{"id":225,"date":"2024-10-18T18:37:35","date_gmt":"2024-10-18T10:37:35","guid":{"rendered":"https:\/\/www.bihec.com\/idonus-irmicroscope\/?p=225"},"modified":"2024-10-18T18:37:35","modified_gmt":"2024-10-18T10:37:35","slug":"idonusvpe100vpe150-trcvpe%e7%b3%bb%e5%88%97hf%e6%b0%94%e7%9b%b8%e8%9a%80%e5%88%bb%e6%9c%ba","status":"publish","type":"post","link":"https:\/\/www.bihec.com\/idonus-irmicroscope\/idonusvpe100vpe150-trcvpe%e7%b3%bb%e5%88%97hf%e6%b0%94%e7%9b%b8%e8%9a%80%e5%88%bb%e6%9c%ba\/","title":{"rendered":"idonus,VPE100,VPE150-TRC,VPE\u7cfb\u5217,HF\u6c14\u76f8\u8680\u523b\u673a"},"content":{"rendered":"

idonus<\/a>,VPE100<\/a>,VPE150-TRC<\/a>,VPE\u7cfb\u5217<\/a>,HF\u6c14\u76f8\u8680\u523b\u673a<\/a><\/p>\n

HF\u6c14\u76f8\u8680\u523b<\/a>\u673a(VPE<\/i>\u7cfb\u5217)<\/p>\n

VPE\u7531\u4e00\u4e2a\u53cd\u5e94\u5ba4\u548c\u4e00\u4e2a\u76d6\u5b50\u7ec4\u6210\u3002\u52a0\u70ed\u5143\u4ef6\u96c6\u6210\u5728\u76d6\u5b50\u4e2d\u3002\u5b83\u63a7\u5236\u8981\u8680\u523b\u7684\u886c\u5e95\u7684\u6e29\u5ea6\u3002\u6676\u5706\u5939\u6301\u53ef\u4ee5\u901a\u8fc7\u4e24\u79cd\u65b9\u5f0f\u5b9e\u73b0:\u901a\u8fc7\u4f7f\u7528\u5939\u6301\u73af\u673a\u68b0\u5730\u5939\u6301\u6676\u5706\u3002\u62e7\u7d27\u662f\u4ece\u8bbe\u5907\u7684\u80cc\u9762\u8fdb\u884c\u7684\uff0c\u8be5\u80cc\u9762\u4ece\u4e0d\u4e0e\u6c22\u6c1f\u9178<\/i><\/b>\u84b8\u6c7d\u30023\u4e2a\u87ba\u6bcd\u5f88\u5bb9\u6613\u7528\u9632\u62a4\u624b\u5957\u5904\u7406\u3002\u53e6\u4e00\u79cd\u9009\u62e9\u662f\u9759\u7535\u7b9d\u4f4d\u3002\u5355\u4e2a\u82af\u7247(\u957f\u4e8e10 mm)\u4ee5\u53ca\u6676\u7247\u53ef\u4ee5\u88ab\u5939\u5230\u52a0\u70ed\u5143\u4ef6\u4e0a\u3002\u4fdd\u62a4\u6676\u7247\u7684\u80cc\u9762\u4e0d\u88ab\u8680\u523b\u3002<\/p>\n

\"\"<\/p>\n

VPE100<\/i>\u7528\u4e00\u4e2a\u7535\u5b50\u5361\u76d8<\/a><\/i>(\u9759\u7535\u5438\u76d8<\/a>)\u3002<\/p>\n

