{"id":898,"date":"2025-11-21T17:21:52","date_gmt":"2025-11-21T09:21:52","guid":{"rendered":"https:\/\/www.bihec.com\/idonus\/?p=898"},"modified":"2025-11-21T17:21:52","modified_gmt":"2025-11-21T09:21:52","slug":"%e4%bb%a3%e7%90%86%e7%91%9e%e5%a3%abidonus-hf-vapor-phase-etcherhf-%e6%b0%94%e7%9b%b8%e5%88%bb%e8%9a%80%e6%9c%ba","status":"publish","type":"post","link":"https:\/\/www.bihec.com\/idonus\/%e4%bb%a3%e7%90%86%e7%91%9e%e5%a3%abidonus-hf-vapor-phase-etcherhf-%e6%b0%94%e7%9b%b8%e5%88%bb%e8%9a%80%e6%9c%ba\/","title":{"rendered":"\u4ee3\u7406\u745e\u58ebIdonus HF Vapor Phase EtcherHF \u6c14\u76f8\u523b\u8680\u673a"},"content":{"rendered":"<h2>\u4ee3\u7406\u745e\u58eb<a href=\"https:\/\/www.bihec.com\/idonus\/tag\/idonus-hf-vapor-phase-etcher\/\" title=\"View all posts in Idonus HF Vapor Phase Etcher\" target=\"_blank\">Idonus HF Vapor Phase Etcher<\/a><a href=\"https:\/\/www.bihec.com\/idonus\/tag\/hf-%e6%b0%94%e7%9b%b8%e5%88%bb%e8%9a%80%e6%9c%ba\/\" title=\"View all posts in HF \u6c14\u76f8\u523b\u8680\u673a\" target=\"_blank\">HF \u6c14\u76f8\u523b\u8680\u673a<\/a><\/h2>\n<p><span>\u745e\u58ebIdonus <a href=\"https:\/\/www.bihec.com\/idonus\/tag\/vpe\/\" title=\"View all posts in VPE\" target=\"_blank\">VPE<\/a>\u7cfb\u7edf\u7531\u53cd\u5e94\u8154\u548c\u76d6\u5b50\u7ec4\u6210\u3002\u52a0\u70ed\u5143\u4ef6\u96c6\u6210\u5728\u76d6\u5b50\u4e2d\u3002\u5b83\u63a7\u5236\u8981\u8680\u523b\u7684\u886c\u5e95\u7684\u6e29\u5ea6\u3002\u6676\u5706\u5939\u6301\u53ef\u4ee5\u901a\u8fc7\u4e24\u79cd\u65b9\u5f0f\u5b9e\u73b0\uff1a\u4f7f\u7528\u5939\u73af\u673a\u68b0\u5939\u6301\u6676\u5706\u3002\u87ba\u9489\u4ece\u88c5\u7f6e\u7684\u80cc\u9762\u8fdb\u884c\u62e7\u7d27\uff0c\u8be5\u80cc\u9762\u6c38\u8fdc\u4e0d\u4f1a\u4e0e<\/span><b><span>\u6c22\u6c1f\u9178 (HF)\u00a0<\/span><i class=\"fa fa-external-link\" aria-hidden=\"true\"><\/i><\/b><span>\u84b8\u6c7d\u3002\u8fd93\u4e2a\u87ba\u6bcd\u53ef\u4ee5\u7528\u9632\u62a4\u624b\u5957\u8f7b\u677e\u64cd\u4f5c\u3002 \u53e6\u4e00\u4e2a\u9009\u62e9\u662f\u9759\u7535\u5939\u6301\u3002\u5355\u4e2a\u82af\u7247\uff08\u957f\u5ea6\u8d85\u8fc710\u6beb\u7c73\uff09\u548c\u6676\u5706\u90fd\u53ef\u4ee5\u5939\u6301\u5230\u52a0\u70ed\u5143\u4ef6\u4e0a\u3002\u6676\u5706\u7684\u80cc\u9762\u4e0d\u53d7\u8680\u523b\u4fdd\u62a4\u3002<\/span><\/p>\n<p>\u6db2\u6001\u6c22\u6c1f\u9178\u88ab\u586b\u5145\u5230\u53cd\u5e94\u8154\u4e2d\u3002\u53cd\u5e94\u8154\u7528\u76d6\u5b50\u5c01\u95ed\u3002 \u5728\u5ba4\u6e29\u4e0b\u751f\u6210\u6c22\u6c1f\u9178\u84b8\u6c7d\uff0c\u8680\u523b\u8fc7\u7a0b\u81ea\u52a8\u5f00\u59cb\u3002 \u8680\u523b\u901f\u7387\u901a\u8fc7\u63a7\u5236\u6676\u5706\u6e29\u5ea6\u6765\u63a7\u5236\uff0c\u6676\u5706\u6e29\u5ea6\u53ef\u4ece35\u00b0C\u8c03\u6574\u523060\u00b0C\u3002<\/p>\n<p><span>\u5904\u7406\u540e\uff0c\u9178\u53ef\u4ee5\u50a8\u5b58\u5728\u4e00\u4e2a\u53ef\u5bc6\u5c01\u7684\u5bb9\u5668\u4e2d\uff0c\u4ee5\u5907\u4e0b\u6b21\u4f7f\u7528\u3002 \u6db2\u4f53\u8f6c\u79fb\u53ea\u9700\u901a\u8fc7\u624b\u67c4\u964d\u4f4e\u8fde\u63a5\u5bb9\u5668\u5373\u53ef\u3002\u7531\u4e8e\u91cd\u529b\uff0c\u9178\u4f1a\u6d41\u5165\u5bb9\u5668\uff0c\u5e76\u53ef\u901a\u8fc7\u4e24\u4e2a\u9600\u95e8\u5173\u95ed\u3002\u91cd\u65b0\u586b\u5145\u53cd\u5e94\u8154\u662f\u901a\u8fc7\u6253\u5f00\u9600\u95e8\u5e76\u62ac\u8d77\u624b\u67c4\u6765\u5b8c\u6210\u7684\u3002\u9178\u4f1a\u6d41\u5165\u53cd\u5e94\u8154\u3002\u9178\u53ef\u4ee5\u88ab\u91cd\u65b0\u4f7f\u7528\u7528\u4e8e\u591a\u6b21\u8680\u523b\uff0c\u76f4\u5230\u9700\u8981\u66f4\u6362\u4e3a\u6b62\u3002 VPE\u7cfb\u7edf\u5360\u5730\u9762\u79ef\u5c0f\uff0c\u53ef\u4ee5\u8f7b\u677e\u5730\u96c6\u6210\u5230\u73b0\u6709\u7684\u6d41\u76d2\u4e2d\u3002<\/span><\/p>\n<p><a style=\"color: var(--color_emph);border-bottom: 1px dashed;text-decoration: none;font-family: 'Open Sans';font-size: medium;font-style: normal;font-weight: 400;letter-spacing: normal;text-align: start;text-indent: 0px;text-transform: none\" title=\"idonus &lt;i&gt;E-chuck 150&lt;\/i&gt; \u914d\u6709\u673a\u68b0\u5f0f\u82af\u7247\u5939\u6301\u88c5\u7f6e\u3002\" href=\"http:\/\/www.idonus.com\/images\/idonus_VPE150TRC_detail_echuck_with_bugleg.jpg\" data-lightbox=\"transitionIn:fade;transitionOut:fade;\"><img decoding=\"async\" loading=\"lazy\" src=\"http:\/\/www.idonus.com\/images\/idonus_VPE150TRC_detail_echuck_with_bugleg.jpg\" width=\"100%\" height=\"auto\" \/><\/a><\/p>\n<p><span>VPE<\/span><i><span>\u00a0\u6709\u4e0d\u540c\u7684\u5c3a\u5bf8\u548c\u4e00\u7cfb\u5217\u53ef\u9009\u914d\u4ef6\u3002 \u8fd9\u91cc\uff0c\u6211\u4eec\u5c55\u793a\u4e86<\/span><\/i><span>\u00a0<a href=\"https:\/\/www.bihec.com\/idonus\/tag\/%e7%94%b5%e5%ad%90%e5%8d%a1%e7%9b%98\/\" title=\"View all posts in \u7535\u5b50\u5361\u76d8\" target=\"_blank\">\u7535\u5b50\u5361\u76d8<\/a><\/span><i><span>\u00a0\u4ee5\u53ca\u673a\u68b0\u5c51\u5939\u7d27\u89e3\u51b3\u65b9\u6848\uff08\u00d8 150 mm\uff09\u3002<\/span><\/i><\/p>\n<h1><span>\u6e29\u5ea6\u63a7\u5236\u53cd\u5e94\u8154 (<\/span><i><span>TRC<\/span><\/i><span>\u00a0)<\/span><\/h1>\n<p><span>\u4e8c\u6c27\u5316<a href=\"https:\/\/www.bihec.com\/idonus\/tag\/%e7%a1%85\/\" title=\"View all posts in \u7845\" target=\"_blank\">\u7845<\/a>\u7684\u523b\u8680\u901f\u7387\u968f\u7740\u53cd\u5e94\u8154\u5185\u6db2\u6001\u6c22\u6c1f\u9178\u7684\u6e29\u5ea6\u7565\u6709\u53d8\u5316\u3002 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width=\"975\" height=\"505\" class=\"alignnone size-full wp-image-899 \" src=\"https:\/\/www.bihec.com\/idonus\/wp-content\/uploads\/sites\/55\/2025\/11\/img_69202dc015e69.png\" alt=\"\" srcset=\"https:\/\/www.bihec.com\/idonus\/wp-content\/uploads\/sites\/55\/2025\/11\/img_69202dc015e69.png?v=1763716545 