{"id":710,"date":"2025-01-10T13:04:59","date_gmt":"2025-01-10T05:04:59","guid":{"rendered":"https:\/\/www.bihec.com\/idonus\/?p=710"},"modified":"2025-01-10T13:04:59","modified_gmt":"2025-01-10T05:04:59","slug":"idonus-hf%e6%b0%94%e7%9b%b8%e8%9a%80%e5%88%bb%e6%9c%bavpe%e7%b3%bb%e5%88%97vpe100%e3%80%81vpe150%e3%80%81vpe200","status":"publish","type":"post","link":"https:\/\/www.bihec.com\/idonus\/idonus-hf%e6%b0%94%e7%9b%b8%e8%9a%80%e5%88%bb%e6%9c%bavpe%e7%b3%bb%e5%88%97vpe100%e3%80%81vpe150%e3%80%81vpe200\/","title":{"rendered":"Idonus HF\u6c14\u76f8\u8680\u523b\u673aVPE\u7cfb\u5217VPE100\u3001VPE150\u3001VPE200"},"content":{"rendered":"<p><strong><a href=\"https:\/\/www.bihec.com\/idonus\/tag\/hf%e6%b0%94%e7%9b%b8%e8%9a%80%e5%88%bb%e6%9c%ba\/\" title=\"View all posts in HF\u6c14\u76f8\u8680\u523b\u673a\" target=\"_blank\">HF\u6c14\u76f8\u8680\u523b\u673a<\/a><a href=\"https:\/\/www.bihec.com\/idonus\/tag\/vpe%e7%b3%bb%e5%88%97\/\" title=\"View all posts in VPE\u7cfb\u5217\" target=\"_blank\">VPE\u7cfb\u5217<\/a><a href=\"https:\/\/www.bihec.com\/idonus\/tag\/vpe\/\" title=\"View all posts in VPE\" target=\"_blank\">VPE<\/a>100\u3001VPE150\u3001VPE200<\/strong><\/p>\n<p>VPE\u7531\u53cd\u5e94\u5ba4\u548c\u76d6\u5b50\u7ec4\u6210\u3002\u52a0\u70ed\u5143\u4ef6\u96c6\u6210\u5728\u76d6\u5b50\u4e2d\u3002\u5b83\u63a7\u5236\u5f85\u8680\u523b\u57fa\u677f\u7684\u6e29\u5ea6\u3002\u6676\u7247\u5939\u7d27\u53ef\u4ee5\u901a\u8fc7\u4e24\u79cd\u65b9\u5f0f\u5b9e\u73b0\uff1a\u6676\u7247\u53ef\u4ee5\u901a\u8fc7\u4f7f\u7528\u5939\u7d27\u73af\u8fdb\u884c\u673a\u68b0\u5939\u7d27\u3002\u62e7\u7d27\u662f\u4ece\u8bbe\u5907\u7684\u80cc\u9762\u8fdb\u884c\u7684\uff0c\u8be5\u80cc\u9762\u6c38\u8fdc\u4e0d\u4f1a\u4e0e\u6c22\u6c1f\u9178\uff08HF\uff09\u84b8\u6c7d\u63a5\u89e6\u3002\u8fd93\u4e2a\u87ba\u6bcd\u5f88\u5bb9\u6613\u7528\u9632\u62a4\u624b\u5957\u5904\u7406\u3002\u53e6\u4e00\u79cd\u9009\u62e9\u662f\u9759\u7535\u5939\u7d27\u3002\u5355\u4e2a\u82af\u7247\uff08\u957f\u5ea6\u8d85\u8fc710\u6beb\u7c73\uff09\u4ee5\u53ca\u6676\u7247\u90fd\u53ef\u4ee5\u5939\u5728\u52a0\u70ed\u5143\u4ef6\u4e0a\u3002\u6676\u7247\u7684\u80cc\u9762\u53d7\u5230\u4fdd\u62a4\uff0c\u514d\u53d7\u8680\u523b\u3002<\/p>\n<p>\u5c06\u6db2\u6001HF\u586b\u5145\u5230\u53cd\u5e94\u5ba4\u4e2d\u3002\u53cd\u5e94\u5ba4\u7528\u76d6\u5b50\u5c01\u95ed\u3002HF\u84b8\u6c7d\u5728\u5ba4\u6e29\u4e0b\u4ea7\u751f