\u6db2\u6001HF\u88ab\u586b\u5145\u5230\u53cd\u5e94\u5ba4\u4e2d\u3002\u7528\u76d6\u5b50\u5c01\u95ed\u53cd\u5e94\u5ba4\u3002HF\u84b8\u6c7d\u5728\u5ba4\u6e29\u4e0b\u4ea7\u751f\uff0c\u8680\u523b\u8fc7\u7a0b\u81ea\u53d1\u5f00\u59cb\u3002\u8680\u523b\u901f\u7387\u7531\u6676\u5706\u6e29\u5ea6\u63a7\u5236\uff0c\u6676\u5706\u6e29\u5ea6\u53ef\u572835\u00b0C\u81f360\u00b0C\u4e4b\u95f4\u8c03\u8282\u3002<\/article>\n
\u5904\u7406\u540e\uff0c\u9178\u53ef\u4ee5\u50a8\u5b58\u5728\u50a8\u5668\u4e2d\uff0c\u4ee5\u4fbf\u5728\u53ef\u5bc6\u5c01\u7684\u5bb9\u5668\u4e2d\u91cd\u590d\u4f7f\u7528\u3002\u901a\u8fc7\u7528\u624b\u67c4\u964d\u4f4e\u8fde\u901a\u50a8\u6db2\u5668\uff0c\u53ef\u4ee5\u7b80\u5355\u5730\u8fdb\u884c\u6db2\u4f53\u8f6c\u79fb\u3002\u7531\u4e8e\u91cd\u529b\u7684\u4f5c\u7528\uff0c\u9178\u6d41\u5165\u50a8\u69fd\uff0c\u53ef\u4ee5\u901a\u8fc7\u4e24\u4e2a\u9600\u95e8\u5173\u95ed\u3002\u91cd\u65b0\u586b\u5145\u53cd\u5e94\u5ba4\u662f\u901a\u8fc7\u6253\u5f00\u9600\u95e8\u548c\u63d0\u8d77\u624b\u67c4\u6765\u5b8c\u6210\u7684\u3002\u9178\u6d41\u5165\u53cd\u5e94\u5ba4\u3002\u9178\u53ef\u4ee5\u91cd\u590d\u7528\u4e8e\u591a\u6b21\u8680\u523b\uff0c\u76f4\u5230\u5fc5\u987b\u66f4\u6362\u4e3a\u6b62\u3002VPE\u7cfb\u7edf\u5360\u5730\u9762\u79ef\u5c0f\uff0c\u53ef\u4ee5\u5f88\u5bb9\u6613\u5730\u96c6\u6210\u5230\u73b0\u6709\u7684\u6d41\u91cf\u7bb1\u3002<\/p>\n

\"\"<\/p>\n

VPE<\/i>\u6709\u5404\u79cd\u5c3a\u5bf8\u548c\u4e00\u7cfb\u5217\u53ef\u9009\u9644\u4ef6\u3002\u5728\u8fd9\u91cc\uff0c\u6211\u4eec\u5c55\u793a\u4e86\u7535\u5b50\u5361\u76d8<\/a><\/i>\u4ee5\u53ca\u673a\u68b0\u82af\u7247\u5939\u7d27\u89e3\u51b3\u65b9\u6848(150\u6beb\u7c73)\u3002<\/p>\n

\u6e29\u63a7\u53cd\u5e94\u5ba4(\u7275\u5f15\u529b\u63a7\u5236\u7cfb\u7edf\uff08Traction Control System\u7684\u7f29\u5199\uff09<\/i>\u00a0)<\/h1>\n

\u4e8c\u6c27\u5316\u7845\u7684\u8680\u523b\u901f\u7387\u968f\u7740\u53cd\u5e94\u5ba4\u4e2d\u6db2\u6001HF\u7684\u6e29\u5ea6\u800c\u7565\u5fae\u53d8\u5316\u3002HF\u7684\u6e29\u5ea6\u53d6\u51b3\u4e8e\u6d01\u51c0\u5ba4\u7684\u73af\u5883\u6e29\u5ea6\u3002\u6b64\u5916\uff0cHF\u5728\u957f\u65f6\u95f4\u7684\u8680\u523b\u8fc7\u7a0b\u4e2d\u53d1\u70ed\uff0c\u8fd9\u5bfc\u81f4\u6676\u7247\u4e0e\u6676\u7247\u4e4b\u95f4\u7684\u8680\u523b\u901f\u7387\u589e\u52a0\uff0c\u76f4\u5230\u7cfb\u7edf\u7a33\u5b9a\u3002<\/p>\n

\u4e3a\u4e86\u7a33\u5b9a\u8680\u523b\u901f\u7387\uff0c\u6211\u4eec\u6709\u4e00\u4e2a\u88c5\u6709\u6e29\u63a7\u6db2\u6001HF\u7684\u53cd\u5e94\u5ba4\u3002HF\u7684\u6e29\u5ea6\u53ef\u4ee5\u7528\u4e00\u4e2a\u9644\u52a0\u7684\u63a7\u5236\u5668\u6765\u8c03\u8282\u3002\u5c06HF\u9178\u52a0\u70ed\u5230\u9608\u503c\u6e29\u5ea6\u4ee5\u4e0a\u5141\u8bb8\u5728\u8680\u523b\u8fc7\u7a0b\u4e2d\u4fdd\u6301\u6e29\u5ea6\u7a33\u5b9a\u3002<\/p>\n

