{"id":922,"date":"2026-08-12T17:38:36","date_gmt":"2026-08-12T09:38:36","guid":{"rendered":"https:\/\/www.bihec.com\/idonus\/?p=922"},"modified":"2026-08-12T17:38:36","modified_gmt":"2026-08-12T09:38:36","slug":"idonus-masdim-%e6%8e%a9%e8%86%9c%e5%af%b9%e5%87%86%e7%b3%bb%e7%bb%9f-%e6%8e%a9%e8%86%9c%e4%b8%8e%e5%9f%ba%e6%9d%bf%e7%b2%be%e5%87%86%e5%af%b9%e5%87%86-%c2%b7-%e7%9c%9f%e7%a9%ba%e5%a4%b9%e6%8c%81","status":"publish","type":"post","link":"https:\/\/www.bihec.com\/idonus\/idonus-masdim-%e6%8e%a9%e8%86%9c%e5%af%b9%e5%87%86%e7%b3%bb%e7%bb%9f-%e6%8e%a9%e8%86%9c%e4%b8%8e%e5%9f%ba%e6%9d%bf%e7%b2%be%e5%87%86%e5%af%b9%e5%87%86-%c2%b7-%e7%9c%9f%e7%a9%ba%e5%a4%b9%e6%8c%81\/","title":{"rendered":"idonus MAS+DIM \u63a9\u819c\u5bf9\u51c6\u7cfb\u7edf \u63a9\u819c\u4e0e\u57fa\u677f\u7cbe\u51c6\u5bf9\u51c6 \u00b7 \u771f\u7a7a\u5939\u6301 \u00b7 \u53cc\u56fe\u50cf\u663e\u5fae\u955c\u5b9e\u65f6\u76d1\u63a7\uff0c\u5bf9\u51c6\u7cbe\u5ea6\u8fbe \u00b15\u03bcm"},"content":{"rendered":"

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idonus<\/a> MAS<\/a>+DIM<\/a> \u63a9\u819c\u5bf9\u51c6\u7cfb\u7edf<\/a><\/span><\/h1>\n
\u63a9\u819c\u4e0e\u57fa\u677f\u7cbe\u51c6\u5bf9\u51c6 \u00b7 \u771f\u7a7a\u5939\u6301 \u00b7 \u53cc\u56fe\u50cf\u663e\u5fae\u955c\u5b9e\u65f6\u76d1\u63a7\uff0c\u5bf9\u51c6\u7cbe\u5ea6\u8fbe \u00b15\u03bcm<\/p>\n
\u00b15\u03bcm<\/strong>\u5bf9\u51c6\u7cbe\u5ea63\u8f74<\/strong>\u624b\u52a8\u5bf9\u51c6 X\/Y\/\u03b8\u53cc\u6444\u50cf\u5934<\/strong>\u540c\u6b65\u76d1\u63a7\u771f\u7a7a<\/strong>\u5939\u6301\u56fa\u5b9a<\/div>\n
<\/div>\n
\u54a8\u8be2\u70ed\u7ebf\u00a0 15821107090<\/div>\n<\/div>\n
<\/div>\n
\n
$\"\"$ <\/p>\n<\/div>\n
\n
\u4ec0\u4e48\u662f\u9634\u5f71\u63a9\u819c\u5bf9\u51c6\uff1f<\/h2>\n
\n
idonus \u63a9\u819c\u5bf9\u51c6\u7cfb\u7edf\uff08MAS\uff09\u4e13\u4e3a\u63a9\u819c\u4e0e\u57fa\u677f\u7684\u9ad8\u7cbe\u5ea6\u5bf9\u51c6\u800c\u8bbe\u8ba1\u3002\u4f7f\u7528\u9634\u5f71\u63a9\u819c\uff08shadow mask\uff09\uff0c\u60a8\u53ef\u4ee5\u8df3\u8fc7\u5149\u523b\u5de5\u827a\uff0c\u76f4\u63a5\u5728\u57fa\u677f\u4e0a\u8fdb\u884c\u8584\u819c\u6c89\u79ef<\/a>\u2014\u2014\u5bf9\u51c6\u540e\u5c06\u63a9\u819c\u4e0e\u57fa\u677f\u5939\u6301\u5728\u53cc\u5361\u76d8\u4e2d\uff0c\u6574\u4f53\u9001\u5165 PVD<\/a> \u8154\u4f53\u8fdb\u884c\u84b8\u53d1\u6216 \u6e85\u5c04<\/a>\u9540\u819c\u3002<\/p>\n
