-400-ID640
MCF275-ThnFlg-C2-175
MCF275-ThnFlg-C2-175-ID1500
MCF275-ThnFlg-C2-400
MCF275-ThnFlg-C2-400-ID1500GG
MCF450-ThnFlg-E2-175
MCF450-ThnFlg-E2-175-ID2900
MCF450-ThnFlg-E2-400
MCF450-ThnFlg-E2-400-ID2900GG
MCF600-ThnFlg-F2-175
MCF600-ThnFlg-F2-175-ID4300
MCF600-ThnFlg-F2-400
MCF600-ThnFlg-F2-400-ID4300GG
MCF800-ThnFlg-G2-175
MCF800-ThnFlg-G2-175-ID6300
MCF800-ThnFlg-G2-400
MCF800-ThnFlg-G2-400-ID6300GG
MCF275-MtgFlg-C2
MCF275-MtgFlg-C1Blk
MCF275-MtgFlg-C1VP
MCF450-MtgFlg-E2
MCF450-MtgFlg-E1Blk
MCF450-MtgFlg-E1VP
MCF600-MtgFlg-F2
MCF600-MtgFlg-F1Blk
MCF600-MtgFlg-F1VP
MCF800-MtgFlg-G2
MCF800-MtgFlg-G1Blk
MCF600-ClsCplr-F1r1
MCF800-ClsCplr-G1r1
MCF275-ExtBrkt-R
MCF275-ExtBrkt-LS
MCF450-ExtBrkt-LS
MCF600-ExtBrkt-LS
MCF600-ExtBrkt-SM
MCF800-ExtBrkt-LS
MCF275-GrvGrb-C01
MCF275-GrvGrb-C02
MCF275-GrvGrb-CB03
MCF275-GrvGrb-CB04
MCF275-GrvGrb-CYL0750
MCF275-GrvGrb-CYL1000
MCF450-GrvGrb-C01
MCF450-GrvGrb-C02
MCF450-GrvGrb-C03
MCF450-GrvGrb-C04
MCF450-GrvGrb-CYL1750
MCF600-GrvGrb-C01
MCF800-GrvGrb-C01
MCF1000-GrvGrb-C01