\uff0c\u8680\u523b\u8fc7\u7a0b\u81ea\u53d1\u5f00\u59cb\u3002\u8680\u523b\u901f\u7387\u7531\u6676\u7247\u6e29\u5ea6\u63a7\u5236\uff0c\u6676\u7247\u6e29\u5ea6\u53ef\u572835\u00b0C\u81f360\u00b0C\u4e4b\u95f4\u8c03\u8282\u3002<\/p>\n<p>\u52a0\u5de5\u540e\uff0c\u9178\u53ef\u4ee5\u50a8\u5b58\u5728\u50a8\u5668\u4e2d\uff0c\u4ee5\u4fbf\u5728\u53ef\u5bc6\u5c01\u7684\u5bb9\u5668\u4e2d\u91cd\u590d\u4f7f\u7528\u3002\u6db2\u4f53\u8f6c\u79fb\u53ea\u9700\u7528\u624b\u67c4\u964d\u4f4e\u8fde\u901a\u7684\u50a8\u6db2\u5668\u5373\u53ef\u5b8c\u6210\u3002\u7531\u4e8e\u91cd\u529b\u4f5c\u7528\uff0c\u9178\u6d41\u5165\u50a8\u6db2\u7f50\uff0c\u53ef\u4ee5\u901a\u8fc7\u4e24\u4e2a\u9600\u95e8\u5173\u95ed\u3002\u901a\u8fc7\u6253\u5f00\u9600\u95e8\u5e76\u63d0\u8d77\u624b\u67c4\u6765\u91cd\u65b0\u586b\u5145\u53cd\u5e94\u5ba4\u3002\u9178\u6d41\u5165\u53cd\u5e94\u5ba4\u3002\u9178\u53ef\u4ee5\u91cd\u590d\u7528\u4e8e\u591a\u6b21\u8680\u523b\uff0c\u76f4\u5230\u5fc5\u987b\u66f4\u6362\u4e3a\u6b62\u3002VPE\u7cfb\u7edf\u5360\u5730\u9762\u79ef\u5c0f\uff0c\u53ef\u4ee5\u5f88\u5bb9\u6613\u5730\u96c6\u6210\u5230\u73b0\u6709\u7684\u6d41\u7bb1\u4e2d\u3002<\/p>\n<p>\u6e29\u63a7\u53cd\u5e94\u5ba4\uff08TRC\uff09<br \/>\n\u4e8c\u6c27\u5316<a href=\"https:\/\/www.bihec.com\/idonus\/tag\/%e7%a1%85\/\" title=\"View all posts in \u7845\" target=\"_blank\">\u7845<\/a>\u7684\u8680\u523b\u901f\u7387\u968f\u53cd\u5e94\u5ba4\u4e2d\u6db2\u4f53HF\u7684\u6e29\u5ea6\u7565\u6709\u53d8\u5316\u3002HF\u7684\u6e29\u5ea6\u53d6\u51b3\u4e8e\u6d01\u51c0\u5ba4\u7684\u73af\u5883\u6e29\u5ea6\u3002\u6b64\u5916\uff0cHF\u5728\u957f\u65f6\u95f4\u8680\u523b\u8fc7\u7a0b\u4e2d\u4f1a\u52a0\u70ed\uff0c\u5bfc\u81f4\u6676\u7247\u4e4b\u95f4\u7684\u8680\u523b\u901f\u7387\u589e\u52a0\uff0c\u76f4\u5230\u7cfb\u7edf\u7a33\u5b9a\u3002<br \/>\n\u4e3a\u4e86\u7a33\u5b9a\u8680\u523b\u901f\u7387\uff0c\u6211\u4eec\u6709\u4e00\u4e2a\u5e26\u6709\u6e29\u5ea6\u63a7\u5236\u6db2\u4f53HF\u7684\u53cd\u5e94\u5ba4\u3002HF\u7684\u6e29\u5ea6\u53ef\u4ee5\u901a\u8fc7\u989d\u5916\u7684\u63a7\u5236\u5668\u8fdb\u884c\u8c03\u8282\u3002\u5c06HF\u9178\u52a0\u70ed\u5230\u9608\u503c\u6e29\u5ea6\u4ee5\u4e0a\u53ef\u4ee5\u5728\u8680\u523b\u8fc7\u7a0b\u4e2d\u4fdd\u6301\u6e29\u5ea6\u7a33\u5b9a\u3002<\/p>\n<p><img decoding=\"async\" loading=\"lazy\" class=\"alignnone wp-image-669 \" src=\"https:\/\/www.bihec.com\/idonus\/wp-content\/uploads\/sites\/55\/2024\/10\/QQ\u6d4f\u89c8\u5668\u622a\u56fe20241016170441.png\" alt=\"\" width=\"689\" height=\"288\" srcset=\"https:\/\/www.bihec.com\/idonus\/wp-content\/uploads\/sites\/55\/2024\/10\/QQ\u6d4f\u89c8\u5668\u622a\u56fe20241016170441.png 1041w, https:\/\/www.bihec.com\/idonus\/wp-content\/uploads\/sites\/55\/2024\/10\/QQ\u6d4f\u89c8\u5668\u622a\u56fe20241016170441-300x125.png 300w, https:\/\/www.bihec.com\/idonus\/wp-content\/uploads\/sites\/55\/2024\/10\/QQ\u6d4f\u89c8\u5668\u622a\u56fe20241016170441-1024x428.png 1024w, https:\/\/www.bihec.com\/idonus\/wp-content\/uploads\/sites\/55\/2024\/10\/QQ\u6d4f\u89c8\u5668\u622a\u56fe20241016170441-768x321.png 768w, https:\/\/www.bihec.com\/idonus\/wp-content\/uploads\/sites\/55\/2024\/10\/QQ\u6d4f\u89c8\u5668\u622a\u56fe20241016170441-500x209.png 500w, https:\/\/www.bihec.com\/idonus\/wp-content\/uploads\/sites\/55\/2024\/10\/QQ\u6d4f\u89c8\u5668\u622a\u56fe20241016170441-800x334.png 800w\" sizes=\"(max-width: 689px) 100vw, 689px\" \/><\/p>\n<h2><a href=\"https:\/\/www.bihec.com\/idonus\/tag\/mems\/\" title=\"View all posts in MEMS\" target=\"_blank\">MEMS<\/a>\u9759\u6469\u64e6<\/h2>\n<p>\u4e8c\u6c27\u5316\u7845\u901a\u5e38\u7528\u4f5c\u5fae\u673a\u68b0\u7ed3\u6784\u7684\u727a\u7272\u5c42\u3002\u4f8b\u5982\uff0c\u7edd\u7f18\u4f53\u4e0a\u7845(SOI)\u6676\u7247\u4e0a\u7684\u6df1\u5ea6\u53cd\u5e94<a href=\"https:\/\/www.bihec.com\/idonus\/tag\/%e7%a6%bb%e5%ad%90%e8%9a%80%e5%88%bb\/\" title=\"View all posts in \u79bb\u5b50\u8680\u523b\" target=\"_blank\">\u79bb\u5b50\u8680\u523b<\/a>(DRIE)\u5668\u4ef6\u901a\u5e38\u5728\u6db2\u4f53\u6c22\u6c1f\u9178(HF)\u4e2d\u91ca\u653e\u3002\u5728\u53bb\u79bb\u5b50\u6c34\u4e2d\u51b2\u6d17\u6676\u7247\u540e\uff0c\u6c34\u7684\u8868\u9762\u5f20\u529b\u7834\u574f\u4e86\u91ca\u653e\u7684\u7ed3\u6784\u6216\u7ed3\u6784\u76f8\u4e92\u7c98\u9644\u3002<\/p>\n<h2>\u9759\u6469\u64e6\u7684\u89e3\u51b3\u65b9\u6848:\u542b\u7898\u7684HF\u84b8\u6c7d<i>VPE<\/i><\/h2>\n<p>\u5728HF\u84b8\u6c7d\u4e2d\u8680\u523b\u4e8c\u6c27\u5316\u7845\u662f\u4e00\u79cd<b>\u51c6\u5e72\u6cd5<\/b>\u3002\u7531\u4e8eHF\u84b8\u6c7d\u73af\u5883\u4e2d\u7684\u6e7f\u5ea6\uff0c\u5728\u6676\u7247\u4e0a\u5b58\u5728\u975e\u5e38\u8584\u7684\u6c34\u819c\u3002HF\u88ab\u5438\u6536\u5e76\u8680\u523b\u4e8c\u6c27\u5316\u7845(SiO<sub>2<\/sub>).