975w, https:\/\/www.bihec.com\/idonus\/wp-content\/uploads\/sites\/55\/2025\/11\/img_69202dc015e69-300x155.png?v=1763716545 300w, https:\/\/www.bihec.com\/idonus\/wp-content\/uploads\/sites\/55\/2025\/11\/img_69202dc015e69-768x398.png?v=1763716545 768w, https:\/\/www.bihec.com\/idonus\/wp-content\/uploads\/sites\/55\/2025\/11\/img_69202dc015e69-500x259.png?v=1763716545 500w, https:\/\/www.bihec.com\/idonus\/wp-content\/uploads\/sites\/55\/2025\/11\/img_69202dc015e69-800x414.png?v=1763716545 800w\" sizes=\"(max-width: 975px) 100vw, 975px\" \/><\/p>\n<p>&nbsp;<\/p>\n<br><div class=\"tagcloud\"><a href=\"https:\/\/www.bihec.com\/idonus\/tag\/idonus\/\" class=\"tag-cloud-link tag-link-0 tag-link-position-1\" style=\"font-size: 22pt;\" aria-label=\"idonus (64\u4e2a\u9879\u76ee)\">idonus<\/a>\n<a href=\"https:\/\/www.bihec.com\/idonus\/tag\/idonus-hf-vapor-phase-etcher\/\" class=\"tag-cloud-link tag-link-1 tag-link-position-2\" style=\"font-size: 8pt;\" aria-label=\"Idonus HF Vapor Phase Etcher (1\u4e2a\u9879\u76ee)\">Idonus HF Vapor Phase Etcher<\/a>\n<a href=\"https:\/\/www.bihec.com\/idonus\/tag\/idonus%e4%bb%a3%e7%90%86\/\" class=\"tag-cloud-link tag-link-2 tag-link-position-3\" style=\"font-size: 12.450331125828pt;\" aria-label=\"idonus\u4ee3\u7406 (5\u4e2a\u9879\u76ee)\">idonus\u4ee3\u7406<\/a>\n<a href=\"https:\/\/www.bihec.com\/idonus\/tag\/idonus%e6%b0%94%e7%9b%b8%e8%9a%80%e5%88%bb%e6%9c%ba\/\" class=\"tag-cloud-link tag-link-3 tag-link-position-4\" style=\"font-size: 8pt;\" aria-label=\"Idonus\u6c14\u76f8\u8680\u523b\u673a (1\u4e2a\u9879\u76ee)\">Idonus\u6c14\u76f8\u8680\u523b\u673a<\/a>\n<a href=\"https:\/\/www.bihec.com\/idonus\/tag\/mems%e5%99%a8%e4%bb%b6\/\" class=\"tag-cloud-link tag-link-4 tag-link-position-5\" style=\"font-size: 19.218543046358pt;\" aria-label=\"MEMS\u5668\u4ef6 (31\u4e2a\u9879\u76ee)\">MEMS\u5668\u4ef6<\/a>\n<a href=\"https:\/\/www.bihec.com\/idonus\/tag\/uv-exp%e7%b3%bb%e5%88%97\/\" class=\"tag-cloud-link tag-link-5 tag-link-position-6\" style=\"font-size: 16.158940397351pt;\" aria-label=\"UV-EXP\u7cfb\u5217 (14\u4e2a\u9879\u76ee)\">UV-EXP\u7cfb\u5217<\/a>\n<a href=\"https:\/\/www.bihec.com\/idonus\/tag\/uv-led\/\" class=\"tag-cloud-link tag-link-6 tag-link-position-7\" style=\"font-size: 17.271523178808pt;\" aria-label=\"UV-LED (19\u4e2a\u9879\u76ee)\">UV-LED<\/a>\n<a href=\"https:\/\/www.bihec.com\/idonus\/tag\/uv-led-exposure%e7%b3%bb%e7%bb%9f\/\" class=\"tag-cloud-link tag-link-7 tag-link-position-8\" style=\"font-size: 16.344370860927pt;\" aria-label=\"UV-LED exposure\u7cfb\u7edf (15\u4e2a\u9879\u76ee)\">UV-LED exposure\u7cfb\u7edf<\/a>\n<a href=\"https:\/\/www.bihec.com\/idonus\/tag\/vpe%e7%b3%bb%e5%88%97\/\" class=\"tag-cloud-link tag-link-8 tag-link-position-9\" style=\"font-size: 