\"\"<\/p>\n

VPE150-TRC<\/i>\u7528\u4e00\u4e2a\u7535\u5b50\u5361\u76d8<\/i>(\u9759\u7535\u5438\u76d8<\/a>)\u3002<\/p>\n<\/article>\n

\"\"<\/p>\n

VPE150-TRC<\/i>\u5e26\u6709\u673a\u68b0\u5361\u76d8(\u88c5\u6709\u5b8c\u6574\u7684\u6676\u7247)\u3002<\/p>\n

 <\/p>\n

\n

\u5de5\u827a:\u6c14\u76f8\u8680\u523b<\/h2>\n

\u7b2c\u4e00\u6b21\u5b9e\u9a8c\u6c7d\u76f8\u8680\u523b<\/i><\/b>\u662f\u7531\u970d\u59c6\u65af&\u65af\u5185\u5c14\u57281966\u5e74\u8fdb\u884c\u76841<\/b>].\u4ed6\u4eec\u89c2\u5bdf\u5230\uff0c\u6676\u7247\u4e0a\u7684\u4e8c\u6c27\u5316\u7845\u4ee5\u76f8\u5f53\u7684\u8680\u523b\u901f\u7387\u88ab\u8680\u523b\uff0c\u5373\u4f7f\u6676\u7247\u4e0d\u5728\u8680\u523b\u6d74\u4e2d\uff0c\u4f46\u63a5\u8fd1\u8680\u523b\u6d74\u3002Helms & Deal\u8bc1\u5b9e\u6c34\u7684\u4f5c\u7528\u662f\u4e3a\u8868\u9762\u7684HF\u63d0\u4f9b\u4e00\u79cd\u6d53\u7f29\u7684\u6eb6\u5242\u4ecb\u8d28\u3002\u5965\u82ac\u8d1d\u683c\u4ee5\u53ca\u5176\u4ed6\u4eba<\/i>\u00a0[2<\/b>]\u63d0\u51fa\u4e86\u4e24\u6b65\u53cd\u5e94\uff0c\u5176\u4e2d\u9996\u5148\u901a\u8fc7\u5438\u9644\u6c34(H)\u5f62\u6210\u7845\u70f7\u9187\u57fa\u56e2\u6765\u6253\u5f00\u6c27\u5316\u7269\u8868\u97622<\/sub>o)\u3002\u968f\u540e\u7845\u70f7\u9187\u57fa\u56e2\u88abHF\u653b\u51fb:<\/p>\n

SiO2<\/sub>+ 2\u5c0f\u65f62<\/sub>O \u2192 Si(OH)4<\/sub>
\n\u7845(\u54e6)4<\/sub>+ 4\u9ad8\u9891\u2192 SiF4<\/sub>+ 4\u5c0f\u65f62<\/sub>O<\/p>\n<\/article>\n

\u8fd9\u4e2a\u5316\u5b66\u65b9\u7a0b\u5f0f\u8868\u660e\uff0c\u6c34\u65e2\u662f\u8680\u523b\u8fc7\u7a0b\u7684\u5f15\u53d1\u5242\uff0c\u4e5f\u662f\u53cd\u5e94\u7269\u3002\u8fd9\u4e00\u4e8b\u5b9e\u8868\u660e\uff0c\u53ef\u4ee5\u63a7\u5236\u8680\u523b\u8fc7\u7a0b\u7684\u6e29\u5ea6\uff0c\u4ee5\u4fdd\u6301\u542f\u52a8\u8be5\u8fc7\u7a0b\u6240\u9700\u7684\u6c34\u91cf\u548c\u53cd\u5e94\u7269\u6c34\u91cf\u4e4b\u95f4\u7684\u5e73\u8861\u3002\u5728idonus\u7684\u6c14\u76f8\u8680\u523b\u673a\u4e2d\uff0c\u8fd9\u79cd\u5e73\u8861\u662f\u901a\u8fc7\u52a0\u70ed\u6676\u7247\u5b9e\u73b0\u7684\u3002\u6676\u7247\u4e0a\u7684\u6c34\u819c\u5728\u4e2d\u7b49\u6e29\u5ea6\u4e0b\u84b8\u53d1\u3002\u8680\u523b\u901f\u7387\u968f\u7740\u6e29\u5ea6\u7684\u5347\u9ad8\u800c\u964d\u4f4e\uff0c\u5e76\u572850\u00b0c\u4ee5\u4e0a\u7684\u6e29\u5ea6\u4e0b\u5b8c\u5168\u505c\u6b62\u3002\u8680\u523b\u901f\u7387\u7ea6\u4e3a5 m\/h\u65f6\uff0c\u53ef\u5b9e\u73b0\u65e0\u9759\u6469\u64e6\u7684MEMS\u91ca\u653e\u3002<\/p>\n