💡 \u6838\u5fc3\u4ef7\u503c\uff1a\u514d\u5149\u523b\u3001\u514d\u6d82\u80f6\u3001\u514d\u663e\u5f71<\/strong>\u2014\u2014\u63a9\u819c\u5bf9\u51c6\u5373\u76f4\u63a5\u6c89\u79ef\uff0c\u5927\u5e45\u7f29\u77ed\u5de5\u827a\u6d41\u7a0b\uff0c\u964d\u4f4e\u6210\u672c\u3002<\/div>\n<\/div>\n
\u4e09\u5927\u6838\u5fc3\u8bbe\u8ba1\u7406\u5ff5<\/h2>\n
\n
\n
🔧<\/div>\n
\u6781\u7b80\u64cd\u4f5c<\/h4>\n
\u771f\u7a7a\u5939\u6301 + 3 \u8f74\u624b\u52a8\u5bf9\u51c6\uff08X \/ Y \/ \u03b8\uff09\uff0c\u64cd\u4f5c\u76f4\u89c2\u7b80\u4fbf\uff0c\u4e0a\u624b\u5373\u7528\u3002<\/p>\n<\/div>\n
\n
📐<\/div>\n
\u7075\u6d3b\u9002\u914d<\/h4>\n
\u517c\u5bb9\u591a\u79cd\u6676\u5706\u5c3a\u5bf8\u4e0e\u5f62\u72b6\uff08\u6807\u51c6\/\u975e\u6807\uff09\uff0c\u5361\u76d8\u6309\u9700\u5b9a\u5236\uff0c\u4e00\u5957\u8bbe\u5907\u9002\u914d\u591a\u79cd\u5de5\u827a\u3002<\/p>\n<\/div>\n
\n
🎯<\/div>\n
\u7cbe\u5bc6\u5bf9\u51c6<\/h4>\n
\u642d\u914d\u53cc\u56fe\u50cf\u663e\u5fae\u955c\uff08DIM\uff09\uff0c\u53ef\u540c\u65f6\u805a\u7126\u4e24\u4e2a\u5bf9\u51c6\u6807\u8bb0\u4f4d\u7f6e\uff0c\u5bf9\u51c6\u7cbe\u5ea6\u8fbe \u00b15\u03bcm\u3002<\/p>\n<\/div>\n<\/div>\n
\u4e24\u5927\u6838\u5fc3\u6a21\u5757\uff0c\u72ec\u7acb\u6216\u7ec4\u5408\u4f7f\u7528<\/h2>\n
\n
\n
\n
MAS<\/h3>\n
Mask Alignment System \u00b7 \u63a9\u819c\u5bf9\u51c6\u7cfb\u7edf<\/p>\n<\/div>\n
\n
\n
\u72ec\u7acb\u8bbe\u5907\uff0c\u542b\u53ef\u62c6\u5378\u8f7d\u7269\u53f0\uff0c\u4fbf\u4e8e\u5361\u76d8\u88c5\u5378\u4e0e\u5bf9\u51c6\u64cd\u4f5c<\/li>\n
Z \u8f74\u63a7\u5236\u5361\u76d8\u63a5\u89e6\uff0c\u5b9e\u73b0\u63a9\u819c\u4e0e\u57fa\u677f\u7cbe\u5bc6\u8d34\u5408<\/li>\n
\u771f\u7a7a\u63a7\u5236\u7cfb\u7edf\uff0c\u7cbe\u51c6\u8c03\u8282\u6676\u5706\u4e0e\u5361\u76d8\u5939\u6301\u529b<\/li>\n
\u53cc\u6676\u5706\/\u63a9\u819c\u5361\u76d8\uff0c\u5939\u6301\u540e\u76f4\u63a5\u8fdb\u5165\u540e\u7eed\u5de5\u827a<\/li>\n
\u652f\u6301\u591a\u79cd\u6676\u5706\u5c3a\u5bf8\u4e0e\u5f62\u72b6\uff0c\u5361\u76d8\u6309\u9700\u5b9a\u5236<\/li>\n<\/ul>\n<\/div>\n<\/div>\n
\n
\n
DIM<\/h3>\n
Double Image Microscope \u00b7 \u53cc\u56fe\u50cf\u663e\u5fae\u955c<\/p>\n<\/div>\n
\n
\n