14.026490066225pt;\" aria-label=\"VPE\u7cfb\u5217 (8\u4e2a\u9879\u76ee)\">VPE\u7cfb\u5217<\/a>\n<a href=\"https:\/\/www.bihec.com\/idonus\/tag\/%e5%85%89%e5%88%bb%e8%83%b6%e6%9b%9d%e5%85%89\/\" class=\"tag-cloud-link tag-link-9 tag-link-position-10\" style=\"font-size: 13.562913907285pt;\" aria-label=\"\u5149\u523b\u80f6\u66dd\u5149 (7\u4e2a\u9879\u76ee)\">\u5149\u523b\u80f6\u66dd\u5149<\/a>\n<a href=\"https:\/\/www.bihec.com\/idonus\/tag\/%e5%be%ae%e7%94%b5%e5%ad%90%e6%9c%ba%e6%a2%b0%e7%b3%bb%e7%bb%9f%e5%88%b6%e9%80%a0%e8%ae%be%e5%a4%87\/\" class=\"tag-cloud-link tag-link-10 tag-link-position-11\" style=\"font-size: 14.860927152318pt;\" aria-label=\"\u5fae\u7535\u5b50\u673a\u68b0\u7cfb\u7edf\u5236\u9020\u8bbe\u5907 (10\u4e2a\u9879\u76ee)\">\u5fae\u7535\u5b50\u673a\u68b0\u7cfb\u7edf\u5236\u9020\u8bbe\u5907<\/a>\n<a href=\"https:\/\/www.bihec.com\/idonus\/tag\/%e6%8e%a9%e6%a8%a1%e5%af%b9%e5%87%86%e5%99%a8\/\" class=\"tag-cloud-link tag-link-11 tag-link-position-12\" style=\"font-size: 17.086092715232pt;\" aria-label=\"\u63a9\u6a21\u5bf9\u51c6\u5668 (18\u4e2a\u9879\u76ee)\">\u63a9\u6a21\u5bf9\u51c6\u5668<\/a>\n<a href=\"https:\/\/www.bihec.com\/idonus\/tag\/%e6%8e%a9%e6%a8%a1%e5%af%b9%e5%87%86%e7%b3%bb%e7%bb%9f\/\" class=\"tag-cloud-link tag-link-12 tag-link-position-13\" style=\"font-size: 15.23178807947pt;\" aria-label=\"\u63a9\u6a21\u5bf9\u51c6\u7cfb\u7edf (11\u4e2a\u9879\u76ee)\">\u63a9\u6a21\u5bf9\u51c6\u7cfb\u7edf<\/a>\n<a href=\"https:\/\/www.bihec.com\/idonus\/tag\/%e6%b0%94%e7%9b%b8%e8%9a%80%e5%88%bb%e6%9c%ba\/\" class=\"tag-cloud-link tag-link-13 tag-link-position-14\" style=\"font-size: 15.509933774834pt;\" aria-label=\"\u6c14\u76f8\u8680\u523b\u673a (12\u4e2a\u9879\u76ee)\">\u6c14\u76f8\u8680\u523b\u673a<\/a>\n<a href=\"https:\/\/www.bihec.com\/idonus\/tag\/%e6%b1%9e%e6%b0%94%e7%81%af\/\" class=\"tag-cloud-link tag-link-14 tag-link-position-15\" style=\"font-size: 16.622516556291pt;\" aria-label=\"\u6c5e\u6c14\u706f (16\u4e2a\u9879\u76ee)\">\u6c5e\u6c14\u706f<\/a>\n<a href=\"https:\/\/www.bihec.com\/idonus\/tag\/%e6%b9%bf%e6%b3%95%e5%a4%84%e7%90%86%e6%99%b6%e5%9c%86%e5%a4%b9%e5%85%b7\/\" class=\"tag-cloud-link tag-link-15 tag-link-position-16\" style=\"font-size: 14.860927152318pt;\" aria-label=\"\u6e7f\u6cd5\u5904\u7406\u6676\u5706\u5939\u5177 (10\u4e2a\u9879\u76ee)\">\u6e7f\u6cd5\u5904\u7406\u6676\u5706\u5939\u5177<\/a>\n<a href=\"https:\/\/www.bihec.com\/idonus\/tag\/%e7%91%9e%e5%a3%abidonus\/\" class=\"tag-cloud-link tag-link-16 tag-link-position-17\" style=\"font-size: 20.609271523179pt;\" aria-label=\"\u745e\u58ebIDONUS (45\u4e2a\u9879\u76ee)\">\u745e\u58ebIDONUS<\/a>\n<a href=\"https:\/\/www.bihec.com\/idonus\/tag\/%e7%b4%ab%e5%a4%96%e7%85%a7%e6%98%8e%e7%b3%bb%e7%bb%9f\/\" 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