MEMS\u9759\u6469\u64e6<\/h2>\n

\u4e8c\u6c27\u5316\u7845\u901a\u5e38\u7528\u4f5c\u5fae\u673a\u68b0\u7ed3\u6784\u7684\u727a\u7272\u5c42\u3002\u4f8b\u5982\uff0c\u7edd\u7f18\u4f53\u4e0a\u7845(SOI)\u6676\u7247\u4e0a\u7684\u6df1\u5ea6\u53cd\u5e94\u79bb\u5b50\u8680\u523b(DRIE)\u5668\u4ef6\u901a\u5e38\u5728\u6db2\u4f53\u6c22\u6c1f\u9178(HF)\u4e2d\u91ca\u653e\u3002\u5728\u53bb\u79bb\u5b50\u6c34\u4e2d\u51b2\u6d17\u6676\u7247\u540e\uff0c\u6c34\u7684\u8868\u9762\u5f20\u529b\u7834\u574f\u4e86\u91ca\u653e\u7684\u7ed3\u6784\u6216\u7ed3\u6784\u76f8\u4e92\u7c98\u9644\u3002<\/p>\n

\u8fd9\u79cd\u65e0\u610f\u7684\u7c98\u9644\u95ee\u9898\u88ab\u79f0\u4e3a:<\/p>\n

\u9759\u6469\u64e6\u529b<\/b>\uff0c\u4e00\u4e2a\u66fc\u6258\u6e2f<\/i>\u5355\u8bcd\u6784\u9020\u81ea\u7c98\u7684<\/b>\u548c\u652f\u6301<\/b>.<\/p>\n

\"\"<\/p>\n<\/article>\n

\u9759\u6469\u64e6\u7684\u89e3\u51b3\u65b9\u6848:\u542b\u7898\u7684HF\u84b8\u6c7dVPE<\/i><\/h2>\n

\u5728HF\u84b8\u6c7d\u4e2d\u8680\u523b\u4e8c\u6c27\u5316\u7845\u662f\u4e00\u79cd\u51c6\u5e72\u6cd5<\/b>\u3002\u7531\u4e8eHF\u84b8\u6c7d\u73af\u5883\u4e2d\u7684\u6e7f\u5ea6\uff0c\u5728\u6676\u7247\u4e0a\u5b58\u5728\u975e\u5e38\u8584\u7684\u6c34\u819c\u3002HF\u88ab\u5438\u6536\u5e76\u8680\u523b\u4e8c\u6c27\u5316\u7845(SiO2<\/sub>).\u5728\u53cd\u5e94\u8fc7\u7a0b\u4e2d\uff0c\u4ea7\u751f\u7845\u70f7\u548c\u6c34\u3002\u7845\u70f7\u4ee5\u6c14\u76f8\u5f62\u5f0f\u9038\u51fa\u3002\u6709\u8da3\u7684\u662f\uff0c\u5728\u8fd9\u4e2a\u53cd\u5e94\u4e2d\uff0c\u6c34\u8d77\u5f15\u53d1\u5242\u7684\u4f5c\u7528\uff0c\u5e76\u4e14\u662f\u7531\u53cd\u5e94\u8fc7\u7a0b\u672c\u8eab\u4ea7\u751f\u7684\u3002\u5728\u52a0\u70ed\u886c\u5e95\u65f6\uff0c\u53ef\u4ee5\u901a\u8fc7\u63a7\u5236\u8868\u9762\u4e0a\u7684\u6c34\u91cf\u6765\u8c03\u6574\u8680\u523b\u901f\u7387\u3002\u57284-6\u5fae\u7c73\/\u5c0f\u65f6\u7684\u8680\u523b\u901f\u7387\u4e0b\uff0c\u5927\u591a\u6570\u7ed3\u6784\u53ef\u4ee5\u88ab\u91ca\u653e\u800c\u4e0d\u4f1a\u7c98\u8fde\u3002\u8680\u523b\u8fdb\u5ea6\u548c\u5747\u5300\u6027\u5982\u4e0b\u56fe\u6240\u793a\u3002<\/p>\n

\"\"<\/p>\n

\u5728\u8be5\u8fc7\u7a0b\u4e2d\u89c2\u5bdf\u5230HF\u8680\u523b\u7684\u5747\u5300\u6027\u3002<\/i><\/p>\n

\u5e94\u7528\u793a\u4f8b<\/h2>\n