Vac Techniche Ltd. Desktop Sputter Coater (DST3-A)

Vac Techniche Ltd. Desktop Sputter Coater (DST3-A) Angled magnetrons 桌面溅射镀膜机

• Control Panel 7” Touch Screen.
• Three Angled Magnetron Cathode: Suitable for 2” target, Water circulation cooling system.
• High Vacuum Pump: Turbo Pump 90l/S (Leybold).
• Ultimate vacuum 1 x 10-5Torr
• Backing pump: VacCoat 6m3/h two stage rotary pump with oil mist filter
• Vacuum chamber: Pyrex cylinder, chamber 300mmOD x 200mm x 7mm thick.
• Sample holder: Based on request and motorized rotatable, change height and angle, cathode selection
• Vacuum Pressure Gauge: Atm to 10-7mbar (Leybold)
• Electronic Leak Valve: 2 x MFC: 0-100sccm for Argon and one for reactive gas
• 3 Manual Shutters for magnetrons
• Main body: Metallic cubic unit 63*50*56 cm,
• Rack: 52*68*85 cm
• Vent Valve:1/4” electrical
• Film Thickness Monitor: Two High precision quartz crystal, 1 nm precision
• DC power supply:1200V DC, 500 mA

Vac Techniche Ltd. Desktop Sputter Coater (DST3-A) Angled magnetrons 桌面溅射镀膜机