紫外线照度计型号511
紫外线照度计型号511
照度计特点
- 探头到探头可重复性小于1%。
- 实时测量。
- 单通道探头
- 双通道探头功能
- 可互换的探头
- 计算机接口
- 余弦响应探头
- 测量mw/cm2，峰值mw/cm2，mj/cm2（SP），累积mj/cm2（总时间-秒）和累积时间（总秒） 计算mw/cm2的平均值，计算mw/cm2的%均匀度和%偏离中心值 X10 范围
- 电池在充电前大约可持续工作 18 小时
- 充电器可从 100-240 VAC、50-60 Hz 运行，具有 UL、CE 和 TUV 批准
全面的UV光测量
511型分析器包括一个实时计算机接口，非常适合测量几个关键的均匀性参数并记录这些数据。511型可以配置9个传感器阵列，直径4英寸的探头或6英寸的11个传感器探头，用于测量“洪水暴露”表面，如紫外线固化的情况。另外还有一款专门设计的探头，在6英寸的弧形阵列中有11个传感器，用于佳能光刻扫描仪的扫描均匀性。
紫外线照度计型号511规格
Switch Functions: | - Red button – ON (hold for one second) Off when displayed and MORE (data review)
- Two black buttons for Mode, Reset SEL (select), Back (data review)
- Channel A, Channel B switch
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| Display: | |
| Range: | - mw/cm22 – 0.1 to 2500 (peak same)
- mj/cm22– .001 to 49,999
- Time – .001 to 49,999 seconds
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| Mode Selection: | mw/cm22 | - mw/cm22 and peak mw/cm22 continuous display
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| mj/cm22 & mw/cm22 | - Single Pulse- mw/cm22 Time (seconds)
- Average mw/cm22 and Peak mw/cm22
- Readings update automatically with new signal or manual reset (selectable)
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| 5 Point mw | - Five readings of mw/cm22in a *fixed pattern using a one second shutter opening (minimum) to read mw/cm22
- Display of average mw/cm22 and +/-% uniformity
- Display of +/-% deviation of each reading from center value
- Display of all five values (3 digits)
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| 5 Point mj | - Five readings of mj/cm22 in a *fixed pattern~shutter control
- Display of average nj/cm22 and +/-% uniformity
- Display of +/-% deviation from center reading
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| Display Pattern: |  |
| Power: | - Built in rechargeable battery – 18 hours operation (approx.)
- Recharge time 6 hours (unit off) – indicated by LED (goes dim and then off when fully charged)
- Low battery indication on display next to ‘OFF’
- Charger – 100-240 VAC, 50-60 Hz
- Charger is UL, CE, TUV approved
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| Probe Wavelengths: | - <220nm to 540nm and more>
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| Size: | - 5.5 in. W (14 cm) x 7.4 in. L (18.8 cm) x 1.5 in. H (3.8 cm)
- Aluminum casing
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| Weight: | |
这张图准确地表示了今天在微电子行业中使用的探头的光谱响应。该图包括了探头中使用的探测器的光谱响应以及滤光玻璃的光谱响应。