\u5728\u53cd\u5e94\u8fc7\u7a0b\u4e2d\uff0c\u4ea7\u751f\u7845\u70f7\u548c\u6c34\u3002\u7845\u70f7\u4ee5\u6c14\u76f8\u5f62\u5f0f\u9038\u51fa\u3002\u6709\u8da3\u7684\u662f\uff0c\u5728\u8fd9\u4e2a\u53cd\u5e94\u4e2d\uff0c\u6c34\u8d77\u5f15\u53d1\u5242\u7684\u4f5c\u7528\uff0c\u5e76\u4e14\u662f\u7531\u53cd\u5e94\u8fc7\u7a0b\u672c\u8eab\u4ea7\u751f\u7684\u3002\u5728\u52a0\u70ed\u886c\u5e95\u65f6\uff0c\u53ef\u4ee5\u901a\u8fc7\u63a7\u5236\u8868\u9762\u4e0a\u7684\u6c34\u91cf\u6765\u8c03\u6574\u8680\u523b\u901f\u7387\u3002\u57284-6\u5fae\u7c73\/\u5c0f\u65f6\u7684\u8680\u523b\u901f\u7387\u4e0b\uff0c\u5927\u591a\u6570\u7ed3\u6784\u53ef\u4ee5\u88ab\u91ca\u653e\u800c\u4e0d\u4f1a\u7c98\u8fde\u3002\u8680\u523b\u8fdb\u5ea6\u548c\u5747\u5300\u6027\u5982\u4e0b\u56fe\u6240\u793a\u3002<\/p>\n<p><img decoding=\"async\" loading=\"lazy\" class=\"alignnone wp-image-670 size-large\" src=\"https:\/\/www.bihec.com\/idonus\/wp-content\/uploads\/sites\/55\/2024\/10\/QQ\u6d4f\u89c8\u5668\u622a\u56fe20241016170745-1024x375.png\" alt=\"\" width=\"640\" height=\"234\" srcset=\"https:\/\/www.bihec.com\/idonus\/wp-content\/uploads\/sites\/55\/2024\/10\/QQ\u6d4f\u89c8\u5668\u622a\u56fe20241016170745-1024x375.png 1024w, https:\/\/www.bihec.com\/idonus\/wp-content\/uploads\/sites\/55\/2024\/10\/QQ\u6d4f\u89c8\u5668\u622a\u56fe20241016170745-300x110.png 300w, https:\/\/www.bihec.com\/idonus\/wp-content\/uploads\/sites\/55\/2024\/10\/QQ\u6d4f\u89c8\u5668\u622a\u56fe20241016170745-768x281.png 768w, https:\/\/www.bihec.com\/idonus\/wp-content\/uploads\/sites\/55\/2024\/10\/QQ\u6d4f\u89c8\u5668\u622a\u56fe20241016170745-1536x562.png 1536w, https:\/\/www.bihec.com\/idonus\/wp-content\/uploads\/sites\/55\/2024\/10\/QQ\u6d4f\u89c8\u5668\u622a\u56fe20241016170745-500x183.png 500w, https:\/\/www.bihec.com\/idonus\/wp-content\/uploads\/sites\/55\/2024\/10\/QQ\u6d4f\u89c8\u5668\u622a\u56fe20241016170745-800x293.png 800w, https:\/\/www.bihec.com\/idonus\/wp-content\/uploads\/sites\/55\/2024\/10\/QQ\u6d4f\u89c8\u5668\u622a\u56fe20241016170745-1280x468.png 1280w, https:\/\/www.bihec.com\/idonus\/wp-content\/uploads\/sites\/55\/2024\/10\/QQ\u6d4f\u89c8\u5668\u622a\u56fe20241016170745.png 1588w\" sizes=\"(max-width: 640px) 100vw, 