Modular alignment system for shadow mask or other mask to substrate alignment
* size: up to 100mm
* standard model for alignment precision of typically 3 - 5 um (others on request)
* base unit with 3 linear axis and 1 rotation axis and 2 tilt axis for
wedge error compensation
* chuck for 100mm wafer and mask
* vacuum switch
[P1801-12] DIM
Double Image Microscope for MAS
consists:
* Microscope tube lens (2 units)
* 5x Objective lens (2 units)
* Cameras (2 units) with image acquisition software
* VIS reflection illuminations (2 units)
* XYZ stage (2 units)
* Base and columnModular alignment system for shadow mask or other mask to substrate alignment
* size: up to 100mm
* standard model for alignment precision of typically 3 - 5 um (others on request)
* base unit with 3 linear axis and 1 rotation axis and 2 tilt axis for
wedge error compensation
* chuck for 100mm wafer and mask
* vacuum switch
[P1801-12] DIM
Double Image Microscope for MAS
consists:
* Microscope tube lens (2 units)
* 5x Objective lens (2 units)
* Cameras (2 units) with image acquisition software
* VIS reflection illuminations (2 units)
* XYZ stage (2 units)
* Base and column
Modular alignment system for shadow mask or other mask to substrate alignment
* size: up to 100mm
* standard model for alignment precision of typically 3 - 5 um (others on request)
* base unit with 3 linear axis and 1 rotation axis and 2 tilt axis for
wedge error compensation
* chuck for 100mm wafer and mask
* vacuum switch
[P1801-12] DIM
Double Image Microscope for MAS
consists:
* Microscope tube lens (2 units)
* 5x Objective lens (2 units)
* Cameras (2 units) with image acquisition software
* VIS reflection illuminations (2 units)
* XYZ stage (2 units)
* Base and column
Modular alignment system for shadow mask or other mask to substrate alignment
* size: up to 100mm
* standard model for alignment precision of typically 3 - 5 um (others on request)
* base unit with 3 linear axis and 1 rotation axis and 2 tilt axis for
wedge error compensation
* chuck for 100mm wafer and mask
* vacuum switch
[P1801-12] DIM
Double Image Microscope for MAS
consists:
* Microscope tube lens (2 units)
* 5x Objective lens (2 units)
* Cameras (2 units) with image acquisition software
* VIS reflection illuminations (2 units)
* XYZ stage (2 units)
* Base and column
Idonus Sarl Shadow Mask Aligner with double image alignment microscope 带双显微镜掩膜对准 [P1801-06] MAS100