\u53cc\u6444\u50cf\u5934\u540c\u6b65\u76d1\u63a7\uff0cPC \u7aef\u5b9e\u65f6\u663e\u793a\u4e24\u4e2a\u5bf9\u51c6\u4f4d\u7f6e<\/li>\n
\u5bf9\u51c6\u7cbe\u5ea6\u9ad8\u8fbe \u00b15\u03bcm<\/li>\n
USB 3.0 \u9ad8\u901f\u4f20\u8f93\uff0c\u5b9e\u65f6\u56fe\u50cf\u65e0\u5ef6\u8fdf<\/li>\n
\u53ef\u540c\u65f6\u805a\u7126\u5e76\u53ef\u89c6\u5316<\/a>\u4e24\u4e2a\u5bf9\u51c6\u6807\u8bb0\uff0c\u7b80\u5316\u5bf9\u51c6\u6d41\u7a0b<\/li>\n
\u53ef\u72ec\u7acb\u4f7f\u7528\uff0c\u4e5f\u53ef\u4e0e MAS \u7ec4\u5408\u4e3a MAS+DIM \u7cfb\u7edf<\/li>\n<\/ul>\n<\/div>\n<\/div>\n<\/div>\n
\u516d\u6b65\u5b8c\u6210\u63a9\u819c\u5bf9\u51c6 \u2014 \u5de5\u827a\u6d41\u7a0b<\/h2>\n
\n
\n
1<\/span><\/p>\n
\u88c5\u8f7d\u57fa\u6750<\/h5>\n
\u4e0a\u4e0b\u5361\u76d8\u5206\u522b\u5939\u6301\u6676\u5706\u4e0e\u63a9\u819c<\/p>\n<\/div>\n
2<\/span><\/p>\n
\u8fdb\u5165\u5bf9\u51c6\u4f4d<\/h5>\n
\u4e0a\u5361\u76d8\uff08\u63a9\u819c\uff09\u79fb\u81f3\u5bf9\u51c6\u4f4d\u7f6e\uff0c\u6676\u5706\u5f85\u88c5\u8f7d<\/p>\n<\/div>\n
3<\/span><\/p>\n
\u7cbe\u51c6\u5bf9\u51c6<\/h5>\n
DIM \u53cc\u6444\u50cf\u5934\u76d1\u63a7\uff0cX\/Y\/\u03b8 \u4e09\u8f74\u5fae\u8c03\u81f3 \u00b15\u03bcm<\/p>\n<\/div>\n
4<\/span><\/p>\n
\u673a\u68b0\u9501\u7d27<\/h5>\n
\u5bf9\u51c6\u5b8c\u6210\u540e\uff0c\u4e0a\u4e0b\u5361\u76d8\u673a\u68b0\u5939\u7d27\u4e3a\u4e00\u4f53<\/p>\n<\/div>\n
5<\/span><\/p>\n
\u5378\u8f7d\u5361\u76d8<\/h5>\n
\u5c06\u5939\u7d27\u7684\u53cc\u5361\u76d8\u6574\u4f53\u4ece\u5bf9\u51c6\u53f0\u4e0a\u53d6\u4e0b<\/p>\n<\/div>\n
6<\/span><\/p>\n
\u8fdb\u5165\u5de5\u827a<\/h5>\n
\u5361\u76d8\u4e0e\u57fa\u6750\u9001\u5165 PVD \/ \u6e85\u5c04\u7b49\u4e0b\u4e00\u9053\u5de5\u5e8f<\/p>\n<\/div>\n<\/div>\n<\/div>\n
\u5173\u952e\u6280\u672f\u89c4\u683c<\/h2>\n
\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n
\u53c2\u6570<\/th>\n \u89c4\u683c<\/th>\n<\/tr>\n<\/thead>\n
\u5bf9\u51c6\u7cbe\u5ea6<\/td>\n \u00b15 \u03bcm\uff08\u642d\u914d DIM \u53cc\u56fe\u50cf\u663e\u5fae\u955c\uff09<\/td>\n<\/tr>\n
\u5bf9\u51c6\u8f74<\/td>\n X \/ Y \/ \u03b8 \u4e09\u8f74\u624b\u52a8\u5bf9\u51c6<\/td>\n<\/tr>\n
Z \u8f74\u529f\u80fd<\/td>\n \u5361\u76d8\u63a5\u89e6\u63a7\u5236<\/td>\n<\/tr>\n
\u5939\u6301\u65b9\u5f0f<\/td>\n \u771f\u7a7a\u5939\u6301\uff0c\u53ef\u8c03\u8282\u5939\u6301\u529b<\/td>\n<\/tr>\n