640px\" \/><\/p>\n<h2>\u5e94\u7528\u793a\u4f8b<\/h2>\n<ul>\n<li>\u65e0\u9759\u6469\u64e6MEMS\u91ca\u653e<\/li>\n<li>\u7ed3\u6784\u7ec6\u5316<\/li>\n<li>SOI\u886c\u5e95\u4e0a\u7ed3\u6784\u7684\u65e0\u5207\u5272\u91ca\u653e<\/li>\n<li>\u8680\u523b\u901f\u7387\u53ef\u4ece0\u5230\u7ea630\u5fae\u7c73\/\u5c0f\u65f6\u8c03\u8282<\/li>\n<li>\u5355\u9762\u6c27\u5316\u7845<sub>2<\/sub>\u8680\u523b(\u52a0\u5de5\u8fc7\u7a0b\u4e2d\u80cc\u9762\u53d7\u5230\u4fdd\u62a4)<\/li>\n<\/ul>\n<p><img decoding=\"async\" loading=\"lazy\" class=\"alignnone wp-image-671 \" src=\"https:\/\/www.bihec.com\/idonus\/wp-content\/uploads\/sites\/55\/2024\/10\/QQ\u6d4f\u89c8\u5668\u622a\u56fe20241016170933.png\" alt=\"\" width=\"658\" height=\"319\" srcset=\"https:\/\/www.bihec.com\/idonus\/wp-content\/uploads\/sites\/55\/2024\/10\/QQ\u6d4f\u89c8\u5668\u622a\u56fe20241016170933.png 941w, https:\/\/www.bihec.com\/idonus\/wp-content\/uploads\/sites\/55\/2024\/10\/QQ\u6d4f\u89c8\u5668\u622a\u56fe20241016170933-300x145.png 300w, https:\/\/www.bihec.com\/idonus\/wp-content\/uploads\/sites\/55\/2024\/10\/QQ\u6d4f\u89c8\u5668\u622a\u56fe20241016170933-768x372.png 768w, https:\/\/www.bihec.com\/idonus\/wp-content\/uploads\/sites\/55\/2024\/10\/QQ\u6d4f\u89c8\u5668\u622a\u56fe20241016170933-500x242.png 500w, https:\/\/www.bihec.com\/idonus\/wp-content\/uploads\/sites\/55\/2024\/10\/QQ\u6d4f\u89c8\u5668\u622a\u56fe20241016170933-800x388.png 800w\" sizes=\"(max-width: 658px) 100vw, 658px\" \/> <img decoding=\"async\" loading=\"lazy\" class=\"alignnone wp-image-672 \" 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https:\/\/www.bihec.com\/idonus\/wp-content\/uploads\/sites\/55\/2024\/10\/QQ\u6d4f\u89c8\u5668\u622a\u56fe20241016170911-800x288.png 800w, https:\/\/www.bihec.com\/idonus\/wp-content\/uploads\/sites\/55\/2024\/10\/QQ\u6d4f\u89c8\u5668\u622a\u56fe20241016170911-1280x461.png 1280w\" sizes=\"(max-width: 766px) 100vw, 766px\" \/><\/p>\n<p>HF<a href=\"https:\/\/www.bihec.com\/idonus\/tag\/%e6%b0%94%e7%9b%b8%e8%9a%80%e5%88%bb%e6%9c%ba\/\" title=\"View all posts in \u6c14\u76f8\u8680\u523b\u673a\" target=\"_blank\">\u6c14\u76f8\u8680\u523b\u673a<\/a>\u3001<a href=\"https:\/\/www.bihec.com\/idonus\/tag\/idonus-hf%e6%b0%94%e7%9b%b8%e8%9a%80%e5%88%bb%e6%9c%ba\/\" title=\"View all posts in Idonus HF\u6c14\u76f8\u8680\u523b\u673a\" target=\"_blank\">Idonus HF\u6c14\u76f8\u8680\u523b\u673a<\/a>\u3001<a href=\"https:\/\/www.bihec.com\/idonus\/tag\/mems%e5%88%b6%e9%80%a0%e8%ae%be%e5%a4%87\/\" title=\"View all posts in MEMS\u5236\u9020\u8bbe\u5907\" 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