\u5361\u76d8\u7c7b\u578b<\/td>\n \u53cc\u5361\u76d8\uff08\u6676\u5706 + \u63a9\u819c\uff09\uff0c\u5939\u6301\u540e\u76f4\u63a5\u8fdb\u5de5\u827a<\/td>\n<\/tr>\n
\u6676\u5706\u517c\u5bb9<\/td>\n \u591a\u79cd\u5c3a\u5bf8\u4e0e\u5f62\u72b6\uff08\u6807\u51c6\/\u975e\u6807\uff09\uff0c\u6309\u9700\u5b9a\u5236\u5361\u76d8<\/td>\n<\/tr>\n
DIM \u6444\u50cf\u5934<\/td>\n \u53cc\u6444\u50cf\u5934\uff0cUSB 3.0 \u63a5\u53e3\uff0cPC \u7aef\u5b9e\u65f6\u76d1\u63a7<\/td>\n<\/tr>\n
DIM \u529f\u80fd<\/td>\n \u540c\u65f6\u805a\u7126\u4e24\u4e2a\u5bf9\u51c6\u6807\u8bb0\u4f4d\u7f6e<\/td>\n<\/tr>\n
\u7cfb\u7edf\u7ec4\u5408<\/td>\n MAS \u72ec\u7acb \/ DIM \u72ec\u7acb \/ MAS+DIM \u7ec4\u5408<\/td>\n<\/tr>\n
\u540e\u7eed\u5de5\u827a<\/td>\n PVD \u84b8\u53d1\u3001\u6e85\u5c04\u7b49\u8584\u819c\u6c89\u79ef\u5de5\u827a<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<\/div>\n
\u5e7f\u6cdb\u7684\u5e94\u7528\u9886\u57df<\/h2>\n
\n
🌑<\/span><\/p>\n
\n
\u9634\u5f71\u63a9\u819c\u6c89\u79ef<\/h5>\n
\u514d\u5149\u523b\u76f4\u63a5\u8584\u819c\u6c89\u79ef\uff0cPVD \u84b8\u53d1\/\u6e85\u5c04<\/p>\n<\/div>\n<\/div>\n
☀️<\/span><\/p>\n
\n
UV \u5149\u63a9\u819c<\/h5>\n
\u7d2b\u5916\u5149\u901a\u8fc7\u63a9\u819c\u8fdb\u884c\u9009\u62e9\u6027\u66dd\u5149<\/p>\n<\/div>\n<\/div>\n
📐<\/span><\/p>\n
\n
\u7eb3\u7c73\u538b\u5370<\/h5>\n
Nanoimprinting \u6a21\u677f\u4e0e\u57fa\u677f\u7cbe\u5bc6\u5bf9\u51c6<\/p>\n<\/div>\n<\/div>\n
🔗<\/span><\/p>\n
\n
\u952e\u5408\u5bf9\u51c6<\/h5>\n
Bonding alignment \u6676\u5706\u952e\u5408\u524d\u7cbe\u5bf9\u51c6<\/p>\n<\/div>\n<\/div>\n<\/div>\n
\u5b66\u672f\u9a8c\u8bc1<\/h2>\n
\n
idonus MAS+DIM \u7cfb\u7edf\u5df2\u5728\u591a\u9879\u5b66\u672f\u7814\u7a76\u4e2d\u5f97\u5230\u9a8c\u8bc1\u4e0e\u5f15\u7528\u3002\u4ee3\u8868\u6027\u8bba\u6587\u53d1\u8868\u4e8e\u00a0Journal of Microelectromechanical Systems<\/strong>\uff08IEEE JMEMS<\/a>, 2016\uff09\uff0c\u9898\u4e3a\u00a0“Metal-Coated SU-8 Structures for High-Density 3-D Microelectrode Arrays”<\/em>\uff0c\u5c55\u793a\u4e86\u8be5\u7cfb\u7edf\u5728\u9ad8\u5bc6\u5ea6\u4e09\u7ef4\u5fae\u7535\u6781\u9635\u5217\u5236\u9020\u4e2d\u7684\u5b9e\u9645\u5e94\u7528\u3002<\/p>\n<\/div>\n
\n
<\/h3>\n
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